Insight of surface treatments for CMOS compatibility of InAs nanowires View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2019-03

AUTHORS

Daya S. Dhungana, Anne Hemeryck, Nicolo Sartori, Pier-Francesco Fazzini, Filadelfo Cristiano, Sébastien R. Plissard

ABSTRACT

A CMOS compatible process is presented in order to grow self-catalyzed InAs nanowires on silicon by molecular beam epitaxy. The crucial step of this process is a new in-situ surface preparation under hydrogen (gas or plasma) during the substrate degassing combined with an in-situ arsenic annealing prior to growth. Morphological and structural characterizations of the InAs nanowires are presented and growth mechanisms are discussed in detail. The major influence of surface termination is exposed both experimentally and theoretically using statistics on ensemble of nanowires and density functional theory (DFT) calculations. The differences observed between Molecular Beam Epitaxy (MBE) and Metal Organic Vapor Phase Epitaxy (MOVPE) growth of InAs nanowires can be explained by these different surfaces terminations. The transition between a vapor solid (VS) and a vapor liquid solid (VLS) growth mechanism is presented. Optimized growth conditions lead to very high aspect ratio nanowires (up to 50 nm in diameter and 3 micron in length) without passing the 410 °C thermal limit, which makes the whole process CMOS compatible. Overall, our results suggest a new method for surface preparation and a possible tuning of the growth mechanism using different surface terminations. More... »

