Design and Verification of Micro/Nano-Probes for Coordinate Measuring Machines View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2019-03

AUTHORS

Kuang-Chao Fan, Rui-Jun Li, Peng Xu

ABSTRACT

Sensing devices, elastic mechanisms, and styli are three key components in the probe design of micro/nano-coordinate measuring machines (CMMs). A variety of probing systems have been developed worldwide. This paper presents a review of the development of micro-probes/nano-probes in recent years, along with those conducted in Hefei University of Technology. This study characterizes different probe designs. The elastic mechanisms of the probes based on leaf springs are developed. The stiffness model of typical elastic mechanisms is analyzed. The model is verified via simulation with ANSYS software. Eight probes based on different sensing principles are introduced. The performance and practicality of these probes are tested. Suggestions are provided for future challenges of micro-probes/nano-probes for CMMs. More... »

PAGES

1-15

References to SciGraph publications

  • 2010-08. A vibrating micro-scale CMM probe for measuring high aspect ratio structures in MICROSYSTEM TECHNOLOGIES
  • 2018-03. Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface in NANOMANUFACTURING AND METROLOGY
  • 2014-11. Development of a high precision coplanar stage by using miniature Michelson interferometer in INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
  • 2017-03. Ball Tips of Micro/Nano Probing Systems: A Review in CHINESE JOURNAL OF MECHANICAL ENGINEERING
  • 2010. Modelling the Interaction Forces between an Ideal Measurement Surface and the Stylus Tip of a Novel Vibrating Micro-scale CMM Probe in PRECISION ASSEMBLY TECHNOLOGIES AND SYSTEMS
  • 2018-03. Preface in NANOMANUFACTURING AND METROLOGY
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/s41871-018-0025-8

    DOI

    http://dx.doi.org/10.1007/s41871-018-0025-8

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1110065567


    Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
    Incoming Citations Browse incoming citations for this publication using opencitations.net

    JSON-LD is the canonical representation for SciGraph data.

    TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "about": [
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0903", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Biomedical Engineering", 
            "type": "DefinedTerm"
          }, 
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Engineering", 
            "type": "DefinedTerm"
          }
        ], 
        "author": [
          {
            "affiliation": {
              "alternateName": "Dalian University of Technology", 
              "id": "https://www.grid.ac/institutes/grid.30055.33", 
              "name": [
                "School of Instrument Science and Opto-electric Engineering, Hefei University of Technology, 230009, Hefei, China", 
                "School of Mechanical Engineering, Dalian University of Technology, 116024, Dalian, China"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Fan", 
            "givenName": "Kuang-Chao", 
            "id": "sg:person.012510343137.66", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012510343137.66"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Hefei University of Technology", 
              "id": "https://www.grid.ac/institutes/grid.256896.6", 
              "name": [
                "School of Instrument Science and Opto-electric Engineering, Hefei University of Technology, 230009, Hefei, China"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Li", 
            "givenName": "Rui-Jun", 
            "id": "sg:person.012601705353.06", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012601705353.06"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Hefei University of Technology", 
              "id": "https://www.grid.ac/institutes/grid.256896.6", 
              "name": [
                "School of Instrument Science and Opto-electric Engineering, Hefei University of Technology, 230009, Hefei, China"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Xu", 
            "givenName": "Peng", 
            "id": "sg:person.016215651721.18", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016215651721.18"
            ], 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "https://doi.org/10.1016/j.precisioneng.2015.08.001", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1002388336"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0960-1317/19/12/125005", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1005227799"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/19/6/064001", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1006314671"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.measurement.2012.02.002", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1006520724"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/27/2/025016", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1009758028"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0007-8506(07)62139-8", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1010177212"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.precisioneng.2005.07.004", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1013250737"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s00542-009-0967-2", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1014100749", 
              "https://doi.org/10.1007/s00542-009-0967-2"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s00542-009-0967-2", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1014100749", 
              "https://doi.org/10.1007/s00542-009-0967-2"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/20/8/084001", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1016040279"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/20/8/084001", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1016040279"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/22/9/094018", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1018339378"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.3390/app6030086", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1018788459"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0007-8506(07)62972-2", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1023575651"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/21/5/054002", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1023659164"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/21/5/054002", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1023659164"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.sna.2010.01.033", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1025342616"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0007-8506(07)63216-8", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1027997361"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0007-8506(07)62516-5", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1028525204"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1117/1.oe.51.8.081502", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1029230318"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0141-6359(98)00008-7", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1031796939"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.optcom.2013.05.034", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1032520410"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1117/1.oe.51.8.081503", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1035603969"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/18/7/006", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1035630830"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/18/2/s01", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1035698492"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/10/8/304", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1036456023"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/25/9/094008", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1036853063"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0007-8506(07)62141-6", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1038218454"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/18/2/s03", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1039825407"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0263-2241(98)00062-1", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1044707386"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.cirp.2010.03.036", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1044991864"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/16/11/001", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047539059"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/16/11/001", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047539059"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s12541-014-0588-2", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1048431401", 
              "https://doi.org/10.1007/s12541-014-0588-2"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1117/12.903980", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1051513881"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.optcom.2015.02.003", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1051913566"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-0233/19/8/084013", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1052605036"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/978-3-642-11598-1_15", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1053294023", 
              "https://doi.org/10.1007/978-3-642-11598-1_15"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/978-3-642-11598-1_15", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1053294023", 
              "https://doi.org/10.1007/978-3-642-11598-1_15"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jlt.2016.2614542", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061289428"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jsen.2012.2228849", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061322382"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1364/ol.36.004689", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1065231240"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1504/ijnm.2012.044656", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1067481494"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s10033-017-0082-8", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1084708142", 
              "https://doi.org/10.1007/s10033-017-0082-8"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s10033-017-0082-8", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1084708142", 
              "https://doi.org/10.1007/s10033-017-0082-8"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.3390/app7040403", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1084849202"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.precisioneng.2017.07.009", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1090911610"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.precisioneng.2017.09.005", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1091499188"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s41871-017-0002-7", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1093062653", 
              "https://doi.org/10.1007/s41871-017-0002-7"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s41871-018-0007-x", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1101834290", 
              "https://doi.org/10.1007/s41871-018-0007-x"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s41871-018-0007-x", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1101834290", 
              "https://doi.org/10.1007/s41871-018-0007-x"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s41871-018-0007-x", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1101834290", 
              "https://doi.org/10.1007/s41871-018-0007-x"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "datePublished": "2019-03", 
        "datePublishedReg": "2019-03-01", 
        "description": "Sensing devices, elastic mechanisms, and styli are three key components in the probe design of micro/nano-coordinate measuring machines (CMMs). A variety of probing systems have been developed worldwide. This paper presents a review of the development of micro-probes/nano-probes in recent years, along with those conducted in Hefei University of Technology. This study characterizes different probe designs. The elastic mechanisms of the probes based on leaf springs are developed. The stiffness model of typical elastic mechanisms is analyzed. The model is verified via simulation with ANSYS software. Eight probes based on different sensing principles are introduced. The performance and practicality of these probes are tested. Suggestions are provided for future challenges of micro-probes/nano-probes for CMMs.", 
        "genre": "research_article", 
        "id": "sg:pub.10.1007/s41871-018-0025-8", 
        "inLanguage": [
          "en"
        ], 
        "isAccessibleForFree": false, 
        "isPartOf": [
          {
            "id": "sg:journal.1301675", 
            "issn": [
              "2520-811X", 
              "2520-8128"
            ], 
            "name": "Nanomanufacturing and Metrology", 
            "type": "Periodical"
          }, 
          {
            "issueNumber": "1", 
            "type": "PublicationIssue"
          }, 
          {
            "type": "PublicationVolume", 
            "volumeNumber": "2"
          }
        ], 
        "name": "Design and Verification of Micro/Nano-Probes for Coordinate Measuring Machines", 
        "pagination": "1-15", 
        "productId": [
          {
            "name": "readcube_id", 
            "type": "PropertyValue", 
            "value": [
              "f343d5ff61e39e60506409253eb7089ddae8396134d2ca53e994bef8c118c560"
            ]
          }, 
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1007/s41871-018-0025-8"
            ]
          }, 
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1110065567"
            ]
          }
        ], 
        "sameAs": [
          "https://doi.org/10.1007/s41871-018-0025-8", 
          "https://app.dimensions.ai/details/publication/pub.1110065567"
        ], 
        "sdDataset": "articles", 
        "sdDatePublished": "2019-04-11T10:33", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000349_0000000349/records_113658_00000005.jsonl", 
        "type": "ScholarlyArticle", 
        "url": "https://link.springer.com/10.1007%2Fs41871-018-0025-8"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

