Effects of Nitrogen Concentration on Microstructure of Tungsten Coatings Synthesized by Plasma Sputtering Method View Full Text


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Article Info

DATE

2015-05-30

AUTHORS

E. Vassallo, G. Angella, R. Caniello, S. Deambrosis, F. Inzoli, E. Miorin, M. Pedroni

ABSTRACT

The use of nitrogen seeding to reduce the edge plasma temperature in tokamak raises concern regarding the possible formation of tungsten nitride layers with different properties (melting temperature, hardness, retention, etc.) with respect to the W. Dedicated laboratory experiments are performed to investigate the interaction of W with N plasmas. In this paper, the structure and mechanical performance of WNx coatings with different nitrogen content prepared by rf plasma sputtering have been investigated. The coatings exhibited different phases as a function of the nitrogen content: films with very low N content (<1 atom%) mainly exhibited the W phase, the W and WNx phases were contemporaneously present for N contents in the range 1–5 % and only the WNx phases were observed for nitrogen content higher than 5 %. The mechanical performance of the WNx coatings was strongly influenced by the structure. The coating formed with 5 % of nitrogen showed the highest mechanical performance. The substrate heating during the plasma deposition has also improved the mechanical properties. More... »

PAGES

1246-1251

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s10894-015-9945-0

DOI

http://dx.doi.org/10.1007/s10894-015-9945-0

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1019875928


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0202", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Atomic, Molecular, Nuclear, Particle and Plasma Physics", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Vassallo", 
        "givenName": "E.", 
        "id": "sg:person.012164257665.01", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012164257665.01"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto per l\u2019Energetica e le Interfasi, 20125, Milan, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto per l\u2019Energetica e le Interfasi, 20125, Milan, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Angella", 
        "givenName": "G.", 
        "id": "sg:person.013102444771.37", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013102444771.37"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Caniello", 
        "givenName": "R.", 
        "id": "sg:person.011516501622.09", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011516501622.09"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto per l\u2019Energetica e le Interfasi, 35127, Padua, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto per l\u2019Energetica e le Interfasi, 35127, Padua, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Deambrosis", 
        "givenName": "S.", 
        "id": "sg:person.0617260013.45", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0617260013.45"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Inzoli", 
        "givenName": "F.", 
        "id": "sg:person.015513442756.15", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015513442756.15"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto per l\u2019Energetica e le Interfasi, 35127, Padua, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto per l\u2019Energetica e le Interfasi, 35127, Padua, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Miorin", 
        "givenName": "E.", 
        "id": "sg:person.01045516241.09", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01045516241.09"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Pedroni", 
        "givenName": "M.", 
        "id": "sg:person.010102707313.24", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010102707313.24"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2015-05-30", 
    "datePublishedReg": "2015-05-30", 
    "description": "The use of nitrogen seeding to reduce the edge plasma temperature in tokamak raises concern regarding the possible formation of tungsten nitride layers with different properties (melting temperature, hardness, retention, etc.) with respect to the W. Dedicated laboratory experiments are performed to investigate the interaction of W with N plasmas. In this paper, the structure and mechanical performance of WNx coatings with different nitrogen content prepared by rf plasma sputtering have been investigated. The coatings exhibited different phases as a function of the nitrogen content: films with very low N content (<1\u00a0atom%) mainly exhibited the W phase, the W and WNx phases were contemporaneously present for N contents in the range 1\u20135\u00a0% and only the WNx phases were observed for nitrogen content higher than 5\u00a0%. The mechanical performance of the WNx coatings was strongly influenced by the structure. The coating formed with 5\u00a0% of nitrogen showed the highest mechanical performance. The substrate heating during the plasma deposition has also improved the mechanical properties.", 
    "genre": "article", 
    "id": "sg:pub.10.1007/s10894-015-9945-0", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136717", 
        "issn": [
          "0164-0313", 
          "1572-9591"
        ], 
        "name": "Journal of Fusion Energy", 
        "publisher": "Springer Nature", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "6", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "34"
      }
    ], 
    "keywords": [
      "mechanical performance", 
      "WNx coatings", 
      "high mechanical performance", 
      "plasma sputtering method", 
      "edge plasma temperature", 
      "tungsten coatings", 
      "substrate heating", 
      "nitride layer", 
      "mechanical properties", 
      "plasma deposition", 
      "sputtering method", 
      "different nitrogen contents", 
      "W phase", 
      "coatings", 
      "tungsten nitride layer", 
      "dedicated laboratory experiments", 
      "RF plasma", 
      "nitrogen content", 
      "plasma temperature", 
      "use of nitrogen", 
      "laboratory experiments", 
      "performance", 
      "different properties", 
      "microstructure", 
      "phase", 
      "range 1", 
      "properties", 
      "possible formation", 
      "films", 
      "low N content", 
      "tokamak", 
      "heating", 
      "layer", 
      "temperature", 
      "different phases", 
      "structure", 
      "deposition", 
      "nitrogen concentration", 
      "content", 
      "nitrogen", 
      "plasma", 
      "experiments", 
      "method", 
      "N content", 
      "formation", 
      "respect", 
      "concentration", 
      "effect", 
      "use", 
      "interaction", 
      "function", 
      "concern", 
      "paper"
    ], 
    "name": "Effects of Nitrogen Concentration on Microstructure of Tungsten Coatings Synthesized by Plasma Sputtering Method", 
    "pagination": "1246-1251", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1019875928"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s10894-015-9945-0"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s10894-015-9945-0", 
      "https://app.dimensions.ai/details/publication/pub.1019875928"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2022-09-02T15:58", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20220902/entities/gbq_results/article/article_668.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1007/s10894-015-9945-0"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

