Fabrication of inclined non-symmetrical periodic micro-structures using Direct Laser Interference Patterning View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2019-12

AUTHORS

Sabri Alamri, Mikhael El-Khoury, Alfredo I. Aguilar-Morales, Sebastian Storm, Tim Kunze, Andrés F. Lasagni

ABSTRACT

The direct fabrication of microstructures, having a non-symmetrical morphology with controllable inclination, presents nowadays a challenging task. Natural examples of surfaces with inclined topographies have shown to provide anisotropic functionalities, which have attracted the interest of several researchers in the last years. This work presents a microfabrication technique for producing microstructures with a determined and controllable inclination angle using two-beam Direct Laser Interference Patterning. Polyimide foils are irradiated with a 4 ns UV (266 nm) laser source producing line-like structures with a period varying from 4.6 µm to 16.5 µm. The inclinations, retrieved by tilting the sample with respect to the optical axis of the setup, are changed from 0° to 75°, introducing a well controllable and defined inclination of the structure walls. The structuring parameters (laser fluence, number of laser pulses and interference period) as well as the inclination of the microstructures are correlated with the global tilting of the sample. As a result, a determined laser fluence and number of pulses are necessary to observe a remarkable non-symmetrical morphology of the structures. In addition, the presence of structural undercuts is reported, which opens the possibility for developing new direction-dependent properties on polymeric materials. As an example, preliminary results on light diffraction are presented, showing a similar behavior as blazed diffraction gratings. More... »

