Ultra-Shallow Chemical Characterization of Organic Thin Films Deposited by Plasma and Vacuum-Ultraviolet, Using Angle- and Excitation Energy-Resolved XPS View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2011-08

AUTHORS

Pierre-Luc Girard-Lauriault, Juan-Carlos Ruiz, Thomas Gross, Michael R. Wertheimer, Wolfgang E. S. Unger

ABSTRACT

Nitrogen (N)-rich organic thin films were deposited using both low-pressure plasma- and vacuum-ultraviolet-based techniques, from mixtures of ammonia (NH3) and ethylene (C2H4). These films were investigated using angle-resolved and excitation energy resolved X-ray photoelectron spectroscopy (ARXPS and ERXPS, respectively) in order to determine their sub-surface chemical profiles. These two techniques enable one to tune the “XPS 95%” information depth, z95%, by varying either the angle or the excitation energy. Using a combination of both techniques, z95% can be varied continuously from 0.7 to 11 nm. The surface-near chemistry is investigated using both high-resolution C 1s spectra and elemental concentrations derived from elemental peak intensities. Results show that while laboratory XPS, and even ARXPS, suggest homogenous surface chemistries, the novel combination of ARXPS and ERXPS points to the existence of a compositional profile in the extreme outer surface layer. Our conclusions are supported by simulations using SESSA software. More... »

