Deposition of SrCO3 thin film consisting of self-assembled bundles of nanostructures by a plasma-enhanced liquid injection chemical vapour deposition technique View Full Text


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Article Info

DATE

2022-05-03

AUTHORS

S. Raj Bharath, T. Maiyalagan, S. Arockiasamy

ABSTRACT

In this work, we demonstrate the deposition of SrCO3 thin film consisting of SrCO3 nano rods by a liquid injection plasma enhanced chemical vapour deposition (PE-LICVD). The precursor, Sr(thd)2tetraglyme (thd: 2,2,6,6-tetramethyl heptanedione) dissolved in tetrahydrofuran was used as Sr source for the deposition of thin film at a substrate temperature of 350 °C in Ar plasma. Thermal stability of Sr precursor was studied using dynamic TG/DTA in an inert Ar atmosphere at a heating rate of 10 °C/min, which revealed the complex to undergo two stepped weight loss indicating a partial cracking of ligand molecules, leading to an end residue of 1.9% at 429 °C. The equilibrium vapour pressure measurement of the Sr precursor by a TG-based transpiration technique using ClausiusClapeyron relation yielded a value of 92.5 ± 0.9 kJmol−1 for the enthalpy of sublimation (ΔH°sub) in the temperature range of 500–573 K. The XRD pattern of the coatings revealed SrCO3 to be in orthorhombic phase and is sufficiently crystalline in nature. The SEM analysis of the thin film revealed the growth of dump-bell shaped SrCO3 nanostructures and the mean size of the SrCO3 nanorods to be 70 ± 11 nm. The direct band gap evaluation of SrCO3 by Tauc method using a Diffuse Reflectance Spectra yielded a value of 3.10 eV. More... »

PAGES

1-9

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http://scigraph.springernature.com/pub.10.1007/s10854-022-08280-z

DOI

http://dx.doi.org/10.1007/s10854-022-08280-z

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