PAGES

5455

Identifiers

URI

http://scigraph.springernature.com/pub.10.1038/s41598-019-41902-x

DOI

http://dx.doi.org/10.1038/s41598-019-41902-x

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1113161710

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/30931990


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0299", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Other Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Fraunhofer Institute for Material and Beam Technology", 
          "id": "https://www.grid.ac/institutes/grid.461641.0", 
          "name": [
            "Fraunhofer-Institut f\u00fcr Werkstoff- und Strahltechnik IWS, 01277, Dresden, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Alamri", 
        "givenName": "Sabri", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Fraunhofer Institute for Material and Beam Technology", 
          "id": "https://www.grid.ac/institutes/grid.461641.0", 
          "name": [
            "Fraunhofer-Institut f\u00fcr Werkstoff- und Strahltechnik IWS, 01277, Dresden, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "El-Khoury", 
        "givenName": "Mikhael", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Fraunhofer Institute for Material and Beam Technology", 
          "id": "https://www.grid.ac/institutes/grid.461641.0", 
          "name": [
            "Fraunhofer-Institut f\u00fcr Werkstoff- und Strahltechnik IWS, 01277, Dresden, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Aguilar-Morales", 
        "givenName": "Alfredo I.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "TU Dresden", 
          "id": "https://www.grid.ac/institutes/grid.4488.0", 
          "name": [
            "Fraunhofer-Institut f\u00fcr Werkstoff- und Strahltechnik IWS, 01277, Dresden, Germany", 
            "Technische Universit\u00e4t Dresden, Institut f\u00fcr Fertigungstechnik, 01062, Dresden, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Storm", 
        "givenName": "Sebastian", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Fraunhofer Institute for Material and Beam Technology", 
          "id": "https://www.grid.ac/institutes/grid.461641.0", 
          "name": [
            "Fraunhofer-Institut f\u00fcr Werkstoff- und Strahltechnik IWS, 01277, Dresden, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kunze", 
        "givenName": "Tim", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "TU Dresden", 
          "id": "https://www.grid.ac/institutes/grid.4488.0", 
          "name": [
            "Fraunhofer-Institut f\u00fcr Werkstoff- und Strahltechnik IWS, 01277, Dresden, Germany", 
            "Technische Universit\u00e4t Dresden, Institut f\u00fcr Fertigungstechnik, 01062, Dresden, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Lasagni", 
        "givenName": "Andr\u00e9s F.", 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/s1010-6030(97)00034-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001171907"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0021-9290(99)00013-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001268506"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adem.201600173", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001754088"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.cirp.2014.03.053", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002414610"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2015.02.021", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003498367"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.tsf.2003.11.133", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004793627"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/2051-672x/4/4/043001", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1005463351"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adhm.201600858", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006227946"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1098/rsif.2009.0048", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1007530252"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf00323903", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014807692", 
          "https://doi.org/10.1007/bf00323903"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/acs.nanolett.5b05183", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1016872775"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1073/pnas.1534701100", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017042329"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.2220111", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018005111"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00339-004-2766-z", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1019492314", 
          "https://doi.org/10.1007/s00339-004-2766-z"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0168-583x(02)00644-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1024031746"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adma.201104331", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1024064615"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adem.201200247", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026241642"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1039/c5cs00438a", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026957708"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0169-4332(99)00474-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029561809"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.155267", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029923956"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/978-3-642-17613-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030470253", 
          "https://doi.org/10.1007/978-3-642-17613-5"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/978-3-642-17613-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030470253", 
          "https://doi.org/10.1007/978-3-642-17613-5"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adfm.201001058", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1033833319"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adfm.201001058", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1033833319"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adem.200700176", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035331399"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2015.11.119", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037757641"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/1.jnp.10.033003", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039264326"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2011.02.053", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040468415"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.sna.2003.10.006", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1042435463"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adem.200900115", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045719045"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adem.200900115", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045719045"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0034-4885/38/8/002", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046855935"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.3390/lubricants4010002", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046970119"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jphotochem.2006.03.004", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1050480968"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00542-007-0545-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1051053453", 
