Effect of IrO2/Pt, IrO2, and Pt bottom electrodes on the structure and electrical properties of PZT based piezoelectric microelectromechanical system ... View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2018-07

AUTHORS

D. M. Potrepka, M. Rivas, H. Yu, M. Aindow, G. R. Fox, R. G. Polcawich

ABSTRACT

In piezoelectric microelectromechanical system devices with PbZrxTi1−xO3 as the ferroelectric, the bottom electrode can provide a template for oriented PbZrxTi1−xO3 growth. IrO2/Pt, IrO2, and Pt bottom electrode layers were sputter deposited onto TiO2 and were used as growth templates for oriented PbZr0.52Ti0.48O3 growth. The IrO2 and Pt were found to be {100}- and {111}-oriented, respectively, by X-ray diffraction. Scanning/transmission electron microscopy results indicate that the bottom electrodes are textured; however, the PbZr0.52Ti0.48O3 layer is partially textured. The impact of the bottom electrode type on the electrical properties is investigated by dielectric, ferroelectric, and piezoelectric measurements on circular capacitors formed on blanket PbZr0.52Ti0.48O3 films and unimorph cantilevers. For devices with PbZr0.52Ti0.48O3 on IrO2/Pt bottom electrodes, values for the dielectric constant of 1103 ± 28, loss tangent of 0.070 ± 0.004, maximum polarization of 0.399 ± 0.003 C/m2 at 38 MV/m, and leakage current of 5.4 ± 5.8 nA at 20 MV/m were obtained. Values of normalized strain of 0.0030 ± 0.0001 at 20 MV/m, and effective piezoelectric coefficient, d31,f, of 100 ± 25 pm/V at 15 MV/m were obtained on cantilever unimorphs with electrode area 16 µm × 123 µm and PZT area 16 µm × 125 µm. These values are comparable to results obtained for PbZr0.52Ti0.48O3 on 100 nm thick Pt-only bottom electrodes. More... »

