Design and fabrication of a scanning electron microscope using a finite element analysis for electron optical system View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2008-09

AUTHORS

Man-Jin Park, Dong Hwan Kim, Keun Park, Dong Young Jang, Dong-Chul Han

ABSTRACT

In this paper, we describe the design and fabrication of a thermionic scanning electron microscope (SEM) and examine its characteristics analytically. In the design process, the dimensions and capacity of the SEM components, such as the electron column, lenses, and apertures, were determined using finite element analysis. All components were integrated systematically during fabrication in order to achieve the maximum performance by adjusting the lens parameters, high voltage source, and image calibration methods. As a result, a thermionic SEM image with high resolution was achieved. We discuss the primary considerations required to achieve a high-performance image. More... »

PAGES

1734-1746

References to SciGraph publications

  • 1982. Magnetic Electron Lenses in NONE
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/s12206-008-0317-9

    DOI

    http://dx.doi.org/10.1007/s12206-008-0317-9

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1001174303


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    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "about": [
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Materials Engineering", 
            "type": "DefinedTerm"
          }, 
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Engineering", 
            "type": "DefinedTerm"
          }
        ], 
        "author": [
          {
            "affiliation": {
              "alternateName": "Seoul National University", 
              "id": "https://www.grid.ac/institutes/grid.31501.36", 
              "name": [
                "School of Mechanical and Aerospace Engineering, Seoul National University, Shinlim-Dong San 56-1, 151-742, Seoul, Korea"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Park", 
            "givenName": "Man-Jin", 
            "id": "sg:person.016166236040.47", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016166236040.47"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Seoul National University of Science and Technology", 
              "id": "https://www.grid.ac/institutes/grid.412485.e", 
              "name": [
                "School of Mechanical Design and Automation Engineering, Seoul National University of Technology, 172 Gongreung-dong, Nowon-gu, 139-743, Seoul, Korea"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Kim", 
            "givenName": "Dong Hwan", 
            "id": "sg:person.014246433163.60", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014246433163.60"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Seoul National University of Science and Technology", 
              "id": "https://www.grid.ac/institutes/grid.412485.e", 
              "name": [
                "School of Mechanical Design and Automation Engineering, Seoul National University of Technology, 172 Gongreung-dong, Nowon-gu, 139-743, Seoul, Korea"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Park", 
            "givenName": "Keun", 
            "id": "sg:person.014727474357.65", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014727474357.65"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Seoul National University of Science and Technology", 
              "id": "https://www.grid.ac/institutes/grid.412485.e", 
              "name": [
                "Department of Industrial Information and System Engineering, Seoul National University of Technology, 172 Gongreung-dong, Nowon-gu, 139-743, Seoul, Korea"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Jang", 
            "givenName": "Dong Young", 
            "id": "sg:person.01241175735.20", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01241175735.20"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Seoul National University", 
              "id": "https://www.grid.ac/institutes/grid.31501.36", 
              "name": [
                "School of Mechanical and Aerospace Engineering, Seoul National University, Shinlim-Dong San 56-1, 151-742, Seoul, Korea"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Han", 
            "givenName": "Dong-Chul", 
            "id": "sg:person.014751104554.20", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014751104554.20"
            ], 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "https://doi.org/10.1016/s0304-3991(02)00289-9", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1012708809"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.micron.2006.06.008", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1017740398"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0168-9002(98)01511-3", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1018821079"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.mee.2004.12.092", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1043226470"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/978-3-642-81516-4", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047778156", 
              "https://doi.org/10.1007/978-3-642-81516-4"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/978-3-642-81516-4", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047778156", 
              "https://doi.org/10.1007/978-3-642-81516-4"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1683435", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057759018"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1116/1.588668", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1062198715"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "datePublished": "2008-09", 
        "datePublishedReg": "2008-09-01", 
        "description": "In this paper, we describe the design and fabrication of a thermionic scanning electron microscope (SEM) and examine its characteristics analytically. In the design process, the dimensions and capacity of the SEM components, such as the electron column, lenses, and apertures, were determined using finite element analysis. All components were integrated systematically during fabrication in order to achieve the maximum performance by adjusting the lens parameters, high voltage source, and image calibration methods. As a result, a thermionic SEM image with high resolution was achieved. We discuss the primary considerations required to achieve a high-performance image.", 
        "genre": "research_article", 
        "id": "sg:pub.10.1007/s12206-008-0317-9", 
        "inLanguage": [
          "en"
        ], 
        "isAccessibleForFree": false, 
        "isPartOf": [
          {
            "id": "sg:journal.1295111", 
            "issn": [
              "1011-8861", 
              "1226-4865"
            ], 
            "name": "Journal of Mechanical Science and Technology", 
            "type": "Periodical"
          }, 
          {
            "issueNumber": "9", 
            "type": "PublicationIssue"
          }, 
          {
            "type": "PublicationVolume", 
            "volumeNumber": "22"
          }
        ], 
        "name": "Design and fabrication of a scanning electron microscope using a finite element analysis for electron optical system", 
        "pagination": "1734-1746", 
        "productId": [
          {
            "name": "readcube_id", 
            "type": "PropertyValue", 
            "value": [
              "0598261426b8b601f1fbefa5438c907203f078b73e37b6b85fbeebae2e36fa75"
            ]
          }, 
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1007/s12206-008-0317-9"
            ]
          }, 
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1001174303"
            ]
          }
        ], 
        "sameAs": [
          "https://doi.org/10.1007/s12206-008-0317-9", 
          "https://app.dimensions.ai/details/publication/pub.1001174303"
        ], 
        "sdDataset": "articles", 
        "sdDatePublished": "2019-04-11T00:17", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8695_00000519.jsonl", 
        "type": "ScholarlyArticle", 
        "url": "http://link.springer.com/10.1007%2Fs12206-008-0317-9"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

