Structural and morphological properties of ITO thin films grown by magnetron sputtering View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2015-12

AUTHORS

Z. Ghorannevis, E. Akbarnejad, M. Ghoranneviss

ABSTRACT

Physical properties of transparent and conducting indium tin oxide (ITO) thin films grown by radiofrequency (RF) magnetron sputtering are studied systematically by changing deposition time. The X-ray diffraction (XRD) data indicate polycrystalline thin films with grain orientations predominantly along the (2 2 2) and (4 0 0) directions. From atomic force microscopy (AFM) it is found that by increasing the deposition time, the roughness of the film increases. Scanning electron microscopy (SEM) images show a network of a high-porosity interconnected nanoparticles, which approximately have a pore size ranging between 20 and 30 nm. Optical measurements suggest an average transmission of 80 % for the ITO films. Sheet resistances are investigated using four-point probes, which imply that by increasing the film thickness the resistivities of the films decrease to 2.43 × 10−5 Ω cm. More... »

PAGES

285-290

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s40094-015-0187-3

DOI

http://dx.doi.org/10.1007/s40094-015-0187-3

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1028094452


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