PAGES

11367-11377

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s10854-018-9224-8

DOI

http://dx.doi.org/10.1007/s10854-018-9224-8

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1103995154


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "United States Army Research Laboratory", 
          "id": "https://www.grid.ac/institutes/grid.420282.e", 
          "name": [
            "Sensors and Electron Devices Directorate, U.S. Army Research Laboratory, 2800 Powder Mill Road, 20783, Adelphi, MD, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Potrepka", 
        "givenName": "D. M.", 
        "id": "sg:person.013007274276.59", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013007274276.59"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Connecticut", 
          "id": "https://www.grid.ac/institutes/grid.63054.34", 
          "name": [
            "Department of Materials Science and Engineering, Institute of Materials Science, University of Connecticut, 97 North Eagleville Road, 06269-3136, Storrs, CT, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Rivas", 
        "givenName": "M.", 
        "id": "sg:person.014306350573.74", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014306350573.74"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Connecticut", 
          "id": "https://www.grid.ac/institutes/grid.63054.34", 
          "name": [
            "Department of Materials Science and Engineering, Institute of Materials Science, University of Connecticut, 97 North Eagleville Road, 06269-3136, Storrs, CT, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Yu", 
        "givenName": "H.", 
        "id": "sg:person.013674501505.47", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013674501505.47"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Connecticut", 
          "id": "https://www.grid.ac/institutes/grid.63054.34", 
          "name": [
            "Department of Materials Science and Engineering, Institute of Materials Science, University of Connecticut, 97 North Eagleville Road, 06269-3136, Storrs, CT, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Aindow", 
        "givenName": "M.", 
        "id": "sg:person.01255733411.60", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01255733411.60"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Fox Materials Consulting, LLC, 7145 Baker Road, 80908, Colorado Springs, CO, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Fox", 
        "givenName": "G. R.", 
        "id": "sg:person.010051127237.95", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010051127237.95"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "United States Army Research Laboratory", 
          "id": "https://www.grid.ac/institutes/grid.420282.e", 
          "name": [
            "Sensors and Electron Devices Directorate, U.S. Army Research Laboratory, 2800 Powder Mill Road, 20783, Adelphi, MD, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Polcawich", 
        "givenName": "R. G.", 
        "id": "sg:person.01105505275.87", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01105505275.87"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1088/0022-3727/34/16/311", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001067767"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1080/10584580008215639", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1010936429"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.tsf.2004.03.021", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1011676258"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/jmr.2013.172", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1023357848"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s10853-011-5642-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1023511413", 
          "https://doi.org/10.1007/s10853-011-5642-1"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/b978-012480874-4/50022-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1031191909"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-1902(59)80070-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036667968"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-1902(59)80070-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036667968"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2013.07.168", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036955923"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jeurceramsoc.2005.03.077", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1044224088"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/jmr.2002.0257", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047619641"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.112031", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057659586"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.369230", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058002071"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.80.205122", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060630899"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.80.205122", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060630899"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.1615982", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062168945"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.35.2210", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063055541"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.36.l1032", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063058659"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.42.5941", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063070603"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.tsf.2017.07.024", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1090656388"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/tuffc.2017.2703670", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1090694858"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s10854-017-7930-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1092330182", 
          "https://doi.org/10.1007/s10854-017-7930-2"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2018-07", 
    "datePublishedReg": "2018-07-01", 
    "description": "In piezoelectric microelectromechanical system devices with PbZrxTi1\u2212xO3 as the ferroelectric, the bottom electrode can provide a template for oriented PbZrxTi1\u2212xO3 growth. IrO2/Pt, IrO2, and Pt bottom electrode layers were sputter deposited onto TiO2 and were used as growth templates for oriented PbZr0.52Ti0.48O3 growth. The IrO2 and Pt were found to be {100}- and {111}-oriented, respectively, by X-ray diffraction. Scanning/transmission electron microscopy results indicate that the bottom electrodes are textured; however, the PbZr0.52Ti0.48O3 layer is partially textured. The impact of the bottom electrode type on the electrical properties is investigated by dielectric, ferroelectric, and piezoelectric measurements on circular capacitors formed on blanket PbZr0.52Ti0.48O3 films and unimorph cantilevers. For devices with PbZr0.52Ti0.48O3 on IrO2/Pt bottom electrodes, values for the dielectric constant of 1103 \u00b1 28, loss tangent of 0.070 \u00b1 0.004, maximum polarization of 0.399 \u00b1 0.003 C/m2 at 38 MV/m, and leakage current of 5.4 \u00b1 5.8 nA at 20 MV/m were obtained. Values of normalized strain of 0.0030 \u00b1 0.0001 at 20 MV/m, and effective piezoelectric coefficient, d31,f, of 100 \u00b1 25 pm/V at 15 MV/m were obtained on cantilever unimorphs with electrode area 16 \u00b5m \u00d7 123 \u00b5m and PZT area 16 \u00b5m \u00d7 125 \u00b5m. These values are comparable to results obtained for PbZr0.52Ti0.48O3 on 100 nm thick Pt-only bottom electrodes.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s10854-018-9224-8", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136825", 
        "issn": [
          "0957-4522", 
          "1573-482X"
        ], 
        "name": "Journal of Materials Science: Materials in Electronics", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "13", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "29"
      }
    ], 
    "name": "Effect of IrO2/Pt, IrO2, and Pt bottom electrodes on the structure and electrical properties of PZT based piezoelectric microelectromechanical system devices", 
    "pagination": "11367-11377", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "39c6d4de4c6c533989e829f8deec0873b213b269ec29190ec732cf7d2b56d1ed"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s10854-018-9224-8"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1103995154"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s10854-018-9224-8", 
      "https://app.dimensions.ai/details/publication/pub.1103995154"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T09:51", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000347_0000000347/records_89789_00000003.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://link.springer.com/10.1007%2Fs10854-018-9224-8"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s10854-018-9224-8'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s10854-018-9224-8'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s10854-018-9224-8'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s10854-018-9224-8'


 

This table displays all metadata directly associated to this object as RDF triples.

