Effects of Nitrogen Concentration on Microstructure of Tungsten Coatings Synthesized by Plasma Sputtering Method View Full Text


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Article Info

DATE

2015-05-30

AUTHORS

E. Vassallo, G. Angella, R. Caniello, S. Deambrosis, F. Inzoli, E. Miorin, M. Pedroni

ABSTRACT

The use of nitrogen seeding to reduce the edge plasma temperature in tokamak raises concern regarding the possible formation of tungsten nitride layers with different properties (melting temperature, hardness, retention, etc.) with respect to the W. Dedicated laboratory experiments are performed to investigate the interaction of W with N plasmas. In this paper, the structure and mechanical performance of WNx coatings with different nitrogen content prepared by rf plasma sputtering have been investigated. The coatings exhibited different phases as a function of the nitrogen content: films with very low N content (<1 atom%) mainly exhibited the W phase, the W and WNx phases were contemporaneously present for N contents in the range 1–5 % and only the WNx phases were observed for nitrogen content higher than 5 %. The mechanical performance of the WNx coatings was strongly influenced by the structure. The coating formed with 5 % of nitrogen showed the highest mechanical performance. The substrate heating during the plasma deposition has also improved the mechanical properties. More... »

PAGES

1246-1251

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s10894-015-9945-0

DOI

http://dx.doi.org/10.1007/s10894-015-9945-0

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1019875928


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0202", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Atomic, Molecular, Nuclear, Particle and Plasma Physics", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Vassallo", 
        "givenName": "E.", 
        "id": "sg:person.012164257665.01", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012164257665.01"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto per l\u2019Energetica e le Interfasi, 20125, Milan, Italy", 
          "id": "http://www.grid.ac/institutes/grid.494651.b", 
          "name": [
            "CNR, Istituto per l\u2019Energetica e le Interfasi, 20125, Milan, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Angella", 
        "givenName": "G.", 
        "id": "sg:person.013102444771.37", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013102444771.37"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Caniello", 
        "givenName": "R.", 
        "id": "sg:person.011516501622.09", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011516501622.09"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto per l\u2019Energetica e le Interfasi, 35127, Padua, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto per l\u2019Energetica e le Interfasi, 35127, Padua, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Deambrosis", 
        "givenName": "S.", 
        "id": "sg:person.0617260013.45", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0617260013.45"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Inzoli", 
        "givenName": "F.", 
        "id": "sg:person.015513442756.15", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015513442756.15"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto per l\u2019Energetica e le Interfasi, 35127, Padua, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto per l\u2019Energetica e le Interfasi, 35127, Padua, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Miorin", 
        "givenName": "E.", 
        "id": "sg:person.01045516241.09", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01045516241.09"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy", 
          "id": "http://www.grid.ac/institutes/grid.5326.2", 
          "name": [
            "CNR, Istituto di Fisica del Plasma \u201cP. Caldirola\u201d, 20125, Milan, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Pedroni", 
        "givenName": "M.", 
        "id": "sg:person.010102707313.24", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010102707313.24"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2015-05-30", 
    "datePublishedReg": "2015-05-30", 
    "description": "The use of nitrogen seeding to reduce the edge plasma temperature in tokamak raises concern regarding the possible formation of tungsten nitride layers with different properties (melting temperature, hardness, retention, etc.) with respect to the W. Dedicated laboratory experiments are performed to investigate the interaction of W with N plasmas. In this paper, the structure and mechanical performance of WNx coatings with different nitrogen content prepared by rf plasma sputtering have been investigated. The coatings exhibited different phases as a function of the nitrogen content: films with very low N content (<1\u00a0atom%) mainly exhibited the W phase, the W and WNx phases were contemporaneously present for N contents in the range 1\u20135\u00a0% and only the WNx phases were observed for nitrogen content higher than 5\u00a0%. The mechanical performance of the WNx coatings was strongly influenced by the structure. The coating formed with 5\u00a0% of nitrogen showed the highest mechanical performance. The substrate heating during the plasma deposition has also improved the mechanical properties.", 
    "genre": "article", 
    "id": "sg:pub.10.1007/s10894-015-9945-0", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136717", 
        "issn": [
          "0164-0313", 
          "1572-9591"
        ], 
        "name": "Journal of Fusion Energy", 
        "publisher": "Springer Nature", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "6", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "34"
      }
    ], 
    "keywords": [
      "mechanical performance", 
      "WNx coatings", 
      "high mechanical performance", 
      "plasma sputtering method", 
      "edge plasma temperature", 
      "tungsten coatings", 
      "substrate heating", 
      "nitride layer", 
      "mechanical properties", 
      "plasma deposition", 
      "sputtering method", 
      "different nitrogen contents", 
      "W phase", 
      "coatings", 
      "tungsten nitride layer", 
      "dedicated laboratory experiments", 
      "RF plasma", 
      "nitrogen content", 
      "plasma temperature", 
      "use of nitrogen", 
      "laboratory experiments", 
      "performance", 
      "different properties", 
      "microstructure", 
      "phase", 
      "range 1", 
      "properties", 
      "possible formation", 
      "films", 
      "low N content", 
      "tokamak", 
      "heating", 
      "layer", 
      "temperature", 
      "different phases", 
      "structure", 
      "deposition", 
      "nitrogen concentration", 
      "content", 
      "nitrogen", 
      "plasma", 
      "experiments", 
      "method", 
      "N content", 
      "formation", 
      "respect", 
      "concentration", 
      "effect", 
      "use", 
      "interaction", 
      "function", 
      "concern", 
      "paper"
    ], 
    "name": "Effects of Nitrogen Concentration on Microstructure of Tungsten Coatings Synthesized by Plasma Sputtering Method", 
    "pagination": "1246-1251", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1019875928"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s10894-015-9945-0"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s10894-015-9945-0", 
      "https://app.dimensions.ai/details/publication/pub.1019875928"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2022-12-01T06:32", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20221201/entities/gbq_results/article/article_649.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1007/s10894-015-9945-0"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