PAGES

535-550

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s11090-011-9306-3

DOI

http://dx.doi.org/10.1007/s11090-011-9306-3

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1002450953


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Chemistry (incl. Structural)", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Federal Institute For Materials Research and Testing", 
          "id": "https://www.grid.ac/institutes/grid.71566.33", 
          "name": [
            "6.43 \u201cSchicht- und Oberfl\u00e4chenanalytik\u201d, BAM Bundesanstalt f\u00fcr Materialforschung und -pr\u00fcfung, 12200, Berlin, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Girard-Lauriault", 
        "givenName": "Pierre-Luc", 
        "id": "sg:person.07516355341.32", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07516355341.32"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ecole Polytechnique de Montr\u00e9al", 
          "id": "https://www.grid.ac/institutes/grid.183158.6", 
          "name": [
            "Department of Engineering Physics, \u00c9cole Polytechnique, C. P. 6079, Succursale Centre-Ville, H3C3A7, Montreal, QC, Canada"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ruiz", 
        "givenName": "Juan-Carlos", 
        "id": "sg:person.0603257505.76", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0603257505.76"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Federal Institute For Materials Research and Testing", 
          "id": "https://www.grid.ac/institutes/grid.71566.33", 
          "name": [
            "6.43 \u201cSchicht- und Oberfl\u00e4chenanalytik\u201d, BAM Bundesanstalt f\u00fcr Materialforschung und -pr\u00fcfung, 12200, Berlin, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Gross", 
        "givenName": "Thomas", 
        "id": "sg:person.0611377121.55", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0611377121.55"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ecole Polytechnique de Montr\u00e9al", 
          "id": "https://www.grid.ac/institutes/grid.183158.6", 
          "name": [
            "Department of Engineering Physics, \u00c9cole Polytechnique, C. P. 6079, Succursale Centre-Ville, H3C3A7, Montreal, QC, Canada"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Wertheimer", 
        "givenName": "Michael R.", 
        "id": "sg:person.01124106756.01", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01124106756.01"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Federal Institute For Materials Research and Testing", 
          "id": "https://www.grid.ac/institutes/grid.71566.33", 
          "name": [
            "6.43 \u201cSchicht- und Oberfl\u00e4chenanalytik\u201d, BAM Bundesanstalt f\u00fcr Materialforschung und -pr\u00fcfung, 12200, Berlin, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Unger", 
        "givenName": "Wolfgang E. S.", 
        "id": "sg:person.07455476272.89", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07455476272.89"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1002/ppap.200800054", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002356570"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.740171305", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002861670"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.740171305", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002861670"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.1433", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003684670"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.740171204", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004931537"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.740171204", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004931537"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/(sici)1096-9918(199902)27:2<103::aid-sia477>3.0.co;2-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006342150"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.2116/analsci.26.209", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006792241"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.2116/analsci.26.209", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006792241"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/cvde.200604035", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1010006563"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/ppap.200700067", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1010442068"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/(sici)1099-0518(19990701)37:13<2191::aid-pola34>3.0.co;2-f", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1010659572"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0257-8972(97)00285-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1013912416"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.1155", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014047822"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/ppap.201000042", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014843976"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.740230209", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015594708"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.2400", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1016359969"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/macp.200800089", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018393738"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.susc.2007.12.005", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1019833764"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0039-6028(96)01350-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1020359247"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/ppap.200700077", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1020736588"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/(sici)1097-4628(19981114)70:7<1283::aid-app5>3.0.co;2-i", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1023302720"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/(sici)1096-9918(200002)29:2<108::aid-sia700>3.0.co;2-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1024075204"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0092-640x(85)90016-6", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025483450"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.2097", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026214084"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.2097", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026214084"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/macp.200400510", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027397408"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0169-4332(98)00756-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029218957"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/mabi.200800359", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030938364"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/mabi.200800359", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030938364"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.radphyschem.2009.08.009", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1031934914"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.740210302", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032083610"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.740210302", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032083610"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0169-4332(96)00256-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032581372"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.elspec.2003.07.001", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1034685671"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/ppap.200900130", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036789743"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/ppap.200900130", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036789743"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/ppap.200600021", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1038114955"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.1564", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039317422"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0368-2048(94)02270-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040001243"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00604-006-0615-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043089125", 
          "https://doi.org/10.1007/s00604-006-0615-9"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00604-006-0615-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043089125", 
          "https://doi.org/10.1007/s00604-006-0615-9"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.1909", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045848569"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/ppap.200400092", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048918432"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/app.13589", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049308709"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s11090-010-9214-y", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049684052", 
          "https://doi.org/10.1007/s11090-010-9214-y"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s11090-010-9214-y", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049684052", 
          "https://doi.org/10.1007/s11090-010-9214-y"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/ppap.200900142", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049816572"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/ppap.200900142", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049816572"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2008.05.099", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1051013949"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.tsf.2008.02.033", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053353259"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/cm0002416", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055406661"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/cm0002416", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055406661"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/la046810w", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056146790"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/la046810w", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056146790"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/la104038q", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056153426"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/la104038q", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056153426"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2011-08", 
    "datePublishedReg": "2011-08-01", 
    "description": "Nitrogen (N)-rich organic thin films were deposited using both low-pressure plasma- and vacuum-ultraviolet-based techniques, from mixtures of ammonia (NH3) and ethylene (C2H4). These films were investigated using angle-resolved and excitation energy resolved X-ray photoelectron spectroscopy (ARXPS and ERXPS, respectively) in order to determine their sub-surface chemical profiles. These two techniques enable one to tune the \u201cXPS 95%\u201d information depth, z95%, by varying either the angle or the excitation energy. Using a combination of both techniques, z95% can be varied continuously from 0.7 to 11 nm. The surface-near chemistry is investigated using both high-resolution C 1s spectra and elemental concentrations derived from elemental peak intensities. Results show that while laboratory XPS, and even ARXPS, suggest homogenous surface chemistries, the novel combination of ARXPS and ERXPS points to the existence of a compositional profile in the extreme outer surface layer. Our conclusions are supported by simulations using SESSA software.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s11090-011-9306-3", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1124016", 
        "issn": [
          "0272-4324", 
          "1572-8986"
        ], 
        "name": "Plasma Chemistry and Plasma Processing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "4", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "31"
      }
    ], 
    "name": "Ultra-Shallow Chemical Characterization of Organic Thin Films Deposited by Plasma and Vacuum-Ultraviolet, Using Angle- and Excitation Energy-Resolved XPS", 
    "pagination": "535-550", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "0bab61e0dfb3b8af414ee9c921450279dd0a7187d7d30e29740921b090ba27d3"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s11090-011-9306-3"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1002450953"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s11090-011-9306-3", 
      "https://app.dimensions.ai/details/publication/pub.1002450953"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T15:00", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8663_00000509.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007%2Fs11090-011-9306-3"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s11090-011-9306-3'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s11090-011-9306-3'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s11090-011-9306-3'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s11090-011-9306-3'


 

This table displays all metadata directly associated to this object as RDF triples.

