Biomimetic Cilia Based on MEMS Technology View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2008-12

AUTHORS

Zhi-guo Zhou, Zhi-wen Liu

ABSTRACT

A review on the research of Micro Electromechanical Systems (MEMS) technology based biomimetic cilia is presented. Biomimetic cilia, enabled by the advancement of MEMS technology, have been under dynamic development for the past decade. After a brief description of the background of cilia and MEMS technology, different biomimetic cilia applications are reviewed. Biomimetic cilia micro-actuators, including micromachined polyimide bimorph biomimetic cilia micro-actuator, electro-statically actuated polymer biomimetic cilia micro-actuator, and magnetically actuated nanorod array biomimetic cilia micro-actuator, are presented. Subsequently micromachined underwater flow biomimetic cilia micro-sensor is studied, followed by acoustic flow micro-sensor. The fabrication of these MEMS-based biomimetic cilia devices, characterization of their physical properties, and the results of their application experiments are discussed. More... »

PAGES

358-365

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1016/s1672-6529(08)60181-x

DOI

http://dx.doi.org/10.1016/s1672-6529(08)60181-x

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1023985584


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Beijing Institute of Technology", 
          "id": "https://www.grid.ac/institutes/grid.43555.32", 
          "name": [
            "Department of Electronic Engineering, Beijing Institute of Technology, Beijing 100081, P. R. China"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Zhou", 
        "givenName": "Zhi-guo", 
        "id": "sg:person.014022651124.02", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014022651124.02"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Beijing Institute of Technology", 
          "id": "https://www.grid.ac/institutes/grid.43555.32", 
          "name": [
            "Department of Electronic Engineering, Beijing Institute of Technology, Beijing 100081, P. R. China"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Liu", 
        "givenName": "Zhi-wen", 
        "id": "sg:person.016213172524.92", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016213172524.92"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1088/0964-1726/10/6/306", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003295109"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.mser.2003.12.001", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004508583"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0960-1317/12/5/322", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006458244"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.cocis.2005.07.002", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1013825214"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/17/4/013", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015708442"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/17/4/013", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015708442"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1073/pnas.76.3.1506", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018858883"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl070190c", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021075048"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl070190c", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021075048"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0304-8853(95)00317-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022346917"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/jmr.1994.1174", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026179559"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0924-4247(98)80053-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1031789985"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0924-4247(01)00731-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1038041825"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1039/b717681c", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1038494867"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0074-7696(08)60812-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1042049515"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0924-4247(97)80224-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1044277602"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/15/5/017", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048074045"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/adma.200290020", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053174027"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/la036332+", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056146614"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/la036332+", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056146614"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/84.809064", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061240717"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/84.925791", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061240828"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/99.590852", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061251923"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/jmems.2006.879373", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061290216"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1155/asp/2006/76593", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063205938", 
          "https://doi.org/10.1155/asp/2006/76593"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2008-12", 
    "datePublishedReg": "2008-12-01", 
    "description": "A review on the research of Micro Electromechanical Systems (MEMS) technology based biomimetic cilia is presented. Biomimetic cilia, enabled by the advancement of MEMS technology, have been under dynamic development for the past decade. After a brief description of the background of cilia and MEMS technology, different biomimetic cilia applications are reviewed. Biomimetic cilia micro-actuators, including micromachined polyimide bimorph biomimetic cilia micro-actuator, electro-statically actuated polymer biomimetic cilia micro-actuator, and magnetically actuated nanorod array biomimetic cilia micro-actuator, are presented. Subsequently micromachined underwater flow biomimetic cilia micro-sensor is studied, followed by acoustic flow micro-sensor. The fabrication of these MEMS-based biomimetic cilia devices, characterization of their physical properties, and the results of their application experiments are discussed.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1016/s1672-6529(08)60181-x", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1037534", 
        "issn": [
          "1672-6529", 
          "2543-2141"
        ], 
        "name": "Journal of Bionic Engineering", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "4", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "5"
      }
    ], 
    "name": "Biomimetic Cilia Based on MEMS Technology", 
    "pagination": "358-365", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "724560cebf6f80e3bad3e36f2a162f5e60cb2fd915008ecd73e9e9cad31aa80f"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1016/s1672-6529(08)60181-x"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1023985584"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1016/s1672-6529(08)60181-x", 
      "https://app.dimensions.ai/details/publication/pub.1023985584"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T00:00", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8695_00000390.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://www.sciencedirect.com/science/article/pii/S167265290860181X"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1016/s1672-6529(08)60181-x'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1016/s1672-6529(08)60181-x'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1016/s1672-6529(08)60181-x'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1016/s1672-6529(08)60181-x'


 

This table displays all metadata directly associated to this object as RDF triples.