    HOW TO GET THIS DATA PROGRAMMATICALLY:

    JSON-LD is a popular format for linked data which is fully compatible with JSON.

    curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s41871-018-0025-8'

    N-Triples is a line-based linked data format ideal for batch operations.

    curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s41871-018-0025-8'

    Turtle is a human-readable linked data format.

    curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s41871-018-0025-8'

    RDF/XML is a standard XML format for linked data.

    curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s41871-018-0025-8'


     

    This table displays all metadata directly associated to this object as RDF triples.

    217 TRIPLES      21 PREDICATES      71 URIs      19 LITERALS      7 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1007/s41871-018-0025-8 schema:about anzsrc-for:09
    2 anzsrc-for:0903
    3 schema:author N136bc16d0e8a44b793c21b534f54360a
    4 schema:citation sg:pub.10.1007/978-3-642-11598-1_15
    5 sg:pub.10.1007/s00542-009-0967-2
    6 sg:pub.10.1007/s10033-017-0082-8
    7 sg:pub.10.1007/s12541-014-0588-2
    8 sg:pub.10.1007/s41871-017-0002-7
    9 sg:pub.10.1007/s41871-018-0007-x
    10 https://doi.org/10.1016/j.cirp.2010.03.036
    11 https://doi.org/10.1016/j.measurement.2012.02.002
    12 https://doi.org/10.1016/j.optcom.2013.05.034
    13 https://doi.org/10.1016/j.optcom.2015.02.003
    14 https://doi.org/10.1016/j.precisioneng.2005.07.004
    15 https://doi.org/10.1016/j.precisioneng.2015.08.001
    16 https://doi.org/10.1016/j.precisioneng.2017.07.009
    17 https://doi.org/10.1016/j.precisioneng.2017.09.005
    18 https://doi.org/10.1016/j.sna.2010.01.033
    19 https://doi.org/10.1016/s0007-8506(07)62139-8
    20 https://doi.org/10.1016/s0007-8506(07)62141-6
    21 https://doi.org/10.1016/s0007-8506(07)62516-5
    22 https://doi.org/10.1016/s0007-8506(07)62972-2
    23 https://doi.org/10.1016/s0007-8506(07)63216-8
    24 https://doi.org/10.1016/s0141-6359(98)00008-7
    25 https://doi.org/10.1016/s0263-2241(98)00062-1
    26 https://doi.org/10.1088/0957-0233/10/8/304
    27 https://doi.org/10.1088/0957-0233/16/11/001
    28 https://doi.org/10.1088/0957-0233/18/2/s01
    29 https://doi.org/10.1088/0957-0233/18/2/s03
    30 https://doi.org/10.1088/0957-0233/18/7/006
    31 https://doi.org/10.1088/0957-0233/19/6/064001
    32 https://doi.org/10.1088/0957-0233/19/8/084013
    33 https://doi.org/10.1088/0957-0233/20/8/084001
    34 https://doi.org/10.1088/0957-0233/21/5/054002
    35 https://doi.org/10.1088/0957-0233/22/9/094018
    36 https://doi.org/10.1088/0957-0233/25/9/094008
    37 https://doi.org/10.1088/0957-0233/27/2/025016
    38 https://doi.org/10.1088/0960-1317/19/12/125005
    39 https://doi.org/10.1109/jlt.2016.2614542
    40 https://doi.org/10.1109/jsen.2012.2228849
    41 https://doi.org/10.1117/1.oe.51.8.081502
    42 https://doi.org/10.1117/1.oe.51.8.081503
    43 https://doi.org/10.1117/12.903980
    44 https://doi.org/10.1364/ol.36.004689
    45 https://doi.org/10.1504/ijnm.2012.044656
    46 https://doi.org/10.3390/app6030086
    47 https://doi.org/10.3390/app7040403
    48 schema:datePublished 2019-03
    49 schema:datePublishedReg 2019-03-01
    50 schema:description Sensing devices, elastic mechanisms, and styli are three key components in the probe design of micro/nano-coordinate measuring machines (CMMs). A variety of probing systems have been developed worldwide. This paper presents a review of the development of micro-probes/nano-probes in recent years, along with those conducted in Hefei University of Technology. This study characterizes different probe designs. The elastic mechanisms of the probes based on leaf springs are developed. The stiffness model of typical elastic mechanisms is analyzed. The model is verified via simulation with ANSYS software. Eight probes based on different sensing principles are introduced. The performance and practicality of these probes are tested. Suggestions are provided for future challenges of micro-probes/nano-probes for CMMs.
