Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2002-11

AUTHORS

E. A. Levashov, D. V. Larikhin, D. V. Shtansky, A. S. Rogachev, H. E. Grigoryan, J. J. Moore

ABSTRACT

Two- and three-layer functionally graded PVD targets with a “working” layer (sputtering surface) based on TiN-TiB2 or TiN-Ti5Si3 formation via the technology of forced SHS compaction were considered. It was shown that rather wide (up to 1 mm) transition diffusional zones providing firm adhesion of the layers were formed between the working, intermediate, and third layers. The compositions TiN + TiB2 + 20%Cu and TiB2 + 50%Cu were found to be optimum for the intermediate (“damping”) and third layers of the three-layer PVD targets. The specific features of phase and structure formation of the two- and three-layer products with the working layer based on TiN-TiB2 and TiN-Ti5Si3 were elucidated. Variation of the “chemical oven” mass exerted a noticeable effect of reduction of the residual porosity and enlarging of the grains of the product phases owing to prolongation of the time for secondary structure formation. The relationship of the hardness of the layers in the functionally graded target on the chemical oven mass allow prediction of the properties of the resultant graded material systems. More... »

PAGES

319-330

Identifiers

URI

http://scigraph.springernature.com/pub.10.1023/a:1023881718671

DOI

http://dx.doi.org/10.1023/a:1023881718671

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1045562039


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "name": [
            "Scientific Educational Center of SHS of the Moscow State Institute of Steel and Alloys and the Institute of Structural Macrokinetics and Materials Science Problems of the Russian Academy of Sciences, Leninsky Prosp. 4/164, 119 991, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Levashov", 
        "givenName": "E. A.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Scientific Educational Center of SHS of the Moscow State Institute of Steel and Alloys and the Institute of Structural Macrokinetics and Materials Science Problems of the Russian Academy of Sciences, Leninsky Prosp. 4/164, 119 991, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Larikhin", 
        "givenName": "D. V.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Scientific Educational Center of SHS of the Moscow State Institute of Steel and Alloys and the Institute of Structural Macrokinetics and Materials Science Problems of the Russian Academy of Sciences, Leninsky Prosp. 4/164, 119 991, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Shtansky", 
        "givenName": "D. V.", 
        "id": "sg:person.0604121561.73", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0604121561.73"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Scientific Educational Center of SHS of the Moscow State Institute of Steel and Alloys and the Institute of Structural Macrokinetics and Materials Science Problems of the Russian Academy of Sciences, Leninsky Prosp. 4/164, 119 991, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Rogachev", 
        "givenName": "A. S.", 
        "id": "sg:person.015243773134.23", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015243773134.23"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Scientific Educational Center of SHS of the Moscow State Institute of Steel and Alloys and the Institute of Structural Macrokinetics and Materials Science Problems of the Russian Academy of Sciences, Leninsky Prosp. 4/164, 119 991, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Grigoryan", 
        "givenName": "H. E.", 
        "id": "sg:person.014470632615.76", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014470632615.76"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Colorado School of Mines", 
          "id": "https://www.grid.ac/institutes/grid.254549.b", 
          "name": [
            "Advance Coatings and Surface Engineering Laboratory (ACSEL), Colorado School of Mines, 80401-1887, Golden, Colorado"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Moore", 
        "givenName": "J. J.", 
        "id": "sg:person.0641164054.59", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0641164054.59"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1023/a:1021873314381", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049969819", 
          "https://doi.org/10.1023/a:1021873314381"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2002-11", 
    "datePublishedReg": "2002-11-01", 
    "description": "Two- and three-layer functionally graded PVD targets with a \u201cworking\u201d layer (sputtering surface) based on TiN-TiB2 or TiN-Ti5Si3 formation via the technology of forced SHS compaction were considered. It was shown that rather wide (up to 1 mm) transition diffusional zones providing firm adhesion of the layers were formed between the working, intermediate, and third layers. The compositions TiN + TiB2 + 20%Cu and TiB2 + 50%Cu were found to be optimum for the intermediate (\u201cdamping\u201d) and third layers of the three-layer PVD targets. The specific features of phase and structure formation of the two- and three-layer products with the working layer based on TiN-TiB2 and TiN-Ti5Si3 were elucidated. Variation of the \u201cchemical oven\u201d mass exerted a noticeable effect of reduction of the residual porosity and enlarging of the grains of the product phases owing to prolongation of the time for secondary structure formation. The relationship of the hardness of the layers in the functionally graded target on the chemical oven mass allow prediction of the properties of the resultant graded material systems.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1023/a:1023881718671", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1143463", 
        "issn": [
          "1064-7562", 
          "1573-4870"
        ], 
        "name": "Journal of Materials Synthesis and Processing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "6", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "10"
      }
    ], 
    "name": "Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN", 
    "pagination": "319-330", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "d9085b1915a69daef4d8f47a28557520639af367873ea0f24d03c7f6e5013bfe"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1023/a:1023881718671"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1045562039"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1023/a:1023881718671", 
      "https://app.dimensions.ai/details/publication/pub.1045562039"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T19:07", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8678_00000507.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1023%2FA%3A1023881718671"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1023/a:1023881718671'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1023/a:1023881718671'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1023/a:1023881718671'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1023/a:1023881718671'