          "https://doi.org/10.1007/s00542-007-0545-4"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00542-007-0545-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1051053453", 
          "https://doi.org/10.1007/s00542-007-0545-4"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adem.200600171", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1052493229"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.phpro.2010.08.141", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1052609228"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1652008", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057730415"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.335230", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057940158"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.336012", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057941428"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.367377", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057997419"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.465070", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058043078"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/3.631270", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061149036"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.1410096", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062166772"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.3117344", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062174008"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.3117344", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062174008"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.590490", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062200536"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.47.5287", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063081570"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.2252649", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1084732174"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/oe.25.009603", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1084949652"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00339-003-2111-y", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1086153670", 
          "https://doi.org/10.1007/s00339-003-2111-y"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/oe.25.022959", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1091677684"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jmatprotec.2017.09.039", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1091974133"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/memsys.1998.659770", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1094350760"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/memsys.1994.555602", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1094492865"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/memsys.1999.746826", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1095594193"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.eurpolymj.2017.12.001", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1099688530"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adem.201700755", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1100483619"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.optlastec.2018.05.044", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1104380371"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1201/9781315214849", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1109724686"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2019-12", 
    "datePublishedReg": "2019-12-01", 
    "description": "The direct fabrication of microstructures, having a non-symmetrical morphology with controllable inclination, presents nowadays a challenging task. Natural examples of surfaces with inclined topographies have shown to provide anisotropic functionalities, which have attracted the interest of several researchers\u00a0in the last years. This work presents a microfabrication technique for producing microstructures with a determined and controllable inclination angle using two-beam Direct Laser Interference Patterning. Polyimide foils are irradiated with a 4\u2009ns UV (266\u2009nm) laser source producing line-like structures with a period varying from 4.6\u2009\u00b5m to 16.5\u2009\u00b5m. The inclinations, retrieved by tilting the sample with respect to the optical axis of the setup, are changed from 0\u00b0 to 75\u00b0, introducing a well controllable and defined inclination of the structure walls. The structuring parameters (laser fluence, number of laser pulses and interference period) as well as the inclination of the microstructures are correlated with the global tilting of the sample. As a result, a determined laser fluence and number of pulses are necessary to observe a remarkable non-symmetrical morphology of the structures. In addition, the presence of structural undercuts is reported, which opens the possibility for developing new direction-dependent properties on polymeric materials. As\u00a0an example, preliminary results on light diffraction are presented, showing a similar behavior as blazed diffraction gratings.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1038/s41598-019-41902-x", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": true, 
    "isFundedItemOf": [
      {
        "id": "sg:grant.4274060", 
        "type": "MonetaryGrant"
      }
    ], 
    "isPartOf": [
      {
        "id": "sg:journal.1045337", 
        "issn": [
          "2045-2322"
        ], 
        "name": "Scientific Reports", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "1", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "9"
      }
    ], 
    "name": "Fabrication of inclined non-symmetrical periodic micro-structures using Direct Laser Interference Patterning", 
    "pagination": "5455", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "e313996a8c4a35edae27baa8e559c8b42a64b7322d9192d48a9309b1d03b8abe"
        ]
      }, 
      {
        "name": "pubmed_id", 
        "type": "PropertyValue", 
        "value": [
          "30931990"
        ]
      }, 
      {
        "name": "nlm_unique_id", 
        "type": "PropertyValue", 
        "value": [
          "101563288"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1038/s41598-019-41902-x"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1113161710"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1038/s41598-019-41902-x", 
      "https://app.dimensions.ai/details/publication/pub.1113161710"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T14:20", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000372_0000000372/records_117123_00000003.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://www.nature.com/articles/s41598-019-41902-x"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1038/s41598-019-41902-x'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1038/s41598-019-41902-x'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1038/s41598-019-41902-x'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1038/s41598-019-41902-x'


