Contact mechanics of a flexible imprinter for photocured nanoimprint lithography View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2005-05

AUTHORS

G.M. McClelland, C.T. Rettner, M.W. Hart, K.R. Carter, M.I. Sanchez, M.E. Best, B.D. Terris

ABSTRACT

A flexible imprinter can be used to accommodate substrate or template roughness in nanoimprint lithography. The contact mechanics of a multi-layer imprinter incorporating bending and local deformation is described. With the right combination of dimensions, moduli, and viscosity, the imprinter can transfer a pattern evenly to a non-flat substrate. These concepts have been used to pattern magnetic media for high density information storage. More... »

PAGES

59-63

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s11249-005-4265-6

DOI

http://dx.doi.org/10.1007/s11249-005-4265-6

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1037391917


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "IBM Research - Almaden", 
          "id": "https://www.grid.ac/institutes/grid.481551.c", 
          "name": [
            "IBM Research Division, Almaden Research Center, 650 Harry Road, 95120, San Jose, CA, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "McClelland", 
        "givenName": "G.M.", 
        "id": "sg:person.014703600445.02", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014703600445.02"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "IBM Research - Almaden", 
          "id": "https://www.grid.ac/institutes/grid.481551.c", 
          "name": [
            "IBM Research Division, Almaden Research Center, 650 Harry Road, 95120, San Jose, CA, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Rettner", 
        "givenName": "C.T.", 
        "id": "sg:person.01236253633.11", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01236253633.11"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "IBM Research - Almaden", 
          "id": "https://www.grid.ac/institutes/grid.481551.c", 
          "name": [
            "IBM Research Division, Almaden Research Center, 650 Harry Road, 95120, San Jose, CA, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Hart", 
        "givenName": "M.W.", 
        "id": "sg:person.07761422345.54", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07761422345.54"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Massachusetts Amherst", 
          "id": "https://www.grid.ac/institutes/grid.266683.f", 
          "name": [
            "IBM Research Division, Almaden Research Center, 650 Harry Road, 95120, San Jose, CA, USA", 
            "Department of Polymer Science and Engineering, University of Massachusetts, 01003, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Carter", 
        "givenName": "K.R.", 
        "id": "sg:person.01250231610.27", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01250231610.27"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "IBM Research - Almaden", 
          "id": "https://www.grid.ac/institutes/grid.481551.c", 
          "name": [
            "IBM Research Division, Almaden Research Center, 650 Harry Road, 95120, San Jose, CA, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sanchez", 
        "givenName": "M.I.", 
        "id": "sg:person.010226047036.46", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010226047036.46"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Hitachi Global Storage Technologies (United States)", 
          "id": "https://www.grid.ac/institutes/grid.450890.0", 
          "name": [
            "Hitachi Global Storage Technologies, San Jose Research Center, 95120, San Jose, CA, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Best", 
        "givenName": "M.E.", 
        "id": "sg:person.016511134237.98", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016511134237.98"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Hitachi Global Storage Technologies (United States)", 
          "id": "https://www.grid.ac/institutes/grid.450890.0", 
          "name": [
            "Hitachi Global Storage Technologies, San Jose Research Center, 95120, San Jose, CA, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Terris", 
        "givenName": "B.D.", 
        "id": "sg:person.011676146405.43", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011676146405.43"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/j.mee.2004.05.010", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001755064"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0043-1648(95)06764-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018190677"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.390082", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025463565"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1289816", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057692232"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1501763", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057713377"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1669343", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057745847"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/20.560144", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061115425"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.1618238", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062168960"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.587499", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062197546"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.588604", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062198651"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.590417", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062200463"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1017/cbo9781139171731", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1098687910"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2005-05", 
    "datePublishedReg": "2005-05-01", 
    "description": "A flexible imprinter can be used to accommodate substrate or template roughness in nanoimprint lithography. The contact mechanics of a multi-layer imprinter incorporating bending and local deformation is described. With the right combination of dimensions, moduli, and viscosity, the imprinter can transfer a pattern evenly to a non-flat substrate. These concepts have been used to pattern magnetic media for high density information storage.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s11249-005-4265-6", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1133987", 
        "issn": [
          "1023-8883", 
          "1573-2711"
        ], 
        "name": "Tribology Letters", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "1", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "19"
      }
    ], 
    "name": "Contact mechanics of a flexible imprinter for photocured nanoimprint lithography", 
    "pagination": "59-63", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "b21e6f474d7bf852423b47a0afe1181682171bded6390758e6506fb1624eedde"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s11249-005-4265-6"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1037391917"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s11249-005-4265-6", 
      "https://app.dimensions.ai/details/publication/pub.1037391917"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T09:18", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000339_0000000339/records_109490_00000000.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007%2Fs11249-005-4265-6"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

