Erbium and Germanium Profiles in Si1 – xGex Layers Grown by Silicon Sublimation-Source Molecular-Beam Epitaxy in GeH4 View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2003-01

AUTHORS

V. G. Shengurov, S. P. Svetlov, V. Yu. Chalkov, B. A. Andreev, Z. F. Krasil'nik, B. Ya. Ber, Yu. N. Drozdov

ABSTRACT

The Ge and Er depth profiles in Si1 – xGex layers grown on Si(100) substrates by Si sublimation-source molecular-beam epitaxy in GeH4 were studied by secondary ion mass spectrometry. The results demonstrate that Ge facilitates Er incorporation into the growing Si–Ge layer. The Er dopant profile becomes sharper with increasing Ge content. The Ge profile also has rather sharp boundaries, indicating that there is no Ge surface segregation, which is attributable to the presence of adsorbed hydrogen, acting as a surfactant. More... »

PAGES

3-5

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1023/a:1021822715712

DOI

http://dx.doi.org/10.1023/a:1021822715712

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1027100003


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