Theoretical analysis and modeling of the obtaining of polycrystalline silicon in a fluidized-bed reactor View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2005-01

AUTHORS

V. A. Borodulya, L. M. Vinogradov, O. S. Rabinovich, A. V. Akulich

ABSTRACT

A theoretical analysis has been performed and basic problems of the technology of obtaining polycrystalline silicon by pyrolytic decomposition of monosilane in a fluidized-bed reactor have been considered. A one-dimensional, two-phase model of this process and basic results of mathematical modeling have been presented.

PAGES

47-53

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s10891-005-0028-3

DOI

http://dx.doi.org/10.1007/s10891-005-0028-3

DIMENSIONS

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