Ontology type: schema:ScholarlyArticle Open Access: True
2018-12
AUTHORSSee Wee Chee, Martin Kammler, Jeremy Graham, Lynne Gignac, Mark C. Reuter, Robert Hull, Frances M. Ross
ABSTRACTWe show that templating a Si surface with a focused beam of Si2+ or Si+ ions can create suitable nucleation sites for the subsequent growth of self-assembled Ge quantum dots by chemical vapor deposition. To determine the mechanism of patterning we use atomic force microscopy to show that, similar to Ga+ patterning, the formation of a surface pit is required to enable control over Ge quantum dot locations. We find that relatively high implantation doses are required to achieve patterning, and these doses lead to amorphization of the substrate. We assess the degree to which the substrate crystallinity can be recovered by subsequent processing. Using in situ transmission electron microscopy heating experiments we find that recrystallization is possible at the growth temperature of the Ge quantum dots, but defects remain that follow the pattern of the initial implantation. We discuss the formation mechanism of the defects and the benefits of using Si ions for patterning both defects and quantum dots on Si substrates. More... »
PAGES9361
http://scigraph.springernature.com/pub.10.1038/s41598-018-27512-z
DOIhttp://dx.doi.org/10.1038/s41598-018-27512-z
DIMENSIONShttps://app.dimensions.ai/details/publication/pub.1104585063
PUBMEDhttps://www.ncbi.nlm.nih.gov/pubmed/29921894
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[
{
"@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json",
"about": [
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Materials Engineering",
"type": "DefinedTerm"
},
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Engineering",
"type": "DefinedTerm"
}
],
"author": [
{
"affiliation": {
"alternateName": "National University of Singapore",
"id": "https://www.grid.ac/institutes/grid.4280.e",
"name": [
"Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, 12180, Troy, NY, USA",
"Center for BioImaging Sciences, Department of Biological Sciences, National University of Singapore, 117557, Singapore, Singapore"
],
"type": "Organization"
},
"familyName": "Chee",
"givenName": "See Wee",
"id": "sg:person.0641033145.30",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0641033145.30"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Regensburg University of Applied Sciences",
"id": "https://www.grid.ac/institutes/grid.434958.7",
"name": [
"Institut f\u00fcr Experimentelle Physik, Universit\u00e4t Duisburg-Essen, 47048, Duisburg, Germany",
"Department of General Studies and Microsystems Engineering, Ostbayerische Technische Hochschule Regensburg, 93049, Regensburg, Germany"
],
"type": "Organization"
},
"familyName": "Kammler",
"givenName": "Martin",
"id": "sg:person.0724363354.56",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0724363354.56"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Thermo Fisher Scientific (United States)",
"id": "https://www.grid.ac/institutes/grid.418190.5",
"name": [
"Department of Materials Science and Engineering, University of Virginia, 22904, Charlottesville, VA, USA",
"Thermo Fisher Scientific, Materials & Structural Analysis Division, 97124, Hillsboro, OR, USA"
],
"type": "Organization"
},
"familyName": "Graham",
"givenName": "Jeremy",
"id": "sg:person.010152627307.33",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010152627307.33"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "IBM Research \u2013 Thomas J. Watson Research Center",
"id": "https://www.grid.ac/institutes/grid.481554.9",
"name": [
"IBM T. J. Watson Research Center, Yorktown Heights, 10598, NY, USA"
],
"type": "Organization"
},
"familyName": "Gignac",
"givenName": "Lynne",
"type": "Person"
},
{
"affiliation": {
"alternateName": "IBM Research \u2013 Thomas J. Watson Research Center",
"id": "https://www.grid.ac/institutes/grid.481554.9",
"name": [
"IBM T. J. Watson Research Center, Yorktown Heights, 10598, NY, USA"
],
"type": "Organization"
},
"familyName": "Reuter",
"givenName": "Mark C.",
"id": "sg:person.011432744162.19",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011432744162.19"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Rensselaer Polytechnic Institute",
"id": "https://www.grid.ac/institutes/grid.33647.35",
"name": [
"Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, 12180, Troy, NY, USA"
],
"type": "Organization"
},
"familyName": "Hull",
"givenName": "Robert",
"id": "sg:person.01021026154.30",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01021026154.30"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "IBM Research \u2013 Thomas J. Watson Research Center",
"id": "https://www.grid.ac/institutes/grid.481554.9",
"name": [
"IBM T. J. Watson Research Center, Yorktown Heights, 10598, NY, USA"
],
"type": "Organization"
},
"familyName": "Ross",
"givenName": "Frances M.",
"id": "sg:person.01252060360.73",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01252060360.73"
],
"type": "Person"
}
],
"citation": [
{
"id": "https://doi.org/10.1088/1742-6596/209/1/012003",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1002272414"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/1742-6596/209/1/012003",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1002272414"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.nimb.2013.11.044",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1005254106"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0022-3727/20/11/009",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1010468135"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0957-4484/17/17/028",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1012108445"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s11664-016-4393-9",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1014506181",
"https://doi.org/10.1007/s11664-016-4393-9"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/1742-6596/209/1/012051",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1017426623"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0169-4332(01)00520-7",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1019883882"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.tsf.2013.02.119",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1021298965"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0920-2307(91)90007-a",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1023188135"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.mee.2009.11.164",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1025241843"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.mssp.2008.10.011",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1026745574"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.ultramic.2012.07.004",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1028485793"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1155/2014/170415",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1030043472"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1038/srep02099",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1033916047",
"https://doi.org/10.1038/srep02099"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s10854-015-3149-2",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1039446692",
