Structural and Mechanical Properties of Zr-Si-N Coatings Deposited by Arc Evaporation at Different Substrate Bias Voltages View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2018-08

AUTHORS

B. Warcholinski, T. A. Kuznetsova, A. Gilewicz, T. I. Zubar, V. A. Lapitskaya, S. A. Chizhik, A. I. Komarov, V. I. Komarova, A. S. Kuprin, V. D. Ovcharenko, V. S. Goltvyanytsya

ABSTRACT

ZrN and Zr-Si-N coatings were formed using vacuum-arc plasma fluxes deposition system at the substrate bias voltage (UB) ranged from − 50 to − 220 V on HS6-5-2 steel substrates. The structural, mechanical and tribological properties were characterized using x-ray diffraction, atomic force microscopy, scanning electron microscopy, optical microscopy, nanoindentation and ball-on-disk test. The surface roughness parameter Ra of ZrN coatings is lower than Zr-Si-N coatings. Both roughness Ra of Zr-Si-N coatings and the number of surface defects with mainly small dimensions to 1 µm decrease with increasing negative substrate bias voltage. The addition of silicon to ZrN significantly reduces the crystallite size, from about 18.3 nm for ZrN coating to 6.4 nm for Zr-Si-N coating both deposited at the same UB = − 100 V and 7.8 nm for UB = − 150 V. The hardness of Zr-Si-N coatings increases to about 30 GPa with the increase in negative substrate bias voltage (UB = − 220 V). Adhesion of the coatings tested is high, and critical load is above 80 N and reduces with UB increase. Coefficient of friction determined using AFM shows similar trend as surface roughness in microscale. More... »

PAGES

3940-3950

References to SciGraph publications

  • 2016-12. Surface Microstructure of Mo(C)N Coatings Investigated by AFM in JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE
  • 2007. Micro- and nanoscale testing of tribomechanical properties of surfaces in RECENT ADVANCES IN MECHATRONICS
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/s11665-018-3483-7

    DOI

    http://dx.doi.org/10.1007/s11665-018-3483-7

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1105292020


    Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
    Incoming Citations Browse incoming citations for this publication using opencitations.net

    JSON-LD is the canonical representation for SciGraph data.

    TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "about": [
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Materials Engineering", 
            "type": "DefinedTerm"
          }, 
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Engineering", 
            "type": "DefinedTerm"
          }
        ], 
        "author": [
          {
            "affiliation": {
              "alternateName": "Koszalin University of Technology", 
              "id": "https://www.grid.ac/institutes/grid.411637.6", 
              "name": [
                "Koszalin University of Technology, Koszalin, Poland"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Warcholinski", 
            "givenName": "B.", 
            "id": "sg:person.016230460161.41", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016230460161.41"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "A.V. Luikov Heat and Mass Transfer Institute", 
              "id": "https://www.grid.ac/institutes/grid.423488.1", 
              "name": [
                "A.V.Luikov Heat and Mass Transfer Institute of NAS Belarus, Minsk, Belarus"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Kuznetsova", 
            "givenName": "T. A.", 
            "id": "sg:person.015277403532.78", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015277403532.78"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Koszalin University of Technology", 
              "id": "https://www.grid.ac/institutes/grid.411637.6", 
              "name": [
                "Koszalin University of Technology, Koszalin, Poland"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Gilewicz", 
            "givenName": "A.", 
            "id": "sg:person.07525406761.91", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07525406761.91"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "A.V. Luikov Heat and Mass Transfer Institute", 
              "id": "https://www.grid.ac/institutes/grid.423488.1", 
              "name": [
                "A.V.Luikov Heat and Mass Transfer Institute of NAS Belarus, Minsk, Belarus"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Zubar", 
            "givenName": "T. I.", 
            "id": "sg:person.07375554032.51", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07375554032.51"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "A.V. Luikov Heat and Mass Transfer Institute", 
              "id": "https://www.grid.ac/institutes/grid.423488.1", 
              "name": [
                "A.V.Luikov Heat and Mass Transfer Institute of NAS Belarus, Minsk, Belarus"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Lapitskaya", 
            "givenName": "V. A.", 
            "id": "sg:person.010021204260.65", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010021204260.65"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "A.V. Luikov Heat and Mass Transfer Institute", 
              "id": "https://www.grid.ac/institutes/grid.423488.1", 
              "name": [
                "A.V.Luikov Heat and Mass Transfer Institute of NAS Belarus, Minsk, Belarus"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Chizhik", 
            "givenName": "S. A.", 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "The Joint Institute of Mechanical Engineering", 
              "id": "https://www.grid.ac/institutes/grid.494915.4", 
              "name": [
                "Joint Institute of Mechanical Engineering of NAS Belarus, Minsk, Belarus"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Komarov", 
            "givenName": "A. I.", 
            "id": "sg:person.016067201241.37", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016067201241.37"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "The Joint Institute of Mechanical Engineering", 
              "id": "https://www.grid.ac/institutes/grid.494915.4", 
              "name": [
                "Joint Institute of Mechanical Engineering of NAS Belarus, Minsk, Belarus"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Komarova", 
            "givenName": "V. I.", 
            "id": "sg:person.010762732141.10", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010762732141.10"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "name": [
                "NSC Kharkov Institute Physics & Technology NASU, Kharkiv, Ukraine"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Kuprin", 
            "givenName": "A. S.", 
            "id": "sg:person.011152346435.90", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011152346435.90"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "name": [
                "NSC Kharkov Institute Physics & Technology NASU, Kharkiv, Ukraine"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Ovcharenko", 
            "givenName": "V. D.", 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "name": [
                "LLC \u201cReal\u201d, Zaporozhye, Ukraine"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Goltvyanytsya", 
            "givenName": "V. S.", 
            "id": "sg:person.011056367552.85", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011056367552.85"
            ], 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "https://doi.org/10.1016/s0043-1648(00)00488-9", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1000668050"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/978-3-540-73956-2_106", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1000817616", 
              "https://doi.org/10.1007/978-3-540-73956-2_106"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/978-3-540-73956-2_106", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1000817616", 