163 TRIPLES      21 PREDICATES      47 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s10854-018-9224-8 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N3c15f4c8785b48ac9b277590dda28d2e
4 schema:citation sg:pub.10.1007/s10853-011-5642-1
5 sg:pub.10.1007/s10854-017-7930-2
6 https://doi.org/10.1016/0022-1902(59)80070-1
7 https://doi.org/10.1016/b978-012480874-4/50022-1
8 https://doi.org/10.1016/j.apsusc.2013.07.168
9 https://doi.org/10.1016/j.jeurceramsoc.2005.03.077
10 https://doi.org/10.1016/j.tsf.2004.03.021
11 https://doi.org/10.1016/j.tsf.2017.07.024
12 https://doi.org/10.1063/1.112031
13 https://doi.org/10.1063/1.369230
14 https://doi.org/10.1080/10584580008215639
15 https://doi.org/10.1088/0022-3727/34/16/311
16 https://doi.org/10.1103/physrevb.80.205122
17 https://doi.org/10.1109/tuffc.2017.2703670
18 https://doi.org/10.1116/1.1615982
19 https://doi.org/10.1143/jjap.35.2210
20 https://doi.org/10.1143/jjap.36.l1032
21 https://doi.org/10.1143/jjap.42.5941
22 https://doi.org/10.1557/jmr.2002.0257
23 https://doi.org/10.1557/jmr.2013.172
24 schema:datePublished 2018-07
25 schema:datePublishedReg 2018-07-01
26 schema:description In piezoelectric microelectromechanical system devices with PbZrxTi1−xO3 as the ferroelectric, the bottom electrode can provide a template for oriented PbZrxTi1−xO3 growth. IrO2/Pt, IrO2, and Pt bottom electrode layers were sputter deposited onto TiO2 and were used as growth templates for oriented PbZr0.52Ti0.48O3 growth. The IrO2 and Pt were found to be {100}- and {111}-oriented, respectively, by X-ray diffraction. Scanning/transmission electron microscopy results indicate that the bottom electrodes are textured; however, the PbZr0.52Ti0.48O3 layer is partially textured. The impact of the bottom electrode type on the electrical properties is investigated by dielectric, ferroelectric, and piezoelectric measurements on circular capacitors formed on blanket PbZr0.52Ti0.48O3 films and unimorph cantilevers. For devices with PbZr0.52Ti0.48O3 on IrO2/Pt bottom electrodes, values for the dielectric constant of 1103 ± 28, loss tangent of 0.070 ± 0.004, maximum polarization of 0.399 ± 0.003 C/m2 at 38 MV/m, and leakage current of 5.4 ± 5.8 nA at 20 MV/m were obtained. Values of normalized strain of 0.0030 ± 0.0001 at 20 MV/m, and effective piezoelectric coefficient, d31,f, of 100 ± 25 pm/V at 15 MV/m were obtained on cantilever unimorphs with electrode area 16 µm × 123 µm and PZT area 16 µm × 125 µm. These values are comparable to results obtained for PbZr0.52Ti0.48O3 on 100 nm thick Pt-only bottom electrodes.
27 schema:genre research_article
28 schema:inLanguage en
29 schema:isAccessibleForFree false
30 schema:isPartOf N5581449e0c404a58ae8341124d9576d7
31 Nda0442415a0b4266add8719cb9466aa3
32 sg:journal.1136825
33 schema:name Effect of IrO2/Pt, IrO2, and Pt bottom electrodes on the structure and electrical properties of PZT based piezoelectric microelectromechanical system devices
34 schema:pagination 11367-11377
35 schema:productId N40f4204f0f6a466ea4499917fa4f49ec
36 N483ac94844374d0c86a8b32014da8220
37 N6fcce64f08b2420ca78d072280aa346c
38 schema:sameAs https://app.dimensions.ai/details/publication/pub.1103995154
39 https://doi.org/10.1007/s10854-018-9224-8
40 schema:sdDatePublished 2019-04-11T09:51
41 schema:sdLicense https://scigraph.springernature.com/explorer/license/
42 schema:sdPublisher Ne0213e4eeb0d4655a33e8750e02bf0ac
43 schema:url https://link.springer.com/10.1007%2Fs10854-018-9224-8
44 sgo:license sg:explorer/license/
