Low Temperature Bonding of Ceramics by Sol-Gel Processing View Full Text


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Article Info

DATE

2003-01

AUTHORS

C.J. Barbé, D.J. Cassidy, G. Triani, B.A. Latella, D.R.G. Mitchell, J.R. Bartlett

ABSTRACT

Silicon, sapphire and polycrystalline wafers have been bonded using a sol-gel process involving spin-coating solutions containing partially hydrolysed silicon or modified aluminium alkoxides. The two coated-substrates were assembled and the resulting sandwich was fired at temperatures ranging from 60 to 600°C. The sol-gel coatings were characterised using ellipsometry and AFM, while the corresponding bonded specimens were investigated using cross-sectional TEM. Their mechanical properties were characterised using both micro-indentation and tensile testing. Bond strengths of 0.8 MPa were achieved at 60°C between silicon wafers using a methacrylate/alumina hybrid system. The strength was increased to 1.3 MPa by using a nano-particulate sol, produced by hydrolysis of Al(OsC4H9)3 modified with ethylacetoacetate, and firing at 600°C. However, significantly lower bond strengths were achieved with sapphire and polycrystalline alumina substrates (0.4 and 0.1 MPa, respectively). The effect of precursor chemistry on the bonds produced is discussed. More... »

PAGES

1145-1150

References to SciGraph publications

  • 2000-12. Low Temperature Bonding of Ceramics by Sol-Gel Processing in JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
  • Identifiers

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    http://scigraph.springernature.com/pub.10.1023/a:1020779328624

    DOI

    http://dx.doi.org/10.1023/a:1020779328624

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1044778086


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    JSON-LD is the canonical representation for SciGraph data.

    TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "about": [
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Physical Chemistry (incl. Structural)", 
            "type": "DefinedTerm"
          }, 
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Chemical Sciences", 
            "type": "DefinedTerm"
          }
        ], 
        "author": [
          {
            "familyName": "Barb\u00e9", 
            "givenName": "C.J.", 
            "id": "sg:person.0775107453.55", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0775107453.55"
            ], 
            "type": "Person"
          }, 
          {
            "familyName": "Cassidy", 
            "givenName": "D.J.", 
            "id": "sg:person.016246235361.46", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016246235361.46"
            ], 
            "type": "Person"
          }, 
          {
            "familyName": "Triani", 
            "givenName": "G.", 
            "id": "sg:person.07704162737.64", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07704162737.64"
            ], 
            "type": "Person"
          }, 
          {
            "familyName": "Latella", 
            "givenName": "B.A.", 
            "id": "sg:person.0740311265.62", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0740311265.62"
            ], 
            "type": "Person"
          }, 
          {
            "familyName": "Mitchell", 
            "givenName": "D.R.G.", 
            "id": "sg:person.013474503527.11", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013474503527.11"
            ], 
            "type": "Person"
          }, 
          {
            "familyName": "Bartlett", 
            "givenName": "J.R.", 
            "id": "sg:person.01205317646.34", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01205317646.34"
            ], 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "sg:pub.10.1023/a:1008733632163", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1022616829", 
              "https://doi.org/10.1023/a:1008733632163"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1146/annurev.matsci.28.1.215", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1044424441"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/0022-3093(90)90153-d", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047320599"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/0022-3093(90)90153-d", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047320599"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "datePublished": "2003-01", 
        "datePublishedReg": "2003-01-01", 
        "description": "Silicon, sapphire and polycrystalline wafers have been bonded using a sol-gel process involving spin-coating solutions containing partially hydrolysed silicon or modified aluminium alkoxides. The two coated-substrates were assembled and the resulting sandwich was fired at temperatures ranging from 60 to 600\u00b0C. The sol-gel coatings were characterised using ellipsometry and AFM, while the corresponding bonded specimens were investigated using cross-sectional TEM. Their mechanical properties were characterised using both micro-indentation and tensile testing. Bond strengths of 0.8 MPa were achieved at 60\u00b0C between silicon wafers using a methacrylate/alumina hybrid system. The strength was increased to 1.3 MPa by using a nano-particulate sol, produced by hydrolysis of Al(OsC4H9)3 modified with ethylacetoacetate, and firing at 600\u00b0C. However, significantly lower bond strengths were achieved with sapphire and polycrystalline alumina substrates (0.4 and 0.1 MPa, respectively). The effect of precursor chemistry on the bonds produced is discussed.", 
        "genre": "research_article", 
        "id": "sg:pub.10.1023/a:1020779328624", 
        "inLanguage": [
          "en"
        ], 
        "isAccessibleForFree": false, 
        "isPartOf": [
          {
            "id": "sg:journal.1048337", 
            "issn": [
              "0928-0707", 
              "1573-4846"
            ], 
            "name": "Journal of Sol-Gel Science and Technology", 
            "type": "Periodical"
          }, 
          {
            "issueNumber": "1-3", 
            "type": "PublicationIssue"
          }, 
          {
            "type": "PublicationVolume", 
            "volumeNumber": "26"
          }
        ], 
        "name": "Low Temperature Bonding of Ceramics by Sol-Gel Processing", 
        "pagination": "1145-1150", 
        "productId": [
          {
            "name": "readcube_id", 
            "type": "PropertyValue", 
            "value": [
              "d54b6e219133453328c2132319efe46b23ef2a99eb458d9f08bd5a19e748673c"
            ]
          }, 
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1023/a:1020779328624"
            ]
          }, 
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1044778086"
            ]
          }
        ], 
        "sameAs": [
          "https://doi.org/10.1023/a:1020779328624", 
          "https://app.dimensions.ai/details/publication/pub.1044778086"
        ], 
        "sdDataset": "articles", 
        "sdDatePublished": "2019-04-10T19:56", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8681_00000507.jsonl", 
        "type": "ScholarlyArticle", 
        "url": "http://link.springer.com/10.1023%2FA%3A1020779328624"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