              "https://doi.org/10.1007/978-3-540-73956-2_106"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.surfcoat.2009.06.042", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1003697180"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0257-8972(03)00710-2", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1003756882"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0257-8972(03)00710-2", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1003756882"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.tsf.2005.08.375", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1004239182"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0257-8972(97)00137-0", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1005686636"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.proeng.2012.02.032", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1006055321"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.surfcoat.2014.07.024", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1009805332"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.surfcoat.2016.07.042", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1014074635"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.surfcoat.2009.11.021", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1017638851"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.surfcoat.2014.10.008", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1018045764"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0257-8972(01)01714-5", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1020508189"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0257-8972(01)01187-2", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1024771358"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0042-207x(96)00307-7", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1025415084"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.surfcoat.2006.08.002", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1027367113"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.matchemphys.2010.02.024", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1027732144"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0257-8972(99)00019-5", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1028359582"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.surfcoat.2007.09.003", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1032133754"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s11665-016-2390-z", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1033861044", 
              "https://doi.org/10.1007/s11665-016-2390-z"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s11665-016-2390-z", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1033861044", 
              "https://doi.org/10.1007/s11665-016-2390-z"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.surfcoat.2013.09.005", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1039031673"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.vacuum.2009.05.018", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1043308803"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.vacuum.2005.01.067", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1043791120"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/0956-716x(91)90256-z", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1044339009"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/0956-716x(91)90256-z", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1044339009"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.surfcoat.2003.10.087", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1046396840"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.tsf.2005.09.062", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047459436"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0040-6090(02)00530-8", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1048357912"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.jallcom.2009.06.147", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1053527813"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1116/1.1468657", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1062167244"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.surfcoat.2017.04.005", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1084535272"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "datePublished": "2018-08", 
        "datePublishedReg": "2018-08-01", 
        "description": "ZrN and Zr-Si-N coatings were formed using vacuum-arc plasma fluxes deposition system at the substrate bias voltage (UB) ranged from \u2212 50 to \u2212 220 V on HS6-5-2 steel substrates. The structural, mechanical and tribological properties were characterized using x-ray diffraction, atomic force microscopy, scanning electron microscopy, optical microscopy, nanoindentation and ball-on-disk test. The surface roughness parameter Ra of ZrN coatings is lower than Zr-Si-N coatings. Both roughness Ra of Zr-Si-N coatings and the number of surface defects with mainly small dimensions to 1 \u00b5m decrease with increasing negative substrate bias voltage. The addition of silicon to ZrN significantly reduces the crystallite size, from about 18.3 nm for ZrN coating to 6.4 nm for Zr-Si-N coating both deposited at the same UB = \u2212 100 V and 7.8 nm for UB = \u2212 150 V. The hardness of Zr-Si-N coatings increases to about 30 GPa with the increase in negative substrate bias voltage (UB = \u2212 220 V). Adhesion of the coatings tested is high, and critical load is above 80 N and reduces with UB increase. Coefficient of friction determined using AFM shows similar trend as surface roughness in microscale.", 
        "genre": "research_article", 
        "id": "sg:pub.10.1007/s11665-018-3483-7", 
        "inLanguage": [
          "en"
        ], 
        "isAccessibleForFree": true, 
        "isPartOf": [
          {
            "id": "sg:journal.1042007", 
            "issn": [
              "1059-9495", 
              "1544-1024"
            ], 
            "name": "Journal of Materials Engineering and Performance", 
            "type": "Periodical"
          }, 
          {
            "issueNumber": "8", 
            "type": "PublicationIssue"
          }, 
          {
            "type": "PublicationVolume", 
            "volumeNumber": "27"
          }
        ], 
        "name": "Structural and Mechanical Properties of Zr-Si-N Coatings Deposited by Arc Evaporation at Different Substrate Bias Voltages", 
        "pagination": "3940-3950", 
        "productId": [
          {
            "name": "readcube_id", 
            "type": "PropertyValue", 
            "value": [
              "447c502fe358a7556a0a59087b4e0383bc29735478677c44dc7af4d540aa9e33"
            ]
          }, 
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1007/s11665-018-3483-7"
            ]
          }, 
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1105292020"
            ]
          }
        ], 
        "sameAs": [
          "https://doi.org/10.1007/s11665-018-3483-7", 
          "https://app.dimensions.ai/details/publication/pub.1105292020"
        ], 
        "sdDataset": "articles", 
        "sdDatePublished": "2019-04-11T09:59", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000347_0000000347/records_89814_00000003.jsonl", 
        "type": "ScholarlyArticle", 
        "url": "https://link.springer.com/10.1007%2Fs11665-018-3483-7"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

