A Hybrid Experimental/Numerical Investigation of the Response of Multilayered MEMS Devices to Dynamic Loading View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2010-04

AUTHORS

J. Kimberley, J. Lambros, I. Chasiotis, J. Pulskamp, R. Polcawich, M. Dubey

ABSTRACT

In order to probe the mechanical response of microelectromechanical systems (MEMS) subjected to dynamic loading, a modified split Hopkinson pressure bar was used to load MEMS devices at accelerations ranging from 103–105 g. Multilayer beams consisting of a PZT film sandwiched between two metal electrodes atop an elastic layer of silicon dioxide were studied because of their relevance to active MEMS devices. Experiments were conducted using the modified split Hopkinson pressure bar to quantify the effects of dynamic loading amplitude, duration, and temporal profile on the failure of the multilayered cantilever beams. Companion finite element simulations of these beams, informed by experimental measurements, were conducted to shed light into the deformation of the multilayered beams. Results of the numerical simulations were then coupled with independent experimental measurements of failure stress in order to predict the material layer at which failure initiation occurred, and the associated time to failure. High-speed imaging was also used to capture the first real-time images of MEMS structures responding to dynamic loading and successfully compare the recorded failure event with those predicted numerically. More... »

PAGES

527-544

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s11340-009-9259-0

DOI

http://dx.doi.org/10.1007/s11340-009-9259-0

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1008680633


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0913", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Mechanical Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "University of Illinois at Urbana Champaign", 
          "id": "https://www.grid.ac/institutes/grid.35403.31", 
          "name": [
            "Aerospace Engineering, University of Illinois at Urbana Champaign, Urbana, IL, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kimberley", 
        "givenName": "J.", 
        "id": "sg:person.014540556327.08", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014540556327.08"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Illinois at Urbana Champaign", 
          "id": "https://www.grid.ac/institutes/grid.35403.31", 
          "name": [
            "Aerospace Engineering, University of Illinois at Urbana Champaign, Urbana, IL, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Lambros", 
        "givenName": "J.", 
        "id": "sg:person.015433752032.13", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015433752032.13"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Illinois at Urbana Champaign", 
          "id": "https://www.grid.ac/institutes/grid.35403.31", 
          "name": [
            "Aerospace Engineering, University of Illinois at Urbana Champaign, Urbana, IL, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Chasiotis", 
        "givenName": "I.", 
        "id": "sg:person.010321743126.32", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010321743126.32"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "United States Army", 
          "id": "https://www.grid.ac/institutes/grid.420176.6", 
          "name": [
            "US Army Research Laboratories, Adelphi, MD, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Pulskamp", 
        "givenName": "J.", 
        "id": "sg:person.015746326555.02", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015746326555.02"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "United States Army", 
          "id": "https://www.grid.ac/institutes/grid.420176.6", 
          "name": [
            "US Army Research Laboratories, Adelphi, MD, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Polcawich", 
        "givenName": "R.", 
        "id": "sg:person.01105505275.87", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01105505275.87"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "United States Army", 
          "id": "https://www.grid.ac/institutes/grid.420176.6", 
          "name": [
            "US Army Research Laboratories, Adelphi, MD, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Dubey", 
        "givenName": "M.", 
        "id": "sg:person.01327213420.71", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01327213420.71"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/j.jmps.2010.04.005", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006079482"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1098/rsta.1914.0010", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006407811"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s11340-008-9212-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1012053691", 
          "https://doi.org/10.1007/s11340-008-9212-7"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.658829", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1016532798"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0026-2714(01)00173-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1020889345"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.sna.2009.06.004", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1044030941"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.ijsolstr.2007.08.004", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049540196"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02411056", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1052249583", 
          "https://doi.org/10.1007/bf02411056"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02411056", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1052249583", 
          "https://doi.org/10.1007/bf02411056"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1661935", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057740214"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/20.911850", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061119309"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/jmems.2002.1007399", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061289675"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/tmtt.2007.910072", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061707783"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2010-04", 
    "datePublishedReg": "2010-04-01", 
    "description": "In order to probe the mechanical response of microelectromechanical systems (MEMS) subjected to dynamic loading, a modified split Hopkinson pressure bar was used to load MEMS devices at accelerations ranging from 103\u2013105 g. Multilayer beams consisting of a PZT film sandwiched between two metal electrodes atop an elastic layer of silicon dioxide were studied because of their relevance to active MEMS devices. Experiments were conducted using the modified split Hopkinson pressure bar to quantify the effects of dynamic loading amplitude, duration, and temporal profile on the failure of the multilayered cantilever beams. Companion finite element simulations of these beams, informed by experimental measurements, were conducted to shed light into the deformation of the multilayered beams. Results of the numerical simulations were then coupled with independent experimental measurements of failure stress in order to predict the material layer at which failure initiation occurred, and the associated time to failure. High-speed imaging was also used to capture the first real-time images of MEMS structures responding to dynamic loading and successfully compare the recorded failure event with those predicted numerically.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s11340-009-9259-0", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isFundedItemOf": [
      {
        "id": "sg:grant.3057865", 
        "type": "MonetaryGrant"
      }
    ], 
    "isPartOf": [
      {
        "id": "sg:journal.1039819", 
        "issn": [
          "0014-4851", 
          "1741-2765"
        ], 
        "name": "Experimental Mechanics", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "4", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "50"
      }
    ], 
    "name": "A Hybrid Experimental/Numerical Investigation of the Response of Multilayered MEMS Devices to Dynamic Loading", 
    "pagination": "527-544", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "295b4b9628e7e15efe0f2edeb6373f65ce44ba067335792fdcfd3f0c25e1e170"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s11340-009-9259-0"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1008680633"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s11340-009-9259-0", 
      "https://app.dimensions.ai/details/publication/pub.1008680633"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T09:27", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000345_0000000345/records_64121_00000000.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007%2Fs11340-009-9259-0"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

