Modeling of H2 and H2/CH4 Moderate-Pressure Microwave Plasma Used for Diamond Deposition View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1998-09

AUTHORS

K. Hassouni, O. Leroy, S. Farhat, A. Gicquel

ABSTRACT

One-dimensional transport models of moderate-pressure H2and H2/CH4plasmas obtained in a diamond deposition microwave reactor are presented. These models describe the plasma as a thermochemically nonequilibrium flow with three different energy modes. The solution of the one-dimensional plasma transport equations enabled the estimation of plasma species concentrations and temperatures on the axis of the reactor. As far as pure H2plasmas are concerned, results showed that the model predictions of gas and vibration temperatures are in good agreement with experimental measurements. The model also yields a relatively good qualitative prediction of the variations of H-atom mole fraction with the power density absorbed by the plasma. The results obtained for H2/CH4discharges showed that the model prediction on the variations of H-atom mole fraction with methane percentage in the discharge is in good qualitative agreement with experimental results. They also showed that methane is rapidly converted to acetylene before reaching the discharge zone. The concentrations of neutral hydrocarbon species in the reactor are mainly governed by thermal chemistry. The addition of methane strongly affects the ionization kinetics of the plasma. Three major ions are generally obtained in H2/CH4plasmas: C2H2+, C2H3+, and C2H5+. The relative predominance of these ions depends on the considered plasma region and on the discharge conditions. The ionic species concentrations are also mainly governed by chemistry, except very near the substrate surface. Finally the use of this transport model along with the surface chemistry model of Goodwin(1)enabled us to estimate the diamond growth rate for several discharge conditions. More... »

PAGES

325-362

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1023/a:1021845402202

DOI

http://dx.doi.org/10.1023/a:1021845402202

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1049070857


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0202", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Atomic, Molecular, Nuclear, Particle and Plasma Physics", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "name": [
            "LIMHP, CNRS-UPN, Avenue J. B. Cl\u00e9ment, 93430, Villetaneuse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Hassouni", 
        "givenName": "K.", 
        "id": "sg:person.0612236636.81", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0612236636.81"
        ], 
        "type": "Person"
      }, 
      {
        "familyName": "Leroy", 
        "givenName": "O.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "LIMHP, CNRS-UPN, Avenue J. B. Cl\u00e9ment, 93430, Villetaneuse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Farhat", 
        "givenName": "S.", 
        "id": "sg:person.01104365640.17", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01104365640.17"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "LIMHP, CNRS-UPN, Avenue J. B. Cl\u00e9ment, 93430, Villetaneuse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Gicquel", 
        "givenName": "A.", 
        "id": "sg:person.016367617542.14", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016367617542.14"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1088/0022-3727/22/11/017", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1016741222"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0925-9635(93)90094-i", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1020947011"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0925-9635(93)90094-i", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1020947011"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0925-9635(94)90229-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021588812"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0925-9635(94)90229-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021588812"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf01466040", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021803698", 
          "https://doi.org/10.1007/bf01466040"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf01466040", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021803698", 
          "https://doi.org/10.1007/bf01466040"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf01570175", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027000309", 
          "https://doi.org/10.1007/bf01570175"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf01570175", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027000309", 
          "https://doi.org/10.1007/bf01570175"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1149/1.2096750", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1028044475"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.2514/3.807", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030809059"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf01570176", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1031148296", 
          "https://doi.org/10.1007/bf01570176"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf01570176", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1031148296", 
          "https://doi.org/10.1007/bf01570176"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/17/8/026", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032038384"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/jmr.1991.2134", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037174078"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1149/1.2108820", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037318135"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0301-0104(87)80120-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037553556"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0925-9635(95)00428-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1044404519"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/j100147a036", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055654941"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1051/jp3:1996176", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056976460"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1051/jp3:1996182", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056976466"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.102946", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057650520"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.105620", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057653189"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1693954", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057765734"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.342696", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057950053"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.345128", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057953776"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.346858", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057957080"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.349284", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057961789"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.351470", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057965810"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.354978", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057972206"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.355063", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057972344"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.356037", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057974565"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.555856", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058109728"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.555858", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058109730"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.62.144", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060798487"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.62.144", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060798487"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.34.1972", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063053624"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "1998-09", 
    "datePublishedReg": "1998-09-01", 
    "description": "One-dimensional transport models of moderate-pressure H2and H2/CH4plasmas obtained in a diamond deposition microwave reactor are presented. These models describe the plasma as a thermochemically nonequilibrium flow with three different energy modes. The solution of the one-dimensional plasma transport equations enabled the estimation of plasma species concentrations and temperatures on the axis of the reactor. As far as pure H2plasmas are concerned, results showed that the model predictions of gas and vibration temperatures are in good agreement with experimental measurements. The model also yields a relatively good qualitative prediction of the variations of H-atom mole fraction with the power density absorbed by the plasma. The results obtained for H2/CH4discharges showed that the model prediction on the variations of H-atom mole fraction with methane percentage in the discharge is in good qualitative agreement with experimental results. They also showed that methane is rapidly converted to acetylene before reaching the discharge zone. The concentrations of neutral hydrocarbon species in the reactor are mainly governed by thermal chemistry. The addition of methane strongly affects the ionization kinetics of the plasma. Three major ions are generally obtained in H2/CH4plasmas: C2H2+, C2H3+, and C2H5+. The relative predominance of these ions depends on the considered plasma region and on the discharge conditions. The ionic species concentrations are also mainly governed by chemistry, except very near the substrate surface. Finally the use of this transport model along with the surface chemistry model of Goodwin(1)enabled us to estimate the diamond growth rate for several discharge conditions.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1023/a:1021845402202", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1124016", 
        "issn": [
          "0272-4324", 
          "1572-8986"
        ], 
        "name": "Plasma Chemistry and Plasma Processing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "3", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "18"
      }
    ], 
    "name": "Modeling of H2 and H2/CH4 Moderate-Pressure Microwave Plasma Used for Diamond Deposition", 
    "pagination": "325-362", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "e9c3ed665245d841a985be577d6ec9f97b302b05be19f4290d64e50ebfeb25d5"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1023/a:1021845402202"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1049070857"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1023/a:1021845402202", 
      "https://app.dimensions.ai/details/publication/pub.1049070857"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T01:06", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8697_00000508.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1023%2FA%3A1021845402202"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1023/a:1021845402202'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1023/a:1021845402202'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1023/a:1021845402202'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1023/a:1021845402202'


