Ontology type: schema:ScholarlyArticle Open Access: True
2015-12
AUTHORSZ. Ghorannevis, E. Akbarnejad, M. Ghoranneviss
ABSTRACTPhysical properties of transparent and conducting indium tin oxide (ITO) thin films grown by radiofrequency (RF) magnetron sputtering are studied systematically by changing deposition time. The X-ray diffraction (XRD) data indicate polycrystalline thin films with grain orientations predominantly along the (2 2 2) and (4 0 0) directions. From atomic force microscopy (AFM) it is found that by increasing the deposition time, the roughness of the film increases. Scanning electron microscopy (SEM) images show a network of a high-porosity interconnected nanoparticles, which approximately have a pore size ranging between 20 and 30 nm. Optical measurements suggest an average transmission of 80 % for the ITO films. Sheet resistances are investigated using four-point probes, which imply that by increasing the film thickness the resistivities of the films decrease to 2.43 × 10−5 Ω cm. More... »
PAGES285-290
http://scigraph.springernature.com/pub.10.1007/s40094-015-0187-3
DOIhttp://dx.doi.org/10.1007/s40094-015-0187-3
DIMENSIONShttps://app.dimensions.ai/details/publication/pub.1028094452
JSON-LD is the canonical representation for SciGraph data.
TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT
[
{
"@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json",
"about": [
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0299",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Other Physical Sciences",
"type": "DefinedTerm"
},
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Physical Sciences",
"type": "DefinedTerm"
}
],
"author": [
{
"affiliation": {
"alternateName": "Islamic Azad University , Karaj",
"id": "https://www.grid.ac/institutes/grid.411769.c",
"name": [
"Department of Physics, Karaj Branch, Islamic Azad University, Karaj, Iran"
],
"type": "Organization"
},
"familyName": "Ghorannevis",
"givenName": "Z.",
"id": "sg:person.013753445623.02",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013753445623.02"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Islamic Azad University, Science and Research Branch",
"id": "https://www.grid.ac/institutes/grid.472472.0",
"name": [
"Plasma Physics Research Centre, Science and Research Branch, Islamic Azad University, Tehran, Iran"
],
"type": "Organization"
},
"familyName": "Akbarnejad",
"givenName": "E.",
"id": "sg:person.015066200473.18",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015066200473.18"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Islamic Azad University, Science and Research Branch",
"id": "https://www.grid.ac/institutes/grid.472472.0",
"name": [
"Plasma Physics Research Centre, Science and Research Branch, Islamic Azad University, Tehran, Iran"
],
"type": "Organization"
},
"familyName": "Ghoranneviss",
"givenName": "M.",
"id": "sg:person.01175235121.92",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01175235121.92"
],
"type": "Person"
}
],
"citation": [
{
"id": "https://doi.org/10.1088/0268-1242/16/8/302",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1000187441"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.apsusc.2005.12.097",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1003751220"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0040-6090(99)00278-3",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1007646989"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.vacuum.2004.03.008",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1007686601"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.tsf.2004.11.186",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1013287913"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.apsusc.2007.11.063",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1015625879"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0022-3727/39/1/027",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1015711628"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0268-1242/23/7/075002",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1016949866"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.ceramint.2015.04.034",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1025329201"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s003390100740",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1030266665",
"https://doi.org/10.1007/s003390100740"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.tsf.2004.02.094",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1030547409"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0268-1242/21/12/043",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1031639972"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.apsusc.2010.10.119",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1035285291"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.apsusc.2005.02.115",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1036977310"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0040-6090(97)00513-0",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1037087946"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s00339-005-3252-y",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1042891800",
"https://doi.org/10.1007/s00339-005-3252-y"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.ceramint.2014.08.111",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1044380336"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.mssp.2015.04.051",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1046429771"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1002/(sici)1521-396x(200002)177:2<445::aid-pssa445>3.0.co;2-n",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1047188303"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0038-1098(03)00237-0",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1050081999"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0038-1098(03)00237-0",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1050081999"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1051/epjap:2005044",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1056959318"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1051/epjap:2005044",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1056959318"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.1318368",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057693938"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.1538335",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057717929"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.343022",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057950741"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0256-307x/25/4/059",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1059055532"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1116/1.579583",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1062189630"
],
"type": "CreativeWork"
}
],
"datePublished": "2015-12",
"datePublishedReg": "2015-12-01",
"description": "Physical properties of transparent and conducting indium tin oxide (ITO) thin films grown by radiofrequency (RF) magnetron sputtering are studied systematically by changing deposition time. The X-ray diffraction (XRD) data indicate polycrystalline thin films with grain orientations predominantly along the (2 2 2) and (4 0 0) directions. From atomic force microscopy (AFM) it is found that by increasing the deposition time, the roughness of the film increases. Scanning electron microscopy (SEM) images show a network of a high-porosity interconnected nanoparticles, which approximately have a pore size ranging between 20 and 30 nm. Optical measurements suggest an average transmission of 80 % for the ITO films. Sheet resistances are investigated using four-point probes, which imply that by increasing the film thickness the resistivities of the films decrease to 2.43 \u00d7 10\u22125 \u03a9 cm.",
"genre": "research_article",
"id": "sg:pub.10.1007/s40094-015-0187-3",
"inLanguage": [
"en"
],
"isAccessibleForFree": true,
"isPartOf": [
{
"id": "sg:journal.1136500",
"issn": [
"2251-7227",
"2251-7235"
],
"name": "Journal of Theoretical and Applied Physics",
"type": "Periodical"
},
{
"issueNumber": "4",
"type": "PublicationIssue"
},
{
"type": "PublicationVolume",
"volumeNumber": "9"
}
],
"name": "Structural and morphological properties of ITO thin films grown by magnetron sputtering",
"pagination": "285-290",
"productId": [
{
"name": "readcube_id",
"type": "PropertyValue",
"value": [
"85d56cb03a132f0d40a6cdb8717a54c0b4f9335738ae490e91922a6cb2d312c8"
]
},
{
"name": "doi",
"type": "PropertyValue",
"value": [
"10.1007/s40094-015-0187-3"
]
},
{
"name": "dimensions_id",
"type": "PropertyValue",
"value": [
"pub.1028094452"
]
}
],
"sameAs": [
"https://doi.org/10.1007/s40094-015-0187-3",
"https://app.dimensions.ai/details/publication/pub.1028094452"
],
"sdDataset": "articles",
"sdDatePublished": "2019-04-11T13:08",
"sdLicense": "https://scigraph.springernature.com/explorer/license/",
"sdPublisher": {
"name": "Springer Nature - SN SciGraph project",
"type": "Organization"
},
"sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000367_0000000367/records_88230_00000000.jsonl",
"type": "ScholarlyArticle",
"url": "http://link.springer.com/10.1007%2Fs40094-015-0187-3"
}
]Download the RDF metadata as: json-ld nt turtle xml License info
JSON-LD is a popular format for linked data which is fully compatible with JSON.
curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s40094-015-0187-3'
N-Triples is a line-based linked data format ideal for batch operations.
curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s40094-015-0187-3'
Turtle is a human-readable linked data format.
curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s40094-015-0187-3'
RDF/XML is a standard XML format for linked data.
curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s40094-015-0187-3'
This table displays all metadata directly associated to this object as RDF triples.
158 TRIPLES
21 PREDICATES
53 URIs
19 LITERALS
7 BLANK NODES