45 sgo:sdDataset articles
46 rdf:type schema:ScholarlyArticle
47 N1068099ebee04c59b939b558cf22aebd rdf:first sg:person.013674501505.47
48 rdf:rest N20b0a983e15442f6ab27a8cac62f5889
49 N20b0a983e15442f6ab27a8cac62f5889 rdf:first sg:person.01255733411.60
50 rdf:rest Nf86bf027db744e28bee8881abf719bc8
51 N3c15f4c8785b48ac9b277590dda28d2e rdf:first sg:person.013007274276.59
52 rdf:rest N7b88217b4e624508b95fb4eff8eea8fd
53 N40f4204f0f6a466ea4499917fa4f49ec schema:name readcube_id
54 schema:value 39c6d4de4c6c533989e829f8deec0873b213b269ec29190ec732cf7d2b56d1ed
55 rdf:type schema:PropertyValue
56 N483ac94844374d0c86a8b32014da8220 schema:name doi
57 schema:value 10.1007/s10854-018-9224-8
58 rdf:type schema:PropertyValue
59 N50a042b0ff734e1594af407568cdda55 rdf:first sg:person.01105505275.87
60 rdf:rest rdf:nil
61 N5581449e0c404a58ae8341124d9576d7 schema:volumeNumber 29
62 rdf:type schema:PublicationVolume
63 N6f85f47c2c1140e7958ec136e0a1ecb1 schema:name Fox Materials Consulting, LLC, 7145 Baker Road, 80908, Colorado Springs, CO, USA
64 rdf:type schema:Organization
65 N6fcce64f08b2420ca78d072280aa346c schema:name dimensions_id
66 schema:value pub.1103995154
67 rdf:type schema:PropertyValue
68 N7b88217b4e624508b95fb4eff8eea8fd rdf:first sg:person.014306350573.74
69 rdf:rest N1068099ebee04c59b939b558cf22aebd
70 Nda0442415a0b4266add8719cb9466aa3 schema:issueNumber 13
71 rdf:type schema:PublicationIssue
72 Ne0213e4eeb0d4655a33e8750e02bf0ac schema:name Springer Nature - SN SciGraph project
73 rdf:type schema:Organization
74 Nf86bf027db744e28bee8881abf719bc8 rdf:first sg:person.010051127237.95
75 rdf:rest N50a042b0ff734e1594af407568cdda55
76 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
77 schema:name Engineering
78 rdf:type schema:DefinedTerm
79 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
80 schema:name Materials Engineering
81 rdf:type schema:DefinedTerm
82 sg:journal.1136825 schema:issn 0957-4522
83 1573-482X
84 schema:name Journal of Materials Science: Materials in Electronics
85 rdf:type schema:Periodical
86 sg:person.010051127237.95 schema:affiliation N6f85f47c2c1140e7958ec136e0a1ecb1
87 schema:familyName Fox
88 schema:givenName G. R.
89 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010051127237.95
90 rdf:type schema:Person
91 sg:person.01105505275.87 schema:affiliation https://www.grid.ac/institutes/grid.420282.e
92 schema:familyName Polcawich
93 schema:givenName R. G.
94 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01105505275.87
95 rdf:type schema:Person
96 sg:person.01255733411.60 schema:affiliation https://www.grid.ac/institutes/grid.63054.34
97 schema:familyName Aindow
98 schema:givenName M.
99 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01255733411.60
100 rdf:type schema:Person
101 sg:person.013007274276.59 schema:affiliation https://www.grid.ac/institutes/grid.420282.e
102 schema:familyName Potrepka
103 schema:givenName D. M.
104 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013007274276.59
105 rdf:type schema:Person
106 sg:person.013674501505.47 schema:affiliation https://www.grid.ac/institutes/grid.63054.34
107 schema:familyName Yu
108 schema:givenName H.
109 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013674501505.47
110 rdf:type schema:Person
111 sg:person.014306350573.74 schema:affiliation https://www.grid.ac/institutes/grid.63054.34
112 schema:familyName Rivas
113 schema:givenName M.
114 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014306350573.74
115 rdf:type schema:Person
