Design and Verification of Micro/Nano-Probes for Coordinate Measuring Machines View Full Text


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Article Info

DATE

2019-03

AUTHORS

Kuang-Chao Fan, Rui-Jun Li, Peng Xu

ABSTRACT

Sensing devices, elastic mechanisms, and styli are three key components in the probe design of micro/nano-coordinate measuring machines (CMMs). A variety of probing systems have been developed worldwide. This paper presents a review of the development of micro-probes/nano-probes in recent years, along with those conducted in Hefei University of Technology. This study characterizes different probe designs. The elastic mechanisms of the probes based on leaf springs are developed. The stiffness model of typical elastic mechanisms is analyzed. The model is verified via simulation with ANSYS software. Eight probes based on different sensing principles are introduced. The performance and practicality of these probes are tested. Suggestions are provided for future challenges of micro-probes/nano-probes for CMMs. More... »

PAGES

1-15

References to SciGraph publications

  • 2010-08. A vibrating micro-scale CMM probe for measuring high aspect ratio structures in MICROSYSTEM TECHNOLOGIES
  • 2018-03. Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface in NANOMANUFACTURING AND METROLOGY
  • 2014-11. Development of a high precision coplanar stage by using miniature Michelson interferometer in INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
  • 2017-03. Ball Tips of Micro/Nano Probing Systems: A Review in CHINESE JOURNAL OF MECHANICAL ENGINEERING
  • 2010. Modelling the Interaction Forces between an Ideal Measurement Surface and the Stylus Tip of a Novel Vibrating Micro-scale CMM Probe in PRECISION ASSEMBLY TECHNOLOGIES AND SYSTEMS
  • 2018-03. Preface in NANOMANUFACTURING AND METROLOGY
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/s41871-018-0025-8

    DOI

    http://dx.doi.org/10.1007/s41871-018-0025-8

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