 

This table displays all metadata directly associated to this object as RDF triples.

276 TRIPLES      21 PREDICATES      85 URIs      21 LITERALS      9 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1038/s41598-019-41902-x schema:about anzsrc-for:02
2 anzsrc-for:0299
3 schema:author N7a43891e2c5045579b6017da96f5bd0c
4 schema:citation sg:pub.10.1007/978-3-642-17613-5
5 sg:pub.10.1007/bf00323903
6 sg:pub.10.1007/s00339-003-2111-y
7 sg:pub.10.1007/s00339-004-2766-z
8 sg:pub.10.1007/s00542-007-0545-4
9 https://doi.org/10.1002/adem.200600171
10 https://doi.org/10.1002/adem.200700176
11 https://doi.org/10.1002/adem.200900115
12 https://doi.org/10.1002/adem.201200247
13 https://doi.org/10.1002/adem.201600173
14 https://doi.org/10.1002/adem.201700755
15 https://doi.org/10.1002/adfm.201001058
16 https://doi.org/10.1002/adhm.201600858
17 https://doi.org/10.1002/adma.201104331
18 https://doi.org/10.1016/j.apsusc.2011.02.053
19 https://doi.org/10.1016/j.apsusc.2015.02.021
20 https://doi.org/10.1016/j.apsusc.2015.11.119
21 https://doi.org/10.1016/j.cirp.2014.03.053
22 https://doi.org/10.1016/j.eurpolymj.2017.12.001
23 https://doi.org/10.1016/j.jmatprotec.2017.09.039
24 https://doi.org/10.1016/j.jphotochem.2006.03.004
25 https://doi.org/10.1016/j.optlastec.2018.05.044
26 https://doi.org/10.1016/j.phpro.2010.08.141
27 https://doi.org/10.1016/j.sna.2003.10.006
28 https://doi.org/10.1016/j.tsf.2003.11.133
29 https://doi.org/10.1016/s0021-9290(99)00013-5
30 https://doi.org/10.1016/s0168-583x(02)00644-4
31 https://doi.org/10.1016/s0169-4332(99)00474-2
32 https://doi.org/10.1016/s1010-6030(97)00034-8
33 https://doi.org/10.1021/acs.nanolett.5b05183
34 https://doi.org/10.1039/c5cs00438a
35 https://doi.org/10.1063/1.1652008
36 https://doi.org/10.1063/1.335230
37 https://doi.org/10.1063/1.336012
38 https://doi.org/10.1063/1.367377
39 https://doi.org/10.1063/1.465070
40 https://doi.org/10.1073/pnas.1534701100
41 https://doi.org/10.1088/0034-4885/38/8/002
42 https://doi.org/10.1088/2051-672x/4/4/043001
43 https://doi.org/10.1098/rsif.2009.0048
44 https://doi.org/10.1109/3.631270
45 https://doi.org/10.1109/memsys.1994.555602
46 https://doi.org/10.1109/memsys.1998.659770
47 https://doi.org/10.1109/memsys.1999.746826
48 https://doi.org/10.1116/1.1410096
49 https://doi.org/10.1116/1.3117344
50 https://doi.org/10.1116/1.590490
51 https://doi.org/10.1117/1.jnp.10.033003
52 https://doi.org/10.1117/12.155267
53 https://doi.org/10.1117/12.2220111
54 https://doi.org/10.1117/12.2252649
55 https://doi.org/10.1143/jjap.47.5287
56 https://doi.org/10.1201/9781315214849
57 https://doi.org/10.1364/oe.25.009603
58 https://doi.org/10.1364/oe.25.022959
59 https://doi.org/10.3390/lubricants4010002
60 schema:datePublished 2019-12
61 schema:datePublishedReg 2019-12-01
62 schema:description The direct fabrication of microstructures, having a non-symmetrical morphology with controllable inclination, presents nowadays a challenging task. Natural examples of surfaces with inclined topographies have shown to provide anisotropic functionalities, which have attracted the interest of several researchers in the last years. This work presents a microfabrication technique for producing microstructures with a determined and controllable inclination angle using two-beam Direct Laser Interference Patterning. Polyimide foils are irradiated with a 4 ns UV (266 nm) laser source producing line-like structures with a period varying from 4.6 µm to 16.5 µm. The inclinations, retrieved by tilting the sample with respect to the optical axis of the setup, are changed from 0° to 75°, introducing a well controllable and defined inclination of the structure walls. The structuring parameters (laser fluence, number of laser pulses and interference period) as well as the inclination of the microstructures are correlated with the global tilting of the sample. As a result, a determined laser fluence and number of pulses are necessary to observe a remarkable non-symmetrical morphology of the structures. In addition, the presence of structural undercuts is reported, which opens the possibility for developing new direction-dependent properties on polymeric materials. As an example, preliminary results on light diffraction are presented, showing a similar behavior as blazed diffraction gratings.
63 schema:genre research_article
64 schema:inLanguage en