PAGES

581-586

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s12274-018-2257-8

DOI

http://dx.doi.org/10.1007/s12274-018-2257-8

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1110580611


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Chemistry (incl. Structural)", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "University of Toulouse", 
          "id": "https://www.grid.ac/institutes/grid.11417.32", 
          "name": [
            "CNRS, LAAS-CNRS, Universit\u00e9 de Toulouse, F-31400, Toulouse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Dhungana", 
        "givenName": "Daya S.", 
        "id": "sg:person.014705255115.46", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014705255115.46"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Toulouse", 
          "id": "https://www.grid.ac/institutes/grid.11417.32", 
          "name": [
            "CNRS, LAAS-CNRS, Universit\u00e9 de Toulouse, F-31400, Toulouse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Hemeryck", 
        "givenName": "Anne", 
        "id": "sg:person.0726561757.16", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0726561757.16"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Toulouse", 
          "id": "https://www.grid.ac/institutes/grid.11417.32", 
          "name": [
            "CNRS, LAAS-CNRS, Universit\u00e9 de Toulouse, F-31400, Toulouse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sartori", 
        "givenName": "Nicolo", 
        "id": "sg:person.016300216115.61", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016300216115.61"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire de Physique et Chimie des Nano-Objets", 
          "id": "https://www.grid.ac/institutes/grid.462768.9", 
          "name": [
            "LPCNO, INSA, Universit\u00e9 de Toulouse, Toulouse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Fazzini", 
        "givenName": "Pier-Francesco", 
        "id": "sg:person.01073570366.81", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01073570366.81"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Toulouse", 
          "id": "https://www.grid.ac/institutes/grid.11417.32", 
          "name": [
            "CNRS, LAAS-CNRS, Universit\u00e9 de Toulouse, F-31400, Toulouse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Cristiano", 
        "givenName": "Filadelfo", 
        "id": "sg:person.013047305553.51", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013047305553.51"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Toulouse", 
          "id": "https://www.grid.ac/institutes/grid.11417.32", 
          "name": [
            "CNRS, LAAS-CNRS, Universit\u00e9 de Toulouse, F-31400, Toulouse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Plissard", 
        "givenName": "S\u00e9bastien R.", 
        "id": "sg:person.0677026001.20", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0677026001.20"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1038/nature11293", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1000108558", 
          "https://doi.org/10.1038/nature11293"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jcrysgro.2014.03.011", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001490122"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1111/j.1365-2818.1988.tb01374.x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003487939"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(96)00722-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1012981019"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/23/23/235602", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014530649"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/21/38/385602", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015445089"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/21/38/385602", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015445089"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/nnano.2008.359", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018562089", 
          "https://doi.org/10.1038/nnano.2008.359"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/nnano.2009.234", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021066022", 
          "https://doi.org/10.1038/nnano.2009.234"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/nnano.2009.234", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021066022", 
          "https://doi.org/10.1038/nnano.2009.234"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/26/26/265302", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022845398"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/22/27/275602", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025362454"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/21/36/365602", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026379644"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/21/36/365602", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026379644"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/1361-6528/aa5252", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026418701"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/1361-6528/aa5252", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026418701"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/20/49/495606", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029919765"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/20/49/495606", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029919765"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jcrysgro.2014.07.034", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1031050900"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl203846g", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032020992"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl1041512", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032530344"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl1041512", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032530344"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jcrysgro.2016.12.026", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1034197818"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/22/42/425704", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037917545"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0304-3991(98)00035-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1038531199"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/24/22/225304", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1041534007"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1186/1556-276x-6-463", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047893290", 
          "https://doi.org/10.1186/1556-276x-6-463"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jcrysgro.2011.08.023", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048684311"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s1369-7021(06)71651-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1050797113"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/acs.cgd.5b00131", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055083189"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/acs.nanolett.5b02165", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055120832"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/acs.nanolett.5b02454", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055120870"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/acs.nanolett.6b01461", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055121509"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/cg400701w", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055396741"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl102308k", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056218127"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl102308k", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056218127"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl401404w", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056220099"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl402447h", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056220260"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl404376m", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056220548"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl504437v", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056221135"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl802398j", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056221530"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl802398j", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056221530"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl900191w", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056221820"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl900191w", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056221820"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.2837191", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057877761"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.3525610", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057967914"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.3558729", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057974163"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.4726037", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058052491"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.4868133", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058091126"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0957-4484/26/41/415604", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1059116990"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.34.6041", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060541354"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.34.6041", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060541354"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.36.7715", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060544464"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.36.7715", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060544464"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.39.1372", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060548991"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.39.1372", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060548991"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.82.035302", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060633181"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.82.035302", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060633181"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.30.3567", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063047302"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1039/c7ra01117b", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1084136484"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/jeds.2017.2787202", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1100093421"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2019-03", 
    "datePublishedReg": "2019-03-01", 
    "description": "A CMOS compatible process is presented in order to grow self-catalyzed InAs nanowires on silicon by molecular beam epitaxy. The crucial step of this process is a new in-situ surface preparation under hydrogen (gas or plasma) during the substrate degassing combined with an in-situ arsenic annealing prior to growth. Morphological and structural characterizations of the InAs nanowires are presented and growth mechanisms are discussed in detail. The major influence of surface termination is exposed both experimentally and theoretically using statistics on ensemble of nanowires and density functional theory (DFT) calculations. The differences observed between Molecular Beam Epitaxy (MBE) and Metal Organic Vapor Phase Epitaxy (MOVPE) growth of InAs nanowires can be explained by these different surfaces terminations. The transition between a vapor solid (VS) and a vapor liquid solid (VLS) growth mechanism is presented. Optimized growth conditions lead to very high aspect ratio nanowires (up to 50 nm in diameter and 3 micron in length) without passing the 410 \u00b0C thermal limit, which makes the whole process CMOS compatible. Overall, our results suggest a new method for surface preparation and a possible tuning of the growth mechanism using different surface terminations.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s12274-018-2257-8", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1042464", 
        "issn": [
          "1998-0124", 
          "1998-0000"
        ], 
        "name": "Nano Research", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "3", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "12"
      }
    ], 
    "name": "Insight of surface treatments for CMOS compatibility of InAs nanowires", 
    "pagination": "581-586", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "fc4bbe8299f276b69b65682bf50fe793c980648959d4a03ec481e361ed392c2c"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s12274-018-2257-8"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1110580611"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s12274-018-2257-8", 
      "https://app.dimensions.ai/details/publication/pub.1110580611"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T11:32", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000357_0000000357/records_99326_00000002.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://link.springer.com/10.1007%2Fs12274-018-2257-8"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s12274-018-2257-8'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s12274-018-2257-8'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s12274-018-2257-8'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s12274-018-2257-8'


 

This table displays all metadata directly associated to this object as RDF triples.

