Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2019-12

AUTHORS

Jiao Fu, Tianfei Zhu, Yan Liang, Zhangcheng Liu, Ruozheng Wang, Xiaofan Zhang, Hong-Xing Wang

ABSTRACT

Fabrication of single crystal diamond capacitive pressure sensor is presented. Firstly, the single crystal diamond cantilever beam was formed on HPHT diamond substrate by using selective high-energy ion implantation, metal patterning, ICP etching and electrochemical etching techniques. Secondly, on this diamond cantilever beam, the desired electrode patterns were processed with photolithography and metal evaporation methods. Furthermore, the displacements of cantilever beam under different pressure conditions were investigated by atomic force microscopy. The capacitance-voltage curves of single crystal diamond cantilever beam and substrate under different force loading conditions were measured by using Agilent B1505A parameter analyzer. The results show that sensitivity increases with the enlargement of electrode area of cantilever beam, and decreases with the rise of measurement frequency. More... »

PAGES

4699

Identifiers

URI

http://scigraph.springernature.com/pub.10.1038/s41598-019-40582-x

DOI

http://dx.doi.org/10.1038/s41598-019-40582-x

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1112855628

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/30886167


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