 

This table displays all metadata directly associated to this object as RDF triples.

179 TRIPLES      21 PREDICATES      58 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1023/a:1021845402202 schema:about anzsrc-for:02
2 anzsrc-for:0202
3 schema:author N15a68140f6594a20b9362383aef1c234
4 schema:citation sg:pub.10.1007/bf01466040
5 sg:pub.10.1007/bf01570175
6 sg:pub.10.1007/bf01570176
7 https://doi.org/10.1016/0301-0104(87)80120-9
8 https://doi.org/10.1016/0925-9635(93)90094-i
9 https://doi.org/10.1016/0925-9635(94)90229-1
10 https://doi.org/10.1016/0925-9635(95)00428-9
11 https://doi.org/10.1021/j100147a036
12 https://doi.org/10.1051/jp3:1996176
13 https://doi.org/10.1051/jp3:1996182
14 https://doi.org/10.1063/1.102946
15 https://doi.org/10.1063/1.105620
16 https://doi.org/10.1063/1.1693954
17 https://doi.org/10.1063/1.342696
18 https://doi.org/10.1063/1.345128
19 https://doi.org/10.1063/1.346858
20 https://doi.org/10.1063/1.349284
21 https://doi.org/10.1063/1.351470
22 https://doi.org/10.1063/1.354978
23 https://doi.org/10.1063/1.355063
24 https://doi.org/10.1063/1.356037
25 https://doi.org/10.1063/1.555856
26 https://doi.org/10.1063/1.555858
27 https://doi.org/10.1088/0022-3727/17/8/026
28 https://doi.org/10.1088/0022-3727/22/11/017
29 https://doi.org/10.1103/physrevlett.62.144
30 https://doi.org/10.1143/jjap.34.1972
31 https://doi.org/10.1149/1.2096750
32 https://doi.org/10.1149/1.2108820
33 https://doi.org/10.1557/jmr.1991.2134
34 https://doi.org/10.2514/3.807
35 schema:datePublished 1998-09
36 schema:datePublishedReg 1998-09-01
37 schema:description One-dimensional transport models of moderate-pressure H2and H2/CH4plasmas obtained in a diamond deposition microwave reactor are presented. These models describe the plasma as a thermochemically nonequilibrium flow with three different energy modes. The solution of the one-dimensional plasma transport equations enabled the estimation of plasma species concentrations and temperatures on the axis of the reactor. As far as pure H2plasmas are concerned, results showed that the model predictions of gas and vibration temperatures are in good agreement with experimental measurements. The model also yields a relatively good qualitative prediction of the variations of H-atom mole fraction with the power density absorbed by the plasma. The results obtained for H2/CH4discharges showed that the model prediction on the variations of H-atom mole fraction with methane percentage in the discharge is in good qualitative agreement with experimental results. They also showed that methane is rapidly converted to acetylene before reaching the discharge zone. The concentrations of neutral hydrocarbon species in the reactor are mainly governed by thermal chemistry. The addition of methane strongly affects the ionization kinetics of the plasma. Three major ions are generally obtained in H2/CH4plasmas: C2H2+, C2H3+, and C2H5+. The relative predominance of these ions depends on the considered plasma region and on the discharge conditions. The ionic species concentrations are also mainly governed by chemistry, except very near the substrate surface. Finally the use of this transport model along with the surface chemistry model of Goodwin(1)enabled us to estimate the diamond growth rate for several discharge conditions.
38 schema:genre research_article
39 schema:inLanguage en
40 schema:isAccessibleForFree false
41 schema:isPartOf N0ec656773794401595cfb85b4791b22a
42 N1d91ea8b1b424b5f8e84257f105c157d
43 sg:journal.1124016
44 schema:name Modeling of H2 and H2/CH4 Moderate-Pressure Microwave Plasma Used for Diamond Deposition
45 schema:pagination 325-362
46 schema:productId N35ee8f4ed23a43b6afa4ea6511c56833
47 N6f8947fcdc49460aa80a4180f49e5645
48 N965ade75eccd46fe9790bc95ca0a413f
49 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049070857
