A Bulk Plasma Generator Based on a Plasma Cathode Discharge View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2003-05

AUTHORS

A. V. Vizir, E. M. Oks*, M. V. Shandrikov, G. Yu. Yushkov

ABSTRACT

The design, operating features, and parameters of a bulk plasma generator based on a steady-state low-pressure discharge with the additional injection of electrons from an external emitter are described. An additional constricted-arc discharge plasma is used as an electron emitter. This type of a discharge system ensures the formation of a homogeneous and stable gas plasma with a concentration of up to 2 ×1010 cm–3 in a volume of 1 m3 at a pressure of up to 3 × 10–4 Torr in a vacuum chamber. At a discharge current of up to 10 A, its voltage is 100–150 V. The device is characterized by a high efficiency of the energy utilization and a long service life, can operate with chemically active gases, and is easy to adjust and maintain. More... »

PAGES

384-387

Identifiers

URI

http://scigraph.springernature.com/pub.10.1023/a:1024478708509

DOI

http://dx.doi.org/10.1023/a:1024478708509

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1031355486


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