226 TRIPLES      21 PREDICATES      71 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s11090-011-9306-3 schema:about anzsrc-for:03
2 anzsrc-for:0306
3 schema:author N5ad6f35c8fa24866b7666af09869ebbf
4 schema:citation sg:pub.10.1007/s00604-006-0615-9
5 sg:pub.10.1007/s11090-010-9214-y
6 https://doi.org/10.1002/(sici)1096-9918(199902)27:2<103::aid-sia477>3.0.co;2-1
7 https://doi.org/10.1002/(sici)1096-9918(200002)29:2<108::aid-sia700>3.0.co;2-4
8 https://doi.org/10.1002/(sici)1097-4628(19981114)70:7<1283::aid-app5>3.0.co;2-i
9 https://doi.org/10.1002/(sici)1099-0518(19990701)37:13<2191::aid-pola34>3.0.co;2-f
10 https://doi.org/10.1002/app.13589
11 https://doi.org/10.1002/cvde.200604035
12 https://doi.org/10.1002/mabi.200800359
13 https://doi.org/10.1002/macp.200400510
14 https://doi.org/10.1002/macp.200800089
15 https://doi.org/10.1002/ppap.200400092
16 https://doi.org/10.1002/ppap.200600021
17 https://doi.org/10.1002/ppap.200700067
18 https://doi.org/10.1002/ppap.200700077
19 https://doi.org/10.1002/ppap.200800054
20 https://doi.org/10.1002/ppap.200900130
21 https://doi.org/10.1002/ppap.200900142
22 https://doi.org/10.1002/ppap.201000042
23 https://doi.org/10.1002/sia.1155
24 https://doi.org/10.1002/sia.1433
25 https://doi.org/10.1002/sia.1564
26 https://doi.org/10.1002/sia.1909
27 https://doi.org/10.1002/sia.2097
28 https://doi.org/10.1002/sia.2400
29 https://doi.org/10.1002/sia.740171204
30 https://doi.org/10.1002/sia.740171305
31 https://doi.org/10.1002/sia.740210302
32 https://doi.org/10.1002/sia.740230209
33 https://doi.org/10.1016/0092-640x(85)90016-6
34 https://doi.org/10.1016/0169-4332(96)00256-5
35 https://doi.org/10.1016/0368-2048(94)02270-4
36 https://doi.org/10.1016/j.apsusc.2008.05.099
37 https://doi.org/10.1016/j.elspec.2003.07.001
38 https://doi.org/10.1016/j.radphyschem.2009.08.009
39 https://doi.org/10.1016/j.susc.2007.12.005
40 https://doi.org/10.1016/j.tsf.2008.02.033
41 https://doi.org/10.1016/s0039-6028(96)01350-7
42 https://doi.org/10.1016/s0169-4332(98)00756-9
43 https://doi.org/10.1016/s0257-8972(97)00285-5
44 https://doi.org/10.1021/cm0002416
45 https://doi.org/10.1021/la046810w
46 https://doi.org/10.1021/la104038q
47 https://doi.org/10.2116/analsci.26.209
48 schema:datePublished 2011-08
49 schema:datePublishedReg 2011-08-01
50 schema:description Nitrogen (N)-rich organic thin films were deposited using both low-pressure plasma- and vacuum-ultraviolet-based techniques, from mixtures of ammonia (NH3) and ethylene (C2H4). These films were investigated using angle-resolved and excitation energy resolved X-ray photoelectron spectroscopy (ARXPS and ERXPS, respectively) in order to determine their sub-surface chemical profiles. These two techniques enable one to tune the “XPS 95%” information depth, z95%, by varying either the angle or the excitation energy. Using a combination of both techniques, z95% can be varied continuously from 0.7 to 11 nm. The surface-near chemistry is investigated using both high-resolution C 1s spectra and elemental concentrations derived from elemental peak intensities. Results show that while laboratory XPS, and even ARXPS, suggest homogenous surface chemistries, the novel combination of ARXPS and ERXPS points to the existence of a compositional profile in the extreme outer surface layer. Our conclusions are supported by simulations using SESSA software.
51 schema:genre research_article
52 schema:inLanguage en
53 schema:isAccessibleForFree false
54 schema:isPartOf N26ac86ca57084996a5f0b2844cd4bbb5
55 N5af05f9ccbe04727be5f166374628e87
56 sg:journal.1124016
