Model of the coating growth under the conditions of magnetron sputtering deposition View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2010-06

AUTHORS

A. G. Knyazeva, S. A. Shanin

ABSTRACT

A mathematical model of a coating that grows during magnetron deposition is formulated and examined. The effect of the main technological and kinetic parameters on the coating growth dynamics is investigated.

PAGES

83-89

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s11182-010-9391-4

DOI

http://dx.doi.org/10.1007/s11182-010-9391-4

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1027539331


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "author": [
      {
        "affiliation": {
          "alternateName": "Institute of Strength Physics and Materials Science", 
          "id": "https://www.grid.ac/institutes/grid.467103.7", 
          "name": [
            "Institute of Strength Physics and Materials Science of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Knyazeva", 
        "givenName": "A. G.", 
        "id": "sg:person.015605237135.34", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015605237135.34"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Tomsk State University", 
          "id": "https://www.grid.ac/institutes/grid.77602.34", 
          "name": [
            "Tomsk State University, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Shanin", 
        "givenName": "S. A.", 
        "id": "sg:person.011656561171.13", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011656561171.13"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1088/0965-0393/4/4/004", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1012631039"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.3367/ufnr.0177.200705a.0473", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1071220553"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2010-06", 
    "datePublishedReg": "2010-06-01", 
    "description": "A mathematical model of a coating that grows during magnetron deposition is formulated and examined. The effect of the main technological and kinetic parameters on the coating growth dynamics is investigated.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s11182-010-9391-4", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1313824", 
        "issn": [
          "1064-8887", 
          "1573-9228"
        ], 
        "name": "Russian Physics Journal", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "1", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "53"
      }
    ], 
    "name": "Model of the coating growth under the conditions of magnetron sputtering deposition", 
    "pagination": "83-89", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "833095484b9eccd29c6caa35763be79b28c245d3bdba61216eba02c1afa11499"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s11182-010-9391-4"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1027539331"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s11182-010-9391-4", 
      "https://app.dimensions.ai/details/publication/pub.1027539331"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T10:35", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000349_0000000349/records_113667_00000001.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007%2Fs11182-010-9391-4"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s11182-010-9391-4'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s11182-010-9391-4'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s11182-010-9391-4'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s11182-010-9391-4'


 

This table displays all metadata directly associated to this object as RDF triples.

69 TRIPLES      20 PREDICATES      27 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s11182-010-9391-4 schema:author N263d6c2916da414d91b2221a0829448f
2 schema:citation https://doi.org/10.1088/0965-0393/4/4/004
3 https://doi.org/10.3367/ufnr.0177.200705a.0473
4 schema:datePublished 2010-06
5 schema:datePublishedReg 2010-06-01
6 schema:description A mathematical model of a coating that grows during magnetron deposition is formulated and examined. The effect of the main technological and kinetic parameters on the coating growth dynamics is investigated.
7 schema:genre research_article
8 schema:inLanguage en
9 schema:isAccessibleForFree false
10 schema:isPartOf Nb4c8b4435c4b44989cc700bb0b2f1bd7
11 Ne2a403f711d9410188dedafa9d303331
12 sg:journal.1313824
13 schema:name Model of the coating growth under the conditions of magnetron sputtering deposition
14 schema:pagination 83-89
15 schema:productId N1224313aa9364b50974098aef9a8a458
16 N5d996a8605494453a063c98a5b7cc2e8
17 N7dc91e79af914cb9880e929b5dc4f3f1
18 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027539331
19 https://doi.org/10.1007/s11182-010-9391-4
20 schema:sdDatePublished 2019-04-11T10:35
21 schema:sdLicense https://scigraph.springernature.com/explorer/license/
22 schema:sdPublisher N8481eb7eb31a46a093b4ef5e35b83651
23 schema:url http://link.springer.com/10.1007%2Fs11182-010-9391-4
24 sgo:license sg:explorer/license/
25 sgo:sdDataset articles
26 rdf:type schema:ScholarlyArticle
27 N1224313aa9364b50974098aef9a8a458 schema:name readcube_id
28 schema:value 833095484b9eccd29c6caa35763be79b28c245d3bdba61216eba02c1afa11499
29 rdf:type schema:PropertyValue
30 N263d6c2916da414d91b2221a0829448f rdf:first sg:person.015605237135.34
31 rdf:rest N515ab982e9d847499c212fe589a83ded
32 N515ab982e9d847499c212fe589a83ded rdf:first sg:person.011656561171.13
33 rdf:rest rdf:nil
34 N5d996a8605494453a063c98a5b7cc2e8 schema:name doi
35 schema:value 10.1007/s11182-010-9391-4
36 rdf:type schema:PropertyValue
37 N7dc91e79af914cb9880e929b5dc4f3f1 schema:name dimensions_id
38 schema:value pub.1027539331
39 rdf:type schema:PropertyValue
40 N8481eb7eb31a46a093b4ef5e35b83651 schema:name Springer Nature - SN SciGraph project
41 rdf:type schema:Organization
42 Nb4c8b4435c4b44989cc700bb0b2f1bd7 schema:volumeNumber 53
43 rdf:type schema:PublicationVolume
44 Ne2a403f711d9410188dedafa9d303331 schema:issueNumber 1
45 rdf:type schema:PublicationIssue
46 sg:journal.1313824 schema:issn 1064-8887
47 1573-9228
48 schema:name Russian Physics Journal
49 rdf:type schema:Periodical
50 sg:person.011656561171.13 schema:affiliation https://www.grid.ac/institutes/grid.77602.34
51 schema:familyName Shanin
52 schema:givenName S. A.
53 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011656561171.13
54 rdf:type schema:Person
55 sg:person.015605237135.34 schema:affiliation https://www.grid.ac/institutes/grid.467103.7
56 schema:familyName Knyazeva
57 schema:givenName A. G.
58 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015605237135.34
59 rdf:type schema:Person
60 https://doi.org/10.1088/0965-0393/4/4/004 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012631039
61 rdf:type schema:CreativeWork
62 https://doi.org/10.3367/ufnr.0177.200705a.0473 schema:sameAs https://app.dimensions.ai/details/publication/pub.1071220553
63 rdf:type schema:CreativeWork
64 https://www.grid.ac/institutes/grid.467103.7 schema:alternateName Institute of Strength Physics and Materials Science
65 schema:name Institute of Strength Physics and Materials Science of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia
66 rdf:type schema:Organization
67 https://www.grid.ac/institutes/grid.77602.34 schema:alternateName Tomsk State University
68 schema:name Tomsk State University, Tomsk, Russia
69 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...