146 TRIPLES      21 PREDICATES      39 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s11249-005-4265-6 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N3d05f9a70fbf497e90ae8dd5ddfe019b
4 schema:citation https://doi.org/10.1016/0043-1648(95)06764-7
5 https://doi.org/10.1016/j.mee.2004.05.010
6 https://doi.org/10.1017/cbo9781139171731
7 https://doi.org/10.1063/1.1289816
8 https://doi.org/10.1063/1.1501763
9 https://doi.org/10.1063/1.1669343
10 https://doi.org/10.1109/20.560144
11 https://doi.org/10.1116/1.1618238
12 https://doi.org/10.1116/1.587499
13 https://doi.org/10.1116/1.588604
14 https://doi.org/10.1116/1.590417
15 https://doi.org/10.1117/12.390082
16 schema:datePublished 2005-05
17 schema:datePublishedReg 2005-05-01
18 schema:description A flexible imprinter can be used to accommodate substrate or template roughness in nanoimprint lithography. The contact mechanics of a multi-layer imprinter incorporating bending and local deformation is described. With the right combination of dimensions, moduli, and viscosity, the imprinter can transfer a pattern evenly to a non-flat substrate. These concepts have been used to pattern magnetic media for high density information storage.
19 schema:genre research_article
20 schema:inLanguage en
21 schema:isAccessibleForFree false
22 schema:isPartOf N55995a42f22a42e0abb4b4afd40fe02e
23 N7137551ba69e4d17b273ddea0b60aefa
24 sg:journal.1133987
25 schema:name Contact mechanics of a flexible imprinter for photocured nanoimprint lithography
26 schema:pagination 59-63
27 schema:productId N0cc86eb5633f40a5bee59269541af825
28 N69ac572aefce49aabc4e6620c43e53cf
29 Na97822c2f50f46ffb6a8339b5d8e6410
30 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037391917
31 https://doi.org/10.1007/s11249-005-4265-6
32 schema:sdDatePublished 2019-04-11T09:18
33 schema:sdLicense https://scigraph.springernature.com/explorer/license/
34 schema:sdPublisher N573600b0d3b849e984533c4990c8db68
35 schema:url http://link.springer.com/10.1007%2Fs11249-005-4265-6
36 sgo:license sg:explorer/license/
37 sgo:sdDataset articles
38 rdf:type schema:ScholarlyArticle
39 N0cc86eb5633f40a5bee59269541af825 schema:name dimensions_id
40 schema:value pub.1037391917
41 rdf:type schema:PropertyValue
42 N1fcf63a59b314fa486c5c6beb839ca86 rdf:first sg:person.07761422345.54
43 rdf:rest N9c9073746752457e953f6de8f8eb677c
44 N3b5ec6537fdb4cbea4161653c401d0b7 rdf:first sg:person.01236253633.11
45 rdf:rest N1fcf63a59b314fa486c5c6beb839ca86
46 N3d05f9a70fbf497e90ae8dd5ddfe019b rdf:first sg:person.014703600445.02
47 rdf:rest N3b5ec6537fdb4cbea4161653c401d0b7
48 N55995a42f22a42e0abb4b4afd40fe02e schema:volumeNumber 19
49 rdf:type schema:PublicationVolume
50 N573600b0d3b849e984533c4990c8db68 schema:name Springer Nature - SN SciGraph project
51 rdf:type schema:Organization
52 N69ac572aefce49aabc4e6620c43e53cf schema:name readcube_id
53 schema:value b21e6f474d7bf852423b47a0afe1181682171bded6390758e6506fb1624eedde
54 rdf:type schema:PropertyValue
55 N7137551ba69e4d17b273ddea0b60aefa schema:issueNumber 1
56 rdf:type schema:PublicationIssue
57 N9c9073746752457e953f6de8f8eb677c rdf:first sg:person.01250231610.27
58 rdf:rest Nd9cdc3a6a7944dbc992e27054427c4a7
59 Na5fc5844b34b4278b95654e955581dae rdf:first sg:person.011676146405.43
60 rdf:rest rdf:nil
61 Na97822c2f50f46ffb6a8339b5d8e6410 schema:name doi
62 schema:value 10.1007/s11249-005-4265-6
63 rdf:type schema:PropertyValue
64 Nd9cdc3a6a7944dbc992e27054427c4a7 rdf:first sg:person.010226047036.46
65 rdf:rest Nf8016a1d1253462fab72ac5b8951acaf
66 Nf8016a1d1253462fab72ac5b8951acaf rdf:first sg:person.016511134237.98
67 rdf:rest Na5fc5844b34b4278b95654e955581dae
68 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
69 schema:name Engineering
70 rdf:type schema:DefinedTerm
71 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
72 schema:name Materials Engineering
73 rdf:type schema:DefinedTerm
74 sg:journal.1133987 schema:issn 1023-8883
75 1573-2711
76 schema:name Tribology Letters
77 rdf:type schema:Periodical
78 sg:person.010226047036.46 schema:affiliation https://www.grid.ac/institutes/grid.481551.c
79 schema:familyName Sanchez