116 sg:pub.10.1007/s10853-011-5642-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023511413
117 https://doi.org/10.1007/s10853-011-5642-1
118 rdf:type schema:CreativeWork
119 sg:pub.10.1007/s10854-017-7930-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1092330182
120 https://doi.org/10.1007/s10854-017-7930-2
121 rdf:type schema:CreativeWork
122 https://doi.org/10.1016/0022-1902(59)80070-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036667968
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1016/b978-012480874-4/50022-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031191909
125 rdf:type schema:CreativeWork
126 https://doi.org/10.1016/j.apsusc.2013.07.168 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036955923
127 rdf:type schema:CreativeWork
128 https://doi.org/10.1016/j.jeurceramsoc.2005.03.077 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044224088
129 rdf:type schema:CreativeWork
130 https://doi.org/10.1016/j.tsf.2004.03.021 schema:sameAs https://app.dimensions.ai/details/publication/pub.1011676258
131 rdf:type schema:CreativeWork
132 https://doi.org/10.1016/j.tsf.2017.07.024 schema:sameAs https://app.dimensions.ai/details/publication/pub.1090656388
133 rdf:type schema:CreativeWork
134 https://doi.org/10.1063/1.112031 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057659586
135 rdf:type schema:CreativeWork
136 https://doi.org/10.1063/1.369230 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058002071
137 rdf:type schema:CreativeWork
138 https://doi.org/10.1080/10584580008215639 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010936429
139 rdf:type schema:CreativeWork
140 https://doi.org/10.1088/0022-3727/34/16/311 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001067767
141 rdf:type schema:CreativeWork
142 https://doi.org/10.1103/physrevb.80.205122 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060630899
143 rdf:type schema:CreativeWork
144 https://doi.org/10.1109/tuffc.2017.2703670 schema:sameAs https://app.dimensions.ai/details/publication/pub.1090694858
145 rdf:type schema:CreativeWork
146 https://doi.org/10.1116/1.1615982 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062168945
147 rdf:type schema:CreativeWork
148 https://doi.org/10.1143/jjap.35.2210 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063055541
149 rdf:type schema:CreativeWork
150 https://doi.org/10.1143/jjap.36.l1032 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063058659
151 rdf:type schema:CreativeWork
152 https://doi.org/10.1143/jjap.42.5941 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063070603
153 rdf:type schema:CreativeWork
154 https://doi.org/10.1557/jmr.2002.0257 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047619641
155 rdf:type schema:CreativeWork
156 https://doi.org/10.1557/jmr.2013.172 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023357848
157 rdf:type schema:CreativeWork
158 https://www.grid.ac/institutes/grid.420282.e schema:alternateName United States Army Research Laboratory
159 schema:name Sensors and Electron Devices Directorate, U.S. Army Research Laboratory, 2800 Powder Mill Road, 20783, Adelphi, MD, USA
160 rdf:type schema:Organization
161 https://www.grid.ac/institutes/grid.63054.34 schema:alternateName University of Connecticut
162 schema:name Department of Materials Science and Engineering, Institute of Materials Science, University of Connecticut, 97 North Eagleville Road, 06269-3136, Storrs, CT, USA
163 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...