Chemical Vapor Deposition of Silicon Dioxide by Direct-Current Corona Discharges in Dry Air Containing Octamethylcyclotetrasiloxane Vapor: Measurement of the Deposition ... View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2004-06

AUTHORS

Junhong Chen, Jane H. Davidson

ABSTRACT

Experiments in a positive-polarity, wire/plate electrode establish the effects of the concentration of octamethylcyclotetrasiloxane (150–1100 ppm) and the operating current (0.5–2.55 μA/cm length of wire) on the rate of deposition of silicon dioxide on the high voltage wire. The wire is 100 μm radius tungsten and the wire-to-plate spacing is 1.5 cm. Analyses of the deposit with X-ray diffraction, energy dispersive X-ray spectroscopy, and X-ray photoelectron spectroscopy show that it is amorphous silicon dioxide. The deposition rate increases linearly with increasing silicone concentration and corona current. For the concentrations of silicone likely to present in indoor air, the gas-phase processes limit the rate of deposition. More... »

PAGES

169-188

Identifiers

URI

http://scigraph.springernature.com/pub.10.1023/b:pcpp.0000013197.77036.f5

DOI

http://dx.doi.org/10.1023/b:pcpp.0000013197.77036.f5

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1047411431


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Chemistry (incl. Structural)", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "California Institute of Technology", 
          "id": "https://www.grid.ac/institutes/grid.20861.3d", 
          "name": [
            "Department of Chemical Engineering, California Institute of Technology, 91125, Pasadena, CA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Chen", 
        "givenName": "Junhong", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Minnesota", 
          "id": "https://www.grid.ac/institutes/grid.17635.36", 
          "name": [
            "Department of Mechanical Engineering, University of Minnesota, 55455, Minneapolis, MN"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Davidson", 
        "givenName": "Jane H.", 
        "id": "sg:person.015432254315.59", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015432254315.59"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1080/02786829808965555", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1008929460"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0040-6090(98)00976-6", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1012367413"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1149/1.2097325", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014912254"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0921-5093(95)09953-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1019305096"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1023/a:1014851908545", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1019809431", 
          "https://doi.org/10.1023/a:1014851908545"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1023/a:1011314420080", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021289615", 
          "https://doi.org/10.1023/a:1011314420080"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1080/0002889778507791", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025896040"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1023/a:1021315412208", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035017510", 
          "https://doi.org/10.1023/a:1021315412208"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1023/a:1022468803203", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035107929", 
          "https://doi.org/10.1023/a:1022468803203"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1080/02786829708965505", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036014664"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0040-6090(96)09024-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1042160644"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1351/pac199971101871", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043560169"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1080/00022470.1975.10470092", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049242206"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1023/a:1022892815876", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049473337", 
          "https://doi.org/10.1023/a:1022892815876"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0021-8502(93)90009-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049515999"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0021-8502(93)90009-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049515999"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0257-8972(97)00294-6", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1050651806"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf00372203", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1050898952", 
          "https://doi.org/10.1007/bf00372203"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.355115", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057972396"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/28.137427", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061141588"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/28.287521", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061142026"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/tiga.1969.4181060", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061631461"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.1448506", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062167089"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.573832", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062183879"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.573833", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062183880"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.574963", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062185010"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.576239", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062186286"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.577464", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062187511"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.578607", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062188654"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.579521", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062189568"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.580082", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062190129"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.580149", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062190196"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.581096", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062191143"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.26.l1138", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063042023"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.27.1381", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063042785"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.27.892", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063043172"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2004-06", 
    "datePublishedReg": "2004-06-01", 
    "description": "Experiments in a positive-polarity, wire/plate electrode establish the effects of the concentration of octamethylcyclotetrasiloxane (150\u20131100 ppm) and the operating current (0.5\u20132.55 \u03bcA/cm length of wire) on the rate of deposition of silicon dioxide on the high voltage wire. The wire is 100 \u03bcm radius tungsten and the wire-to-plate spacing is 1.5 cm. Analyses of the deposit with X-ray diffraction, energy dispersive X-ray spectroscopy, and X-ray photoelectron spectroscopy show that it is amorphous silicon dioxide. The deposition rate increases linearly with increasing silicone concentration and corona current. For the concentrations of silicone likely to present in indoor air, the gas-phase processes limit the rate of deposition.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1023/b:pcpp.0000013197.77036.f5", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1124016", 
        "issn": [
          "0272-4324", 
          "1572-8986"
        ], 
        "name": "Plasma Chemistry and Plasma Processing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "2", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "24"
      }
    ], 
    "name": "Chemical Vapor Deposition of Silicon Dioxide by Direct-Current Corona Discharges in Dry Air Containing Octamethylcyclotetrasiloxane Vapor: Measurement of the Deposition Rate", 
    "pagination": "169-188", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "e1da4fd41bcd17b22902f8e66c34a8f2b1ccbbf81b9fbd1e4df3ffd4bf66eb0f"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1023/b:pcpp.0000013197.77036.f5"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1047411431"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1023/b:pcpp.0000013197.77036.f5", 
      "https://app.dimensions.ai/details/publication/pub.1047411431"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T01:59", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8700_00000507.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1023%2FB%3APCPP.0000013197.77036.f5"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