164 TRIPLES      20 PREDICATES      79 URIs      69 LITERALS      6 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s10894-015-9945-0 schema:about anzsrc-for:02
2 anzsrc-for:0202
3 anzsrc-for:09
4 anzsrc-for:0912
5 schema:author N05e3d918eefb45fea3cecaa7c23f7bbb
6 schema:datePublished 2015-05-30
7 schema:datePublishedReg 2015-05-30
8 schema:description The use of nitrogen seeding to reduce the edge plasma temperature in tokamak raises concern regarding the possible formation of tungsten nitride layers with different properties (melting temperature, hardness, retention, etc.) with respect to the W. Dedicated laboratory experiments are performed to investigate the interaction of W with N plasmas. In this paper, the structure and mechanical performance of WNx coatings with different nitrogen content prepared by rf plasma sputtering have been investigated. The coatings exhibited different phases as a function of the nitrogen content: films with very low N content (<1 atom%) mainly exhibited the W phase, the W and WNx phases were contemporaneously present for N contents in the range 1–5 % and only the WNx phases were observed for nitrogen content higher than 5 %. The mechanical performance of the WNx coatings was strongly influenced by the structure. The coating formed with 5 % of nitrogen showed the highest mechanical performance. The substrate heating during the plasma deposition has also improved the mechanical properties.
9 schema:genre article
10 schema:isAccessibleForFree false
11 schema:isPartOf N4f4f400c2da749c8823db02f47d88af2
12 N567d2a66ab934292a8fc3a8ada4174d5
13 sg:journal.1136717
14 schema:keywords N content
15 RF plasma
16 W phase
17 WNx coatings
18 coatings
19 concentration
20 concern
21 content
22 dedicated laboratory experiments
23 deposition
24 different nitrogen contents
25 different phases
26 different properties
27 edge plasma temperature
28 effect
29 experiments
30 films
31 formation
32 function
33 heating
34 high mechanical performance
35 interaction
36 laboratory experiments
37 layer
38 low N content
39 mechanical performance
40 mechanical properties
41 method
42 microstructure
43 nitride layer
44 nitrogen
45 nitrogen concentration
46 nitrogen content
47 paper
48 performance
49 phase
50 plasma
51 plasma deposition
52 plasma sputtering method
53 plasma temperature
54 possible formation
55 properties
56 range 1
57 respect
58 sputtering method
59 structure
60 substrate heating
61 temperature
62 tokamak
63 tungsten coatings
64 tungsten nitride layer
65 use
66 use of nitrogen
67 schema:name Effects of Nitrogen Concentration on Microstructure of Tungsten Coatings Synthesized by Plasma Sputtering Method
68 schema:pagination 1246-1251
69 schema:productId N767e64ea54cb49f5888e91b2126ec032
70 N7f24635b729b4218ad4012e8045fcf18
71 schema:sameAs https://app.dimensions.ai/details/publication/pub.1019875928
72 https://doi.org/10.1007/s10894-015-9945-0
73 schema:sdDatePublished 2022-09-02T15:58
74 schema:sdLicense https://scigraph.springernature.com/explorer/license/
75 schema:sdPublisher N84e93598ce3342a5aa71a6be92e6571f
76 schema:url https://doi.org/10.1007/s10894-015-9945-0
77 sgo:license sg:explorer/license/
78 sgo:sdDataset articles
79 rdf:type schema:ScholarlyArticle
80 N05e3d918eefb45fea3cecaa7c23f7bbb rdf:first sg:person.012164257665.01
81 rdf:rest Nd242fb6091ec40edb1ad849c931c278a
82 N4f4f400c2da749c8823db02f47d88af2 schema:volumeNumber 34
83 rdf:type schema:PublicationVolume
84 N567d2a66ab934292a8fc3a8ada4174d5 schema:issueNumber 6
85 rdf:type schema:PublicationIssue
86 N600109ff74874dc896981036fd2b704b rdf:first sg:person.010102707313.24
87 rdf:rest rdf:nil
88 N767e64ea54cb49f5888e91b2126ec032 schema:name dimensions_id
89 schema:value pub.1019875928
90 rdf:type schema:PropertyValue