165 TRIPLES      20 PREDICATES      79 URIs      69 LITERALS      6 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s10894-015-9945-0 schema:about anzsrc-for:02
2 anzsrc-for:0202
3 anzsrc-for:09
4 anzsrc-for:0912
5 schema:author Nf4923631cfe64fc4821058cd0b8a7bb9
6 schema:datePublished 2015-05-30
7 schema:datePublishedReg 2015-05-30
8 schema:description The use of nitrogen seeding to reduce the edge plasma temperature in tokamak raises concern regarding the possible formation of tungsten nitride layers with different properties (melting temperature, hardness, retention, etc.) with respect to the W. Dedicated laboratory experiments are performed to investigate the interaction of W with N plasmas. In this paper, the structure and mechanical performance of WNx coatings with different nitrogen content prepared by rf plasma sputtering have been investigated. The coatings exhibited different phases as a function of the nitrogen content: films with very low N content (<1 atom%) mainly exhibited the W phase, the W and WNx phases were contemporaneously present for N contents in the range 1–5 % and only the WNx phases were observed for nitrogen content higher than 5 %. The mechanical performance of the WNx coatings was strongly influenced by the structure. The coating formed with 5 % of nitrogen showed the highest mechanical performance. The substrate heating during the plasma deposition has also improved the mechanical properties.
9 schema:genre article
10 schema:isAccessibleForFree false
11 schema:isPartOf N38970370c4a74ea0b7b4fbb5ac132238
12 Nf0fd026d7e5c45f29a4ce4373804176a
13 sg:journal.1136717
14 schema:keywords N content
15 RF plasma
16 W phase
17 WNx coatings
18 coatings
19 concentration
20 concern
21 content
22 dedicated laboratory experiments
23 deposition
24 different nitrogen contents
25 different phases
26 different properties
27 edge plasma temperature
28 effect
29 experiments
30 films
31 formation
32 function
33 heating
34 high mechanical performance
35 interaction
36 laboratory experiments
37 layer
38 low N content
39 mechanical performance
40 mechanical properties
41 method
42 microstructure
43 nitride layer
44 nitrogen
45 nitrogen concentration
46 nitrogen content
47 paper
48 performance
49 phase
50 plasma
51 plasma deposition
52 plasma sputtering method
53 plasma temperature
54 possible formation
55 properties
56 range 1
57 respect
58 sputtering method
59 structure
60 substrate heating
61 temperature
62 tokamak
63 tungsten coatings
64 tungsten nitride layer
65 use
66 use of nitrogen
67 schema:name Effects of Nitrogen Concentration on Microstructure of Tungsten Coatings Synthesized by Plasma Sputtering Method
68 schema:pagination 1246-1251
69 schema:productId N878b653ce5974bcdb9d35c1c003130f6
70 Nd7baaa5e3ce5405cbb1d46fe351de9df
71 schema:sameAs https://app.dimensions.ai/details/publication/pub.1019875928
72 https://doi.org/10.1007/s10894-015-9945-0
73 schema:sdDatePublished 2022-12-01T06:32
74 schema:sdLicense https://scigraph.springernature.com/explorer/license/
75 schema:sdPublisher Nd1d6ad56b474429bbc6b314d862076ee
76 schema:url https://doi.org/10.1007/s10894-015-9945-0
77 sgo:license sg:explorer/license/
78 sgo:sdDataset articles
79 rdf:type schema:ScholarlyArticle
80 N33b0c68ff80e40baa667dca454406ad0 rdf:first sg:person.01045516241.09
81 rdf:rest N41a1b8a33fcb457ba2ba0ea844608f58
82 N38970370c4a74ea0b7b4fbb5ac132238 schema:issueNumber 6
83 rdf:type schema:PublicationIssue
84 N3b92ec1f490e4ad1bb6d399038d3ca6f rdf:first sg:person.015513442756.15
85 rdf:rest N33b0c68ff80e40baa667dca454406ad0
86 N41a1b8a33fcb457ba2ba0ea844608f58 rdf:first sg:person.010102707313.24
87 rdf:rest rdf:nil
88 N5a6e09df1b8c4928bc16ea375c4a8772 rdf:first sg:person.0617260013.45
89 rdf:rest N3b92ec1f490e4ad1bb6d399038d3ca6f