181 TRIPLES      21 PREDICATES      62 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1023/b:pcpp.0000013197.77036.f5 schema:about anzsrc-for:03
2 anzsrc-for:0306
3 schema:author Nbf72cdcd62294f13b96b37c66f2c3d32
4 schema:citation sg:pub.10.1007/bf00372203
5 sg:pub.10.1023/a:1011314420080
6 sg:pub.10.1023/a:1014851908545
7 sg:pub.10.1023/a:1021315412208
8 sg:pub.10.1023/a:1022468803203
9 sg:pub.10.1023/a:1022892815876
10 https://doi.org/10.1016/0021-8502(93)90009-x
11 https://doi.org/10.1016/0921-5093(95)09953-0
12 https://doi.org/10.1016/s0040-6090(96)09024-4
13 https://doi.org/10.1016/s0040-6090(98)00976-6
14 https://doi.org/10.1016/s0257-8972(97)00294-6
15 https://doi.org/10.1063/1.355115
16 https://doi.org/10.1080/00022470.1975.10470092
17 https://doi.org/10.1080/0002889778507791
18 https://doi.org/10.1080/02786829708965505
19 https://doi.org/10.1080/02786829808965555
20 https://doi.org/10.1109/28.137427
21 https://doi.org/10.1109/28.287521
22 https://doi.org/10.1109/tiga.1969.4181060
23 https://doi.org/10.1116/1.1448506
24 https://doi.org/10.1116/1.573832
25 https://doi.org/10.1116/1.573833
26 https://doi.org/10.1116/1.574963
27 https://doi.org/10.1116/1.576239
28 https://doi.org/10.1116/1.577464
29 https://doi.org/10.1116/1.578607
30 https://doi.org/10.1116/1.579521
31 https://doi.org/10.1116/1.580082
32 https://doi.org/10.1116/1.580149
33 https://doi.org/10.1116/1.581096
34 https://doi.org/10.1143/jjap.26.l1138
35 https://doi.org/10.1143/jjap.27.1381
36 https://doi.org/10.1143/jjap.27.892
37 https://doi.org/10.1149/1.2097325
38 https://doi.org/10.1351/pac199971101871
39 schema:datePublished 2004-06
40 schema:datePublishedReg 2004-06-01
41 schema:description Experiments in a positive-polarity, wire/plate electrode establish the effects of the concentration of octamethylcyclotetrasiloxane (150–1100 ppm) and the operating current (0.5–2.55 μA/cm length of wire) on the rate of deposition of silicon dioxide on the high voltage wire. The wire is 100 μm radius tungsten and the wire-to-plate spacing is 1.5 cm. Analyses of the deposit with X-ray diffraction, energy dispersive X-ray spectroscopy, and X-ray photoelectron spectroscopy show that it is amorphous silicon dioxide. The deposition rate increases linearly with increasing silicone concentration and corona current. For the concentrations of silicone likely to present in indoor air, the gas-phase processes limit the rate of deposition.
42 schema:genre research_article
43 schema:inLanguage en
44 schema:isAccessibleForFree false
45 schema:isPartOf N2dd67cb5501c42128c8a18f02ed17bf4
46 Na96a192daa8a4c479bf101ec43a5d0d9
47 sg:journal.1124016
48 schema:name Chemical Vapor Deposition of Silicon Dioxide by Direct-Current Corona Discharges in Dry Air Containing Octamethylcyclotetrasiloxane Vapor: Measurement of the Deposition Rate
49 schema:pagination 169-188
50 schema:productId N182e555a2b1147a49530b26ee7d8e06e
51 N338649c333044c4fba6e15d008a93870
52 Ned0fd9739a174e019435163cbc530ea5
53 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047411431
54 https://doi.org/10.1023/b:pcpp.0000013197.77036.f5
55 schema:sdDatePublished 2019-04-11T01:59
56 schema:sdLicense https://scigraph.springernature.com/explorer/license/
57 schema:sdPublisher Nb48116a804d44dbcbda8bc1ee78be4c6
58 schema:url http://link.springer.com/10.1023%2FB%3APCPP.0000013197.77036.f5
59 sgo:license sg:explorer/license/
60 sgo:sdDataset articles
61 rdf:type schema:ScholarlyArticle
62 N182e555a2b1147a49530b26ee7d8e06e schema:name dimensions_id
63 schema:value pub.1047411431
64 rdf:type schema:PropertyValue
65 N2dd67cb5501c42128c8a18f02ed17bf4 schema:volumeNumber 24
