Ontology type: schema:ScholarlyArticle
2015-12
AUTHORSMohammad Taghi Hosseinnejad, Zohreh Ghorannevis, Mahmood Ghoranneviss, G. Reza Etaati, Marzieh Shirazi
ABSTRACTPlasma focus (PF) technique is potentially promising candidate for the materials processing and surface modification because of the radiations in a wide range of energies. In this review paper, we discuss and report the use of PF device for transition hard metal nitrides thin film synthesis and investigation of some effective deposition parameters in PF. In this paper, we focus on tungsten nitride film, which has promising industrial and scientific applications. A systematic study has been performed to investigate the effect of the number of focus shots and substrate axial and angular positions on the physical properties of tungsten nitride film deposited by PF device. It is indicated that these parameters are effective in order to obtain good quality tungsten nitride film and estimating the optimum conditions for growing these films with desired physical properties. More... »
PAGES1217-1228
http://scigraph.springernature.com/pub.10.1007/s10894-015-9954-z
DOIhttp://dx.doi.org/10.1007/s10894-015-9954-z
DIMENSIONShttps://app.dimensions.ai/details/publication/pub.1017000037
JSON-LD is the canonical representation for SciGraph data.
TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT
[
{
"@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json",
"about": [
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Materials Engineering",
"type": "DefinedTerm"
},
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Engineering",
"type": "DefinedTerm"
}
],
"author": [
{
"affiliation": {
"alternateName": "Islamic Azad University, Science and Research Branch",
"id": "https://www.grid.ac/institutes/grid.472472.0",
"name": [
"Young Researchers and Elites Club, Science and Research Branch, Islamic Azad University, Tehran, Iran"
],
"type": "Organization"
},
"familyName": "Hosseinnejad",
"givenName": "Mohammad Taghi",
"id": "sg:person.013540014443.94",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013540014443.94"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Islamic Azad University , Karaj",
"id": "https://www.grid.ac/institutes/grid.411769.c",
"name": [
"Physics Department, Karaj Branch, Islamic Azad University, Karaj, Iran"
],
"type": "Organization"
},
"familyName": "Ghorannevis",
"givenName": "Zohreh",
"id": "sg:person.013753445623.02",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013753445623.02"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Islamic Azad University, Tehran",
"id": "https://www.grid.ac/institutes/grid.411463.5",
"name": [
"Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran"
],
"type": "Organization"
},
"familyName": "Ghoranneviss",
"givenName": "Mahmood",
"id": "sg:person.01175235121.92",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01175235121.92"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Amirkabir University of Technology",
"id": "https://www.grid.ac/institutes/grid.411368.9",
"name": [
"Nuclear Engineering and Physics Department, Amirkabir University of Technology, Tehran, Iran"
],
"type": "Organization"
},
"familyName": "Etaati",
"givenName": "G. Reza",
"id": "sg:person.01042426660.09",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01042426660.09"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Islamic Azad University, Science and Research Branch",
"id": "https://www.grid.ac/institutes/grid.472472.0",
"name": [
"Young Researchers and Elites Club, Science and Research Branch, Islamic Azad University, Tehran, Iran"
],
"type": "Organization"
},
"familyName": "Shirazi",
"givenName": "Marzieh",
"id": "sg:person.07604313071.12",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07604313071.12"
],
"type": "Person"
}
],
"citation": [
{
"id": "https://doi.org/10.1088/0022-3727/36/8/313",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1001882882"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.apsusc.2008.08.055",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1002038149"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.surfcoat.2005.11.053",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1002318010"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0042-207x(94)90020-5",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1002536891"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0042-207x(94)90020-5",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1002536891"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.apsusc.2011.03.155",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1003144671"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0022-3727/40/7/021",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1005614283"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s10894-011-9422-3",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1009556215",
"https://doi.org/10.1007/s10894-011-9422-3"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0257-8972(95)08214-x",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1014870892"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.physleta.2008.10.062",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1015663955"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.surfcoat.2004.08.116",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1017346089"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1002/sia.2083",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1019351955"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1002/sia.2083",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1019351955"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0022-3727/40/3/013",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1022503756"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0963-0252/12/3/315",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1023756619"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0375-9601(81)90473-4",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1026783365"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0375-9601(81)90473-4",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1026783365"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0257-8972(98)00803-2",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1027437876"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0257-8972(03)00628-5",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1028124871"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0257-8972(03)00628-5",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1028124871"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0963-0252/15/3/001",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1030673427"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0963-0252/15/3/001",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1030673427"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.surfcoat.2008.05.038",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1032810845"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0257-8972(01)01222-1",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1033108933"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.tsf.2004.10.053",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1033179939"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0040-6090(00)01041-5",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1033479144"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.apsusc.2013.10.025",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1034789880"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.wear.2006.07.010",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1034852088"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1023/a:1026274524191",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1036389618",
