Ontology type: schema:ScholarlyArticle
2019-03
AUTHORSJungjae Park, Jong-Ahn Kim, Heulbi Ahn, Jaeseok Bae, Jonghan Jin
ABSTRACTThickness is a typical parameter related to length, of which measurements are conducted in various industrial fields, such as the automotive, aviation, ship-building, semiconductor, and display industries. Among various measurement techniques, optical interferometry is very attractive in terms of reliability owing to the direct realization of the metre. Moreover, the nature of this non-contact method is such that it does not damage samples. In this review, optical interferometric methods for measuring thicknesses of thick transparent layers are introduced through a discussion of basic principles and applications. With consideration of optical layouts and analysis methods of interference signals, monochromatic laser interferometry, low-coherence interferometry, and spectral interferometry are introduced and discussed in chapters 2, 3 and 4, respectively. With regard to spectral interferometry, the two different key technologies of spectrally resolved interferometry and wavelength-scanning interferometry are covered in different subsections of chapter 4. More... »
PAGES463-477
http://scigraph.springernature.com/pub.10.1007/s12541-019-00105-0
DOIhttp://dx.doi.org/10.1007/s12541-019-00105-0
DIMENSIONShttps://app.dimensions.ai/details/publication/pub.1112685402
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[
{
"@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json",
"about": [
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0299",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Other Physical Sciences",
"type": "DefinedTerm"
},
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Physical Sciences",
"type": "DefinedTerm"
}
],
"author": [
{
"affiliation": {
"alternateName": "Korea University of Science and Technology",
"id": "https://www.grid.ac/institutes/grid.412786.e",
"name": [
"Division of Physical Metrology, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, 34113, Daejeon, Republic of Korea",
"Department of Science of Measurement, Korea University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, 34113, Daejeon, Republic of Korea"
],
"type": "Organization"
},
"familyName": "Park",
"givenName": "Jungjae",
"type": "Person"
},
{
"affiliation": {
"alternateName": "Korea Research Institute of Standards and Science",
"id": "https://www.grid.ac/institutes/grid.410883.6",
"name": [
"Division of Physical Metrology, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, 34113, Daejeon, Republic of Korea"
],
"type": "Organization"
},
"familyName": "Kim",
"givenName": "Jong-Ahn",
"type": "Person"
},
{
"affiliation": {
"alternateName": "Korea University of Science and Technology",
"id": "https://www.grid.ac/institutes/grid.412786.e",
"name": [
"Department of Science of Measurement, Korea University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, 34113, Daejeon, Republic of Korea"
],
"type": "Organization"
},
"familyName": "Ahn",
"givenName": "Heulbi",
"type": "Person"
},
{
"affiliation": {
"alternateName": "Korea University of Science and Technology",
"id": "https://www.grid.ac/institutes/grid.412786.e",
"name": [
"Department of Science of Measurement, Korea University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, 34113, Daejeon, Republic of Korea"
],
"type": "Organization"
},
"familyName": "Bae",
"givenName": "Jaeseok",
"type": "Person"
},
{
"affiliation": {
"alternateName": "Korea University of Science and Technology",
"id": "https://www.grid.ac/institutes/grid.412786.e",
"name": [
"Division of Physical Metrology, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, 34113, Daejeon, Republic of Korea",
"Department of Science of Measurement, Korea University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, 34113, Daejeon, Republic of Korea"
],
"type": "Organization"
},
"familyName": "Jin",
"givenName": "Jonghan",
"type": "Person"
}
],
"citation": [
{
"id": "https://doi.org/10.1016/j.tsf.2013.10.158",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1000556355"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.23.022928",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1003569570"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s40684-016-0029-z",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1003629587",
"https://doi.org/10.1007/s40684-016-0029-z"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s40684-016-0029-z",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1003629587",
"https://doi.org/10.1007/s40684-016-0029-z"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s12541-014-0534-3",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1005486989",
"https://doi.org/10.1007/s12541-014-0534-3"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.22.027392",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1008464221"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.23.032941",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1008959026"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.optcom.2013.03.055",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1011890086"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.3807/josk.2014.18.3.236",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1014758381"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.23.032869",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1019322495"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1117/12.885173",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1019925879"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.expthermflusci.2010.05.004",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1022371746"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.tsf.2005.11.042",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1026177813"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1117/12.783503",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1026221742"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s10043-997-0507-1",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1028464404",
"https://doi.org/10.1007/s10043-997-0507-1"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s10043-997-0507-1",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1028464404",
"https://doi.org/10.1007/s10043-997-0507-1"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0957-0233/27/2/022001",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1029490233"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.expthermflusci.2012.08.013",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1038092106"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0161-6420(97)30307-8",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1038514916"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.23.004065",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1040801402"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1002/sia.2051",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1041524538"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s10043-000-0468-0",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1041721660",
"https://doi.org/10.1007/s10043-000-0468-0"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s10043-000-0468-0",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1041721660",
"https://doi.org/10.1007/s10043-000-0468-0"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s40684-015-0015-x",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1042828373",
"https://doi.org/10.1007/s40684-015-0015-x"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s00340-008-3093-4",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1044412294",
"https://doi.org/10.1007/s00340-008-3093-4"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s00340-008-3093-4",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1044412294",
"https://doi.org/10.1007/s00340-008-3093-4"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1117/12.436775",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1044879727"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0886-3350(01)01089-6",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1045478733"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0030-4018(01)01719-9",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1045938392"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0957-0233/15/8/017",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1048094358"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.optlastec.2004.11.020",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1048579671"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0040-6090(85)90190-7",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1051522138"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0040-6090(85)90190-7",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1051522138"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.22.023427",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1052225534"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.22.021145",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1052524477"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.1686039",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057761857"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.1770315",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057818866"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.2202916",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057846419"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.2752607",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057863764"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.2776015",