66 rdf:type schema:PublicationVolume
67 N32922219de0f4814a98a4dbd879ac08d schema:affiliation https://www.grid.ac/institutes/grid.20861.3d
68 schema:familyName Chen
69 schema:givenName Junhong
70 rdf:type schema:Person
71 N338649c333044c4fba6e15d008a93870 schema:name doi
72 schema:value 10.1023/b:pcpp.0000013197.77036.f5
73 rdf:type schema:PropertyValue
74 Na2e2cbb3b7ed41148cce4bf357b83e67 rdf:first sg:person.015432254315.59
75 rdf:rest rdf:nil
76 Na96a192daa8a4c479bf101ec43a5d0d9 schema:issueNumber 2
77 rdf:type schema:PublicationIssue
78 Nb48116a804d44dbcbda8bc1ee78be4c6 schema:name Springer Nature - SN SciGraph project
79 rdf:type schema:Organization
80 Nbf72cdcd62294f13b96b37c66f2c3d32 rdf:first N32922219de0f4814a98a4dbd879ac08d
81 rdf:rest Na2e2cbb3b7ed41148cce4bf357b83e67
82 Ned0fd9739a174e019435163cbc530ea5 schema:name readcube_id
83 schema:value e1da4fd41bcd17b22902f8e66c34a8f2b1ccbbf81b9fbd1e4df3ffd4bf66eb0f
84 rdf:type schema:PropertyValue
85 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
86 schema:name Chemical Sciences
87 rdf:type schema:DefinedTerm
88 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
89 schema:name Physical Chemistry (incl. Structural)
90 rdf:type schema:DefinedTerm
91 sg:journal.1124016 schema:issn 0272-4324
92 1572-8986
93 schema:name Plasma Chemistry and Plasma Processing
94 rdf:type schema:Periodical
95 sg:person.015432254315.59 schema:affiliation https://www.grid.ac/institutes/grid.17635.36
96 schema:familyName Davidson
97 schema:givenName Jane H.
98 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015432254315.59
99 rdf:type schema:Person
100 sg:pub.10.1007/bf00372203 schema:sameAs https://app.dimensions.ai/details/publication/pub.1050898952
101 https://doi.org/10.1007/bf00372203
102 rdf:type schema:CreativeWork
103 sg:pub.10.1023/a:1011314420080 schema:sameAs https://app.dimensions.ai/details/publication/pub.1021289615
104 https://doi.org/10.1023/a:1011314420080
105 rdf:type schema:CreativeWork
106 sg:pub.10.1023/a:1014851908545 schema:sameAs https://app.dimensions.ai/details/publication/pub.1019809431
107 https://doi.org/10.1023/a:1014851908545
108 rdf:type schema:CreativeWork
109 sg:pub.10.1023/a:1021315412208 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035017510
110 https://doi.org/10.1023/a:1021315412208
111 rdf:type schema:CreativeWork
112 sg:pub.10.1023/a:1022468803203 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035107929
113 https://doi.org/10.1023/a:1022468803203
114 rdf:type schema:CreativeWork
115 sg:pub.10.1023/a:1022892815876 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049473337
116 https://doi.org/10.1023/a:1022892815876
117 rdf:type schema:CreativeWork
118 https://doi.org/10.1016/0021-8502(93)90009-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1049515999
119 rdf:type schema:CreativeWork
120 https://doi.org/10.1016/0921-5093(95)09953-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1019305096
121 rdf:type schema:CreativeWork
122 https://doi.org/10.1016/s0040-6090(96)09024-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1042160644
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1016/s0040-6090(98)00976-6 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012367413
125 rdf:type schema:CreativeWork
126 https://doi.org/10.1016/s0257-8972(97)00294-6 schema:sameAs https://app.dimensions.ai/details/publication/pub.1050651806
127 rdf:type schema:CreativeWork
128 https://doi.org/10.1063/1.355115 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057972396
129 rdf:type schema:CreativeWork