247 TRIPLES      21 PREDICATES      75 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s12274-018-2257-8 schema:about anzsrc-for:03
2 anzsrc-for:0306
3 schema:author Nb9ae11e7ca86447abda36e5036b4a219
4 schema:citation sg:pub.10.1038/nature11293
5 sg:pub.10.1038/nnano.2008.359
6 sg:pub.10.1038/nnano.2009.234
7 sg:pub.10.1186/1556-276x-6-463
8 https://doi.org/10.1016/0039-6028(96)00722-4
9 https://doi.org/10.1016/j.jcrysgro.2011.08.023
10 https://doi.org/10.1016/j.jcrysgro.2014.03.011
11 https://doi.org/10.1016/j.jcrysgro.2014.07.034
12 https://doi.org/10.1016/j.jcrysgro.2016.12.026
13 https://doi.org/10.1016/s0304-3991(98)00035-7
14 https://doi.org/10.1016/s1369-7021(06)71651-0
15 https://doi.org/10.1021/acs.cgd.5b00131
16 https://doi.org/10.1021/acs.nanolett.5b02165
17 https://doi.org/10.1021/acs.nanolett.5b02454
18 https://doi.org/10.1021/acs.nanolett.6b01461
19 https://doi.org/10.1021/cg400701w
20 https://doi.org/10.1021/nl102308k
21 https://doi.org/10.1021/nl1041512
22 https://doi.org/10.1021/nl203846g
23 https://doi.org/10.1021/nl401404w
24 https://doi.org/10.1021/nl402447h
25 https://doi.org/10.1021/nl404376m
26 https://doi.org/10.1021/nl504437v
27 https://doi.org/10.1021/nl802398j
28 https://doi.org/10.1021/nl900191w
29 https://doi.org/10.1039/c7ra01117b
30 https://doi.org/10.1063/1.2837191
31 https://doi.org/10.1063/1.3525610
32 https://doi.org/10.1063/1.3558729
33 https://doi.org/10.1063/1.4726037
34 https://doi.org/10.1063/1.4868133
35 https://doi.org/10.1088/0957-4484/20/49/495606
36 https://doi.org/10.1088/0957-4484/21/36/365602
37 https://doi.org/10.1088/0957-4484/21/38/385602
38 https://doi.org/10.1088/0957-4484/22/27/275602
39 https://doi.org/10.1088/0957-4484/22/42/425704
40 https://doi.org/10.1088/0957-4484/23/23/235602
41 https://doi.org/10.1088/0957-4484/24/22/225304
42 https://doi.org/10.1088/0957-4484/26/26/265302
43 https://doi.org/10.1088/0957-4484/26/41/415604
44 https://doi.org/10.1088/1361-6528/aa5252
45 https://doi.org/10.1103/physrevb.34.6041
46 https://doi.org/10.1103/physrevb.36.7715
47 https://doi.org/10.1103/physrevb.39.1372
48 https://doi.org/10.1103/physrevb.82.035302
49 https://doi.org/10.1109/jeds.2017.2787202
50 https://doi.org/10.1111/j.1365-2818.1988.tb01374.x
51 https://doi.org/10.1143/jjap.30.3567
52 schema:datePublished 2019-03
53 schema:datePublishedReg 2019-03-01
54 schema:description A CMOS compatible process is presented in order to grow self-catalyzed InAs nanowires on silicon by molecular beam epitaxy. The crucial step of this process is a new in-situ surface preparation under hydrogen (gas or plasma) during the substrate degassing combined with an in-situ arsenic annealing prior to growth. Morphological and structural characterizations of the InAs nanowires are presented and growth mechanisms are discussed in detail. The major influence of surface termination is exposed both experimentally and theoretically using statistics on ensemble of nanowires and density functional theory (DFT) calculations. The differences observed between Molecular Beam Epitaxy (MBE) and Metal Organic Vapor Phase Epitaxy (MOVPE) growth of InAs nanowires can be explained by these different surfaces terminations. The transition between a vapor solid (VS) and a vapor liquid solid (VLS) growth mechanism is presented. Optimized growth conditions lead to very high aspect ratio nanowires (up to 50 nm in diameter and 3 micron in length) without passing the 410 °C thermal limit, which makes the whole process CMOS compatible. Overall, our results suggest a new method for surface preparation and a possible tuning of the growth mechanism using different surface terminations.
55 schema:genre research_article
56 schema:inLanguage en
57 schema:isAccessibleForFree false
58 schema:isPartOf N34918e2166654248b0f115f5df37556b
59 N5c936871cdde44b78441c80a17bf27c5
60 sg:journal.1042464