135 TRIPLES      21 PREDICATES      49 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1016/s1672-6529(08)60181-x schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N2b29a6ac31fd4b34a118ba5c89b6c2ba
4 schema:citation sg:pub.10.1155/asp/2006/76593
5 https://doi.org/10.1002/adma.200290020
6 https://doi.org/10.1016/0304-8853(95)00317-7
7 https://doi.org/10.1016/j.cocis.2005.07.002
8 https://doi.org/10.1016/j.mser.2003.12.001
9 https://doi.org/10.1016/s0074-7696(08)60812-8
10 https://doi.org/10.1016/s0924-4247(01)00731-2
11 https://doi.org/10.1016/s0924-4247(97)80224-5
12 https://doi.org/10.1016/s0924-4247(98)80053-8
13 https://doi.org/10.1021/la036332+
14 https://doi.org/10.1021/nl070190c
15 https://doi.org/10.1039/b717681c
16 https://doi.org/10.1073/pnas.76.3.1506
17 https://doi.org/10.1088/0957-4484/15/5/017
18 https://doi.org/10.1088/0957-4484/17/4/013
19 https://doi.org/10.1088/0960-1317/12/5/322
20 https://doi.org/10.1088/0964-1726/10/6/306
21 https://doi.org/10.1109/84.809064
22 https://doi.org/10.1109/84.925791
23 https://doi.org/10.1109/99.590852
24 https://doi.org/10.1109/jmems.2006.879373
25 https://doi.org/10.1557/jmr.1994.1174
26 schema:datePublished 2008-12
27 schema:datePublishedReg 2008-12-01
28 schema:description A review on the research of Micro Electromechanical Systems (MEMS) technology based biomimetic cilia is presented. Biomimetic cilia, enabled by the advancement of MEMS technology, have been under dynamic development for the past decade. After a brief description of the background of cilia and MEMS technology, different biomimetic cilia applications are reviewed. Biomimetic cilia micro-actuators, including micromachined polyimide bimorph biomimetic cilia micro-actuator, electro-statically actuated polymer biomimetic cilia micro-actuator, and magnetically actuated nanorod array biomimetic cilia micro-actuator, are presented. Subsequently micromachined underwater flow biomimetic cilia micro-sensor is studied, followed by acoustic flow micro-sensor. The fabrication of these MEMS-based biomimetic cilia devices, characterization of their physical properties, and the results of their application experiments are discussed.
29 schema:genre research_article
30 schema:inLanguage en
31 schema:isAccessibleForFree false
32 schema:isPartOf N7f762e1b462d44c385529dd1b90af7a1
33 Nad732a472e6d47b896a64c52648ad120
34 sg:journal.1037534
35 schema:name Biomimetic Cilia Based on MEMS Technology
36 schema:pagination 358-365
37 schema:productId N66d4d064eff6466b8e4b0a28feae2468
38 Nb9c4a3cd16c941d8ac5eda3bb99f654d
39 Ne66d676807e34434b84ee1e7e512a626
40 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023985584
41 https://doi.org/10.1016/s1672-6529(08)60181-x
42 schema:sdDatePublished 2019-04-11T00:00
43 schema:sdLicense https://scigraph.springernature.com/explorer/license/
44 schema:sdPublisher Nd6db59ff34494ece9c9b27ed1d1b414b
45 schema:url http://www.sciencedirect.com/science/article/pii/S167265290860181X
46 sgo:license sg:explorer/license/
47 sgo:sdDataset articles
48 rdf:type schema:ScholarlyArticle
49 N2b29a6ac31fd4b34a118ba5c89b6c2ba rdf:first sg:person.014022651124.02
50 rdf:rest Nec50d190127d422eabb86066c5bf852e
51 N66d4d064eff6466b8e4b0a28feae2468 schema:name readcube_id
52 schema:value 724560cebf6f80e3bad3e36f2a162f5e60cb2fd915008ecd73e9e9cad31aa80f
53 rdf:type schema:PropertyValue
54 N7f762e1b462d44c385529dd1b90af7a1 schema:volumeNumber 5
55 rdf:type schema:PublicationVolume
56 Nad732a472e6d47b896a64c52648ad120 schema:issueNumber 4
57 rdf:type schema:PublicationIssue
58 Nb9c4a3cd16c941d8ac5eda3bb99f654d schema:name doi
59 schema:value 10.1016/s1672-6529(08)60181-x
60 rdf:type schema:PropertyValue
61 Nd6db59ff34494ece9c9b27ed1d1b414b schema:name Springer Nature - SN SciGraph project
62 rdf:type schema:Organization
63 Ne66d676807e34434b84ee1e7e512a626 schema:name dimensions_id
64 schema:value pub.1023985584
65 rdf:type schema:PropertyValue
66 Nec50d190127d422eabb86066c5bf852e rdf:first sg:person.016213172524.92
67 rdf:rest rdf:nil
68 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
69 schema:name Engineering
70 rdf:type schema:DefinedTerm