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057866084"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1076/ceyr.16.3.214.15412",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1058249284"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1109/68.124892",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1061207136"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1109/lpt.2011.2155642",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1061371818"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1109/tim.2008.927208",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1061637775"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.12.001271",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065090255"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.29.003280",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065104893"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.30.002975",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065106078"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.31.006637",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065107373"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.34.007914",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065110585"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.39.002658",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065115179"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.39.004607",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065115413"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.41.001315",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065117074"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.42.003882",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065118277"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.43.001241",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065118829"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.44.000344",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065119528"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.44.005202",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065120113"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.45.004547",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065120974"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.46.003498",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065121957"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.48.000799",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065123787"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.48.002461",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065124094"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.50.000970",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065126486"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.53.001727",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065130310"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.53.004604",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065130695"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.54.007693",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065132516"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/josa.61.000351",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065152099"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/josa.69.001143",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065155010"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/jot.71.000847",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065179709"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.16.005516",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065187437"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.17.015104",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065191181"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.18.009429",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065193355"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.18.009429",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065193355"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.18.018339",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065194406"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.18.018339",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065194406"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.20.012184",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065200367"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.20.020078",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065201248"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ol.21.001942",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065217102"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ol.23.000966",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065218049"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ol.32.000647",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065224694"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ol.40.003169",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065237807"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.5860/choice.37-0379",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1073359918"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.precisioneng.2017.01.011",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1074203935"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.4983314",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1085510676"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.25.012689",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1085622478"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.3807/copp.2017.1.1.029",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1090108363"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1038/s41598-017-11825-6",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1091688655",
"https://doi.org/10.1038/s41598-017-11825-6"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.56.008592",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1092373869"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.precisioneng.2017.11.016",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1093138771"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s12541-017-0217-y",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1099704637",
"https://doi.org/10.1007/s12541-017-0217-y"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.optcom.2018.09.024",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1107127806"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1038/s41598-018-33728-w",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1107590511",
"https://doi.org/10.1038/s41598-018-33728-w"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.57.009722",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1109937631"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/ao.57.009722",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1109937631"
],
"type": "CreativeWork"
}
],
"datePublished": "2019-03",
"datePublishedReg": "2019-03-01",
"description": "Thickness is a typical parameter related to length, of which measurements are conducted in various industrial fields, such as the automotive, aviation, ship-building, semiconductor, and display industries. Among various measurement techniques, optical interferometry is very attractive in terms of reliability owing to the direct realization of the metre. Moreover, the nature of this non-contact method is such that it does not damage samples. In this review, optical interferometric methods for measuring thicknesses of thick transparent layers are introduced through a discussion of basic principles and applications. With consideration of optical layouts and analysis methods of interference signals, monochromatic laser interferometry, low-coherence interferometry, and spectral interferometry are introduced and discussed in chapters 2, 3 and 4, respectively. With regard to spectral interferometry, the two different key technologies of spectrally resolved interferometry and wavelength-scanning interferometry are covered in different subsections of chapter 4.",
"genre": "research_article",
"id": "sg:pub.10.1007/s12541-019-00105-0",
"inLanguage": [
"en"
],
"isAccessibleForFree": false,
"isPartOf": [
{
"id": "sg:journal.1135952",
"issn": [
"2234-7593",
"2005-4602"
],
"name": "International Journal of Precision Engineering and Manufacturing",
"type": "Periodical"
},
{
"issueNumber": "3",
"type": "PublicationIssue"
},
{
"type": "PublicationVolume",
"volumeNumber": "20"
}
],
"name": "A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry",
"pagination": "463-477",
"productId": [
{
"name": "readcube_id",
"type": "PropertyValue",
"value": [
"0ac640b7e83479de9b1e53bb8e696ca7a31988993dddb4f8b2c4ece4f7c05667"
]
},
{
"name": "doi",
"type": "PropertyValue",
"value": [
"10.1007/s12541-019-00105-0"
]
},
{
"name": "dimensions_id",
"type": "PropertyValue",
"value": [
"pub.1112685402"
]
}
],
"sameAs": [
"https://doi.org/10.1007/s12541-019-00105-0",
"https://app.dimensions.ai/details/publication/pub.1112685402"
],
"sdDataset": "articles",
"sdDatePublished": "2019-04-11T13:12",
"sdLicense": "https://scigraph.springernature.com/explorer/license/",
"sdPublisher": {
"name": "Springer Nature - SN SciGraph project",
"type": "Organization"
},
"sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000367_0000000367/records_88257_00000001.jsonl",
"type": "ScholarlyArticle",
"url": "https://link.springer.com/10.1007%2Fs12541-019-00105-0"
}
]Download the RDF metadata as: json-ld nt turtle xml License info
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349 TRIPLES
21 PREDICATES
111 URIs
19 LITERALS
7 BLANK NODES