57 schema:name Ultra-Shallow Chemical Characterization of Organic Thin Films Deposited by Plasma and Vacuum-Ultraviolet, Using Angle- and Excitation Energy-Resolved XPS
58 schema:pagination 535-550
59 schema:productId N9d547d4a4f3d42fda7dda2d672401e19
60 Ne7f59544fb084c67900d232fca16606c
61 Nf6126602c4954e338d3815a0760bfe7c
62 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002450953
63 https://doi.org/10.1007/s11090-011-9306-3
64 schema:sdDatePublished 2019-04-10T15:00
65 schema:sdLicense https://scigraph.springernature.com/explorer/license/
66 schema:sdPublisher Nca1b1456bbf847ff8ebf41d78150cdf5
67 schema:url http://link.springer.com/10.1007%2Fs11090-011-9306-3
68 sgo:license sg:explorer/license/
69 sgo:sdDataset articles
70 rdf:type schema:ScholarlyArticle
71 N1fe05355eafa47efa79d1951a945ea54 rdf:first sg:person.07455476272.89
72 rdf:rest rdf:nil
73 N26ac86ca57084996a5f0b2844cd4bbb5 schema:issueNumber 4
74 rdf:type schema:PublicationIssue
75 N3eb346ac546c401d87a4b32ed0cf933a rdf:first sg:person.0611377121.55
76 rdf:rest N76b5bef0c91b49f7af8f5a739eac8cd8
77 N5ad6f35c8fa24866b7666af09869ebbf rdf:first sg:person.07516355341.32
78 rdf:rest N9a2165bef75c43168fb7ae9c06a1ae86
79 N5af05f9ccbe04727be5f166374628e87 schema:volumeNumber 31
80 rdf:type schema:PublicationVolume
81 N76b5bef0c91b49f7af8f5a739eac8cd8 rdf:first sg:person.01124106756.01
82 rdf:rest N1fe05355eafa47efa79d1951a945ea54
83 N9a2165bef75c43168fb7ae9c06a1ae86 rdf:first sg:person.0603257505.76
84 rdf:rest N3eb346ac546c401d87a4b32ed0cf933a
85 N9d547d4a4f3d42fda7dda2d672401e19 schema:name readcube_id
86 schema:value 0bab61e0dfb3b8af414ee9c921450279dd0a7187d7d30e29740921b090ba27d3
87 rdf:type schema:PropertyValue
88 Nca1b1456bbf847ff8ebf41d78150cdf5 schema:name Springer Nature - SN SciGraph project
89 rdf:type schema:Organization
90 Ne7f59544fb084c67900d232fca16606c schema:name dimensions_id
91 schema:value pub.1002450953
92 rdf:type schema:PropertyValue
93 Nf6126602c4954e338d3815a0760bfe7c schema:name doi
94 schema:value 10.1007/s11090-011-9306-3
95 rdf:type schema:PropertyValue
96 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
97 schema:name Chemical Sciences
98 rdf:type schema:DefinedTerm
99 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
100 schema:name Physical Chemistry (incl. Structural)
101 rdf:type schema:DefinedTerm
102 sg:journal.1124016 schema:issn 0272-4324
103 1572-8986
104 schema:name Plasma Chemistry and Plasma Processing
105 rdf:type schema:Periodical
106 sg:person.01124106756.01 schema:affiliation https://www.grid.ac/institutes/grid.183158.6
107 schema:familyName Wertheimer
108 schema:givenName Michael R.
109 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01124106756.01
110 rdf:type schema:Person
111 sg:person.0603257505.76 schema:affiliation https://www.grid.ac/institutes/grid.183158.6
112 schema:familyName Ruiz
113 schema:givenName Juan-Carlos
114 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0603257505.76
115 rdf:type schema:Person
116 sg:person.0611377121.55 schema:affiliation https://www.grid.ac/institutes/grid.71566.33
117 schema:familyName Gross
118 schema:givenName Thomas
119 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0611377121.55
120 rdf:type schema:Person
121 sg:person.07455476272.89 schema:affiliation https://www.grid.ac/institutes/grid.71566.33
122 schema:familyName Unger
123 schema:givenName Wolfgang E. S.
124 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07455476272.89
125 rdf:type schema:Person
126 sg:person.07516355341.32 schema:affiliation https://www.grid.ac/institutes/grid.71566.33
127 schema:familyName Girard-Lauriault
