Integration of a Cr–N Thin-Film Displacement Sensor into an XY Micro-stage for Closed-Loop Nano-positioning View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2019-04-06

AUTHORS

Keisuke Adachi, Hiraku Matsukuma, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki

ABSTRACT

N/A

References to SciGraph publications

  • 2009-12. Metrological atomic force microscope using a large range scanning dual stage in INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
  • 2014-10. Novel piezo driven motion amplified stage in INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
  • Journal

    TITLE

    Nanomanufacturing and Metrology

    ISSUE

    N/A

    VOLUME

    N/A

    Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/s41871-019-00040-8

    DOI

    http://dx.doi.org/10.1007/s41871-019-00040-8

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1113284151


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