61 schema:name Insight of surface treatments for CMOS compatibility of InAs nanowires
62 schema:pagination 581-586
63 schema:productId N0a11677000a14a49ac4091469c6e31ef
64 N4af5981816d94c6087670df8d4829065
65 Nbc57aa55996d48be962f3487649eb710
66 schema:sameAs https://app.dimensions.ai/details/publication/pub.1110580611
67 https://doi.org/10.1007/s12274-018-2257-8
68 schema:sdDatePublished 2019-04-11T11:32
69 schema:sdLicense https://scigraph.springernature.com/explorer/license/
70 schema:sdPublisher N54488b75658d40779697fc8a6d2bc9a3
71 schema:url https://link.springer.com/10.1007%2Fs12274-018-2257-8
72 sgo:license sg:explorer/license/
73 sgo:sdDataset articles
74 rdf:type schema:ScholarlyArticle
75 N0a11677000a14a49ac4091469c6e31ef schema:name readcube_id
76 schema:value fc4bbe8299f276b69b65682bf50fe793c980648959d4a03ec481e361ed392c2c
77 rdf:type schema:PropertyValue
78 N34918e2166654248b0f115f5df37556b schema:issueNumber 3
79 rdf:type schema:PublicationIssue
80 N4af5981816d94c6087670df8d4829065 schema:name dimensions_id
81 schema:value pub.1110580611
82 rdf:type schema:PropertyValue
83 N5165ec844d9e49299f4334ad4399fc2a rdf:first sg:person.013047305553.51
84 rdf:rest Nd56f55f9d71e446dabd5ece374b9f658
85 N54488b75658d40779697fc8a6d2bc9a3 schema:name Springer Nature - SN SciGraph project
86 rdf:type schema:Organization
87 N5c936871cdde44b78441c80a17bf27c5 schema:volumeNumber 12
88 rdf:type schema:PublicationVolume
89 N82bbe6748ef54af6b5dcbdc68e45c7e4 rdf:first sg:person.01073570366.81
90 rdf:rest N5165ec844d9e49299f4334ad4399fc2a
91 N98ea31d682894863bc6953c2b977645f rdf:first sg:person.016300216115.61
92 rdf:rest N82bbe6748ef54af6b5dcbdc68e45c7e4
93 Nb9ae11e7ca86447abda36e5036b4a219 rdf:first sg:person.014705255115.46
94 rdf:rest Nedd310bbf2ab4202b71ab14f903154b0
95 Nbc57aa55996d48be962f3487649eb710 schema:name doi
96 schema:value 10.1007/s12274-018-2257-8
97 rdf:type schema:PropertyValue
98 Nd56f55f9d71e446dabd5ece374b9f658 rdf:first sg:person.0677026001.20
99 rdf:rest rdf:nil
100 Nedd310bbf2ab4202b71ab14f903154b0 rdf:first sg:person.0726561757.16
101 rdf:rest N98ea31d682894863bc6953c2b977645f
102 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
103 schema:name Chemical Sciences
104 rdf:type schema:DefinedTerm
105 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
106 schema:name Physical Chemistry (incl. Structural)
107 rdf:type schema:DefinedTerm
108 sg:journal.1042464 schema:issn 1998-0000
109 1998-0124
110 schema:name Nano Research
111 rdf:type schema:Periodical
112 sg:person.01073570366.81 schema:affiliation https://www.grid.ac/institutes/grid.462768.9
113 schema:familyName Fazzini
114 schema:givenName Pier-Francesco
115 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01073570366.81
116 rdf:type schema:Person
117 sg:person.013047305553.51 schema:affiliation https://www.grid.ac/institutes/grid.11417.32
118 schema:familyName Cristiano
119 schema:givenName Filadelfo
120 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013047305553.51
121 rdf:type schema:Person
122 sg:person.014705255115.46 schema:affiliation https://www.grid.ac/institutes/grid.11417.32
123 schema:familyName Dhungana
124 schema:givenName Daya S.
125 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014705255115.46
126 rdf:type schema:Person
127 sg:person.016300216115.61 schema:affiliation https://www.grid.ac/institutes/grid.11417.32
128 schema:familyName Sartori
129 schema:givenName Nicolo
130 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016300216115.61
131 rdf:type schema:Person
132 sg:person.0677026001.20 schema:affiliation https://www.grid.ac/institutes/grid.11417.32
133 schema:familyName Plissard
134 schema:givenName Sébastien R.
135 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0677026001.20
136 rdf:type schema:Person
137 sg:person.0726561757.16 schema:affiliation https://www.grid.ac/institutes/grid.11417.32