50 https://doi.org/10.1023/a:1021845402202
51 schema:sdDatePublished 2019-04-11T01:06
52 schema:sdLicense https://scigraph.springernature.com/explorer/license/
53 schema:sdPublisher N90825bdc93ce4eb9a5574d59783352b8
54 schema:url http://link.springer.com/10.1023%2FA%3A1021845402202
55 sgo:license sg:explorer/license/
56 sgo:sdDataset articles
57 rdf:type schema:ScholarlyArticle
58 N0ec656773794401595cfb85b4791b22a schema:issueNumber 3
59 rdf:type schema:PublicationIssue
60 N15a68140f6594a20b9362383aef1c234 rdf:first sg:person.0612236636.81
61 rdf:rest N635e7e62c29e4137b8a6fb8070d15ecd
62 N1d91ea8b1b424b5f8e84257f105c157d schema:volumeNumber 18
63 rdf:type schema:PublicationVolume
64 N2ff51945ce5b49fe95d89bfb7142b014 schema:name LIMHP, CNRS-UPN, Avenue J. B. Clément, 93430, Villetaneuse, France
65 rdf:type schema:Organization
66 N32f162be536349f4b7eedb6ce1bc0878 rdf:first sg:person.016367617542.14
67 rdf:rest rdf:nil
68 N35ee8f4ed23a43b6afa4ea6511c56833 schema:name doi
69 schema:value 10.1023/a:1021845402202
70 rdf:type schema:PropertyValue
71 N3ccbc36a6f11460d8bee074a9bff3777 rdf:first sg:person.01104365640.17
72 rdf:rest N32f162be536349f4b7eedb6ce1bc0878
73 N3f2a59dfdf9447d79e764c2d5a78ba3d schema:name LIMHP, CNRS-UPN, Avenue J. B. Clément, 93430, Villetaneuse, France
74 rdf:type schema:Organization
75 N54e4144dfea74f5393b701c9e1c187ec schema:familyName Leroy
76 schema:givenName O.
77 rdf:type schema:Person
78 N556dcc4fe1ab453abae2c60601c196c9 schema:name LIMHP, CNRS-UPN, Avenue J. B. Clément, 93430, Villetaneuse, France
79 rdf:type schema:Organization
80 N635e7e62c29e4137b8a6fb8070d15ecd rdf:first N54e4144dfea74f5393b701c9e1c187ec
81 rdf:rest N3ccbc36a6f11460d8bee074a9bff3777
82 N6f8947fcdc49460aa80a4180f49e5645 schema:name readcube_id
83 schema:value e9c3ed665245d841a985be577d6ec9f97b302b05be19f4290d64e50ebfeb25d5
84 rdf:type schema:PropertyValue
85 N90825bdc93ce4eb9a5574d59783352b8 schema:name Springer Nature - SN SciGraph project
86 rdf:type schema:Organization
87 N965ade75eccd46fe9790bc95ca0a413f schema:name dimensions_id
88 schema:value pub.1049070857
89 rdf:type schema:PropertyValue
90 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
91 schema:name Physical Sciences
92 rdf:type schema:DefinedTerm
93 anzsrc-for:0202 schema:inDefinedTermSet anzsrc-for:
94 schema:name Atomic, Molecular, Nuclear, Particle and Plasma Physics
95 rdf:type schema:DefinedTerm
96 sg:journal.1124016 schema:issn 0272-4324
97 1572-8986
98 schema:name Plasma Chemistry and Plasma Processing
99 rdf:type schema:Periodical
100 sg:person.01104365640.17 schema:affiliation N3f2a59dfdf9447d79e764c2d5a78ba3d
101 schema:familyName Farhat
102 schema:givenName S.
103 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01104365640.17
104 rdf:type schema:Person
105 sg:person.016367617542.14 schema:affiliation N2ff51945ce5b49fe95d89bfb7142b014
106 schema:familyName Gicquel
107 schema:givenName A.
108 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016367617542.14
109 rdf:type schema:Person
110 sg:person.0612236636.81 schema:affiliation N556dcc4fe1ab453abae2c60601c196c9
111 schema:familyName Hassouni
112 schema:givenName K.
113 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0612236636.81
114 rdf:type schema:Person
115 sg:pub.10.1007/bf01466040 schema:sameAs https://app.dimensions.ai/details/publication/pub.1021803698
116 https://doi.org/10.1007/bf01466040
117 rdf:type schema:CreativeWork
118 sg:pub.10.1007/bf01570175 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027000309
119 https://doi.org/10.1007/bf01570175
120 rdf:type schema:CreativeWork
121 sg:pub.10.1007/bf01570176 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031148296
122 https://doi.org/10.1007/bf01570176
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1016/0301-0104(87)80120-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037553556
