Investigation of Effective Parameters on Metal Nitride Deposition by Plasma Focus Device: Number of Shots and Substrate Axial and Angular ... View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2015-12

AUTHORS

Mohammad Taghi Hosseinnejad, Zohreh Ghorannevis, Mahmood Ghoranneviss, G. Reza Etaati, Marzieh Shirazi

ABSTRACT

Plasma focus (PF) technique is potentially promising candidate for the materials processing and surface modification because of the radiations in a wide range of energies. In this review paper, we discuss and report the use of PF device for transition hard metal nitrides thin film synthesis and investigation of some effective deposition parameters in PF. In this paper, we focus on tungsten nitride film, which has promising industrial and scientific applications. A systematic study has been performed to investigate the effect of the number of focus shots and substrate axial and angular positions on the physical properties of tungsten nitride film deposited by PF device. It is indicated that these parameters are effective in order to obtain good quality tungsten nitride film and estimating the optimum conditions for growing these films with desired physical properties. More... »

PAGES

1217-1228

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s10894-015-9954-z

DOI

http://dx.doi.org/10.1007/s10894-015-9954-z

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1017000037


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Islamic Azad University, Science and Research Branch", 
          "id": "https://www.grid.ac/institutes/grid.472472.0", 
          "name": [
            "Young Researchers and Elites Club, Science and Research Branch, Islamic Azad University, Tehran, Iran"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Hosseinnejad", 
        "givenName": "Mohammad Taghi", 
        "id": "sg:person.013540014443.94", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013540014443.94"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Islamic Azad University , Karaj", 
          "id": "https://www.grid.ac/institutes/grid.411769.c", 
          "name": [
            "Physics Department, Karaj Branch, Islamic Azad University, Karaj, Iran"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ghorannevis", 
        "givenName": "Zohreh", 
        "id": "sg:person.013753445623.02", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013753445623.02"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Islamic Azad University, Tehran", 
          "id": "https://www.grid.ac/institutes/grid.411463.5", 
          "name": [
            "Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ghoranneviss", 
        "givenName": "Mahmood", 
        "id": "sg:person.01175235121.92", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01175235121.92"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Amirkabir University of Technology", 
          "id": "https://www.grid.ac/institutes/grid.411368.9", 
          "name": [
            "Nuclear Engineering and Physics Department, Amirkabir University of Technology, Tehran, Iran"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Etaati", 
        "givenName": "G. Reza", 
        "id": "sg:person.01042426660.09", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01042426660.09"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Islamic Azad University, Science and Research Branch", 
          "id": "https://www.grid.ac/institutes/grid.472472.0", 
          "name": [
            "Young Researchers and Elites Club, Science and Research Branch, Islamic Azad University, Tehran, Iran"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Shirazi", 
        "givenName": "Marzieh", 
        "id": "sg:person.07604313071.12", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07604313071.12"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1088/0022-3727/36/8/313", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001882882"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2008.08.055", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002038149"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.surfcoat.2005.11.053", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002318010"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0042-207x(94)90020-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002536891"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0042-207x(94)90020-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002536891"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2011.03.155", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003144671"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/40/7/021", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1005614283"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s10894-011-9422-3", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1009556215", 
          "https://doi.org/10.1007/s10894-011-9422-3"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0257-8972(95)08214-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014870892"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.physleta.2008.10.062", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015663955"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.surfcoat.2004.08.116", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017346089"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.2083", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1019351955"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/sia.2083", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1019351955"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/40/3/013", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022503756"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0963-0252/12/3/315", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1023756619"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0375-9601(81)90473-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026783365"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0375-9601(81)90473-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026783365"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0257-8972(98)00803-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027437876"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0257-8972(03)00628-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1028124871"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0257-8972(03)00628-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1028124871"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0963-0252/15/3/001", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030673427"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0963-0252/15/3/001", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030673427"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.surfcoat.2008.05.038", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032810845"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0257-8972(01)01222-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1033108933"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.tsf.2004.10.053", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1033179939"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0040-6090(00)01041-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1033479144"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2013.10.025", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1034789880"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.wear.2006.07.010", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1034852088"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1023/a:1026274524191", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036389618", 