 

This table displays all metadata directly associated to this object as RDF triples.

108 TRIPLES      21 PREDICATES      28 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1023/a:1023881718671 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N114d42d68b284eb4bc1d0e7e3308cc40
4 schema:citation sg:pub.10.1023/a:1021873314381
5 schema:datePublished 2002-11
6 schema:datePublishedReg 2002-11-01
7 schema:description Two- and three-layer functionally graded PVD targets with a “working” layer (sputtering surface) based on TiN-TiB2 or TiN-Ti5Si3 formation via the technology of forced SHS compaction were considered. It was shown that rather wide (up to 1 mm) transition diffusional zones providing firm adhesion of the layers were formed between the working, intermediate, and third layers. The compositions TiN + TiB2 + 20%Cu and TiB2 + 50%Cu were found to be optimum for the intermediate (“damping”) and third layers of the three-layer PVD targets. The specific features of phase and structure formation of the two- and three-layer products with the working layer based on TiN-TiB2 and TiN-Ti5Si3 were elucidated. Variation of the “chemical oven” mass exerted a noticeable effect of reduction of the residual porosity and enlarging of the grains of the product phases owing to prolongation of the time for secondary structure formation. The relationship of the hardness of the layers in the functionally graded target on the chemical oven mass allow prediction of the properties of the resultant graded material systems.
8 schema:genre research_article
9 schema:inLanguage en
10 schema:isAccessibleForFree false
11 schema:isPartOf N3d132553dafc40a38e1912404f3c692d
12 N70244e5345ee4dfd92e670907d8c3c1e
13 sg:journal.1143463
14 schema:name Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN
15 schema:pagination 319-330
16 schema:productId N09f24ec5863f46e1847af1cbceb478b1
17 N9c8410bce0874f1db4315e0b69b8d386
18 Nd71078db6a0f40de804cd8c6a5bbcc0f
19 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045562039
20 https://doi.org/10.1023/a:1023881718671
21 schema:sdDatePublished 2019-04-10T19:07
22 schema:sdLicense https://scigraph.springernature.com/explorer/license/
23 schema:sdPublisher N5a610d1d1edd4694be38add63441372c
24 schema:url http://link.springer.com/10.1023%2FA%3A1023881718671
25 sgo:license sg:explorer/license/
26 sgo:sdDataset articles
27 rdf:type schema:ScholarlyArticle
28 N01086e5ff1c24c59910880543a496717 rdf:first sg:person.015243773134.23
29 rdf:rest N3bd33e9c087c4374ba12a8e27d118bd8
30 N076b9b89a8b14142b12f850461ac3fd2 schema:affiliation N57d38da23a3f400495591ad018b33cd1
31 schema:familyName Levashov
32 schema:givenName E. A.
33 rdf:type schema:Person
34 N09f24ec5863f46e1847af1cbceb478b1 schema:name readcube_id
35 schema:value d9085b1915a69daef4d8f47a28557520639af367873ea0f24d03c7f6e5013bfe
36 rdf:type schema:PropertyValue
37 N0d9c6d4a4c5e4cfe9bfadce5c3d02dda rdf:first Nb474ae3d438b47b2967fb8a8a9a7fb15
38 rdf:rest Na938f700070048d7b3396fa119021003
39 N114d42d68b284eb4bc1d0e7e3308cc40 rdf:first N076b9b89a8b14142b12f850461ac3fd2
40 rdf:rest N0d9c6d4a4c5e4cfe9bfadce5c3d02dda
41 N3bd33e9c087c4374ba12a8e27d118bd8 rdf:first sg:person.014470632615.76
42 rdf:rest N4520fd4039404fe3b0c02779124fde8f
43 N3d132553dafc40a38e1912404f3c692d schema:volumeNumber 10
44 rdf:type schema:PublicationVolume
45 N43b2ea974b7f4ee38daf25749beef079 schema:name Scientific Educational Center of SHS of the Moscow State Institute of Steel and Alloys and the Institute of Structural Macrokinetics and Materials Science Problems of the Russian Academy of Sciences, Leninsky Prosp. 4/164, 119 991, Moscow, Russia
46 rdf:type schema:Organization
47 N4520fd4039404fe3b0c02779124fde8f rdf:first sg:person.0641164054.59
48 rdf:rest rdf:nil