    HOW TO GET THIS DATA PROGRAMMATICALLY:

    JSON-LD is a popular format for linked data which is fully compatible with JSON.

    curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s12206-008-0317-9'

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    curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s12206-008-0317-9'


     

    This table displays all metadata directly associated to this object as RDF triples.

    115 TRIPLES      21 PREDICATES      34 URIs      19 LITERALS      7 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1007/s12206-008-0317-9 schema:about anzsrc-for:09
    2 anzsrc-for:0912
    3 schema:author Na2962bfd386743f18eb108ebde12ea24
    4 schema:citation sg:pub.10.1007/978-3-642-81516-4
    5 https://doi.org/10.1016/j.mee.2004.12.092
    6 https://doi.org/10.1016/j.micron.2006.06.008
    7 https://doi.org/10.1016/s0168-9002(98)01511-3
    8 https://doi.org/10.1016/s0304-3991(02)00289-9
    9 https://doi.org/10.1063/1.1683435
    10 https://doi.org/10.1116/1.588668
    11 schema:datePublished 2008-09
    12 schema:datePublishedReg 2008-09-01
    13 schema:description In this paper, we describe the design and fabrication of a thermionic scanning electron microscope (SEM) and examine its characteristics analytically. In the design process, the dimensions and capacity of the SEM components, such as the electron column, lenses, and apertures, were determined using finite element analysis. All components were integrated systematically during fabrication in order to achieve the maximum performance by adjusting the lens parameters, high voltage source, and image calibration methods. As a result, a thermionic SEM image with high resolution was achieved. We discuss the primary considerations required to achieve a high-performance image.
    14 schema:genre research_article
    15 schema:inLanguage en
    16 schema:isAccessibleForFree false
    17 schema:isPartOf N1391ed206035453c8e47a97c76dc25d3
    18 N4dd2e83ffe274fad8eed526cc65ca823
    19 sg:journal.1295111
    20 schema:name Design and fabrication of a scanning electron microscope using a finite element analysis for electron optical system
    21 schema:pagination 1734-1746
    22 schema:productId N3abb5686142c40bfaa9656a1935443c9
    23 N7351e6cd41384db794becf5988141347
    24 Nb752a401f1c14bdb9d28dd9c604b4523
    25 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001174303
    26 https://doi.org/10.1007/s12206-008-0317-9
    27 schema:sdDatePublished 2019-04-11T00:17
    28 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    29 schema:sdPublisher Nfbd64420741149b38d248cca8efe2b22
    30 schema:url http://link.springer.com/10.1007%2Fs12206-008-0317-9
    31 sgo:license sg:explorer/license/
    32 sgo:sdDataset articles
    33 rdf:type schema:ScholarlyArticle
    34 N1391ed206035453c8e47a97c76dc25d3 schema:volumeNumber 22
    35 rdf:type schema:PublicationVolume
    36 N2e2360fda2854c889f131af1418465a8 rdf:first sg:person.014246433163.60
    37 rdf:rest N4dbc8bf25979477588c2c0ea0ef554ee
    38 N3abb5686142c40bfaa9656a1935443c9 schema:name doi
    39 schema:value 10.1007/s12206-008-0317-9
    40 rdf:type schema:PropertyValue
    41 N4dbc8bf25979477588c2c0ea0ef554ee rdf:first sg:person.014727474357.65
    42 rdf:rest N61180411f7534a36813719d8d0ab2f71
    43 N4dd2e83ffe274fad8eed526cc65ca823 schema:issueNumber 9
    44 rdf:type schema:PublicationIssue
    45 N61180411f7534a36813719d8d0ab2f71 rdf:first sg:person.01241175735.20
    46 rdf:rest Nb310d686b1b747d188d463fdab97eee4
    47 N7351e6cd41384db794becf5988141347 schema:name dimensions_id
    48 schema:value pub.1001174303
    49 rdf:type schema:PropertyValue
    50 Na2962bfd386743f18eb108ebde12ea24 rdf:first sg:person.016166236040.47
    51 rdf:rest N2e2360fda2854c889f131af1418465a8
    52 Nb310d686b1b747d188d463fdab97eee4 rdf:first sg:person.014751104554.20
    53 rdf:rest rdf:nil
    54 Nb752a401f1c14bdb9d28dd9c604b4523 schema:name readcube_id