    51 schema:genre research_article
    52 schema:inLanguage en
    53 schema:isAccessibleForFree false
    54 schema:isPartOf N5ac61be1744248d38f0f9b16dfbd0528
    55 N93f4ceddb9e74e3fa13e83939b3dd7db
    56 sg:journal.1301675
    57 schema:name Design and Verification of Micro/Nano-Probes for Coordinate Measuring Machines
    58 schema:pagination 1-15
    59 schema:productId N9448bf14cc12439884508f751aa27805
    60 Na8770b5c9fc941caa14716e7b716d02b
    61 Ncd767c869955476fa0d067bdd5c8898f
    62 schema:sameAs https://app.dimensions.ai/details/publication/pub.1110065567
    63 https://doi.org/10.1007/s41871-018-0025-8
    64 schema:sdDatePublished 2019-04-11T10:33
    65 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    66 schema:sdPublisher Nb21d212674ad452bbc0324b296681d59
    67 schema:url https://link.springer.com/10.1007%2Fs41871-018-0025-8
    68 sgo:license sg:explorer/license/
    69 sgo:sdDataset articles
    70 rdf:type schema:ScholarlyArticle
    71 N136bc16d0e8a44b793c21b534f54360a rdf:first sg:person.012510343137.66
    72 rdf:rest Ndbee68e454d74869942b4108d808a4a6
    73 N5ac61be1744248d38f0f9b16dfbd0528 schema:issueNumber 1
    74 rdf:type schema:PublicationIssue
    75 N93f4ceddb9e74e3fa13e83939b3dd7db schema:volumeNumber 2
    76 rdf:type schema:PublicationVolume
    77 N9448bf14cc12439884508f751aa27805 schema:name readcube_id
    78 schema:value f343d5ff61e39e60506409253eb7089ddae8396134d2ca53e994bef8c118c560
    79 rdf:type schema:PropertyValue
    80 N9753db537a4e49b29fa00e0528f5924d rdf:first sg:person.016215651721.18
    81 rdf:rest rdf:nil
    82 Na8770b5c9fc941caa14716e7b716d02b schema:name dimensions_id
    83 schema:value pub.1110065567
    84 rdf:type schema:PropertyValue
    85 Nb21d212674ad452bbc0324b296681d59 schema:name Springer Nature - SN SciGraph project
    86 rdf:type schema:Organization
    87 Ncd767c869955476fa0d067bdd5c8898f schema:name doi
    88 schema:value 10.1007/s41871-018-0025-8
    89 rdf:type schema:PropertyValue
    90 Ndbee68e454d74869942b4108d808a4a6 rdf:first sg:person.012601705353.06
    91 rdf:rest N9753db537a4e49b29fa00e0528f5924d
    92 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
    93 schema:name Engineering
    94 rdf:type schema:DefinedTerm
    95 anzsrc-for:0903 schema:inDefinedTermSet anzsrc-for:
    96 schema:name Biomedical Engineering
    97 rdf:type schema:DefinedTerm
    98 sg:journal.1301675 schema:issn 2520-811X
    99 2520-8128
    100 schema:name Nanomanufacturing and Metrology
    101 rdf:type schema:Periodical
    102 sg:person.012510343137.66 schema:affiliation https://www.grid.ac/institutes/grid.30055.33
    103 schema:familyName Fan
    104 schema:givenName Kuang-Chao
    105 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012510343137.66
    106 rdf:type schema:Person
    107 sg:person.012601705353.06 schema:affiliation https://www.grid.ac/institutes/grid.256896.6
    108 schema:familyName Li
    109 schema:givenName Rui-Jun
    110 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012601705353.06
    111 rdf:type schema:Person
    112 sg:person.016215651721.18 schema:affiliation https://www.grid.ac/institutes/grid.256896.6
    113 schema:familyName Xu
    114 schema:givenName Peng
    115 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016215651721.18
    116 rdf:type schema:Person
    117 sg:pub.10.1007/978-3-642-11598-1_15 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053294023
    118 https://doi.org/10.1007/978-3-642-11598-1_15