"https://doi.org/10.1023/a:1026274524191"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0022-3727/30/6/004",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1036913652"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0169-4332(00)00683-8",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1038573903"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0257-8972(99)00072-9",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1039477726"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0375-9601(93)91172-2",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1039760793"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0375-9601(93)91172-2",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1039760793"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/1742-6596/208/1/012103",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1039991756"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/1742-6596/208/1/012103",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1039991756"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0040-6090(98)01029-3",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1040174301"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1088/0022-3727/39/10/033",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1042609312"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s10894-011-9440-1",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1043294447",
"https://doi.org/10.1007/s10894-011-9440-1"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.mseb.2003.09.016",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1044324313"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0169-4332(03)00343-x",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1045883288"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/s0169-4332(03)00343-x",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1045883288"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.surfcoat.2010.11.015",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1046227763"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0040-6090(86)90280-4",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1048324183"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0040-6090(86)90280-4",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1048324183"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.vacuum.2013.01.018",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1049440316"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0375-9601(80)90272-8",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1051652332"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/0375-9601(80)90272-8",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1051652332"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1017/s0263034600008703",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1053986532"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1017/s0263034600008703",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1053986532"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.1711086",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057779464"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1116/1.1515911",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1062168029"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1116/1.579878",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1062189925"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1116/1.580673",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1062190720"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1119/1.15433",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1062233787"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1557/mrs2003.56",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1067968431"
],
"type": "CreativeWork"
}
],
"datePublished": "2015-12",
"datePublishedReg": "2015-12-01",
"description": "Plasma focus (PF) technique is potentially promising candidate for the materials processing and surface modification because of the radiations in a wide range of energies. In this review paper, we discuss and report the use of PF device for transition hard metal nitrides thin film synthesis and investigation of some effective deposition parameters in PF. In this paper, we focus on tungsten nitride film, which has promising industrial and scientific applications. A systematic study has been performed to investigate the effect of the number of focus shots and substrate axial and angular positions on the physical properties of tungsten nitride film deposited by PF device. It is indicated that these parameters are effective in order to obtain good quality tungsten nitride film and estimating the optimum conditions for growing these films with desired physical properties.",
"genre": "research_article",
"id": "sg:pub.10.1007/s10894-015-9954-z",
"inLanguage": [
"en"
],
"isAccessibleForFree": false,
"isPartOf": [
{
"id": "sg:journal.1136717",
"issn": [
"0164-0313",
"1572-9591"
],
"name": "Journal of Fusion Energy",
"type": "Periodical"
},
{
"issueNumber": "6",
"type": "PublicationIssue"
},
{
"type": "PublicationVolume",
"volumeNumber": "34"
}
],
"name": "Investigation of Effective Parameters on Metal Nitride Deposition by Plasma Focus Device: Number of Shots and Substrate Axial and Angular Positions",
"pagination": "1217-1228",
"productId": [
{
"name": "readcube_id",
"type": "PropertyValue",
"value": [
"50fece41c72bab6b907146682d15865a0588f4221e5ba78b0abae7579fc1ba09"
]
},
{
"name": "doi",
"type": "PropertyValue",
"value": [
"10.1007/s10894-015-9954-z"
]
},
{
"name": "dimensions_id",
"type": "PropertyValue",
"value": [
"pub.1017000037"
]
}
],
"sameAs": [
"https://doi.org/10.1007/s10894-015-9954-z",
"https://app.dimensions.ai/details/publication/pub.1017000037"
],
"sdDataset": "articles",
"sdDatePublished": "2019-04-10T22:31",
"sdLicense": "https://scigraph.springernature.com/explorer/license/",
"sdPublisher": {
"name": "Springer Nature - SN SciGraph project",
"type": "Organization"
},
"sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8690_00000511.jsonl",
"type": "ScholarlyArticle",
"url": "http://link.springer.com/10.1007%2Fs10894-015-9954-z"
}
]Download the RDF metadata as: json-ld nt turtle xml License info
JSON-LD is a popular format for linked data which is fully compatible with JSON.
curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s10894-015-9954-z'
N-Triples is a line-based linked data format ideal for batch operations.
curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s10894-015-9954-z'
Turtle is a human-readable linked data format.
curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s10894-015-9954-z'
RDF/XML is a standard XML format for linked data.
curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s10894-015-9954-z'
This table displays all metadata directly associated to this object as RDF triples.
236 TRIPLES
21 PREDICATES
72 URIs
19 LITERALS
7 BLANK NODES