71 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
72 schema:name Materials Engineering
73 rdf:type schema:DefinedTerm
74 sg:journal.1037534 schema:issn 1672-6529
75 2543-2141
76 schema:name Journal of Bionic Engineering
77 rdf:type schema:Periodical
78 sg:person.014022651124.02 schema:affiliation https://www.grid.ac/institutes/grid.43555.32
79 schema:familyName Zhou
80 schema:givenName Zhi-guo
81 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014022651124.02
82 rdf:type schema:Person
83 sg:person.016213172524.92 schema:affiliation https://www.grid.ac/institutes/grid.43555.32
84 schema:familyName Liu
85 schema:givenName Zhi-wen
86 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016213172524.92
87 rdf:type schema:Person
88 sg:pub.10.1155/asp/2006/76593 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063205938
89 https://doi.org/10.1155/asp/2006/76593
90 rdf:type schema:CreativeWork
91 https://doi.org/10.1002/adma.200290020 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053174027
92 rdf:type schema:CreativeWork
93 https://doi.org/10.1016/0304-8853(95)00317-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022346917
94 rdf:type schema:CreativeWork
95 https://doi.org/10.1016/j.cocis.2005.07.002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1013825214
96 rdf:type schema:CreativeWork
97 https://doi.org/10.1016/j.mser.2003.12.001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1004508583
98 rdf:type schema:CreativeWork
99 https://doi.org/10.1016/s0074-7696(08)60812-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1042049515
100 rdf:type schema:CreativeWork
101 https://doi.org/10.1016/s0924-4247(01)00731-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1038041825
102 rdf:type schema:CreativeWork
103 https://doi.org/10.1016/s0924-4247(97)80224-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044277602
104 rdf:type schema:CreativeWork
105 https://doi.org/10.1016/s0924-4247(98)80053-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031789985
106 rdf:type schema:CreativeWork
107 https://doi.org/10.1021/la036332+ schema:sameAs https://app.dimensions.ai/details/publication/pub.1056146614
108 rdf:type schema:CreativeWork
109 https://doi.org/10.1021/nl070190c schema:sameAs https://app.dimensions.ai/details/publication/pub.1021075048
110 rdf:type schema:CreativeWork
111 https://doi.org/10.1039/b717681c schema:sameAs https://app.dimensions.ai/details/publication/pub.1038494867
112 rdf:type schema:CreativeWork
113 https://doi.org/10.1073/pnas.76.3.1506 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018858883
114 rdf:type schema:CreativeWork
115 https://doi.org/10.1088/0957-4484/15/5/017 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048074045
116 rdf:type schema:CreativeWork
117 https://doi.org/10.1088/0957-4484/17/4/013 schema:sameAs https://app.dimensions.ai/details/publication/pub.1015708442
118 rdf:type schema:CreativeWork
119 https://doi.org/10.1088/0960-1317/12/5/322 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006458244
120 rdf:type schema:CreativeWork
121 https://doi.org/10.1088/0964-1726/10/6/306 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003295109
122 rdf:type schema:CreativeWork
123 https://doi.org/10.1109/84.809064 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061240717
124 rdf:type schema:CreativeWork
125 https://doi.org/10.1109/84.925791 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061240828
126 rdf:type schema:CreativeWork
127 https://doi.org/10.1109/99.590852 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061251923
128 rdf:type schema:CreativeWork
129 https://doi.org/10.1109/jmems.2006.879373 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061290216
130 rdf:type schema:CreativeWork
131 https://doi.org/10.1557/jmr.1994.1174 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026179559
132 rdf:type schema:CreativeWork
133 https://www.grid.ac/institutes/grid.43555.32 schema:alternateName Beijing Institute of Technology
134 schema:name Department of Electronic Engineering, Beijing Institute of Technology, Beijing 100081, P. R. China
135 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...