139 TRIPLES      21 PREDICATES      39 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s11340-009-9259-0 schema:about anzsrc-for:09
2 anzsrc-for:0913
3 schema:author N6e843aa522fd4038950a608915417f50
4 schema:citation sg:pub.10.1007/bf02411056
5 sg:pub.10.1007/s11340-008-9212-7
6 https://doi.org/10.1016/j.ijsolstr.2007.08.004
7 https://doi.org/10.1016/j.jmps.2010.04.005
8 https://doi.org/10.1016/j.sna.2009.06.004
9 https://doi.org/10.1016/s0026-2714(01)00173-1
10 https://doi.org/10.1063/1.1661935
11 https://doi.org/10.1098/rsta.1914.0010
12 https://doi.org/10.1109/20.911850
13 https://doi.org/10.1109/jmems.2002.1007399
14 https://doi.org/10.1109/tmtt.2007.910072
15 https://doi.org/10.1117/12.658829
16 schema:datePublished 2010-04
17 schema:datePublishedReg 2010-04-01
18 schema:description In order to probe the mechanical response of microelectromechanical systems (MEMS) subjected to dynamic loading, a modified split Hopkinson pressure bar was used to load MEMS devices at accelerations ranging from 103–105 g. Multilayer beams consisting of a PZT film sandwiched between two metal electrodes atop an elastic layer of silicon dioxide were studied because of their relevance to active MEMS devices. Experiments were conducted using the modified split Hopkinson pressure bar to quantify the effects of dynamic loading amplitude, duration, and temporal profile on the failure of the multilayered cantilever beams. Companion finite element simulations of these beams, informed by experimental measurements, were conducted to shed light into the deformation of the multilayered beams. Results of the numerical simulations were then coupled with independent experimental measurements of failure stress in order to predict the material layer at which failure initiation occurred, and the associated time to failure. High-speed imaging was also used to capture the first real-time images of MEMS structures responding to dynamic loading and successfully compare the recorded failure event with those predicted numerically.
19 schema:genre research_article
20 schema:inLanguage en
21 schema:isAccessibleForFree false
22 schema:isPartOf N3dc1e530dbff477c92eabd1e41f3dd77
23 N868685d34a3b4efe9998ff55b7015467
24 sg:journal.1039819
25 schema:name A Hybrid Experimental/Numerical Investigation of the Response of Multilayered MEMS Devices to Dynamic Loading
26 schema:pagination 527-544
27 schema:productId N09fa5cb3683e4bd998686881865b0e8a
28 N3a24058da3614f5f9652cdd079eccb00
29 N8e2b8625567b4f44bf90dfcc4cfafebc
30 schema:sameAs https://app.dimensions.ai/details/publication/pub.1008680633
31 https://doi.org/10.1007/s11340-009-9259-0
32 schema:sdDatePublished 2019-04-11T09:27
33 schema:sdLicense https://scigraph.springernature.com/explorer/license/
34 schema:sdPublisher Nea101f4374b24a28bca3538890fe1afb
35 schema:url http://link.springer.com/10.1007%2Fs11340-009-9259-0
36 sgo:license sg:explorer/license/
37 sgo:sdDataset articles
38 rdf:type schema:ScholarlyArticle
39 N09fa5cb3683e4bd998686881865b0e8a schema:name dimensions_id
40 schema:value pub.1008680633
41 rdf:type schema:PropertyValue
42 N2a386def4b5b48d1bdade2fbf5f42d51 rdf:first sg:person.01327213420.71
43 rdf:rest rdf:nil
44 N2b28d74adea44f94ba30e737341a6621 rdf:first sg:person.015746326555.02
45 rdf:rest Nd052ae8a0c804407b10e651e5012a267
46 N2da43303fcb749d09ca1aeb75df2f3df rdf:first sg:person.015433752032.13
47 rdf:rest Neb97d55d2c6f4d80b28ea7d426251e8c
48 N3a24058da3614f5f9652cdd079eccb00 schema:name doi
49 schema:value 10.1007/s11340-009-9259-0
50 rdf:type schema:PropertyValue
51 N3dc1e530dbff477c92eabd1e41f3dd77 schema:volumeNumber 50
52 rdf:type schema:PublicationVolume
53 N6e843aa522fd4038950a608915417f50 rdf:first sg:person.014540556327.08
54 rdf:rest N2da43303fcb749d09ca1aeb75df2f3df
55 N868685d34a3b4efe9998ff55b7015467 schema:issueNumber 4
56 rdf:type schema:PublicationIssue
57 N8e2b8625567b4f44bf90dfcc4cfafebc schema:name readcube_id
58 schema:value 295b4b9628e7e15efe0f2edeb6373f65ce44ba067335792fdcfd3f0c25e1e170
59 rdf:type schema:PropertyValue
60 Nd052ae8a0c804407b10e651e5012a267 rdf:first sg:person.01105505275.87
61 rdf:rest N2a386def4b5b48d1bdade2fbf5f42d51
62 Nea101f4374b24a28bca3538890fe1afb schema:name Springer Nature - SN SciGraph project
63 rdf:type schema:Organization
