Structure and Properties of Ti–O–N Coatings Produced by Reactive Magnetron Sputtering View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2014-02-08

AUTHORS

M. E. Konischev, O. S. Kuzmin, A. A. Pustovalova, N. S. Morozova, K. E. Evdokimov, R. A. Surmenev, V. F. Pichugin, M. Epple

ABSTRACT

Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti–O–N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given. More... »

PAGES

1144-1149

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s11182-014-0154-5

DOI

http://dx.doi.org/10.1007/s11182-014-0154-5

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1044560959


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Chemistry (incl. Structural)", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "National Research Tomsk Polytechnic University, Tomsk, Russia", 
          "id": "http://www.grid.ac/institutes/grid.27736.37", 
          "name": [
            "National Research Tomsk Polytechnic University, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Konischev", 
        "givenName": "M. E.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Physics of Strength and Material Science of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia", 
          "id": "http://www.grid.ac/institutes/grid.415877.8", 
          "name": [
            "Institute of Physics of Strength and Material Science of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kuzmin", 
        "givenName": "O. S.", 
        "id": "sg:person.013214124330.41", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013214124330.41"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "National Research Tomsk Polytechnic University, Tomsk, Russia", 
          "id": "http://www.grid.ac/institutes/grid.27736.37", 
          "name": [
            "National Research Tomsk Polytechnic University, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Pustovalova", 
        "givenName": "A. A.", 
        "id": "sg:person.010153635217.29", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010153635217.29"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "National Research Tomsk Polytechnic University, Tomsk, Russia", 
          "id": "http://www.grid.ac/institutes/grid.27736.37", 
          "name": [
            "National Research Tomsk Polytechnic University, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Morozova", 
        "givenName": "N. S.", 
        "id": "sg:person.012625244375.15", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012625244375.15"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "National Research Tomsk Polytechnic University, Tomsk, Russia", 
          "id": "http://www.grid.ac/institutes/grid.27736.37", 
          "name": [
            "National Research Tomsk Polytechnic University, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Evdokimov", 
        "givenName": "K. E.", 
        "id": "sg:person.07551520201.34", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07551520201.34"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "National Research Tomsk Polytechnic University, Tomsk, Russia", 
          "id": "http://www.grid.ac/institutes/grid.27736.37", 
          "name": [
            "National Research Tomsk Polytechnic University, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Surmenev", 
        "givenName": "R. A.", 
        "id": "sg:person.012573551471.29", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012573551471.29"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "National Research Tomsk Polytechnic University, Tomsk, Russia", 
          "id": "http://www.grid.ac/institutes/grid.27736.37", 
          "name": [
            "National Research Tomsk Polytechnic University, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Pichugin", 
        "givenName": "V. F.", 
        "id": "sg:person.010630457643.26", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010630457643.26"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Inorganic Chemistry of the University of Duisburg-Essen, Essen, Germany", 
          "id": "http://www.grid.ac/institutes/grid.5718.b", 
          "name": [
            "Institute of Inorganic Chemistry of the University of Duisburg-Essen, Essen, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Epple", 
        "givenName": "M.", 
        "id": "sg:person.011342402346.80", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011342402346.80"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1134/s1063784210080207", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1010788963", 
          "https://doi.org/10.1134/s1063784210080207"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/s1087659612040049", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049223178", 
          "https://doi.org/10.1134/s1087659612040049"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2014-02-08", 
    "datePublishedReg": "2014-02-08", 
    "description": "Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti\u2013O\u2013N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given.", 
    "genre": "article", 
    "id": "sg:pub.10.1007/s11182-014-0154-5", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1313824", 
        "issn": [
          "1064-8887", 
          "1573-9228"
        ], 
        "name": "Russian Physics Journal", 
        "publisher": "Springer Nature", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "10", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "56"
      }
    ], 
    "keywords": [
      "titanium oxynitride coatings", 
      "optical characteristics", 
      "oxynitride coatings", 
      "N coatings", 
      "titanium oxide", 
      "mid-frequency magnetron", 
      "reactive magnetron sputtering", 
      "stainless steel substrates", 
      "properties of Ti", 
      "free surface energy", 
      "spectroscopic lines", 
      "gas discharge", 
      "steel substrate", 
      "transmission electron microscopy", 
      "synthesized films", 
      "magnetron sputtering", 
      "contact angle", 
      "wetting angle", 
      "surface energy", 
      "coatings", 
      "electron microscopy", 
      "experimental study", 
      "Infrared Spectroscopy", 
      "Ti", 
      "oxide", 
      "sputtering", 
      "magnetron", 
      "angle", 
      "properties", 
      "spectroscopy", 
      "films", 
      "energy", 
      "structure", 
      "microscopy", 
      "characteristics", 
      "intensity", 
      "substrate", 
      "mode", 
      "morphology", 
      "results of examination", 
      "scanning", 
      "results", 
      "discharge", 
      "conditions", 
      "system", 
      "lines", 
      "study", 
      "synthesis", 
      "examination"
    ], 
    "name": "Structure and Properties of Ti\u2013O\u2013N Coatings Produced by Reactive Magnetron Sputtering", 
    "pagination": "1144-1149", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1044560959"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s11182-014-0154-5"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s11182-014-0154-5", 
      "https://app.dimensions.ai/details/publication/pub.1044560959"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2022-12-01T06:32", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20221201/entities/gbq_results/article/article_642.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1007/s11182-014-0154-5"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

