Optimization of PVD Parameters for the Deposition of Ultrahard Ti–Si–B–N Coatings View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1999-05

AUTHORS

D. V. Shtansky, E. A. Levashov, A. N. Sheveiko, J. J. Moore

ABSTRACT

Multicomponent Ti–Si–B–N coatings were deposited on high-speed steel (HSS) substrates by reactive magnetron sputtering using a SHS TiB + 20 wt% Si target. The influences of the substrate temperature, bias voltage, and nitrogen partial pressure on the structure and the elemental compositions of the films were studied. The films were characterized by high-resolution transmission electron microscopy (HRTEM), Auger spectroscopy (AES), and X-ray diffraction (XRD). The results of HRTEM analysis indicated the formation of an ordered–disordered structure with fine crystalline grains of hexagonal Ti(B,N)x phase and amorphous integrain layers. The stoichiometry of the Ti(B,N)x phase was strongly affected by PVD process parameters. The films were characterized in terms of their microhardness and wear resistance. The reasons for the high value of microhardness appear to be the result of stoichiometric phase composition, compressive residual stress, and dense and fine microstructure of the Ti–Si–B–N coatings. The tribological wear test results indicated the superior wear-resistant properties of Ti–Si–B–N coatings compared to TiN and Ti(C,N) coatings. More... »

PAGES

187-193

Identifiers

URI

http://scigraph.springernature.com/pub.10.1023/a:1021873314381

DOI

http://dx.doi.org/10.1023/a:1021873314381

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1049969819


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "University of Tokyo", 
          "id": "https://www.grid.ac/institutes/grid.26999.3d", 
          "name": [
            "SHS-Center, Moscow Steel and Alloys Institute, Leninsky pr. 4, 164, 117936, Moscow, Russia", 
            "Department of Materials Science, Faculty of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, 113-8656, Tokyo, Japan"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Shtansky", 
        "givenName": "D. V.", 
        "id": "sg:person.0604121561.73", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0604121561.73"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "SHS-Center, Moscow Steel and Alloys Institute, Leninsky pr. 4, 164, 117936, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Levashov", 
        "givenName": "E. A.", 
        "id": "sg:person.016454247245.56", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016454247245.56"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "SHS-Center, Moscow Steel and Alloys Institute, Leninsky pr. 4, 164, 117936, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sheveiko", 
        "givenName": "A. N.", 
        "id": "sg:person.0674531012.53", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0674531012.53"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Colorado School of Mines", 
          "id": "https://www.grid.ac/institutes/grid.254549.b", 
          "name": [
            "Advanced Coatings and Surface Engineering Laboratory (ACSEL), Colorado School of Mines, 80401-1887, Golden, Colorado"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Moore", 
        "givenName": "J. J.", 
        "id": "sg:person.0641164054.59", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0641164054.59"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1179/sur.1992.8.1.39", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006799911"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1080/01418639608240319", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022712582"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0257-8972(90)90065-k", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022924524"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0257-8972(90)90065-k", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022924524"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0257-8972(90)90146-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037618605"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0257-8972(90)90146-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037618605"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.2355/isijinternational.33.949", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039239319"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1023/a:1022663210694", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043285326", 
          "https://doi.org/10.1023/a:1022663210694"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0257-8972(91)90054-z", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049160205"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0257-8972(91)90054-z", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049160205"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0257-8972(09)90059-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049469000"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.579541", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062189588"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "1999-05", 
    "datePublishedReg": "1999-05-01", 
    "description": "Multicomponent Ti\u2013Si\u2013B\u2013N coatings were deposited on high-speed steel (HSS) substrates by reactive magnetron sputtering using a SHS TiB + 20 wt% Si target. The influences of the substrate temperature, bias voltage, and nitrogen partial pressure on the structure and the elemental compositions of the films were studied. The films were characterized by high-resolution transmission electron microscopy (HRTEM), Auger spectroscopy (AES), and X-ray diffraction (XRD). The results of HRTEM analysis indicated the formation of an ordered\u2013disordered structure with fine crystalline grains of hexagonal Ti(B,N)x phase and amorphous integrain layers. The stoichiometry of the Ti(B,N)x phase was strongly affected by PVD process parameters. The films were characterized in terms of their microhardness and wear resistance. The reasons for the high value of microhardness appear to be the result of stoichiometric phase composition, compressive residual stress, and dense and fine microstructure of the Ti\u2013Si\u2013B\u2013N coatings. The tribological wear test results indicated the superior wear-resistant properties of Ti\u2013Si\u2013B\u2013N coatings compared to TiN and Ti(C,N) coatings.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1023/a:1021873314381", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1143463", 
        "issn": [
          "1064-7562", 
          "1573-4870"
        ], 
        "name": "Journal of Materials Synthesis and Processing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "3", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "7"
      }
    ], 
    "name": "Optimization of PVD Parameters for the Deposition of Ultrahard Ti\u2013Si\u2013B\u2013N Coatings", 
    "pagination": "187-193", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "ee0a441d6bd54e0d20edab47ce5041b0ee044a133b144f9003ed13d819018086"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1023/a:1021873314381"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1049969819"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1023/a:1021873314381", 
      "https://app.dimensions.ai/details/publication/pub.1049969819"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T15:00", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8663_00000508.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1023%2FA%3A1021873314381"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1023/a:1021873314381'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1023/a:1021873314381'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1023/a:1021873314381'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1023/a:1021873314381'