128 schema:givenName Pierre-Luc
129 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07516355341.32
130 rdf:type schema:Person
131 sg:pub.10.1007/s00604-006-0615-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043089125
132 https://doi.org/10.1007/s00604-006-0615-9
133 rdf:type schema:CreativeWork
134 sg:pub.10.1007/s11090-010-9214-y schema:sameAs https://app.dimensions.ai/details/publication/pub.1049684052
135 https://doi.org/10.1007/s11090-010-9214-y
136 rdf:type schema:CreativeWork
137 https://doi.org/10.1002/(sici)1096-9918(199902)27:2<103::aid-sia477>3.0.co;2-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006342150
138 rdf:type schema:CreativeWork
139 https://doi.org/10.1002/(sici)1096-9918(200002)29:2<108::aid-sia700>3.0.co;2-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024075204
140 rdf:type schema:CreativeWork
141 https://doi.org/10.1002/(sici)1097-4628(19981114)70:7<1283::aid-app5>3.0.co;2-i schema:sameAs https://app.dimensions.ai/details/publication/pub.1023302720
142 rdf:type schema:CreativeWork
143 https://doi.org/10.1002/(sici)1099-0518(19990701)37:13<2191::aid-pola34>3.0.co;2-f schema:sameAs https://app.dimensions.ai/details/publication/pub.1010659572
144 rdf:type schema:CreativeWork
145 https://doi.org/10.1002/app.13589 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049308709
146 rdf:type schema:CreativeWork
147 https://doi.org/10.1002/cvde.200604035 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010006563
148 rdf:type schema:CreativeWork
149 https://doi.org/10.1002/mabi.200800359 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030938364
150 rdf:type schema:CreativeWork
151 https://doi.org/10.1002/macp.200400510 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027397408
152 rdf:type schema:CreativeWork
153 https://doi.org/10.1002/macp.200800089 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018393738
154 rdf:type schema:CreativeWork
155 https://doi.org/10.1002/ppap.200400092 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048918432
156 rdf:type schema:CreativeWork
157 https://doi.org/10.1002/ppap.200600021 schema:sameAs https://app.dimensions.ai/details/publication/pub.1038114955
158 rdf:type schema:CreativeWork
159 https://doi.org/10.1002/ppap.200700067 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010442068
160 rdf:type schema:CreativeWork
161 https://doi.org/10.1002/ppap.200700077 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020736588
162 rdf:type schema:CreativeWork
163 https://doi.org/10.1002/ppap.200800054 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002356570
164 rdf:type schema:CreativeWork
165 https://doi.org/10.1002/ppap.200900130 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036789743
166 rdf:type schema:CreativeWork
167 https://doi.org/10.1002/ppap.200900142 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049816572
168 rdf:type schema:CreativeWork
169 https://doi.org/10.1002/ppap.201000042 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014843976
170 rdf:type schema:CreativeWork
171 https://doi.org/10.1002/sia.1155 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014047822
172 rdf:type schema:CreativeWork
173 https://doi.org/10.1002/sia.1433 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003684670
174 rdf:type schema:CreativeWork
175 https://doi.org/10.1002/sia.1564 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039317422
176 rdf:type schema:CreativeWork
177 https://doi.org/10.1002/sia.1909 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045848569
178 rdf:type schema:CreativeWork