"https://doi.org/10.1007/s10854-015-3149-2"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.4947095",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1040166140"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.scriptamat.2010.10.036",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1041636271"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0957-4484/22/7/075301",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1046445988"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1557/jmr.2014.239",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1046773100"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.susc.2006.12.075",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1050214904"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.nimb.2007.12.008",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1052320668"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.mee.2006.01.017",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1052789497"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1021/cg200433r",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1055395261"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1021/cg200433r",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1055395261"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1021/nl0717199",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1056217398"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1021/nl0717199",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1056217398"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.1542680",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057718522"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.1828597",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057825237"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.2736343",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057861652"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.2957676",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057887385"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.3091395",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057911584"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.4789625",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1058068611"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.4790713",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1058069171"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.4813097",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1058078734"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.88980",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1058129120"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1103/physrevb.70.195306",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1060611841"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1103/physrevb.70.195306",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1060611841"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1103/physrevb.76.235301",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1060623263"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1103/physrevb.76.235301",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1060623263"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1103/physrevb.77.075311",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1060623895"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1103/physrevb.77.075311",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1060623895"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1109/jproc.2007.900971",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1061296787"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1116/1.1417553",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1062166863"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1116/1.4824327",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1062176951"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1116/1.583937",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1062193984"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1147/rd.444.0489",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1063182518"
],
"type": "CreativeWork"
},
{
"id": "https://app.dimensions.ai/details/publication/pub.1077407926",
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1142/9781860949067_0011",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1088730260"
],
"type": "CreativeWork"
}
],
"datePublished": "2018-12",
"datePublishedReg": "2018-12-01",
"description": "We show that templating a Si surface with a focused beam of Si2+ or Si+ ions can create suitable nucleation sites for the subsequent growth of self-assembled Ge quantum dots by chemical vapor deposition. To determine the mechanism of patterning we use atomic force microscopy to show that, similar to Ga+ patterning, the formation of a surface pit is required to enable control over Ge quantum dot locations. We find that relatively high implantation doses are required to achieve patterning, and these doses lead to amorphization of the substrate. We assess the degree to which the substrate crystallinity can be recovered by subsequent processing. Using in situ transmission electron microscopy heating experiments we find that recrystallization is possible at the growth temperature of the Ge quantum dots, but defects remain that follow the pattern of the initial implantation. We discuss the formation mechanism of the defects and the benefits of using Si ions for patterning both defects and quantum dots on Si substrates.",
"genre": "research_article",
"id": "sg:pub.10.1038/s41598-018-27512-z",
"inLanguage": [
"en"
],
"isAccessibleForFree": true,
"isPartOf": [
{
"id": "sg:journal.1045337",
"issn": [
"2045-2322"
],
"name": "Scientific Reports",
"type": "Periodical"
},
{
"issueNumber": "1",
"type": "PublicationIssue"
},
{
"type": "PublicationVolume",
"volumeNumber": "8"
}
],
"name": "Directed Self-Assembly of Ge Quantum Dots Using Focused Si2+ Ion Beam Patterning",
"pagination": "9361",
"productId": [
{
"name": "readcube_id",
"type": "PropertyValue",
"value": [
"2d140b7ba3b0fc563decbac8ecdcf4bbbf4f7166da86885071b9a48fabd7690b"
]
},
{
"name": "pubmed_id",
"type": "PropertyValue",
"value": [
"29921894"
]
},
{
"name": "nlm_unique_id",
"type": "PropertyValue",
"value": [
"101563288"
]
},
{
"name": "doi",
"type": "PropertyValue",
"value": [
"10.1038/s41598-018-27512-z"
]
},
{
"name": "dimensions_id",
"type": "PropertyValue",
"value": [
"pub.1104585063"
]
}
],
"sameAs": [
"https://doi.org/10.1038/s41598-018-27512-z",
"https://app.dimensions.ai/details/publication/pub.1104585063"
],
"sdDataset": "articles",
"sdDatePublished": "2019-04-10T21:00",
"sdLicense": "https://scigraph.springernature.com/explorer/license/",
"sdPublisher": {
"name": "Springer Nature - SN SciGraph project",
"type": "Organization"
},
"sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8684_00000604.jsonl",
"type": "ScholarlyArticle",
"url": "https://www.nature.com/articles/s41598-018-27512-z"
}
]Download the RDF metadata as: json-ld nt turtle xml License info
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255 TRIPLES
21 PREDICATES
72 URIs
21 LITERALS
9 BLANK NODES