          "https://doi.org/10.1023/a:1026274524191"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/30/6/004", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036913652"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0169-4332(00)00683-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1038573903"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0257-8972(99)00072-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039477726"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0375-9601(93)91172-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039760793"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0375-9601(93)91172-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039760793"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/1742-6596/208/1/012103", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039991756"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/1742-6596/208/1/012103", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039991756"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0040-6090(98)01029-3", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040174301"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/39/10/033", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1042609312"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s10894-011-9440-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043294447", 
          "https://doi.org/10.1007/s10894-011-9440-1"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.mseb.2003.09.016", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1044324313"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0169-4332(03)00343-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045883288"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0169-4332(03)00343-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045883288"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.surfcoat.2010.11.015", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046227763"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0040-6090(86)90280-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048324183"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0040-6090(86)90280-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048324183"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.vacuum.2013.01.018", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049440316"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0375-9601(80)90272-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1051652332"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0375-9601(80)90272-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1051652332"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1017/s0263034600008703", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053986532"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1017/s0263034600008703", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053986532"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1711086", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057779464"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.1515911", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062168029"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.579878", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062189925"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.580673", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062190720"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1119/1.15433", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062233787"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/mrs2003.56", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1067968431"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2015-12", 
    "datePublishedReg": "2015-12-01", 
    "description": "Plasma focus (PF) technique is potentially promising candidate for the materials processing and surface modification because of the radiations in a wide range of energies. In this review paper, we discuss and report the use of PF device for transition hard metal nitrides thin film synthesis and investigation of some effective deposition parameters in PF. In this paper, we focus on tungsten nitride film, which has promising industrial and scientific applications. A systematic study has been performed to investigate the effect of the number of focus shots and substrate axial and angular positions on the physical properties of tungsten nitride film deposited by PF device. It is indicated that these parameters are effective in order to obtain good quality tungsten nitride film and estimating the optimum conditions for growing these films with desired physical properties.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s10894-015-9954-z", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136717", 
        "issn": [
          "0164-0313", 
          "1572-9591"
        ], 
        "name": "Journal of Fusion Energy", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "6", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "34"
      }
    ], 
    "name": "Investigation of Effective Parameters on Metal Nitride Deposition by Plasma Focus Device: Number of Shots and Substrate Axial and Angular Positions", 
    "pagination": "1217-1228", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "50fece41c72bab6b907146682d15865a0588f4221e5ba78b0abae7579fc1ba09"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s10894-015-9954-z"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1017000037"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s10894-015-9954-z", 
      "https://app.dimensions.ai/details/publication/pub.1017000037"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T22:31", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8690_00000511.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007%2Fs10894-015-9954-z"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s10894-015-9954-z'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s10894-015-9954-z'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s10894-015-9954-z'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s10894-015-9954-z'