138 schema:familyName Hemeryck
139 schema:givenName Anne
140 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0726561757.16
141 rdf:type schema:Person
142 sg:pub.10.1038/nature11293 schema:sameAs https://app.dimensions.ai/details/publication/pub.1000108558
143 https://doi.org/10.1038/nature11293
144 rdf:type schema:CreativeWork
145 sg:pub.10.1038/nnano.2008.359 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018562089
146 https://doi.org/10.1038/nnano.2008.359
147 rdf:type schema:CreativeWork
148 sg:pub.10.1038/nnano.2009.234 schema:sameAs https://app.dimensions.ai/details/publication/pub.1021066022
149 https://doi.org/10.1038/nnano.2009.234
150 rdf:type schema:CreativeWork
151 sg:pub.10.1186/1556-276x-6-463 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047893290
152 https://doi.org/10.1186/1556-276x-6-463
153 rdf:type schema:CreativeWork
154 https://doi.org/10.1016/0039-6028(96)00722-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012981019
155 rdf:type schema:CreativeWork
156 https://doi.org/10.1016/j.jcrysgro.2011.08.023 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048684311
157 rdf:type schema:CreativeWork
158 https://doi.org/10.1016/j.jcrysgro.2014.03.011 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001490122
159 rdf:type schema:CreativeWork
160 https://doi.org/10.1016/j.jcrysgro.2014.07.034 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031050900
161 rdf:type schema:CreativeWork
162 https://doi.org/10.1016/j.jcrysgro.2016.12.026 schema:sameAs https://app.dimensions.ai/details/publication/pub.1034197818
163 rdf:type schema:CreativeWork
164 https://doi.org/10.1016/s0304-3991(98)00035-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1038531199
165 rdf:type schema:CreativeWork
166 https://doi.org/10.1016/s1369-7021(06)71651-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1050797113
167 rdf:type schema:CreativeWork
168 https://doi.org/10.1021/acs.cgd.5b00131 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055083189
169 rdf:type schema:CreativeWork
170 https://doi.org/10.1021/acs.nanolett.5b02165 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055120832
171 rdf:type schema:CreativeWork
172 https://doi.org/10.1021/acs.nanolett.5b02454 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055120870
173 rdf:type schema:CreativeWork
174 https://doi.org/10.1021/acs.nanolett.6b01461 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055121509
175 rdf:type schema:CreativeWork
176 https://doi.org/10.1021/cg400701w schema:sameAs https://app.dimensions.ai/details/publication/pub.1055396741
177 rdf:type schema:CreativeWork
178 https://doi.org/10.1021/nl102308k schema:sameAs https://app.dimensions.ai/details/publication/pub.1056218127
179 rdf:type schema:CreativeWork
180 https://doi.org/10.1021/nl1041512 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032530344
181 rdf:type schema:CreativeWork
182 https://doi.org/10.1021/nl203846g schema:sameAs https://app.dimensions.ai/details/publication/pub.1032020992
183 rdf:type schema:CreativeWork
184 https://doi.org/10.1021/nl401404w schema:sameAs https://app.dimensions.ai/details/publication/pub.1056220099
185 rdf:type schema:CreativeWork
186 https://doi.org/10.1021/nl402447h schema:sameAs https://app.dimensions.ai/details/publication/pub.1056220260
187 rdf:type schema:CreativeWork
188 https://doi.org/10.1021/nl404376m schema:sameAs https://app.dimensions.ai/details/publication/pub.1056220548
189 rdf:type schema:CreativeWork
190 https://doi.org/10.1021/nl504437v schema:sameAs https://app.dimensions.ai/details/publication/pub.1056221135
191 rdf:type schema:CreativeWork
192 https://doi.org/10.1021/nl802398j schema:sameAs https://app.dimensions.ai/details/publication/pub.1056221530
193 rdf:type schema:CreativeWork
194 https://doi.org/10.1021/nl900191w schema:sameAs https://app.dimensions.ai/details/publication/pub.1056221820