80 schema:givenName M.I.
81 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010226047036.46
82 rdf:type schema:Person
83 sg:person.011676146405.43 schema:affiliation https://www.grid.ac/institutes/grid.450890.0
84 schema:familyName Terris
85 schema:givenName B.D.
86 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011676146405.43
87 rdf:type schema:Person
88 sg:person.01236253633.11 schema:affiliation https://www.grid.ac/institutes/grid.481551.c
89 schema:familyName Rettner
90 schema:givenName C.T.
91 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01236253633.11
92 rdf:type schema:Person
93 sg:person.01250231610.27 schema:affiliation https://www.grid.ac/institutes/grid.266683.f
94 schema:familyName Carter
95 schema:givenName K.R.
96 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01250231610.27
97 rdf:type schema:Person
98 sg:person.014703600445.02 schema:affiliation https://www.grid.ac/institutes/grid.481551.c
99 schema:familyName McClelland
100 schema:givenName G.M.
101 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014703600445.02
102 rdf:type schema:Person
103 sg:person.016511134237.98 schema:affiliation https://www.grid.ac/institutes/grid.450890.0
104 schema:familyName Best
105 schema:givenName M.E.
106 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016511134237.98
107 rdf:type schema:Person
108 sg:person.07761422345.54 schema:affiliation https://www.grid.ac/institutes/grid.481551.c
109 schema:familyName Hart
110 schema:givenName M.W.
111 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07761422345.54
112 rdf:type schema:Person
113 https://doi.org/10.1016/0043-1648(95)06764-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018190677
114 rdf:type schema:CreativeWork
115 https://doi.org/10.1016/j.mee.2004.05.010 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001755064
116 rdf:type schema:CreativeWork
117 https://doi.org/10.1017/cbo9781139171731 schema:sameAs https://app.dimensions.ai/details/publication/pub.1098687910
118 rdf:type schema:CreativeWork
119 https://doi.org/10.1063/1.1289816 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057692232
120 rdf:type schema:CreativeWork
121 https://doi.org/10.1063/1.1501763 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057713377
122 rdf:type schema:CreativeWork
123 https://doi.org/10.1063/1.1669343 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057745847
124 rdf:type schema:CreativeWork
125 https://doi.org/10.1109/20.560144 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061115425
126 rdf:type schema:CreativeWork
127 https://doi.org/10.1116/1.1618238 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062168960
128 rdf:type schema:CreativeWork
129 https://doi.org/10.1116/1.587499 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062197546
130 rdf:type schema:CreativeWork
131 https://doi.org/10.1116/1.588604 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062198651
132 rdf:type schema:CreativeWork
133 https://doi.org/10.1116/1.590417 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062200463
134 rdf:type schema:CreativeWork
135 https://doi.org/10.1117/12.390082 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025463565
136 rdf:type schema:CreativeWork
137 https://www.grid.ac/institutes/grid.266683.f schema:alternateName University of Massachusetts Amherst
138 schema:name Department of Polymer Science and Engineering, University of Massachusetts, 01003, USA
139 IBM Research Division, Almaden Research Center, 650 Harry Road, 95120, San Jose, CA, USA
140 rdf:type schema:Organization
141 https://www.grid.ac/institutes/grid.450890.0 schema:alternateName Hitachi Global Storage Technologies (United States)
142 schema:name Hitachi Global Storage Technologies, San Jose Research Center, 95120, San Jose, CA, USA
143 rdf:type schema:Organization
144 https://www.grid.ac/institutes/grid.481551.c schema:alternateName IBM Research - Almaden
145 schema:name IBM Research Division, Almaden Research Center, 650 Harry Road, 95120, San Jose, CA, USA
146 rdf:type schema:Organization
 




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