176 TRIPLES      21 PREDICATES      77 URIs      65 LITERALS      6 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s11182-014-0154-5 schema:about anzsrc-for:03
2 anzsrc-for:0306
3 anzsrc-for:09
4 anzsrc-for:0912
5 schema:author N485f1d0c763c40e68622cfb88b4d83a7
6 schema:citation sg:pub.10.1134/s1063784210080207
7 sg:pub.10.1134/s1087659612040049
8 schema:datePublished 2014-02-08
9 schema:datePublishedReg 2014-02-08
10 schema:description Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti–O–N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given.
11 schema:genre article
12 schema:isAccessibleForFree false
13 schema:isPartOf N773e9fb7d3114701a4719cd50b314131
14 N967c91ec26a649c4bbf786b167592455
15 sg:journal.1313824
16 schema:keywords Infrared Spectroscopy
17 N coatings
18 Ti
19 angle
20 characteristics
21 coatings
22 conditions
23 contact angle
24 discharge
25 electron microscopy
26 energy
27 examination
28 experimental study
29 films
30 free surface energy
31 gas discharge
32 intensity
33 lines
34 magnetron
35 magnetron sputtering
36 microscopy
37 mid-frequency magnetron
38 mode
39 morphology
40 optical characteristics
41 oxide
42 oxynitride coatings
43 properties
44 properties of Ti
45 reactive magnetron sputtering
46 results
47 results of examination
48 scanning
49 spectroscopic lines
50 spectroscopy
51 sputtering
52 stainless steel substrates
53 steel substrate
54 structure
55 study
56 substrate
57 surface energy
58 synthesis
59 synthesized films
60 system
61 titanium oxide
62 titanium oxynitride coatings
63 transmission electron microscopy
64 wetting angle
65 schema:name Structure and Properties of Ti–O–N Coatings Produced by Reactive Magnetron Sputtering
66 schema:pagination 1144-1149
67 schema:productId Nab08b796ffb04c22ab6c36b0d3cadfd9
68 Nc1a6a1ce1bcf480cbc6875a795ae9a29
69 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044560959
70 https://doi.org/10.1007/s11182-014-0154-5
71 schema:sdDatePublished 2022-12-01T06:32
72 schema:sdLicense https://scigraph.springernature.com/explorer/license/
73 schema:sdPublisher N96f5e5686b574dd1a5b9041696f11773
74 schema:url https://doi.org/10.1007/s11182-014-0154-5
75 sgo:license sg:explorer/license/
76 sgo:sdDataset articles
77 rdf:type schema:ScholarlyArticle
78 N0f2c45d9d04f47b8b92d98a1f702522f rdf:first sg:person.07551520201.34
79 rdf:rest N99a9707e5cb74ea191f0a32e785fa918
80 N485f1d0c763c40e68622cfb88b4d83a7 rdf:first Nd57f572526d345f88c3c7b992c60f0a4
81 rdf:rest N965d9c09f52b4cd69a27ef9648d8cd0b
82 N6d8904140f1848c697c1e3a7c3fa9915 rdf:first sg:person.010153635217.29
83 rdf:rest N99d9883811f7427bb9e611ff0765263b
84 N773e9fb7d3114701a4719cd50b314131 schema:issueNumber 10
85 rdf:type schema:PublicationIssue
86 N965d9c09f52b4cd69a27ef9648d8cd0b rdf:first sg:person.013214124330.41
87 rdf:rest N6d8904140f1848c697c1e3a7c3fa9915
88 N967c91ec26a649c4bbf786b167592455 schema:volumeNumber 56
89 rdf:type schema:PublicationVolume
90 N96f5e5686b574dd1a5b9041696f11773 schema:name Springer Nature - SN SciGraph project
91 rdf:type schema:Organization
92 N99a9707e5cb74ea191f0a32e785fa918 rdf:first sg:person.012573551471.29
93 rdf:rest Nfd82a86d72df4ca5941952a62d5fd307
94 N99d9883811f7427bb9e611ff0765263b rdf:first sg:person.012625244375.15
95 rdf:rest N0f2c45d9d04f47b8b92d98a1f702522f
96 Nab08b796ffb04c22ab6c36b0d3cadfd9 schema:name dimensions_id
97 schema:value pub.1044560959
98 rdf:type schema:PropertyValue
99 Nc1a6a1ce1bcf480cbc6875a795ae9a29 schema:name doi
100 schema:value 10.1007/s11182-014-0154-5
101 rdf:type schema:PropertyValue
102 Ncf98b644010947f18f3e80f5d15af5dd rdf:first sg:person.011342402346.80
103 rdf:rest rdf:nil
104 Nd57f572526d345f88c3c7b992c60f0a4 schema:affiliation grid-institutes:grid.27736.37
105 schema:familyName Konischev