65 schema:isAccessibleForFree true
66 schema:isPartOf Nb6aa687aae984c65b63e741396d6ae8e
67 Nc375150cd5914d8097246a3bca061a9d
68 sg:journal.1045337
69 schema:name Fabrication of inclined non-symmetrical periodic micro-structures using Direct Laser Interference Patterning
70 schema:pagination 5455
71 schema:productId N02c1c4247ceb413dad171b5927e6dca4
72 N0f5fa4f3d79b41a1baa5739480466d22
73 N42549972eff44175aef762cbb2df00f3
74 N859edd01d43646a0b21539ad071e883a
75 Ne238f318fb4e48e4ade90a0a8c665119
76 schema:sameAs https://app.dimensions.ai/details/publication/pub.1113161710
77 https://doi.org/10.1038/s41598-019-41902-x
78 schema:sdDatePublished 2019-04-11T14:20
79 schema:sdLicense https://scigraph.springernature.com/explorer/license/
80 schema:sdPublisher Nca5bf219e632428caf1aa1116113bed7
81 schema:url https://www.nature.com/articles/s41598-019-41902-x
82 sgo:license sg:explorer/license/
83 sgo:sdDataset articles
84 rdf:type schema:ScholarlyArticle
85 N020d50cd5c414cfaa36773637f6dcf81 rdf:first N2d97fb736cd54272b62692052d4fbe65
86 rdf:rest N54cc79e8307a41749b18ca38181494ef
87 N02c1c4247ceb413dad171b5927e6dca4 schema:name pubmed_id
88 schema:value 30931990
89 rdf:type schema:PropertyValue
90 N0f5fa4f3d79b41a1baa5739480466d22 schema:name readcube_id
91 schema:value e313996a8c4a35edae27baa8e559c8b42a64b7322d9192d48a9309b1d03b8abe
92 rdf:type schema:PropertyValue
93 N2739c03e53c64b438b1bd6c2f13ab7d4 rdf:first N4b356f7b0adc455eb4e55dfcccdf5dc5
94 rdf:rest N020d50cd5c414cfaa36773637f6dcf81
95 N2d97fb736cd54272b62692052d4fbe65 schema:affiliation https://www.grid.ac/institutes/grid.461641.0
96 schema:familyName Kunze
97 schema:givenName Tim
98 rdf:type schema:Person
99 N42549972eff44175aef762cbb2df00f3 schema:name dimensions_id
100 schema:value pub.1113161710
101 rdf:type schema:PropertyValue
102 N4b356f7b0adc455eb4e55dfcccdf5dc5 schema:affiliation https://www.grid.ac/institutes/grid.4488.0
103 schema:familyName Storm
104 schema:givenName Sebastian
105 rdf:type schema:Person
106 N54cc79e8307a41749b18ca38181494ef rdf:first Nc473d774b09447ebb17c20a43092d4b3
107 rdf:rest rdf:nil
108 N64d747d63f714089842d64c7a23c69b1 schema:affiliation https://www.grid.ac/institutes/grid.461641.0
109 schema:familyName Aguilar-Morales
110 schema:givenName Alfredo I.
111 rdf:type schema:Person
112 N712d8567429d46a28dd9528f8999a7db rdf:first Nd81fdd1901c74aa1a5a818967093246e
113 rdf:rest Ne639d9425e92462ba61e974c87ac358f
114 N7a43891e2c5045579b6017da96f5bd0c rdf:first Nae500dfe52ad499faf66a6b672fd5bf2
115 rdf:rest N712d8567429d46a28dd9528f8999a7db
116 N859edd01d43646a0b21539ad071e883a schema:name nlm_unique_id
117 schema:value 101563288
118 rdf:type schema:PropertyValue
119 Nae500dfe52ad499faf66a6b672fd5bf2 schema:affiliation https://www.grid.ac/institutes/grid.461641.0
120 schema:familyName Alamri
121 schema:givenName Sabri
122 rdf:type schema:Person
123 Nb6aa687aae984c65b63e741396d6ae8e schema:issueNumber 1
124 rdf:type schema:PublicationIssue
125 Nc375150cd5914d8097246a3bca061a9d schema:volumeNumber 9
126 rdf:type schema:PublicationVolume
127 Nc473d774b09447ebb17c20a43092d4b3 schema:affiliation https://www.grid.ac/institutes/grid.4488.0
128 schema:familyName Lasagni
129 schema:givenName Andrés F.
130 rdf:type schema:Person
131 Nca5bf219e632428caf1aa1116113bed7 schema:name Springer Nature - SN SciGraph project
132 rdf:type schema:Organization
133 Nd81fdd1901c74aa1a5a818967093246e schema:affiliation https://www.grid.ac/institutes/grid.461641.0
134 schema:familyName El-Khoury
135 schema:givenName Mikhael
136 rdf:type schema:Person
137 Ne238f318fb4e48e4ade90a0a8c665119 schema:name doi
138 schema:value 10.1038/s41598-019-41902-x
139 rdf:type schema:PropertyValue
140 Ne639d9425e92462ba61e974c87ac358f rdf:first N64d747d63f714089842d64c7a23c69b1
141 rdf:rest N2739c03e53c64b438b1bd6c2f13ab7d4
142 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
143 schema:name Physical Sciences
144 rdf:type schema:DefinedTerm
145 anzsrc-for:0299 schema:inDefinedTermSet anzsrc-for:
146 schema:name Other Physical Sciences
147 rdf:type schema:DefinedTerm
148 sg:grant.4274060 http://pending.schema.org/fundedItem sg:pub.10.1038/s41598-019-41902-x
149 rdf:type schema:MonetaryGrant
150 sg:journal.1045337 schema:issn 2045-2322
151 schema:name Scientific Reports
152 rdf:type schema:Periodical
153 sg:pub.10.1007/978-3-642-17613-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030470253