195 rdf:type schema:CreativeWork
196 https://doi.org/10.1039/c7ra01117b schema:sameAs https://app.dimensions.ai/details/publication/pub.1084136484
197 rdf:type schema:CreativeWork
198 https://doi.org/10.1063/1.2837191 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057877761
199 rdf:type schema:CreativeWork
200 https://doi.org/10.1063/1.3525610 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057967914
201 rdf:type schema:CreativeWork
202 https://doi.org/10.1063/1.3558729 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057974163
203 rdf:type schema:CreativeWork
204 https://doi.org/10.1063/1.4726037 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058052491
205 rdf:type schema:CreativeWork
206 https://doi.org/10.1063/1.4868133 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058091126
207 rdf:type schema:CreativeWork
208 https://doi.org/10.1088/0957-4484/20/49/495606 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029919765
209 rdf:type schema:CreativeWork
210 https://doi.org/10.1088/0957-4484/21/36/365602 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026379644
211 rdf:type schema:CreativeWork
212 https://doi.org/10.1088/0957-4484/21/38/385602 schema:sameAs https://app.dimensions.ai/details/publication/pub.1015445089
213 rdf:type schema:CreativeWork
214 https://doi.org/10.1088/0957-4484/22/27/275602 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025362454
215 rdf:type schema:CreativeWork
216 https://doi.org/10.1088/0957-4484/22/42/425704 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037917545
217 rdf:type schema:CreativeWork
218 https://doi.org/10.1088/0957-4484/23/23/235602 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014530649
219 rdf:type schema:CreativeWork
220 https://doi.org/10.1088/0957-4484/24/22/225304 schema:sameAs https://app.dimensions.ai/details/publication/pub.1041534007
221 rdf:type schema:CreativeWork
222 https://doi.org/10.1088/0957-4484/26/26/265302 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022845398
223 rdf:type schema:CreativeWork
224 https://doi.org/10.1088/0957-4484/26/41/415604 schema:sameAs https://app.dimensions.ai/details/publication/pub.1059116990
225 rdf:type schema:CreativeWork
226 https://doi.org/10.1088/1361-6528/aa5252 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026418701
227 rdf:type schema:CreativeWork
228 https://doi.org/10.1103/physrevb.34.6041 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060541354
229 rdf:type schema:CreativeWork
230 https://doi.org/10.1103/physrevb.36.7715 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060544464
231 rdf:type schema:CreativeWork
232 https://doi.org/10.1103/physrevb.39.1372 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060548991
233 rdf:type schema:CreativeWork
234 https://doi.org/10.1103/physrevb.82.035302 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060633181
235 rdf:type schema:CreativeWork
236 https://doi.org/10.1109/jeds.2017.2787202 schema:sameAs https://app.dimensions.ai/details/publication/pub.1100093421
237 rdf:type schema:CreativeWork
238 https://doi.org/10.1111/j.1365-2818.1988.tb01374.x schema:sameAs https://app.dimensions.ai/details/publication/pub.1003487939
239 rdf:type schema:CreativeWork
240 https://doi.org/10.1143/jjap.30.3567 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063047302
241 rdf:type schema:CreativeWork
242 https://www.grid.ac/institutes/grid.11417.32 schema:alternateName University of Toulouse
243 schema:name CNRS, LAAS-CNRS, Université de Toulouse, F-31400, Toulouse, France
244 rdf:type schema:Organization
245 https://www.grid.ac/institutes/grid.462768.9 schema:alternateName Laboratoire de Physique et Chimie des Nano-Objets
246 schema:name LPCNO, INSA, Université de Toulouse, Toulouse, France
247 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...