90 N7de64bfea3f54cbb9c154cd92fd93900 rdf:first sg:person.013102444771.37
91 rdf:rest Nd7b5784a95a24e5ba6a190ec7e036af4
92 N878b653ce5974bcdb9d35c1c003130f6 schema:name dimensions_id
93 schema:value pub.1019875928
94 rdf:type schema:PropertyValue
95 Nd1d6ad56b474429bbc6b314d862076ee schema:name Springer Nature - SN SciGraph project
96 rdf:type schema:Organization
97 Nd7b5784a95a24e5ba6a190ec7e036af4 rdf:first sg:person.011516501622.09
98 rdf:rest N5a6e09df1b8c4928bc16ea375c4a8772
99 Nd7baaa5e3ce5405cbb1d46fe351de9df schema:name doi
100 schema:value 10.1007/s10894-015-9945-0
101 rdf:type schema:PropertyValue
102 Nf0fd026d7e5c45f29a4ce4373804176a schema:volumeNumber 34
103 rdf:type schema:PublicationVolume
104 Nf4923631cfe64fc4821058cd0b8a7bb9 rdf:first sg:person.012164257665.01
105 rdf:rest N7de64bfea3f54cbb9c154cd92fd93900
106 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
107 schema:name Physical Sciences
108 rdf:type schema:DefinedTerm
109 anzsrc-for:0202 schema:inDefinedTermSet anzsrc-for:
110 schema:name Atomic, Molecular, Nuclear, Particle and Plasma Physics
111 rdf:type schema:DefinedTerm
112 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
113 schema:name Engineering
114 rdf:type schema:DefinedTerm
115 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
116 schema:name Materials Engineering
117 rdf:type schema:DefinedTerm
118 sg:journal.1136717 schema:issn 0164-0313
119 1572-9591
120 schema:name Journal of Fusion Energy
121 schema:publisher Springer Nature
122 rdf:type schema:Periodical
123 sg:person.010102707313.24 schema:affiliation grid-institutes:grid.5326.2
124 schema:familyName Pedroni
125 schema:givenName M.
126 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010102707313.24
127 rdf:type schema:Person
128 sg:person.01045516241.09 schema:affiliation grid-institutes:grid.5326.2
129 schema:familyName Miorin
130 schema:givenName E.
131 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01045516241.09
132 rdf:type schema:Person
133 sg:person.011516501622.09 schema:affiliation grid-institutes:grid.5326.2
134 schema:familyName Caniello
135 schema:givenName R.
136 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011516501622.09
137 rdf:type schema:Person
138 sg:person.012164257665.01 schema:affiliation grid-institutes:grid.5326.2
139 schema:familyName Vassallo
140 schema:givenName E.
141 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012164257665.01
142 rdf:type schema:Person
143 sg:person.013102444771.37 schema:affiliation grid-institutes:grid.494651.b
144 schema:familyName Angella
145 schema:givenName G.
146 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013102444771.37
147 rdf:type schema:Person
148 sg:person.015513442756.15 schema:affiliation grid-institutes:grid.5326.2
149 schema:familyName Inzoli
150 schema:givenName F.
151 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015513442756.15
152 rdf:type schema:Person
153 sg:person.0617260013.45 schema:affiliation grid-institutes:grid.5326.2
154 schema:familyName Deambrosis
155 schema:givenName S.
156 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0617260013.45
157 rdf:type schema:Person
158 grid-institutes:grid.494651.b schema:alternateName CNR, Istituto per l’Energetica e le Interfasi, 20125, Milan, Italy
159 schema:name CNR, Istituto per l’Energetica e le Interfasi, 20125, Milan, Italy
160 rdf:type schema:Organization
161 grid-institutes:grid.5326.2 schema:alternateName CNR, Istituto di Fisica del Plasma “P. Caldirola”, 20125, Milan, Italy
162 CNR, Istituto per l’Energetica e le Interfasi, 35127, Padua, Italy
163 schema:name CNR, Istituto di Fisica del Plasma “P. Caldirola”, 20125, Milan, Italy
164 CNR, Istituto per l’Energetica e le Interfasi, 35127, Padua, Italy
165 rdf:type schema:Organization
 




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