 

This table displays all metadata directly associated to this object as RDF triples.

236 TRIPLES      21 PREDICATES      72 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s10894-015-9954-z schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N5fb91234aa0041f1a9d6ed9b34e58b5f
4 schema:citation sg:pub.10.1007/s10894-011-9422-3
5 sg:pub.10.1007/s10894-011-9440-1
6 sg:pub.10.1023/a:1026274524191
7 https://doi.org/10.1002/sia.2083
8 https://doi.org/10.1016/0040-6090(86)90280-4
9 https://doi.org/10.1016/0042-207x(94)90020-5
10 https://doi.org/10.1016/0257-8972(95)08214-x
11 https://doi.org/10.1016/0375-9601(80)90272-8
12 https://doi.org/10.1016/0375-9601(81)90473-4
13 https://doi.org/10.1016/0375-9601(93)91172-2
14 https://doi.org/10.1016/j.apsusc.2008.08.055
15 https://doi.org/10.1016/j.apsusc.2011.03.155
16 https://doi.org/10.1016/j.apsusc.2013.10.025
17 https://doi.org/10.1016/j.mseb.2003.09.016
18 https://doi.org/10.1016/j.physleta.2008.10.062
19 https://doi.org/10.1016/j.surfcoat.2004.08.116
20 https://doi.org/10.1016/j.surfcoat.2005.11.053
21 https://doi.org/10.1016/j.surfcoat.2008.05.038
22 https://doi.org/10.1016/j.surfcoat.2010.11.015
23 https://doi.org/10.1016/j.tsf.2004.10.053
24 https://doi.org/10.1016/j.vacuum.2013.01.018
25 https://doi.org/10.1016/j.wear.2006.07.010
26 https://doi.org/10.1016/s0040-6090(00)01041-5
27 https://doi.org/10.1016/s0040-6090(98)01029-3
28 https://doi.org/10.1016/s0169-4332(00)00683-8
29 https://doi.org/10.1016/s0169-4332(03)00343-x
30 https://doi.org/10.1016/s0257-8972(01)01222-1
31 https://doi.org/10.1016/s0257-8972(03)00628-5
32 https://doi.org/10.1016/s0257-8972(98)00803-2
33 https://doi.org/10.1016/s0257-8972(99)00072-9
34 https://doi.org/10.1017/s0263034600008703
35 https://doi.org/10.1063/1.1711086
36 https://doi.org/10.1088/0022-3727/30/6/004
37 https://doi.org/10.1088/0022-3727/36/8/313
38 https://doi.org/10.1088/0022-3727/39/10/033
39 https://doi.org/10.1088/0022-3727/40/3/013
40 https://doi.org/10.1088/0022-3727/40/7/021
41 https://doi.org/10.1088/0963-0252/12/3/315
42 https://doi.org/10.1088/0963-0252/15/3/001
43 https://doi.org/10.1088/1742-6596/208/1/012103
44 https://doi.org/10.1116/1.1515911
45 https://doi.org/10.1116/1.579878
46 https://doi.org/10.1116/1.580673
47 https://doi.org/10.1119/1.15433
48 https://doi.org/10.1557/mrs2003.56
49 schema:datePublished 2015-12
50 schema:datePublishedReg 2015-12-01
51 schema:description Plasma focus (PF) technique is potentially promising candidate for the materials processing and surface modification because of the radiations in a wide range of energies. In this review paper, we discuss and report the use of PF device for transition hard metal nitrides thin film synthesis and investigation of some effective deposition parameters in PF. In this paper, we focus on tungsten nitride film, which has promising industrial and scientific applications. A systematic study has been performed to investigate the effect of the number of focus shots and substrate axial and angular positions on the physical properties of tungsten nitride film deposited by PF device. It is indicated that these parameters are effective in order to obtain good quality tungsten nitride film and estimating the optimum conditions for growing these films with desired physical properties.
52 schema:genre research_article
53 schema:inLanguage en
54 schema:isAccessibleForFree false
55 schema:isPartOf N2cfaeb6e4fca43a1af97e12d56a9aed5
56 Na795de10694246359be49a3c60863e16
57 sg:journal.1136717
58 schema:name Investigation of Effective Parameters on Metal Nitride Deposition by Plasma Focus Device: Number of Shots and Substrate Axial and Angular Positions
59 schema:pagination 1217-1228
60 schema:productId N0008dc4548734a269ab273a0b8879d63
61 N02056363e4754d239d69c0d2a0b0e405
62 N9428937fec0b4813beb0f80d3644e902
63 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017000037
64 https://doi.org/10.1007/s10894-015-9954-z
65 schema:sdDatePublished 2019-04-10T22:31
66 schema:sdLicense https://scigraph.springernature.com/explorer/license/
67 schema:sdPublisher N32f8636f3b5b4b0dbba9c77e65b153f6
68 schema:url http://link.springer.com/10.1007%2Fs10894-015-9954-z
69 sgo:license sg:explorer/license/
70 sgo:sdDataset articles
71 rdf:type schema:ScholarlyArticle
72 N0008dc4548734a269ab273a0b8879d63 schema:name doi
73 schema:value 10.1007/s10894-015-9954-z
74 rdf:type schema:PropertyValue
75 N02056363e4754d239d69c0d2a0b0e405 schema:name readcube_id
76 schema:value 50fece41c72bab6b907146682d15865a0588f4221e5ba78b0abae7579fc1ba09
77 rdf:type schema:PropertyValue
78 N14c4a3243b0549d6a9c3fb2671044f41 rdf:first sg:person.01175235121.92
79 rdf:rest N650e4c03061a422baa9bfdc6233dc631
80 N2cfaeb6e4fca43a1af97e12d56a9aed5 schema:volumeNumber 34
81 rdf:type schema:PublicationVolume
82 N32f8636f3b5b4b0dbba9c77e65b153f6 schema:name Springer Nature - SN SciGraph project
83 rdf:type schema:Organization