    HOW TO GET THIS DATA PROGRAMMATICALLY:

    JSON-LD is a popular format for linked data which is fully compatible with JSON.

    curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s11665-018-3483-7'

    N-Triples is a line-based linked data format ideal for batch operations.

    curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s11665-018-3483-7'

    Turtle is a human-readable linked data format.

    curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s11665-018-3483-7'

    RDF/XML is a standard XML format for linked data.

    curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s11665-018-3483-7'


     

    This table displays all metadata directly associated to this object as RDF triples.

    230 TRIPLES      21 PREDICATES      56 URIs      19 LITERALS      7 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1007/s11665-018-3483-7 schema:about anzsrc-for:09
    2 anzsrc-for:0912
    3 schema:author Na743ec539ae7419c82903876bd6c25d9
    4 schema:citation sg:pub.10.1007/978-3-540-73956-2_106
    5 sg:pub.10.1007/s11665-016-2390-z
    6 https://doi.org/10.1016/0956-716x(91)90256-z
    7 https://doi.org/10.1016/j.jallcom.2009.06.147
    8 https://doi.org/10.1016/j.matchemphys.2010.02.024
    9 https://doi.org/10.1016/j.proeng.2012.02.032
    10 https://doi.org/10.1016/j.surfcoat.2003.10.087
    11 https://doi.org/10.1016/j.surfcoat.2006.08.002
    12 https://doi.org/10.1016/j.surfcoat.2007.09.003
    13 https://doi.org/10.1016/j.surfcoat.2009.06.042
    14 https://doi.org/10.1016/j.surfcoat.2009.11.021
    15 https://doi.org/10.1016/j.surfcoat.2013.09.005
    16 https://doi.org/10.1016/j.surfcoat.2014.07.024
    17 https://doi.org/10.1016/j.surfcoat.2014.10.008
    18 https://doi.org/10.1016/j.surfcoat.2016.07.042
    19 https://doi.org/10.1016/j.surfcoat.2017.04.005
    20 https://doi.org/10.1016/j.tsf.2005.08.375
    21 https://doi.org/10.1016/j.tsf.2005.09.062
    22 https://doi.org/10.1016/j.vacuum.2005.01.067
    23 https://doi.org/10.1016/j.vacuum.2009.05.018
    24 https://doi.org/10.1016/s0040-6090(02)00530-8
    25 https://doi.org/10.1016/s0042-207x(96)00307-7
    26 https://doi.org/10.1016/s0043-1648(00)00488-9
    27 https://doi.org/10.1016/s0257-8972(01)01187-2
    28 https://doi.org/10.1016/s0257-8972(01)01714-5
    29 https://doi.org/10.1016/s0257-8972(03)00710-2
    30 https://doi.org/10.1016/s0257-8972(97)00137-0
    31 https://doi.org/10.1016/s0257-8972(99)00019-5
    32 https://doi.org/10.1116/1.1468657
    33 schema:datePublished 2018-08
    34 schema:datePublishedReg 2018-08-01
    35 schema:description ZrN and Zr-Si-N coatings were formed using vacuum-arc plasma fluxes deposition system at the substrate bias voltage (UB) ranged from − 50 to − 220 V on HS6-5-2 steel substrates. The structural, mechanical and tribological properties were characterized using x-ray diffraction, atomic force microscopy, scanning electron microscopy, optical microscopy, nanoindentation and ball-on-disk test. The surface roughness parameter Ra of ZrN coatings is lower than Zr-Si-N coatings. Both roughness Ra of Zr-Si-N coatings and the number of surface defects with mainly small dimensions to 1 µm decrease with increasing negative substrate bias voltage. The addition of silicon to ZrN significantly reduces the crystallite size, from about 18.3 nm for ZrN coating to 6.4 nm for Zr-Si-N coating both deposited at the same UB = − 100 V and 7.8 nm for UB = − 150 V. The hardness of Zr-Si-N coatings increases to about 30 GPa with the increase in negative substrate bias voltage (UB = − 220 V). Adhesion of the coatings tested is high, and critical load is above 80 N and reduces with UB increase. Coefficient of friction determined using AFM shows similar trend as surface roughness in microscale.
    36 schema:genre research_article
    37 schema:inLanguage en
    38 schema:isAccessibleForFree true
    39 schema:isPartOf N04b7fc97ebb84686a18d6fa021e4332a
    40 N1b7b5c5abaaa44a6b902207374e86fe8
    41 sg:journal.1042007