    119 rdf:type schema:CreativeWork
    120 sg:pub.10.1007/s00542-009-0967-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014100749
    121 https://doi.org/10.1007/s00542-009-0967-2
    122 rdf:type schema:CreativeWork
    123 sg:pub.10.1007/s10033-017-0082-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1084708142
    124 https://doi.org/10.1007/s10033-017-0082-8
    125 rdf:type schema:CreativeWork
    126 sg:pub.10.1007/s12541-014-0588-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048431401
    127 https://doi.org/10.1007/s12541-014-0588-2
    128 rdf:type schema:CreativeWork
    129 sg:pub.10.1007/s41871-017-0002-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1093062653
    130 https://doi.org/10.1007/s41871-017-0002-7
    131 rdf:type schema:CreativeWork
    132 sg:pub.10.1007/s41871-018-0007-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1101834290
    133 https://doi.org/10.1007/s41871-018-0007-x
    134 rdf:type schema:CreativeWork
    135 https://doi.org/10.1016/j.cirp.2010.03.036 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044991864
    136 rdf:type schema:CreativeWork
    137 https://doi.org/10.1016/j.measurement.2012.02.002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006520724
    138 rdf:type schema:CreativeWork
    139 https://doi.org/10.1016/j.optcom.2013.05.034 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032520410
    140 rdf:type schema:CreativeWork
    141 https://doi.org/10.1016/j.optcom.2015.02.003 schema:sameAs https://app.dimensions.ai/details/publication/pub.1051913566
    142 rdf:type schema:CreativeWork
    143 https://doi.org/10.1016/j.precisioneng.2005.07.004 schema:sameAs https://app.dimensions.ai/details/publication/pub.1013250737
    144 rdf:type schema:CreativeWork
    145 https://doi.org/10.1016/j.precisioneng.2015.08.001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002388336
    146 rdf:type schema:CreativeWork
    147 https://doi.org/10.1016/j.precisioneng.2017.07.009 schema:sameAs https://app.dimensions.ai/details/publication/pub.1090911610
    148 rdf:type schema:CreativeWork
    149 https://doi.org/10.1016/j.precisioneng.2017.09.005 schema:sameAs https://app.dimensions.ai/details/publication/pub.1091499188
    150 rdf:type schema:CreativeWork
    151 https://doi.org/10.1016/j.sna.2010.01.033 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025342616
    152 rdf:type schema:CreativeWork
    153 https://doi.org/10.1016/s0007-8506(07)62139-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010177212
    154 rdf:type schema:CreativeWork
    155 https://doi.org/10.1016/s0007-8506(07)62141-6 schema:sameAs https://app.dimensions.ai/details/publication/pub.1038218454
    156 rdf:type schema:CreativeWork
    157 https://doi.org/10.1016/s0007-8506(07)62516-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028525204
    158 rdf:type schema:CreativeWork
    159 https://doi.org/10.1016/s0007-8506(07)62972-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023575651
    160 rdf:type schema:CreativeWork
    161 https://doi.org/10.1016/s0007-8506(07)63216-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027997361
    162 rdf:type schema:CreativeWork
    163 https://doi.org/10.1016/s0141-6359(98)00008-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031796939
    164 rdf:type schema:CreativeWork
    165 https://doi.org/10.1016/s0263-2241(98)00062-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044707386
    166 rdf:type schema:CreativeWork
    167 https://doi.org/10.1088/0957-0233/10/8/304 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036456023
    168 rdf:type schema:CreativeWork
    169 https://doi.org/10.1088/0957-0233/16/11/001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047539059