84 N5fb91234aa0041f1a9d6ed9b34e58b5f rdf:first sg:person.013540014443.94
85 rdf:rest N6b462c5d95474db7a8118f88db65337c
86 N650e4c03061a422baa9bfdc6233dc631 rdf:first sg:person.01042426660.09
87 rdf:rest N9567aa5362e1419895cf49df72ba5eb5
88 N6b462c5d95474db7a8118f88db65337c rdf:first sg:person.013753445623.02
89 rdf:rest N14c4a3243b0549d6a9c3fb2671044f41
90 N9428937fec0b4813beb0f80d3644e902 schema:name dimensions_id
91 schema:value pub.1017000037
92 rdf:type schema:PropertyValue
93 N9567aa5362e1419895cf49df72ba5eb5 rdf:first sg:person.07604313071.12
94 rdf:rest rdf:nil
95 Na795de10694246359be49a3c60863e16 schema:issueNumber 6
96 rdf:type schema:PublicationIssue
97 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
98 schema:name Engineering
99 rdf:type schema:DefinedTerm
100 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
101 schema:name Materials Engineering
102 rdf:type schema:DefinedTerm
103 sg:journal.1136717 schema:issn 0164-0313
104 1572-9591
105 schema:name Journal of Fusion Energy
106 rdf:type schema:Periodical
107 sg:person.01042426660.09 schema:affiliation https://www.grid.ac/institutes/grid.411368.9
108 schema:familyName Etaati
109 schema:givenName G. Reza
110 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01042426660.09
111 rdf:type schema:Person
112 sg:person.01175235121.92 schema:affiliation https://www.grid.ac/institutes/grid.411463.5
113 schema:familyName Ghoranneviss
114 schema:givenName Mahmood
115 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01175235121.92
116 rdf:type schema:Person
117 sg:person.013540014443.94 schema:affiliation https://www.grid.ac/institutes/grid.472472.0
118 schema:familyName Hosseinnejad
119 schema:givenName Mohammad Taghi
120 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013540014443.94
121 rdf:type schema:Person
122 sg:person.013753445623.02 schema:affiliation https://www.grid.ac/institutes/grid.411769.c
123 schema:familyName Ghorannevis
124 schema:givenName Zohreh
125 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013753445623.02
126 rdf:type schema:Person
127 sg:person.07604313071.12 schema:affiliation https://www.grid.ac/institutes/grid.472472.0
128 schema:familyName Shirazi
129 schema:givenName Marzieh
130 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07604313071.12
131 rdf:type schema:Person
132 sg:pub.10.1007/s10894-011-9422-3 schema:sameAs https://app.dimensions.ai/details/publication/pub.1009556215
133 https://doi.org/10.1007/s10894-011-9422-3
134 rdf:type schema:CreativeWork
135 sg:pub.10.1007/s10894-011-9440-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043294447
136 https://doi.org/10.1007/s10894-011-9440-1
137 rdf:type schema:CreativeWork
138 sg:pub.10.1023/a:1026274524191 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036389618
139 https://doi.org/10.1023/a:1026274524191
140 rdf:type schema:CreativeWork
141 https://doi.org/10.1002/sia.2083 schema:sameAs https://app.dimensions.ai/details/publication/pub.1019351955
142 rdf:type schema:CreativeWork
143 https://doi.org/10.1016/0040-6090(86)90280-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048324183
144 rdf:type schema:CreativeWork
145 https://doi.org/10.1016/0042-207x(94)90020-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002536891
146 rdf:type schema:CreativeWork
147 https://doi.org/10.1016/0257-8972(95)08214-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1014870892
148 rdf:type schema:CreativeWork
149 https://doi.org/10.1016/0375-9601(80)90272-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1051652332
150 rdf:type schema:CreativeWork
151 https://doi.org/10.1016/0375-9601(81)90473-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026783365
152 rdf:type schema:CreativeWork
153 https://doi.org/10.1016/0375-9601(93)91172-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039760793
154 rdf:type schema:CreativeWork
155 https://doi.org/10.1016/j.apsusc.2008.08.055 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002038149
156 rdf:type schema:CreativeWork
157 https://doi.org/10.1016/j.apsusc.2011.03.155 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003144671
158 rdf:type schema:CreativeWork
159 https://doi.org/10.1016/j.apsusc.2013.10.025 schema:sameAs https://app.dimensions.ai/details/publication/pub.1034789880
160 rdf:type schema:CreativeWork
161 https://doi.org/10.1016/j.mseb.2003.09.016 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044324313
162 rdf:type schema:CreativeWork
163 https://doi.org/10.1016/j.physleta.2008.10.062 schema:sameAs https://app.dimensions.ai/details/publication/pub.1015663955
164 rdf:type schema:CreativeWork
165 https://doi.org/10.1016/j.surfcoat.2004.08.116 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017346089
166 rdf:type schema:CreativeWork
167 https://doi.org/10.1016/j.surfcoat.2005.11.053 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002318010
168 rdf:type schema:CreativeWork