 

This table displays all metadata directly associated to this object as RDF triples.

118 TRIPLES      21 PREDICATES      36 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1023/a:1021873314381 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author Nc115941fc7e5452ba6eaaf42511cf199
4 schema:citation sg:pub.10.1023/a:1022663210694
5 https://doi.org/10.1016/0257-8972(90)90065-k
6 https://doi.org/10.1016/0257-8972(90)90146-4
7 https://doi.org/10.1016/0257-8972(91)90054-z
8 https://doi.org/10.1016/s0257-8972(09)90059-7
9 https://doi.org/10.1080/01418639608240319
10 https://doi.org/10.1116/1.579541
11 https://doi.org/10.1179/sur.1992.8.1.39
12 https://doi.org/10.2355/isijinternational.33.949
13 schema:datePublished 1999-05
14 schema:datePublishedReg 1999-05-01
15 schema:description Multicomponent Ti–Si–B–N coatings were deposited on high-speed steel (HSS) substrates by reactive magnetron sputtering using a SHS TiB + 20 wt% Si target. The influences of the substrate temperature, bias voltage, and nitrogen partial pressure on the structure and the elemental compositions of the films were studied. The films were characterized by high-resolution transmission electron microscopy (HRTEM), Auger spectroscopy (AES), and X-ray diffraction (XRD). The results of HRTEM analysis indicated the formation of an ordered–disordered structure with fine crystalline grains of hexagonal Ti(B,N)x phase and amorphous integrain layers. The stoichiometry of the Ti(B,N)x phase was strongly affected by PVD process parameters. The films were characterized in terms of their microhardness and wear resistance. The reasons for the high value of microhardness appear to be the result of stoichiometric phase composition, compressive residual stress, and dense and fine microstructure of the Ti–Si–B–N coatings. The tribological wear test results indicated the superior wear-resistant properties of Ti–Si–B–N coatings compared to TiN and Ti(C,N) coatings.
16 schema:genre research_article
17 schema:inLanguage en
18 schema:isAccessibleForFree false
19 schema:isPartOf N38bce43b2fbc43f4bae5211357ea1ed1
20 Ncc84531914ce4dfd881a79f3e24f1a6e
21 sg:journal.1143463
22 schema:name Optimization of PVD Parameters for the Deposition of Ultrahard Ti–Si–B–N Coatings
23 schema:pagination 187-193
24 schema:productId N27a344d7f87d42bdb30ab6dce1100bc6
25 N2cb5e500ab7c4474ad06465fd2820a15
26 N32184fc7f8714ac49a2537977bff09f6
27 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049969819
28 https://doi.org/10.1023/a:1021873314381
29 schema:sdDatePublished 2019-04-10T15:00
30 schema:sdLicense https://scigraph.springernature.com/explorer/license/
31 schema:sdPublisher N0f5fa5ea99c7480ea1a21dd001890c26
32 schema:url http://link.springer.com/10.1023%2FA%3A1021873314381
33 sgo:license sg:explorer/license/
34 sgo:sdDataset articles
35 rdf:type schema:ScholarlyArticle
36 N0f5fa5ea99c7480ea1a21dd001890c26 schema:name Springer Nature - SN SciGraph project
37 rdf:type schema:Organization
38 N27a344d7f87d42bdb30ab6dce1100bc6 schema:name doi
39 schema:value 10.1023/a:1021873314381
40 rdf:type schema:PropertyValue
41 N2cb5e500ab7c4474ad06465fd2820a15 schema:name readcube_id
42 schema:value ee0a441d6bd54e0d20edab47ce5041b0ee044a133b144f9003ed13d819018086
43 rdf:type schema:PropertyValue
44 N32184fc7f8714ac49a2537977bff09f6 schema:name dimensions_id
45 schema:value pub.1049969819
46 rdf:type schema:PropertyValue
47 N38bce43b2fbc43f4bae5211357ea1ed1 schema:issueNumber 3
48 rdf:type schema:PublicationIssue
49 N9cee14074b3f485da8c7fb5b3d241f72 rdf:first sg:person.016454247245.56
50 rdf:rest Nbef58f8d8e5e4f9d8eefdc49ccd28943
51 Nb025812d669240d1b0d9d27a447addaa rdf:first sg:person.0641164054.59
52 rdf:rest rdf:nil
53 Nbef58f8d8e5e4f9d8eefdc49ccd28943 rdf:first sg:person.0674531012.53
54 rdf:rest Nb025812d669240d1b0d9d27a447addaa