    42 schema:name Structural and Mechanical Properties of Zr-Si-N Coatings Deposited by Arc Evaporation at Different Substrate Bias Voltages
    43 schema:pagination 3940-3950
    44 schema:productId N07ef140ec97e4b1cbef197c2b545e3f2
    45 N36fd36ad89544f278b4f8a6037cfd9f0
    46 N4ee2c3951b8e4738b6e576e74b78d7eb
    47 schema:sameAs https://app.dimensions.ai/details/publication/pub.1105292020
    48 https://doi.org/10.1007/s11665-018-3483-7
    49 schema:sdDatePublished 2019-04-11T09:59
    50 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    51 schema:sdPublisher Ne47e501f52c84157ae19e3b021426db2
    52 schema:url https://link.springer.com/10.1007%2Fs11665-018-3483-7
    53 sgo:license sg:explorer/license/
    54 sgo:sdDataset articles
    55 rdf:type schema:ScholarlyArticle
    56 N04b7fc97ebb84686a18d6fa021e4332a schema:volumeNumber 27
    57 rdf:type schema:PublicationVolume
    58 N07ef140ec97e4b1cbef197c2b545e3f2 schema:name readcube_id
    59 schema:value 447c502fe358a7556a0a59087b4e0383bc29735478677c44dc7af4d540aa9e33
    60 rdf:type schema:PropertyValue
    61 N10341e113f594975a02c064fd05a4098 rdf:first N431731a71703402a81da629828197c76
    62 rdf:rest N5fb096d88e464348ad6ee27ada6ee1c6
    63 N1b7b5c5abaaa44a6b902207374e86fe8 schema:issueNumber 8
    64 rdf:type schema:PublicationIssue
    65 N1cd8848eef274ba4b482136a1f3344da rdf:first sg:person.015277403532.78
    66 rdf:rest N4aef9b03b89146fd9e7e18c60a8c2748
    67 N36fd36ad89544f278b4f8a6037cfd9f0 schema:name dimensions_id
    68 schema:value pub.1105292020
    69 rdf:type schema:PropertyValue
    70 N431731a71703402a81da629828197c76 schema:affiliation https://www.grid.ac/institutes/grid.423488.1
    71 schema:familyName Chizhik
    72 schema:givenName S. A.
    73 rdf:type schema:Person
    74 N476aad74e63e4e2da71bcb06df476847 rdf:first sg:person.07375554032.51
    75 rdf:rest Nf38bbeb4a1e6464285f4812554c79be2
    76 N4aef9b03b89146fd9e7e18c60a8c2748 rdf:first sg:person.07525406761.91
    77 rdf:rest N476aad74e63e4e2da71bcb06df476847
    78 N4e2f0dbb6a8345f1a42faa53dbaa0cff schema:name NSC Kharkov Institute Physics & Technology NASU, Kharkiv, Ukraine
    79 rdf:type schema:Organization
    80 N4ee2c3951b8e4738b6e576e74b78d7eb schema:name doi
    81 schema:value 10.1007/s11665-018-3483-7
    82 rdf:type schema:PropertyValue
    83 N5459b7289100408db7639eb7d75f9f00 schema:name NSC Kharkov Institute Physics & Technology NASU, Kharkiv, Ukraine
    84 rdf:type schema:Organization
    85 N5b87a164c0aa4abba13316e56eb69523 rdf:first sg:person.010762732141.10
    86 rdf:rest N9bc609d3dc224546b4b8bd61b9da45a7
    87 N5c40343ab3ad4d0d9059ca579e3aaae1 rdf:first Na37ef6cbe0204b2699c1bcfda6bb214f
    88 rdf:rest N6fb6c9e4dcc94833ae77555689523731
    89 N5fb096d88e464348ad6ee27ada6ee1c6 rdf:first sg:person.016067201241.37
    90 rdf:rest N5b87a164c0aa4abba13316e56eb69523
    91 N6fb6c9e4dcc94833ae77555689523731 rdf:first sg:person.011056367552.85
    92 rdf:rest rdf:nil
    93 N9bc609d3dc224546b4b8bd61b9da45a7 rdf:first sg:person.011152346435.90
    94 rdf:rest N5c40343ab3ad4d0d9059ca579e3aaae1
    95 Na37ef6cbe0204b2699c1bcfda6bb214f schema:affiliation N4e2f0dbb6a8345f1a42faa53dbaa0cff
    96 schema:familyName Ovcharenko
    97 schema:givenName V. D.
    98 rdf:type schema:Person
    99 Na743ec539ae7419c82903876bd6c25d9 rdf:first sg:person.016230460161.41
    100 rdf:rest N1cd8848eef274ba4b482136a1f3344da
    101 Nc1d8b61104514cdba65367255763541b schema:name LLC “Real”, Zaporozhye, Ukraine
    102 rdf:type schema:Organization
    103 Ne47e501f52c84157ae19e3b021426db2 schema:name Springer Nature - SN SciGraph project
    104 rdf:type schema:Organization
    105 Nf38bbeb4a1e6464285f4812554c79be2 rdf:first sg:person.010021204260.65
    106 rdf:rest N10341e113f594975a02c064fd05a4098
    107 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
    108 schema:name Engineering
    109 rdf:type schema:DefinedTerm
    110 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
    111 schema:name Materials Engineering