169 https://doi.org/10.1016/j.surfcoat.2008.05.038 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032810845
170 rdf:type schema:CreativeWork
171 https://doi.org/10.1016/j.surfcoat.2010.11.015 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046227763
172 rdf:type schema:CreativeWork
173 https://doi.org/10.1016/j.tsf.2004.10.053 schema:sameAs https://app.dimensions.ai/details/publication/pub.1033179939
174 rdf:type schema:CreativeWork
175 https://doi.org/10.1016/j.vacuum.2013.01.018 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049440316
176 rdf:type schema:CreativeWork
177 https://doi.org/10.1016/j.wear.2006.07.010 schema:sameAs https://app.dimensions.ai/details/publication/pub.1034852088
178 rdf:type schema:CreativeWork
179 https://doi.org/10.1016/s0040-6090(00)01041-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1033479144
180 rdf:type schema:CreativeWork
181 https://doi.org/10.1016/s0040-6090(98)01029-3 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040174301
182 rdf:type schema:CreativeWork
183 https://doi.org/10.1016/s0169-4332(00)00683-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1038573903
184 rdf:type schema:CreativeWork
185 https://doi.org/10.1016/s0169-4332(03)00343-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1045883288
186 rdf:type schema:CreativeWork
187 https://doi.org/10.1016/s0257-8972(01)01222-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1033108933
188 rdf:type schema:CreativeWork
189 https://doi.org/10.1016/s0257-8972(03)00628-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028124871
190 rdf:type schema:CreativeWork
191 https://doi.org/10.1016/s0257-8972(98)00803-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027437876
192 rdf:type schema:CreativeWork
193 https://doi.org/10.1016/s0257-8972(99)00072-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039477726
194 rdf:type schema:CreativeWork
195 https://doi.org/10.1017/s0263034600008703 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053986532
196 rdf:type schema:CreativeWork
197 https://doi.org/10.1063/1.1711086 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057779464
198 rdf:type schema:CreativeWork
199 https://doi.org/10.1088/0022-3727/30/6/004 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036913652
200 rdf:type schema:CreativeWork
201 https://doi.org/10.1088/0022-3727/36/8/313 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001882882
202 rdf:type schema:CreativeWork
203 https://doi.org/10.1088/0022-3727/39/10/033 schema:sameAs https://app.dimensions.ai/details/publication/pub.1042609312
204 rdf:type schema:CreativeWork
205 https://doi.org/10.1088/0022-3727/40/3/013 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022503756
206 rdf:type schema:CreativeWork
207 https://doi.org/10.1088/0022-3727/40/7/021 schema:sameAs https://app.dimensions.ai/details/publication/pub.1005614283
208 rdf:type schema:CreativeWork
209 https://doi.org/10.1088/0963-0252/12/3/315 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023756619
210 rdf:type schema:CreativeWork
211 https://doi.org/10.1088/0963-0252/15/3/001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030673427
212 rdf:type schema:CreativeWork
213 https://doi.org/10.1088/1742-6596/208/1/012103 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039991756
214 rdf:type schema:CreativeWork
215 https://doi.org/10.1116/1.1515911 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062168029
216 rdf:type schema:CreativeWork
217 https://doi.org/10.1116/1.579878 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062189925
218 rdf:type schema:CreativeWork
219 https://doi.org/10.1116/1.580673 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062190720
220 rdf:type schema:CreativeWork
221 https://doi.org/10.1119/1.15433 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062233787
222 rdf:type schema:CreativeWork
223 https://doi.org/10.1557/mrs2003.56 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067968431
224 rdf:type schema:CreativeWork
225 https://www.grid.ac/institutes/grid.411368.9 schema:alternateName Amirkabir University of Technology
226 schema:name Nuclear Engineering and Physics Department, Amirkabir University of Technology, Tehran, Iran
227 rdf:type schema:Organization
228 https://www.grid.ac/institutes/grid.411463.5 schema:alternateName Islamic Azad University, Tehran
229 schema:name Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran
230 rdf:type schema:Organization
231 https://www.grid.ac/institutes/grid.411769.c schema:alternateName Islamic Azad University , Karaj
232 schema:name Physics Department, Karaj Branch, Islamic Azad University, Karaj, Iran
233 rdf:type schema:Organization
234 https://www.grid.ac/institutes/grid.472472.0 schema:alternateName Islamic Azad University, Science and Research Branch
235 schema:name Young Researchers and Elites Club, Science and Research Branch, Islamic Azad University, Tehran, Iran
236 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...