106 schema:givenName M. E.
107 rdf:type schema:Person
108 Nfd82a86d72df4ca5941952a62d5fd307 rdf:first sg:person.010630457643.26
109 rdf:rest Ncf98b644010947f18f3e80f5d15af5dd
110 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
111 schema:name Chemical Sciences
112 rdf:type schema:DefinedTerm
113 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
114 schema:name Physical Chemistry (incl. Structural)
115 rdf:type schema:DefinedTerm
116 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
117 schema:name Engineering
118 rdf:type schema:DefinedTerm
119 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
120 schema:name Materials Engineering
121 rdf:type schema:DefinedTerm
122 sg:journal.1313824 schema:issn 1064-8887
123 1573-9228
124 schema:name Russian Physics Journal
125 schema:publisher Springer Nature
126 rdf:type schema:Periodical
127 sg:person.010153635217.29 schema:affiliation grid-institutes:grid.27736.37
128 schema:familyName Pustovalova
129 schema:givenName A. A.
130 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010153635217.29
131 rdf:type schema:Person
132 sg:person.010630457643.26 schema:affiliation grid-institutes:grid.27736.37
133 schema:familyName Pichugin
134 schema:givenName V. F.
135 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010630457643.26
136 rdf:type schema:Person
137 sg:person.011342402346.80 schema:affiliation grid-institutes:grid.5718.b
138 schema:familyName Epple
139 schema:givenName M.
140 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011342402346.80
141 rdf:type schema:Person
142 sg:person.012573551471.29 schema:affiliation grid-institutes:grid.27736.37
143 schema:familyName Surmenev
144 schema:givenName R. A.
145 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012573551471.29
146 rdf:type schema:Person
147 sg:person.012625244375.15 schema:affiliation grid-institutes:grid.27736.37
148 schema:familyName Morozova
149 schema:givenName N. S.
150 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012625244375.15
151 rdf:type schema:Person
152 sg:person.013214124330.41 schema:affiliation grid-institutes:grid.415877.8
153 schema:familyName Kuzmin
154 schema:givenName O. S.
155 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013214124330.41
156 rdf:type schema:Person
157 sg:person.07551520201.34 schema:affiliation grid-institutes:grid.27736.37
158 schema:familyName Evdokimov
159 schema:givenName K. E.
160 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07551520201.34
161 rdf:type schema:Person
162 sg:pub.10.1134/s1063784210080207 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010788963
163 https://doi.org/10.1134/s1063784210080207
164 rdf:type schema:CreativeWork
165 sg:pub.10.1134/s1087659612040049 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049223178
166 https://doi.org/10.1134/s1087659612040049
167 rdf:type schema:CreativeWork
168 grid-institutes:grid.27736.37 schema:alternateName National Research Tomsk Polytechnic University, Tomsk, Russia
169 schema:name National Research Tomsk Polytechnic University, Tomsk, Russia
170 rdf:type schema:Organization
171 grid-institutes:grid.415877.8 schema:alternateName Institute of Physics of Strength and Material Science of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia
172 schema:name Institute of Physics of Strength and Material Science of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia
173 rdf:type schema:Organization
174 grid-institutes:grid.5718.b schema:alternateName Institute of Inorganic Chemistry of the University of Duisburg-Essen, Essen, Germany
175 schema:name Institute of Inorganic Chemistry of the University of Duisburg-Essen, Essen, Germany
176 rdf:type schema:Organization
 




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