    170 rdf:type schema:CreativeWork
    171 https://doi.org/10.1088/0957-0233/18/2/s01 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035698492
    172 rdf:type schema:CreativeWork
    173 https://doi.org/10.1088/0957-0233/18/2/s03 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039825407
    174 rdf:type schema:CreativeWork
    175 https://doi.org/10.1088/0957-0233/18/7/006 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035630830
    176 rdf:type schema:CreativeWork
    177 https://doi.org/10.1088/0957-0233/19/6/064001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006314671
    178 rdf:type schema:CreativeWork
    179 https://doi.org/10.1088/0957-0233/19/8/084013 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052605036
    180 rdf:type schema:CreativeWork
    181 https://doi.org/10.1088/0957-0233/20/8/084001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016040279
    182 rdf:type schema:CreativeWork
    183 https://doi.org/10.1088/0957-0233/21/5/054002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023659164
    184 rdf:type schema:CreativeWork
    185 https://doi.org/10.1088/0957-0233/22/9/094018 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018339378
    186 rdf:type schema:CreativeWork
    187 https://doi.org/10.1088/0957-0233/25/9/094008 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036853063
    188 rdf:type schema:CreativeWork
    189 https://doi.org/10.1088/0957-0233/27/2/025016 schema:sameAs https://app.dimensions.ai/details/publication/pub.1009758028
    190 rdf:type schema:CreativeWork
    191 https://doi.org/10.1088/0960-1317/19/12/125005 schema:sameAs https://app.dimensions.ai/details/publication/pub.1005227799
    192 rdf:type schema:CreativeWork
    193 https://doi.org/10.1109/jlt.2016.2614542 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061289428
    194 rdf:type schema:CreativeWork
    195 https://doi.org/10.1109/jsen.2012.2228849 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061322382
    196 rdf:type schema:CreativeWork
    197 https://doi.org/10.1117/1.oe.51.8.081502 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029230318
    198 rdf:type schema:CreativeWork
    199 https://doi.org/10.1117/1.oe.51.8.081503 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035603969
    200 rdf:type schema:CreativeWork
    201 https://doi.org/10.1117/12.903980 schema:sameAs https://app.dimensions.ai/details/publication/pub.1051513881
    202 rdf:type schema:CreativeWork
    203 https://doi.org/10.1364/ol.36.004689 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065231240
    204 rdf:type schema:CreativeWork
    205 https://doi.org/10.1504/ijnm.2012.044656 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067481494
    206 rdf:type schema:CreativeWork
    207 https://doi.org/10.3390/app6030086 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018788459
    208 rdf:type schema:CreativeWork
    209 https://doi.org/10.3390/app7040403 schema:sameAs https://app.dimensions.ai/details/publication/pub.1084849202
    210 rdf:type schema:CreativeWork
    211 https://www.grid.ac/institutes/grid.256896.6 schema:alternateName Hefei University of Technology
    212 schema:name School of Instrument Science and Opto-electric Engineering, Hefei University of Technology, 230009, Hefei, China
    213 rdf:type schema:Organization
    214 https://www.grid.ac/institutes/grid.30055.33 schema:alternateName Dalian University of Technology
    215 schema:name School of Instrument Science and Opto-electric Engineering, Hefei University of Technology, 230009, Hefei, China
    216 School of Mechanical Engineering, Dalian University of Technology, 116024, Dalian, China
    217 rdf:type schema:Organization
     




    Preview window. Press ESC to close (or click here)


    ...