179 https://doi.org/10.1002/sia.2097 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026214084
180 rdf:type schema:CreativeWork
181 https://doi.org/10.1002/sia.2400 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016359969
182 rdf:type schema:CreativeWork
183 https://doi.org/10.1002/sia.740171204 schema:sameAs https://app.dimensions.ai/details/publication/pub.1004931537
184 rdf:type schema:CreativeWork
185 https://doi.org/10.1002/sia.740171305 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002861670
186 rdf:type schema:CreativeWork
187 https://doi.org/10.1002/sia.740210302 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032083610
188 rdf:type schema:CreativeWork
189 https://doi.org/10.1002/sia.740230209 schema:sameAs https://app.dimensions.ai/details/publication/pub.1015594708
190 rdf:type schema:CreativeWork
191 https://doi.org/10.1016/0092-640x(85)90016-6 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025483450
192 rdf:type schema:CreativeWork
193 https://doi.org/10.1016/0169-4332(96)00256-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032581372
194 rdf:type schema:CreativeWork
195 https://doi.org/10.1016/0368-2048(94)02270-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040001243
196 rdf:type schema:CreativeWork
197 https://doi.org/10.1016/j.apsusc.2008.05.099 schema:sameAs https://app.dimensions.ai/details/publication/pub.1051013949
198 rdf:type schema:CreativeWork
199 https://doi.org/10.1016/j.elspec.2003.07.001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1034685671
200 rdf:type schema:CreativeWork
201 https://doi.org/10.1016/j.radphyschem.2009.08.009 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031934914
202 rdf:type schema:CreativeWork
203 https://doi.org/10.1016/j.susc.2007.12.005 schema:sameAs https://app.dimensions.ai/details/publication/pub.1019833764
204 rdf:type schema:CreativeWork
205 https://doi.org/10.1016/j.tsf.2008.02.033 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053353259
206 rdf:type schema:CreativeWork
207 https://doi.org/10.1016/s0039-6028(96)01350-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020359247
208 rdf:type schema:CreativeWork
209 https://doi.org/10.1016/s0169-4332(98)00756-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029218957
210 rdf:type schema:CreativeWork
211 https://doi.org/10.1016/s0257-8972(97)00285-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1013912416
212 rdf:type schema:CreativeWork
213 https://doi.org/10.1021/cm0002416 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055406661
214 rdf:type schema:CreativeWork
215 https://doi.org/10.1021/la046810w schema:sameAs https://app.dimensions.ai/details/publication/pub.1056146790
216 rdf:type schema:CreativeWork
217 https://doi.org/10.1021/la104038q schema:sameAs https://app.dimensions.ai/details/publication/pub.1056153426
218 rdf:type schema:CreativeWork
219 https://doi.org/10.2116/analsci.26.209 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006792241
220 rdf:type schema:CreativeWork
221 https://www.grid.ac/institutes/grid.183158.6 schema:alternateName Ecole Polytechnique de Montréal
222 schema:name Department of Engineering Physics, École Polytechnique, C. P. 6079, Succursale Centre-Ville, H3C3A7, Montreal, QC, Canada
223 rdf:type schema:Organization
224 https://www.grid.ac/institutes/grid.71566.33 schema:alternateName Federal Institute For Materials Research and Testing
225 schema:name 6.43 “Schicht- und Oberflächenanalytik”, BAM Bundesanstalt für Materialforschung und -prüfung, 12200, Berlin, Germany
226 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...