55 Nc115941fc7e5452ba6eaaf42511cf199 rdf:first sg:person.0604121561.73
56 rdf:rest N9cee14074b3f485da8c7fb5b3d241f72
57 Ncc84531914ce4dfd881a79f3e24f1a6e schema:volumeNumber 7
58 rdf:type schema:PublicationVolume
59 Nd958130d473041d98d129cbb75f21999 schema:name SHS-Center, Moscow Steel and Alloys Institute, Leninsky pr. 4, 164, 117936, Moscow, Russia
60 rdf:type schema:Organization
61 Nf6e12bec19394cf784b15debbed3a0f8 schema:name SHS-Center, Moscow Steel and Alloys Institute, Leninsky pr. 4, 164, 117936, Moscow, Russia
62 rdf:type schema:Organization
63 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
64 schema:name Engineering
65 rdf:type schema:DefinedTerm
66 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
67 schema:name Materials Engineering
68 rdf:type schema:DefinedTerm
69 sg:journal.1143463 schema:issn 1064-7562
70 1573-4870
71 schema:name Journal of Materials Synthesis and Processing
72 rdf:type schema:Periodical
73 sg:person.016454247245.56 schema:affiliation Nd958130d473041d98d129cbb75f21999
74 schema:familyName Levashov
75 schema:givenName E. A.
76 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016454247245.56
77 rdf:type schema:Person
78 sg:person.0604121561.73 schema:affiliation https://www.grid.ac/institutes/grid.26999.3d
79 schema:familyName Shtansky
80 schema:givenName D. V.
81 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0604121561.73
82 rdf:type schema:Person
83 sg:person.0641164054.59 schema:affiliation https://www.grid.ac/institutes/grid.254549.b
84 schema:familyName Moore
85 schema:givenName J. J.
86 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0641164054.59
87 rdf:type schema:Person
88 sg:person.0674531012.53 schema:affiliation Nf6e12bec19394cf784b15debbed3a0f8
89 schema:familyName Sheveiko
90 schema:givenName A. N.
91 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0674531012.53
92 rdf:type schema:Person
93 sg:pub.10.1023/a:1022663210694 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043285326
94 https://doi.org/10.1023/a:1022663210694
95 rdf:type schema:CreativeWork
96 https://doi.org/10.1016/0257-8972(90)90065-k schema:sameAs https://app.dimensions.ai/details/publication/pub.1022924524
97 rdf:type schema:CreativeWork
98 https://doi.org/10.1016/0257-8972(90)90146-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037618605
99 rdf:type schema:CreativeWork
100 https://doi.org/10.1016/0257-8972(91)90054-z schema:sameAs https://app.dimensions.ai/details/publication/pub.1049160205
101 rdf:type schema:CreativeWork
102 https://doi.org/10.1016/s0257-8972(09)90059-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049469000
103 rdf:type schema:CreativeWork
104 https://doi.org/10.1080/01418639608240319 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022712582
105 rdf:type schema:CreativeWork
106 https://doi.org/10.1116/1.579541 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062189588
107 rdf:type schema:CreativeWork
108 https://doi.org/10.1179/sur.1992.8.1.39 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006799911
109 rdf:type schema:CreativeWork
110 https://doi.org/10.2355/isijinternational.33.949 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039239319
111 rdf:type schema:CreativeWork
112 https://www.grid.ac/institutes/grid.254549.b schema:alternateName Colorado School of Mines
113 schema:name Advanced Coatings and Surface Engineering Laboratory (ACSEL), Colorado School of Mines, 80401-1887, Golden, Colorado
114 rdf:type schema:Organization
115 https://www.grid.ac/institutes/grid.26999.3d schema:alternateName University of Tokyo
116 schema:name Department of Materials Science, Faculty of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, 113-8656, Tokyo, Japan
117 SHS-Center, Moscow Steel and Alloys Institute, Leninsky pr. 4, 164, 117936, Moscow, Russia
118 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...