Engineering polymer MEMS using combined microfluidic pervaporation and micro-molding View Full Text


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Article Info

DATE

2018-12

AUTHORS

Damien Thuau, Cédric Laval, Isabelle Dufour, Philippe Poulin, Cédric Ayela, Jean-Baptiste Salmon

ABSTRACT

In view of the extensive increase of flexible devices and wearable electronics, the development of polymer micro-electro-mechanical systems (MEMS) is becoming more and more important since their potential to meet the multiple needs for sensing applications in flexible electronics is now clearly established. Nevertheless, polymer micromachining for MEMS applications is not yet as mature as its silicon counterpart, and innovative microfabrication techniques are still expected. We show in the present work an emerging and versatile microfabrication method to produce arbitrary organic, spatially resolved multilayer micro-structures, starting from dilute inks, and with possibly a large choice of materials. This approach consists in extending classical microfluidic pervaporation combined with MIcro-Molding In Capillaries. To illustrate the potential of this technique, bilayer polymer double-clamped resonators with integrated piezoresistive readout have been fabricated, characterized, and applied to humidity sensing. The present work opens new opportunities for the conception and integration of polymers in MEMS. An innovative and versatile technique for fabricating micro electromechanical systems (MEMS) from polymers opens the door to new sensing technologies for use in flexible devices. Owing to their low cost, flexibility, and biocompatibility, polymer and composite materials are attracting considerable attention as an alternative to silicon-based MEMS for biological applications, and energy and sensing technologies. Current manufacturing processes for polymer-based MEMS, however, still lag behind those for silicon. Now, Damien Thuau and colleagues from the University of Bordeaux in France have used classical microfluidic pervaporation combined with micro-molding to produce multilayer polymeric micro-structures. The technique could be used for creating micro-structuration from almost any type of materials, starting from dilute colloidal dispersions to polymer solutions, and paves the way for new applications, including bio-sensors, mechanical energy harvesters, and actuators More... »

PAGES

15

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http://scigraph.springernature.com/pub.10.1038/s41378-018-0017-2

DOI

http://dx.doi.org/10.1038/s41378-018-0017-2

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43 schema:description In view of the extensive increase of flexible devices and wearable electronics, the development of polymer micro-electro-mechanical systems (MEMS) is becoming more and more important since their potential to meet the multiple needs for sensing applications in flexible electronics is now clearly established. Nevertheless, polymer micromachining for MEMS applications is not yet as mature as its silicon counterpart, and innovative microfabrication techniques are still expected. We show in the present work an emerging and versatile microfabrication method to produce arbitrary organic, spatially resolved multilayer micro-structures, starting from dilute inks, and with possibly a large choice of materials. This approach consists in extending classical microfluidic pervaporation combined with MIcro-Molding In Capillaries. To illustrate the potential of this technique, bilayer polymer double-clamped resonators with integrated piezoresistive readout have been fabricated, characterized, and applied to humidity sensing. The present work opens new opportunities for the conception and integration of polymers in MEMS. An innovative and versatile technique for fabricating micro electromechanical systems (MEMS) from polymers opens the door to new sensing technologies for use in flexible devices. Owing to their low cost, flexibility, and biocompatibility, polymer and composite materials are attracting considerable attention as an alternative to silicon-based MEMS for biological applications, and energy and sensing technologies. Current manufacturing processes for polymer-based MEMS, however, still lag behind those for silicon. Now, Damien Thuau and colleagues from the University of Bordeaux in France have used classical microfluidic pervaporation combined with micro-molding to produce multilayer polymeric micro-structures. The technique could be used for creating micro-structuration from almost any type of materials, starting from dilute colloidal dispersions to polymer solutions, and paves the way for new applications, including bio-sensors, mechanical energy harvesters, and actuators
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