125 rdf:type schema:CreativeWork
126 https://doi.org/10.1016/0925-9635(93)90094-i schema:sameAs https://app.dimensions.ai/details/publication/pub.1020947011
127 rdf:type schema:CreativeWork
128 https://doi.org/10.1016/0925-9635(94)90229-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1021588812
129 rdf:type schema:CreativeWork
130 https://doi.org/10.1016/0925-9635(95)00428-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044404519
131 rdf:type schema:CreativeWork
132 https://doi.org/10.1021/j100147a036 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055654941
133 rdf:type schema:CreativeWork
134 https://doi.org/10.1051/jp3:1996176 schema:sameAs https://app.dimensions.ai/details/publication/pub.1056976460
135 rdf:type schema:CreativeWork
136 https://doi.org/10.1051/jp3:1996182 schema:sameAs https://app.dimensions.ai/details/publication/pub.1056976466
137 rdf:type schema:CreativeWork
138 https://doi.org/10.1063/1.102946 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057650520
139 rdf:type schema:CreativeWork
140 https://doi.org/10.1063/1.105620 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057653189
141 rdf:type schema:CreativeWork
142 https://doi.org/10.1063/1.1693954 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057765734
143 rdf:type schema:CreativeWork
144 https://doi.org/10.1063/1.342696 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057950053
145 rdf:type schema:CreativeWork
146 https://doi.org/10.1063/1.345128 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057953776
147 rdf:type schema:CreativeWork
148 https://doi.org/10.1063/1.346858 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057957080
149 rdf:type schema:CreativeWork
150 https://doi.org/10.1063/1.349284 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057961789
151 rdf:type schema:CreativeWork
152 https://doi.org/10.1063/1.351470 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057965810
153 rdf:type schema:CreativeWork
154 https://doi.org/10.1063/1.354978 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057972206
155 rdf:type schema:CreativeWork
156 https://doi.org/10.1063/1.355063 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057972344
157 rdf:type schema:CreativeWork
158 https://doi.org/10.1063/1.356037 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057974565
159 rdf:type schema:CreativeWork
160 https://doi.org/10.1063/1.555856 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058109728
161 rdf:type schema:CreativeWork
162 https://doi.org/10.1063/1.555858 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058109730
163 rdf:type schema:CreativeWork
164 https://doi.org/10.1088/0022-3727/17/8/026 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032038384
165 rdf:type schema:CreativeWork
166 https://doi.org/10.1088/0022-3727/22/11/017 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016741222
167 rdf:type schema:CreativeWork
168 https://doi.org/10.1103/physrevlett.62.144 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060798487
169 rdf:type schema:CreativeWork
170 https://doi.org/10.1143/jjap.34.1972 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063053624
171 rdf:type schema:CreativeWork
172 https://doi.org/10.1149/1.2096750 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028044475
173 rdf:type schema:CreativeWork
174 https://doi.org/10.1149/1.2108820 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037318135
175 rdf:type schema:CreativeWork
176 https://doi.org/10.1557/jmr.1991.2134 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037174078
177 rdf:type schema:CreativeWork
178 https://doi.org/10.2514/3.807 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030809059
179 rdf:type schema:CreativeWork
 




Preview window. Press ESC to close (or click here)


...