64 Neb97d55d2c6f4d80b28ea7d426251e8c rdf:first sg:person.010321743126.32
65 rdf:rest N2b28d74adea44f94ba30e737341a6621
66 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
67 schema:name Engineering
68 rdf:type schema:DefinedTerm
69 anzsrc-for:0913 schema:inDefinedTermSet anzsrc-for:
70 schema:name Mechanical Engineering
71 rdf:type schema:DefinedTerm
72 sg:grant.3057865 http://pending.schema.org/fundedItem sg:pub.10.1007/s11340-009-9259-0
73 rdf:type schema:MonetaryGrant
74 sg:journal.1039819 schema:issn 0014-4851
75 1741-2765
76 schema:name Experimental Mechanics
77 rdf:type schema:Periodical
78 sg:person.010321743126.32 schema:affiliation https://www.grid.ac/institutes/grid.35403.31
79 schema:familyName Chasiotis
80 schema:givenName I.
81 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010321743126.32
82 rdf:type schema:Person
83 sg:person.01105505275.87 schema:affiliation https://www.grid.ac/institutes/grid.420176.6
84 schema:familyName Polcawich
85 schema:givenName R.
86 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01105505275.87
87 rdf:type schema:Person
88 sg:person.01327213420.71 schema:affiliation https://www.grid.ac/institutes/grid.420176.6
89 schema:familyName Dubey
90 schema:givenName M.
91 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01327213420.71
92 rdf:type schema:Person
93 sg:person.014540556327.08 schema:affiliation https://www.grid.ac/institutes/grid.35403.31
94 schema:familyName Kimberley
95 schema:givenName J.
96 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014540556327.08
97 rdf:type schema:Person
98 sg:person.015433752032.13 schema:affiliation https://www.grid.ac/institutes/grid.35403.31
99 schema:familyName Lambros
100 schema:givenName J.
101 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015433752032.13
102 rdf:type schema:Person
103 sg:person.015746326555.02 schema:affiliation https://www.grid.ac/institutes/grid.420176.6
104 schema:familyName Pulskamp
105 schema:givenName J.
106 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015746326555.02
107 rdf:type schema:Person
108 sg:pub.10.1007/bf02411056 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052249583
109 https://doi.org/10.1007/bf02411056
110 rdf:type schema:CreativeWork
111 sg:pub.10.1007/s11340-008-9212-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012053691
112 https://doi.org/10.1007/s11340-008-9212-7
113 rdf:type schema:CreativeWork
114 https://doi.org/10.1016/j.ijsolstr.2007.08.004 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049540196
115 rdf:type schema:CreativeWork
116 https://doi.org/10.1016/j.jmps.2010.04.005 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006079482
117 rdf:type schema:CreativeWork
118 https://doi.org/10.1016/j.sna.2009.06.004 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044030941
119 rdf:type schema:CreativeWork
120 https://doi.org/10.1016/s0026-2714(01)00173-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020889345
121 rdf:type schema:CreativeWork
122 https://doi.org/10.1063/1.1661935 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057740214
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1098/rsta.1914.0010 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006407811
125 rdf:type schema:CreativeWork
126 https://doi.org/10.1109/20.911850 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061119309
127 rdf:type schema:CreativeWork
128 https://doi.org/10.1109/jmems.2002.1007399 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061289675
129 rdf:type schema:CreativeWork
130 https://doi.org/10.1109/tmtt.2007.910072 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061707783
131 rdf:type schema:CreativeWork
132 https://doi.org/10.1117/12.658829 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016532798
133 rdf:type schema:CreativeWork
134 https://www.grid.ac/institutes/grid.35403.31 schema:alternateName University of Illinois at Urbana Champaign
135 schema:name Aerospace Engineering, University of Illinois at Urbana Champaign, Urbana, IL, USA
136 rdf:type schema:Organization
137 https://www.grid.ac/institutes/grid.420176.6 schema:alternateName United States Army
138 schema:name US Army Research Laboratories, Adelphi, MD, USA
139 rdf:type schema:Organization
 




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