154 https://doi.org/10.1007/978-3-642-17613-5
155 rdf:type schema:CreativeWork
156 sg:pub.10.1007/bf00323903 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014807692
157 https://doi.org/10.1007/bf00323903
158 rdf:type schema:CreativeWork
159 sg:pub.10.1007/s00339-003-2111-y schema:sameAs https://app.dimensions.ai/details/publication/pub.1086153670
160 https://doi.org/10.1007/s00339-003-2111-y
161 rdf:type schema:CreativeWork
162 sg:pub.10.1007/s00339-004-2766-z schema:sameAs https://app.dimensions.ai/details/publication/pub.1019492314
163 https://doi.org/10.1007/s00339-004-2766-z
164 rdf:type schema:CreativeWork
165 sg:pub.10.1007/s00542-007-0545-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1051053453
166 https://doi.org/10.1007/s00542-007-0545-4
167 rdf:type schema:CreativeWork
168 https://doi.org/10.1002/adem.200600171 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052493229
169 rdf:type schema:CreativeWork
170 https://doi.org/10.1002/adem.200700176 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035331399
171 rdf:type schema:CreativeWork
172 https://doi.org/10.1002/adem.200900115 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045719045
173 rdf:type schema:CreativeWork
174 https://doi.org/10.1002/adem.201200247 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026241642
175 rdf:type schema:CreativeWork
176 https://doi.org/10.1002/adem.201600173 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001754088
177 rdf:type schema:CreativeWork
178 https://doi.org/10.1002/adem.201700755 schema:sameAs https://app.dimensions.ai/details/publication/pub.1100483619
179 rdf:type schema:CreativeWork
180 https://doi.org/10.1002/adfm.201001058 schema:sameAs https://app.dimensions.ai/details/publication/pub.1033833319
181 rdf:type schema:CreativeWork
182 https://doi.org/10.1002/adhm.201600858 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006227946
183 rdf:type schema:CreativeWork
184 https://doi.org/10.1002/adma.201104331 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024064615
185 rdf:type schema:CreativeWork
186 https://doi.org/10.1016/j.apsusc.2011.02.053 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040468415
187 rdf:type schema:CreativeWork
188 https://doi.org/10.1016/j.apsusc.2015.02.021 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003498367
189 rdf:type schema:CreativeWork
190 https://doi.org/10.1016/j.apsusc.2015.11.119 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037757641
191 rdf:type schema:CreativeWork
192 https://doi.org/10.1016/j.cirp.2014.03.053 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002414610
193 rdf:type schema:CreativeWork
194 https://doi.org/10.1016/j.eurpolymj.2017.12.001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1099688530
195 rdf:type schema:CreativeWork
196 https://doi.org/10.1016/j.jmatprotec.2017.09.039 schema:sameAs https://app.dimensions.ai/details/publication/pub.1091974133
197 rdf:type schema:CreativeWork
198 https://doi.org/10.1016/j.jphotochem.2006.03.004 schema:sameAs https://app.dimensions.ai/details/publication/pub.1050480968
199 rdf:type schema:CreativeWork
200 https://doi.org/10.1016/j.optlastec.2018.05.044 schema:sameAs https://app.dimensions.ai/details/publication/pub.1104380371
201 rdf:type schema:CreativeWork
202 https://doi.org/10.1016/j.phpro.2010.08.141 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052609228
203 rdf:type schema:CreativeWork
204 https://doi.org/10.1016/j.sna.2003.10.006 schema:sameAs https://app.dimensions.ai/details/publication/pub.1042435463
205 rdf:type schema:CreativeWork
206 https://doi.org/10.1016/j.tsf.2003.11.133 schema:sameAs https://app.dimensions.ai/details/publication/pub.1004793627
207 rdf:type schema:CreativeWork
208 https://doi.org/10.1016/s0021-9290(99)00013-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001268506
209 rdf:type schema:CreativeWork
210 https://doi.org/10.1016/s0168-583x(02)00644-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024031746
211 rdf:type schema:CreativeWork
212 https://doi.org/10.1016/s0169-4332(99)00474-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029561809
213 rdf:type schema:CreativeWork
214 https://doi.org/10.1016/s1010-6030(97)00034-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001171907
215 rdf:type schema:CreativeWork