130 https://doi.org/10.1080/00022470.1975.10470092 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049242206
131 rdf:type schema:CreativeWork
132 https://doi.org/10.1080/0002889778507791 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025896040
133 rdf:type schema:CreativeWork
134 https://doi.org/10.1080/02786829708965505 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036014664
135 rdf:type schema:CreativeWork
136 https://doi.org/10.1080/02786829808965555 schema:sameAs https://app.dimensions.ai/details/publication/pub.1008929460
137 rdf:type schema:CreativeWork
138 https://doi.org/10.1109/28.137427 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061141588
139 rdf:type schema:CreativeWork
140 https://doi.org/10.1109/28.287521 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061142026
141 rdf:type schema:CreativeWork
142 https://doi.org/10.1109/tiga.1969.4181060 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061631461
143 rdf:type schema:CreativeWork
144 https://doi.org/10.1116/1.1448506 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062167089
145 rdf:type schema:CreativeWork
146 https://doi.org/10.1116/1.573832 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062183879
147 rdf:type schema:CreativeWork
148 https://doi.org/10.1116/1.573833 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062183880
149 rdf:type schema:CreativeWork
150 https://doi.org/10.1116/1.574963 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062185010
151 rdf:type schema:CreativeWork
152 https://doi.org/10.1116/1.576239 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062186286
153 rdf:type schema:CreativeWork
154 https://doi.org/10.1116/1.577464 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062187511
155 rdf:type schema:CreativeWork
156 https://doi.org/10.1116/1.578607 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062188654
157 rdf:type schema:CreativeWork
158 https://doi.org/10.1116/1.579521 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062189568
159 rdf:type schema:CreativeWork
160 https://doi.org/10.1116/1.580082 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062190129
161 rdf:type schema:CreativeWork
162 https://doi.org/10.1116/1.580149 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062190196
163 rdf:type schema:CreativeWork
164 https://doi.org/10.1116/1.581096 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062191143
165 rdf:type schema:CreativeWork
166 https://doi.org/10.1143/jjap.26.l1138 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063042023
167 rdf:type schema:CreativeWork
168 https://doi.org/10.1143/jjap.27.1381 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063042785
169 rdf:type schema:CreativeWork
170 https://doi.org/10.1143/jjap.27.892 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063043172
171 rdf:type schema:CreativeWork
172 https://doi.org/10.1149/1.2097325 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014912254
173 rdf:type schema:CreativeWork
174 https://doi.org/10.1351/pac199971101871 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043560169
175 rdf:type schema:CreativeWork
176 https://www.grid.ac/institutes/grid.17635.36 schema:alternateName University of Minnesota
177 schema:name Department of Mechanical Engineering, University of Minnesota, 55455, Minneapolis, MN
178 rdf:type schema:Organization
179 https://www.grid.ac/institutes/grid.20861.3d schema:alternateName California Institute of Technology
180 schema:name Department of Chemical Engineering, California Institute of Technology, 91125, Pasadena, CA
181 rdf:type schema:Organization
 




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