    55 schema:value 0598261426b8b601f1fbefa5438c907203f078b73e37b6b85fbeebae2e36fa75
    56 rdf:type schema:PropertyValue
    57 Nfbd64420741149b38d248cca8efe2b22 schema:name Springer Nature - SN SciGraph project
    58 rdf:type schema:Organization
    59 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
    60 schema:name Engineering
    61 rdf:type schema:DefinedTerm
    62 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
    63 schema:name Materials Engineering
    64 rdf:type schema:DefinedTerm
    65 sg:journal.1295111 schema:issn 1011-8861
    66 1226-4865
    67 schema:name Journal of Mechanical Science and Technology
    68 rdf:type schema:Periodical
    69 sg:person.01241175735.20 schema:affiliation https://www.grid.ac/institutes/grid.412485.e
    70 schema:familyName Jang
    71 schema:givenName Dong Young
    72 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01241175735.20
    73 rdf:type schema:Person
    74 sg:person.014246433163.60 schema:affiliation https://www.grid.ac/institutes/grid.412485.e
    75 schema:familyName Kim
    76 schema:givenName Dong Hwan
    77 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014246433163.60
    78 rdf:type schema:Person
    79 sg:person.014727474357.65 schema:affiliation https://www.grid.ac/institutes/grid.412485.e
    80 schema:familyName Park
    81 schema:givenName Keun
    82 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014727474357.65
    83 rdf:type schema:Person
    84 sg:person.014751104554.20 schema:affiliation https://www.grid.ac/institutes/grid.31501.36
    85 schema:familyName Han
    86 schema:givenName Dong-Chul
    87 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014751104554.20
    88 rdf:type schema:Person
    89 sg:person.016166236040.47 schema:affiliation https://www.grid.ac/institutes/grid.31501.36
    90 schema:familyName Park
    91 schema:givenName Man-Jin
    92 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016166236040.47
    93 rdf:type schema:Person
    94 sg:pub.10.1007/978-3-642-81516-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047778156
    95 https://doi.org/10.1007/978-3-642-81516-4
    96 rdf:type schema:CreativeWork
    97 https://doi.org/10.1016/j.mee.2004.12.092 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043226470
    98 rdf:type schema:CreativeWork
    99 https://doi.org/10.1016/j.micron.2006.06.008 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017740398
    100 rdf:type schema:CreativeWork
    101 https://doi.org/10.1016/s0168-9002(98)01511-3 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018821079
    102 rdf:type schema:CreativeWork
    103 https://doi.org/10.1016/s0304-3991(02)00289-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012708809
    104 rdf:type schema:CreativeWork
    105 https://doi.org/10.1063/1.1683435 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057759018
    106 rdf:type schema:CreativeWork
    107 https://doi.org/10.1116/1.588668 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062198715
    108 rdf:type schema:CreativeWork
    109 https://www.grid.ac/institutes/grid.31501.36 schema:alternateName Seoul National University
    110 schema:name School of Mechanical and Aerospace Engineering, Seoul National University, Shinlim-Dong San 56-1, 151-742, Seoul, Korea
    111 rdf:type schema:Organization
    112 https://www.grid.ac/institutes/grid.412485.e schema:alternateName Seoul National University of Science and Technology
    113 schema:name Department of Industrial Information and System Engineering, Seoul National University of Technology, 172 Gongreung-dong, Nowon-gu, 139-743, Seoul, Korea
    114 School of Mechanical Design and Automation Engineering, Seoul National University of Technology, 172 Gongreung-dong, Nowon-gu, 139-743, Seoul, Korea
    115 rdf:type schema:Organization
     




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