Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2019-12

AUTHORS

Frederik Kotz, Patrick Risch, Karl Arnold, Semih Sevim, Josep Puigmartí-Luis, Alexander Quick, Michael Thiel, Andrei Hrynevich, Paul D. Dalton, Dorothea Helmer, Bastian E. Rapp

ABSTRACT

Fused silica glass is the preferred material for applications which require long-term chemical and mechanical stability as well as excellent optical properties. The manufacturing of complex hollow microstructures within transparent fused silica glass is of particular interest for, among others, the miniaturization of chemical synthesis towards more versatile, configurable and environmentally friendly flow-through chemistry as well as high-quality optical waveguides or capillaries. However, microstructuring of such complex three-dimensional structures in glass has proven evasive due to its high thermal and chemical stability as well as mechanical hardness. Here we present an approach for the generation of hollow microstructures in fused silica glass with high precision and freedom of three-dimensional designs. The process combines the concept of sacrificial template replication with a room-temperature molding process for fused silica glass. The fabricated glass chips are versatile tools for, among other, the advance of miniaturization in chemical synthesis on chip. More... »

PAGES

1439

Identifiers

URI

http://scigraph.springernature.com/pub.10.1038/s41467-019-09497-z

DOI

http://dx.doi.org/10.1038/s41467-019-09497-z

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1113051185

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/30926801


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RDF/XML is a standard XML format for linked data.

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