49 N4ea435e99c1848328c0929d9f278af82 schema:name Scientific Educational Center of SHS of the Moscow State Institute of Steel and Alloys and the Institute of Structural Macrokinetics and Materials Science Problems of the Russian Academy of Sciences, Leninsky Prosp. 4/164, 119 991, Moscow, Russia
50 rdf:type schema:Organization
51 N57d38da23a3f400495591ad018b33cd1 schema:name Scientific Educational Center of SHS of the Moscow State Institute of Steel and Alloys and the Institute of Structural Macrokinetics and Materials Science Problems of the Russian Academy of Sciences, Leninsky Prosp. 4/164, 119 991, Moscow, Russia
52 rdf:type schema:Organization
53 N5a610d1d1edd4694be38add63441372c schema:name Springer Nature - SN SciGraph project
54 rdf:type schema:Organization
55 N70244e5345ee4dfd92e670907d8c3c1e schema:issueNumber 6
56 rdf:type schema:PublicationIssue
57 N9c8410bce0874f1db4315e0b69b8d386 schema:name dimensions_id
58 schema:value pub.1045562039
59 rdf:type schema:PropertyValue
60 Na938f700070048d7b3396fa119021003 rdf:first sg:person.0604121561.73
61 rdf:rest N01086e5ff1c24c59910880543a496717
62 Nb474ae3d438b47b2967fb8a8a9a7fb15 schema:affiliation Nb5d1a59054c84570965232ed43358048
63 schema:familyName Larikhin
64 schema:givenName D. V.
65 rdf:type schema:Person
66 Nb5d1a59054c84570965232ed43358048 schema:name Scientific Educational Center of SHS of the Moscow State Institute of Steel and Alloys and the Institute of Structural Macrokinetics and Materials Science Problems of the Russian Academy of Sciences, Leninsky Prosp. 4/164, 119 991, Moscow, Russia
67 rdf:type schema:Organization
68 Nd71078db6a0f40de804cd8c6a5bbcc0f schema:name doi
69 schema:value 10.1023/a:1023881718671
70 rdf:type schema:PropertyValue
71 Ndf9aa27fbccb47a4878f8ae1ad7d11c7 schema:name Scientific Educational Center of SHS of the Moscow State Institute of Steel and Alloys and the Institute of Structural Macrokinetics and Materials Science Problems of the Russian Academy of Sciences, Leninsky Prosp. 4/164, 119 991, Moscow, Russia
72 rdf:type schema:Organization
73 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
74 schema:name Engineering
75 rdf:type schema:DefinedTerm
76 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
77 schema:name Materials Engineering
78 rdf:type schema:DefinedTerm
79 sg:journal.1143463 schema:issn 1064-7562
80 1573-4870
81 schema:name Journal of Materials Synthesis and Processing
82 rdf:type schema:Periodical
83 sg:person.014470632615.76 schema:affiliation N4ea435e99c1848328c0929d9f278af82
84 schema:familyName Grigoryan
85 schema:givenName H. E.
86 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014470632615.76
87 rdf:type schema:Person
88 sg:person.015243773134.23 schema:affiliation N43b2ea974b7f4ee38daf25749beef079
89 schema:familyName Rogachev
90 schema:givenName A. S.
91 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015243773134.23
92 rdf:type schema:Person
93 sg:person.0604121561.73 schema:affiliation Ndf9aa27fbccb47a4878f8ae1ad7d11c7
94 schema:familyName Shtansky
95 schema:givenName D. V.
96 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0604121561.73
97 rdf:type schema:Person
98 sg:person.0641164054.59 schema:affiliation https://www.grid.ac/institutes/grid.254549.b
99 schema:familyName Moore
100 schema:givenName J. J.
101 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0641164054.59
102 rdf:type schema:Person
103 sg:pub.10.1023/a:1021873314381 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049969819
104 https://doi.org/10.1023/a:1021873314381
105 rdf:type schema:CreativeWork
106 https://www.grid.ac/institutes/grid.254549.b schema:alternateName Colorado School of Mines
107 schema:name Advance Coatings and Surface Engineering Laboratory (ACSEL), Colorado School of Mines, 80401-1887, Golden, Colorado
108 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...