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    This table displays all metadata directly associated to this object as RDF triples.

    97 TRIPLES      21 PREDICATES      30 URIs      19 LITERALS      7 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1023/a:1020779328624 schema:about anzsrc-for:03
    2 anzsrc-for:0306
    3 schema:author Na6d49d03c7964f4fb6800c7f31cf152d
    4 schema:citation sg:pub.10.1023/a:1008733632163
    5 https://doi.org/10.1016/0022-3093(90)90153-d
    6 https://doi.org/10.1146/annurev.matsci.28.1.215
    7 schema:datePublished 2003-01
    8 schema:datePublishedReg 2003-01-01
    9 schema:description Silicon, sapphire and polycrystalline wafers have been bonded using a sol-gel process involving spin-coating solutions containing partially hydrolysed silicon or modified aluminium alkoxides. The two coated-substrates were assembled and the resulting sandwich was fired at temperatures ranging from 60 to 600°C. The sol-gel coatings were characterised using ellipsometry and AFM, while the corresponding bonded specimens were investigated using cross-sectional TEM. Their mechanical properties were characterised using both micro-indentation and tensile testing. Bond strengths of 0.8 MPa were achieved at 60°C between silicon wafers using a methacrylate/alumina hybrid system. The strength was increased to 1.3 MPa by using a nano-particulate sol, produced by hydrolysis of Al(OsC4H9)3 modified with ethylacetoacetate, and firing at 600°C. However, significantly lower bond strengths were achieved with sapphire and polycrystalline alumina substrates (0.4 and 0.1 MPa, respectively). The effect of precursor chemistry on the bonds produced is discussed.
    10 schema:genre research_article
    11 schema:inLanguage en
    12 schema:isAccessibleForFree false
    13 schema:isPartOf N52ca007071734fba85819833818ab828
    14 N99f7e94035d14984b4d6b2a4720720db
    15 sg:journal.1048337
    16 schema:name Low Temperature Bonding of Ceramics by Sol-Gel Processing
    17 schema:pagination 1145-1150
    18 schema:productId N20cd14448f4b4814a6c25b14877f4f14
    19 N7c346c832bbf4d6a84f3b76b3ea32d47
    20 N96b6ba95caba41af9a6e1a926c09d3f3
    21 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044778086
    22 https://doi.org/10.1023/a:1020779328624
    23 schema:sdDatePublished 2019-04-10T19:56
    24 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    25 schema:sdPublisher N119dd6eb17c3417697ec141129bfdaba
    26 schema:url http://link.springer.com/10.1023%2FA%3A1020779328624
    27 sgo:license sg:explorer/license/
    28 sgo:sdDataset articles
    29 rdf:type schema:ScholarlyArticle
    30 N119dd6eb17c3417697ec141129bfdaba schema:name Springer Nature - SN SciGraph project
    31 rdf:type schema:Organization
    32 N20cd14448f4b4814a6c25b14877f4f14 schema:name dimensions_id
    33 schema:value pub.1044778086
    34 rdf:type schema:PropertyValue
    35 N271bca8032194b84b99dc5c6c8bb962f rdf:first sg:person.07704162737.64
    36 rdf:rest Nf396aaf21f3e45249e9e7fa88ba2b259
    37 N52ca007071734fba85819833818ab828 schema:volumeNumber 26
    38 rdf:type schema:PublicationVolume
