Structural and Mechanical Properties of Zr-Si-N Coatings Deposited by Arc Evaporation at Different Substrate Bias Voltages View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2018-08

AUTHORS

B. Warcholinski, T. A. Kuznetsova, A. Gilewicz, T. I. Zubar, V. A. Lapitskaya, S. A. Chizhik, A. I. Komarov, V. I. Komarova, A. S. Kuprin, V. D. Ovcharenko, V. S. Goltvyanytsya

ABSTRACT

ZrN and Zr-Si-N coatings were formed using vacuum-arc plasma fluxes deposition system at the substrate bias voltage (UB) ranged from − 50 to − 220 V on HS6-5-2 steel substrates. The structural, mechanical and tribological properties were characterized using x-ray diffraction, atomic force microscopy, scanning electron microscopy, optical microscopy, nanoindentation and ball-on-disk test. The surface roughness parameter Ra of ZrN coatings is lower than Zr-Si-N coatings. Both roughness Ra of Zr-Si-N coatings and the number of surface defects with mainly small dimensions to 1 µm decrease with increasing negative substrate bias voltage. The addition of silicon to ZrN significantly reduces the crystallite size, from about 18.3 nm for ZrN coating to 6.4 nm for Zr-Si-N coating both deposited at the same UB = − 100 V and 7.8 nm for UB = − 150 V. The hardness of Zr-Si-N coatings increases to about 30 GPa with the increase in negative substrate bias voltage (UB = − 220 V). Adhesion of the coatings tested is high, and critical load is above 80 N and reduces with UB increase. Coefficient of friction determined using AFM shows similar trend as surface roughness in microscale. More... »

PAGES

3940-3950

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s11665-018-3483-7

DOI

http://dx.doi.org/10.1007/s11665-018-3483-7

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https://app.dimensions.ai/details/publication/pub.1105292020


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35 schema:description ZrN and Zr-Si-N coatings were formed using vacuum-arc plasma fluxes deposition system at the substrate bias voltage (UB) ranged from − 50 to − 220 V on HS6-5-2 steel substrates. The structural, mechanical and tribological properties were characterized using x-ray diffraction, atomic force microscopy, scanning electron microscopy, optical microscopy, nanoindentation and ball-on-disk test. The surface roughness parameter Ra of ZrN coatings is lower than Zr-Si-N coatings. Both roughness Ra of Zr-Si-N coatings and the number of surface defects with mainly small dimensions to 1 µm decrease with increasing negative substrate bias voltage. The addition of silicon to ZrN significantly reduces the crystallite size, from about 18.3 nm for ZrN coating to 6.4 nm for Zr-Si-N coating both deposited at the same UB = − 100 V and 7.8 nm for UB = − 150 V. The hardness of Zr-Si-N coatings increases to about 30 GPa with the increase in negative substrate bias voltage (UB = − 220 V). Adhesion of the coatings tested is high, and critical load is above 80 N and reduces with UB increase. Coefficient of friction determined using AFM shows similar trend as surface roughness in microscale.
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