Oxidation of the (100) face of crystalline silicon View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2007-07

AUTHORS

M. I. Terebinskaya, V. V. Lobanov

ABSTRACT

The density functional theory was used to calculate the equilibrium structures of clusters serving as models of the sequence of reaction steps in the oxidation of the (100) face of crystalline silicon and their relative heat effects. The formation of all the intermediates on the (100) face proceeds without activation energy, suggesting the feasibility of avalanche-like formation of an SiO2 film. More... »

PAGES

278-283

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s11237-007-0034-y

DOI

http://dx.doi.org/10.1007/s11237-007-0034-y

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1015779406


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