Fabrication of parabolic Si nanostructures by nanosphere lithography and its application for solar cells View Full Text


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Article Info

DATE

2017-12

AUTHORS

See-Eun Cheon, Hyeon-seung Lee, Jihye Choi, Ah Reum Jeong, Taek Sung Lee, Doo Seok Jeong, Kyeong-Seok Lee, Wook-Seong Lee, Won Mok Kim, Heon Lee, Inho Kim

ABSTRACT

We demonstrated fabrication of a parabola shaped Si nanostructures of various periods by combined approach of nanosphere lithography and a single step CF4/O2 reactive ion etch (RIE) process. Silica nanosphere monolayers in a hexagonal array were well deposited by a solvent controlled spin coating technique based on binary organic solvents. We showed numerically that a parabolic Si nanostructure of an optimal period among various-shaped nanostructures overcoated with a dielectric layer of a 70 nm thickness provide the most effective antireflection. As the simulation results as a design guide, we fabricated the parabolic Si nanostructures of a 520 nm period and a 300 nm height exhibiting the lowest weighted reflectance of 2.75%. With incorporation of such parabolic Si nanostructures, a damage removal process for 20 sec and SiNx antireflection coating of a 70 nm thickness, the efficiency of solar cells increased to 17.2% while that of the planar cells without the nanostructures exhibited 16.2%. The efficiency enhancement of the cell with the Si nanostructures was attributed to the improved photocurrents arising from the broad spectral antireflection which was confirmed by the external quantum efficiency (EQE) measurements. More... »

PAGES

7336

Identifiers

URI

http://scigraph.springernature.com/pub.10.1038/s41598-017-07463-7

DOI

http://dx.doi.org/10.1038/s41598-017-07463-7

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1090993261

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/28779077


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Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1038/s41598-017-07463-7'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1038/s41598-017-07463-7'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1038/s41598-017-07463-7'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1038/s41598-017-07463-7'


 

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