    112 rdf:type schema:DefinedTerm
    113 sg:journal.1042007 schema:issn 1059-9495
    114 1544-1024
    115 schema:name Journal of Materials Engineering and Performance
    116 rdf:type schema:Periodical
    117 sg:person.010021204260.65 schema:affiliation https://www.grid.ac/institutes/grid.423488.1
    118 schema:familyName Lapitskaya
    119 schema:givenName V. A.
    120 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010021204260.65
    121 rdf:type schema:Person
    122 sg:person.010762732141.10 schema:affiliation https://www.grid.ac/institutes/grid.494915.4
    123 schema:familyName Komarova
    124 schema:givenName V. I.
    125 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010762732141.10
    126 rdf:type schema:Person
    127 sg:person.011056367552.85 schema:affiliation Nc1d8b61104514cdba65367255763541b
    128 schema:familyName Goltvyanytsya
    129 schema:givenName V. S.
    130 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011056367552.85
    131 rdf:type schema:Person
    132 sg:person.011152346435.90 schema:affiliation N5459b7289100408db7639eb7d75f9f00
    133 schema:familyName Kuprin
    134 schema:givenName A. S.
    135 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011152346435.90
    136 rdf:type schema:Person
    137 sg:person.015277403532.78 schema:affiliation https://www.grid.ac/institutes/grid.423488.1
    138 schema:familyName Kuznetsova
    139 schema:givenName T. A.
    140 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015277403532.78
    141 rdf:type schema:Person
    142 sg:person.016067201241.37 schema:affiliation https://www.grid.ac/institutes/grid.494915.4
    143 schema:familyName Komarov
    144 schema:givenName A. I.
    145 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016067201241.37
    146 rdf:type schema:Person
    147 sg:person.016230460161.41 schema:affiliation https://www.grid.ac/institutes/grid.411637.6
    148 schema:familyName Warcholinski
    149 schema:givenName B.
    150 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016230460161.41
    151 rdf:type schema:Person
    152 sg:person.07375554032.51 schema:affiliation https://www.grid.ac/institutes/grid.423488.1
    153 schema:familyName Zubar
    154 schema:givenName T. I.
    155 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07375554032.51
    156 rdf:type schema:Person
    157 sg:person.07525406761.91 schema:affiliation https://www.grid.ac/institutes/grid.411637.6
    158 schema:familyName Gilewicz
    159 schema:givenName A.
    160 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07525406761.91
    161 rdf:type schema:Person
    162 sg:pub.10.1007/978-3-540-73956-2_106 schema:sameAs https://app.dimensions.ai/details/publication/pub.1000817616
    163 https://doi.org/10.1007/978-3-540-73956-2_106
    164 rdf:type schema:CreativeWork
    165 sg:pub.10.1007/s11665-016-2390-z schema:sameAs https://app.dimensions.ai/details/publication/pub.1033861044
    166 https://doi.org/10.1007/s11665-016-2390-z
    167 rdf:type schema:CreativeWork
    168 https://doi.org/10.1016/0956-716x(91)90256-z schema:sameAs https://app.dimensions.ai/details/publication/pub.1044339009
    169 rdf:type schema:CreativeWork
    170 https://doi.org/10.1016/j.jallcom.2009.06.147 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053527813
    171 rdf:type schema:CreativeWork
    172 https://doi.org/10.1016/j.matchemphys.2010.02.024 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027732144
    173 rdf:type schema:CreativeWork
    174 https://doi.org/10.1016/j.proeng.2012.02.032 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006055321
    175 rdf:type schema:CreativeWork
    176 https://doi.org/10.1016/j.surfcoat.2003.10.087 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046396840
    177 rdf:type schema:CreativeWork
    178 https://doi.org/10.1016/j.surfcoat.2006.08.002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027367113
    179 rdf:type schema:CreativeWork