91 N7f24635b729b4218ad4012e8045fcf18 schema:name doi
92 schema:value 10.1007/s10894-015-9945-0
93 rdf:type schema:PropertyValue
94 N84e93598ce3342a5aa71a6be92e6571f schema:name Springer Nature - SN SciGraph project
95 rdf:type schema:Organization
96 Na9272492fbdc4de497f08713f70fb5a0 rdf:first sg:person.015513442756.15
97 rdf:rest Ndbeee508b18e46308cbd8f0333f9cd15
98 Nbcccf587f369426f8d0872b255e880bb rdf:first sg:person.0617260013.45
99 rdf:rest Na9272492fbdc4de497f08713f70fb5a0
100 Nc8a618db134e4162bf971cc3dc13ef8a rdf:first sg:person.011516501622.09
101 rdf:rest Nbcccf587f369426f8d0872b255e880bb
102 Nd242fb6091ec40edb1ad849c931c278a rdf:first sg:person.013102444771.37
103 rdf:rest Nc8a618db134e4162bf971cc3dc13ef8a
104 Ndbeee508b18e46308cbd8f0333f9cd15 rdf:first sg:person.01045516241.09
105 rdf:rest N600109ff74874dc896981036fd2b704b
106 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
107 schema:name Physical Sciences
108 rdf:type schema:DefinedTerm
109 anzsrc-for:0202 schema:inDefinedTermSet anzsrc-for:
110 schema:name Atomic, Molecular, Nuclear, Particle and Plasma Physics
111 rdf:type schema:DefinedTerm
112 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
113 schema:name Engineering
114 rdf:type schema:DefinedTerm
115 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
116 schema:name Materials Engineering
117 rdf:type schema:DefinedTerm
118 sg:journal.1136717 schema:issn 0164-0313
119 1572-9591
120 schema:name Journal of Fusion Energy
121 schema:publisher Springer Nature
122 rdf:type schema:Periodical
123 sg:person.010102707313.24 schema:affiliation grid-institutes:grid.5326.2
124 schema:familyName Pedroni
125 schema:givenName M.
126 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010102707313.24
127 rdf:type schema:Person
128 sg:person.01045516241.09 schema:affiliation grid-institutes:grid.5326.2
129 schema:familyName Miorin
130 schema:givenName E.
131 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01045516241.09
132 rdf:type schema:Person
133 sg:person.011516501622.09 schema:affiliation grid-institutes:grid.5326.2
134 schema:familyName Caniello
135 schema:givenName R.
136 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011516501622.09
137 rdf:type schema:Person
138 sg:person.012164257665.01 schema:affiliation grid-institutes:grid.5326.2
139 schema:familyName Vassallo
140 schema:givenName E.
141 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012164257665.01
142 rdf:type schema:Person
143 sg:person.013102444771.37 schema:affiliation grid-institutes:grid.5326.2
144 schema:familyName Angella
145 schema:givenName G.
146 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013102444771.37
147 rdf:type schema:Person
148 sg:person.015513442756.15 schema:affiliation grid-institutes:grid.5326.2
149 schema:familyName Inzoli
150 schema:givenName F.
151 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015513442756.15
152 rdf:type schema:Person
153 sg:person.0617260013.45 schema:affiliation grid-institutes:grid.5326.2
154 schema:familyName Deambrosis
155 schema:givenName S.
156 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0617260013.45
157 rdf:type schema:Person
158 grid-institutes:grid.5326.2 schema:alternateName CNR, Istituto di Fisica del Plasma “P. Caldirola”, 20125, Milan, Italy
159 CNR, Istituto per l’Energetica e le Interfasi, 20125, Milan, Italy
160 CNR, Istituto per l’Energetica e le Interfasi, 35127, Padua, Italy
161 schema:name CNR, Istituto di Fisica del Plasma “P. Caldirola”, 20125, Milan, Italy
162 CNR, Istituto per l’Energetica e le Interfasi, 20125, Milan, Italy
163 CNR, Istituto per l’Energetica e le Interfasi, 35127, Padua, Italy
164 rdf:type schema:Organization
 




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