    39 N6f98b6ae2509430bb43da9d5f801acf5 rdf:first sg:person.016246235361.46
    40 rdf:rest N271bca8032194b84b99dc5c6c8bb962f
    41 N7c346c832bbf4d6a84f3b76b3ea32d47 schema:name readcube_id
    42 schema:value d54b6e219133453328c2132319efe46b23ef2a99eb458d9f08bd5a19e748673c
    43 rdf:type schema:PropertyValue
    44 N96b6ba95caba41af9a6e1a926c09d3f3 schema:name doi
    45 schema:value 10.1023/a:1020779328624
    46 rdf:type schema:PropertyValue
    47 N99f7e94035d14984b4d6b2a4720720db schema:issueNumber 1-3
    48 rdf:type schema:PublicationIssue
    49 N9f52fbe2f94f42ccbb7c7301a85ef81d rdf:first sg:person.01205317646.34
    50 rdf:rest rdf:nil
    51 Na6d49d03c7964f4fb6800c7f31cf152d rdf:first sg:person.0775107453.55
    52 rdf:rest N6f98b6ae2509430bb43da9d5f801acf5
    53 Nb54861edbb2449358df3f237e1a136a0 rdf:first sg:person.013474503527.11
    54 rdf:rest N9f52fbe2f94f42ccbb7c7301a85ef81d
    55 Nf396aaf21f3e45249e9e7fa88ba2b259 rdf:first sg:person.0740311265.62
    56 rdf:rest Nb54861edbb2449358df3f237e1a136a0
    57 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
    58 schema:name Chemical Sciences
    59 rdf:type schema:DefinedTerm
    60 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
    61 schema:name Physical Chemistry (incl. Structural)
    62 rdf:type schema:DefinedTerm
    63 sg:journal.1048337 schema:issn 0928-0707
    64 1573-4846
    65 schema:name Journal of Sol-Gel Science and Technology
    66 rdf:type schema:Periodical
    67 sg:person.01205317646.34 schema:familyName Bartlett
    68 schema:givenName J.R.
    69 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01205317646.34
    70 rdf:type schema:Person
    71 sg:person.013474503527.11 schema:familyName Mitchell
    72 schema:givenName D.R.G.
    73 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013474503527.11
    74 rdf:type schema:Person
    75 sg:person.016246235361.46 schema:familyName Cassidy
    76 schema:givenName D.J.
    77 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016246235361.46
    78 rdf:type schema:Person
    79 sg:person.0740311265.62 schema:familyName Latella
    80 schema:givenName B.A.
    81 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0740311265.62
    82 rdf:type schema:Person
    83 sg:person.07704162737.64 schema:familyName Triani
    84 schema:givenName G.
    85 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07704162737.64
    86 rdf:type schema:Person
    87 sg:person.0775107453.55 schema:familyName Barbé
    88 schema:givenName C.J.
    89 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0775107453.55
    90 rdf:type schema:Person
    91 sg:pub.10.1023/a:1008733632163 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022616829
    92 https://doi.org/10.1023/a:1008733632163
    93 rdf:type schema:CreativeWork
    94 https://doi.org/10.1016/0022-3093(90)90153-d schema:sameAs https://app.dimensions.ai/details/publication/pub.1047320599
    95 rdf:type schema:CreativeWork
    96 https://doi.org/10.1146/annurev.matsci.28.1.215 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044424441
    97 rdf:type schema:CreativeWork
     




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