    180 https://doi.org/10.1016/j.surfcoat.2007.09.003 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032133754
    181 rdf:type schema:CreativeWork
    182 https://doi.org/10.1016/j.surfcoat.2009.06.042 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003697180
    183 rdf:type schema:CreativeWork
    184 https://doi.org/10.1016/j.surfcoat.2009.11.021 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017638851
    185 rdf:type schema:CreativeWork
    186 https://doi.org/10.1016/j.surfcoat.2013.09.005 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039031673
    187 rdf:type schema:CreativeWork
    188 https://doi.org/10.1016/j.surfcoat.2014.07.024 schema:sameAs https://app.dimensions.ai/details/publication/pub.1009805332
    189 rdf:type schema:CreativeWork
    190 https://doi.org/10.1016/j.surfcoat.2014.10.008 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018045764
    191 rdf:type schema:CreativeWork
    192 https://doi.org/10.1016/j.surfcoat.2016.07.042 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014074635
    193 rdf:type schema:CreativeWork
    194 https://doi.org/10.1016/j.surfcoat.2017.04.005 schema:sameAs https://app.dimensions.ai/details/publication/pub.1084535272
    195 rdf:type schema:CreativeWork
    196 https://doi.org/10.1016/j.tsf.2005.08.375 schema:sameAs https://app.dimensions.ai/details/publication/pub.1004239182
    197 rdf:type schema:CreativeWork
    198 https://doi.org/10.1016/j.tsf.2005.09.062 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047459436
    199 rdf:type schema:CreativeWork
    200 https://doi.org/10.1016/j.vacuum.2005.01.067 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043791120
    201 rdf:type schema:CreativeWork
    202 https://doi.org/10.1016/j.vacuum.2009.05.018 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043308803
    203 rdf:type schema:CreativeWork
    204 https://doi.org/10.1016/s0040-6090(02)00530-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048357912
    205 rdf:type schema:CreativeWork
    206 https://doi.org/10.1016/s0042-207x(96)00307-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025415084
    207 rdf:type schema:CreativeWork
    208 https://doi.org/10.1016/s0043-1648(00)00488-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1000668050
    209 rdf:type schema:CreativeWork
    210 https://doi.org/10.1016/s0257-8972(01)01187-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024771358
    211 rdf:type schema:CreativeWork
    212 https://doi.org/10.1016/s0257-8972(01)01714-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020508189
    213 rdf:type schema:CreativeWork
    214 https://doi.org/10.1016/s0257-8972(03)00710-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003756882
    215 rdf:type schema:CreativeWork
    216 https://doi.org/10.1016/s0257-8972(97)00137-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1005686636
    217 rdf:type schema:CreativeWork
    218 https://doi.org/10.1016/s0257-8972(99)00019-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028359582
    219 rdf:type schema:CreativeWork
    220 https://doi.org/10.1116/1.1468657 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062167244
    221 rdf:type schema:CreativeWork
    222 https://www.grid.ac/institutes/grid.411637.6 schema:alternateName Koszalin University of Technology
    223 schema:name Koszalin University of Technology, Koszalin, Poland
    224 rdf:type schema:Organization
    225 https://www.grid.ac/institutes/grid.423488.1 schema:alternateName A.V. Luikov Heat and Mass Transfer Institute
    226 schema:name A.V.Luikov Heat and Mass Transfer Institute of NAS Belarus, Minsk, Belarus
    227 rdf:type schema:Organization
    228 https://www.grid.ac/institutes/grid.494915.4 schema:alternateName The Joint Institute of Mechanical Engineering
    229 schema:name Joint Institute of Mechanical Engineering of NAS Belarus, Minsk, Belarus
    230 rdf:type schema:Organization
     




    Preview window. Press ESC to close (or click here)


    ...