216 https://doi.org/10.1021/acs.nanolett.5b05183 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016872775
217 rdf:type schema:CreativeWork
218 https://doi.org/10.1039/c5cs00438a schema:sameAs https://app.dimensions.ai/details/publication/pub.1026957708
219 rdf:type schema:CreativeWork
220 https://doi.org/10.1063/1.1652008 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057730415
221 rdf:type schema:CreativeWork
222 https://doi.org/10.1063/1.335230 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057940158
223 rdf:type schema:CreativeWork
224 https://doi.org/10.1063/1.336012 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057941428
225 rdf:type schema:CreativeWork
226 https://doi.org/10.1063/1.367377 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057997419
227 rdf:type schema:CreativeWork
228 https://doi.org/10.1063/1.465070 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058043078
229 rdf:type schema:CreativeWork
230 https://doi.org/10.1073/pnas.1534701100 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017042329
231 rdf:type schema:CreativeWork
232 https://doi.org/10.1088/0034-4885/38/8/002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046855935
233 rdf:type schema:CreativeWork
234 https://doi.org/10.1088/2051-672x/4/4/043001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1005463351
235 rdf:type schema:CreativeWork
236 https://doi.org/10.1098/rsif.2009.0048 schema:sameAs https://app.dimensions.ai/details/publication/pub.1007530252
237 rdf:type schema:CreativeWork
238 https://doi.org/10.1109/3.631270 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061149036
239 rdf:type schema:CreativeWork
240 https://doi.org/10.1109/memsys.1994.555602 schema:sameAs https://app.dimensions.ai/details/publication/pub.1094492865
241 rdf:type schema:CreativeWork
242 https://doi.org/10.1109/memsys.1998.659770 schema:sameAs https://app.dimensions.ai/details/publication/pub.1094350760
243 rdf:type schema:CreativeWork
244 https://doi.org/10.1109/memsys.1999.746826 schema:sameAs https://app.dimensions.ai/details/publication/pub.1095594193
245 rdf:type schema:CreativeWork
246 https://doi.org/10.1116/1.1410096 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062166772
247 rdf:type schema:CreativeWork
248 https://doi.org/10.1116/1.3117344 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062174008
249 rdf:type schema:CreativeWork
250 https://doi.org/10.1116/1.590490 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062200536
251 rdf:type schema:CreativeWork
252 https://doi.org/10.1117/1.jnp.10.033003 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039264326
253 rdf:type schema:CreativeWork
254 https://doi.org/10.1117/12.155267 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029923956
255 rdf:type schema:CreativeWork
256 https://doi.org/10.1117/12.2220111 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018005111
257 rdf:type schema:CreativeWork
258 https://doi.org/10.1117/12.2252649 schema:sameAs https://app.dimensions.ai/details/publication/pub.1084732174
259 rdf:type schema:CreativeWork
260 https://doi.org/10.1143/jjap.47.5287 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063081570
261 rdf:type schema:CreativeWork
262 https://doi.org/10.1201/9781315214849 schema:sameAs https://app.dimensions.ai/details/publication/pub.1109724686
263 rdf:type schema:CreativeWork
264 https://doi.org/10.1364/oe.25.009603 schema:sameAs https://app.dimensions.ai/details/publication/pub.1084949652
265 rdf:type schema:CreativeWork
266 https://doi.org/10.1364/oe.25.022959 schema:sameAs https://app.dimensions.ai/details/publication/pub.1091677684
267 rdf:type schema:CreativeWork
268 https://doi.org/10.3390/lubricants4010002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046970119
269 rdf:type schema:CreativeWork
270 https://www.grid.ac/institutes/grid.4488.0 schema:alternateName TU Dresden
271 schema:name Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS, 01277, Dresden, Germany
272 Technische Universität Dresden, Institut für Fertigungstechnik, 01062, Dresden, Germany
273 rdf:type schema:Organization
274 https://www.grid.ac/institutes/grid.461641.0 schema:alternateName Fraunhofer Institute for Material and Beam Technology
275 schema:name Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS, 01277, Dresden, Germany
276 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...