Depth-detection methods for microgripper based CNT manipulation in a scanning electron microscope View Full Text


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Article Info

DATE

2008-11

AUTHORS

Volkmar Eichhorn, Sergej Fatikow, Thomas Wich, Christian Dahmen, Torsten Sievers, Karin Nordström Andersen, Kenneth Carlson, Peter Bøggild

ABSTRACT

Current research work on the development of different depth-detection methods for supporting pick-and-place manipulations of carbon nanotubes (CNTs) in a scanning electron microscope (SEM) is presented. A nanorobot station capable of performing this manipulation task in the SEM’s vacuum chamber has been developed, consisting of two cooperating nanorobots. One robot carries an electrothermal microgripper and also performs the coarse approach between microgripper and CNT. The second robot serves as sample holder and realizes the fine positioning of the CNT sample. For a reliable fine approach between microgripper and CNT as well as an intended future automation of handling tasks, depth-detection methods are required in order to precisely measure and align the z-position of microgripper and CNT. Two different methods for z-position estimation are proposed. The depth from focus method uses the focusing information of SEM images whereas the touchdown sensor concept relies on a bimorph piezo bending actuator. The feasibility of both approaches is shown and first experimental results are discussed. Future work has to show how the proposed methods will increase the efficiency of nanorobotic manipulation and how these methods can advance the automation of nanohandling tasks. More... »

PAGES

27-36

References to SciGraph publications

  • 1991-11. Helical microtubules of graphitic carbon in NATURE
  • 1998-02. Edge and Depth from Focus in INTERNATIONAL JOURNAL OF COMPUTER VISION
  • 2003-12. Microscopic vision system with all-in-focus and depth images in MACHINE VISION AND APPLICATIONS
  • 1998. Scanning Electron Microscopy, Physics of Image Formation and Microanalysis in NONE
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    http://scigraph.springernature.com/pub.10.1007/s12213-008-0001-2

    DOI

    http://dx.doi.org/10.1007/s12213-008-0001-2

    DIMENSIONS

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