Dependence of {111}-textured Pt electrode properties on TiO2 seed layers formed by thermal oxidation View Full Text


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Article Info

DATE

2018-01

AUTHORS

Glen R. Fox, Daniel M. Potrepka, Ronald G. Polcawich

ABSTRACT

The Pt/TiO2/SiO2/Si electrode structure prepared using sputter deposition of Ti, conversion of Ti to TiO2 by thermal oxidation, and sputter deposition of Pt was evaluated by using measurements of sheet resistance and X-ray diffraction. Nonlinearity of the reciprocal sheet resistance dependence on thickness revealed a change in the Ti conductivity that was attributed to a change in the Ti microstructure. Upon conversion to TiO2, it was determined that TiO2 exhibits a critical thickness of 32 nm that minimizes normal strain and {100}-textured misorientation and correlates with the onset of the Ti reciprocal sheet resistance nonlinearity. Both the TiO2 {100}-strain and {100}-texture directly affects the {111}-textured growth of Pt deposited at 500 °C. Pt deposited onto TiO2 films with the critical thickness of 32 nm exhibits a maximization of the normal strain relative to bulk Pt and also displays the narrowest distribution of Pt {111}-textured grain misalignment. The results presented show how Ti deposition conditions, TiO2 anneal conditions, and TiO2 thickness combine to modify the Pt electrode structural properties. Additionally, the measurement techniques demonstrated for the Ti, TiO2, and Pt are applicable to process control monitoring as well as standardized comparison of electrode structures used in integrated piezoelectric and ferroelectric devices. More... »

PAGES

412-426

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s10854-017-7930-2

DOI

http://dx.doi.org/10.1007/s10854-017-7930-2

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1092330182


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "name": [
            "Fox Materials Consulting, LLC, 80908, Colorado Springs, CO, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Fox", 
        "givenName": "Glen R.", 
        "id": "sg:person.010051127237.95", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010051127237.95"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "United States Army Research Laboratory", 
          "id": "https://www.grid.ac/institutes/grid.420282.e", 
          "name": [
            "Sensors and Electron Devices Directorate, U.S. Army Research Laboratory, 20783, Adelphi, MD, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Potrepka", 
        "givenName": "Daniel M.", 
        "id": "sg:person.013007274276.59", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013007274276.59"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "United States Army Research Laboratory", 
          "id": "https://www.grid.ac/institutes/grid.420282.e", 
          "name": [
            "Sensors and Electron Devices Directorate, U.S. Army Research Laboratory, 20783, Adelphi, MD, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Polcawich", 
        "givenName": "Ronald G.", 
        "id": "sg:person.01105505275.87", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01105505275.87"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/0040-6090(72)90314-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1000909968"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0040-6090(72)90314-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1000909968"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0040-6090(01)01675-3", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001874711"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf00321438", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003369116", 
          "https://doi.org/10.1007/bf00321438"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf00321438", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003369116", 
          "https://doi.org/10.1007/bf00321438"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0040-6090(79)90310-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1007718243"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0040-6090(79)90310-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1007718243"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2010.02.048", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1008116695"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1111/j.1151-2916.1994.tb04603.x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1009158938"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/jmr.1995.1508", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1011633707"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/jmr.1992.1876", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1011801403"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.tsf.2013.07.023", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1012465970"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0167-9317(95)00108-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1016120119"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1080/00150197308235781", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1019187405"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/jmr.1997.0050", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1020983190"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/jmr.2013.172", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1023357848"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0167-9317(95)00163-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1024456521"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/cjoc.20000180313", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025929746"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/cjoc.20000180313", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025929746"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1111/j.1151-2916.1991.tb04293.x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027021682"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1080/01418610108216618", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029973328"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0040-6090(01)01780-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030712970"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jallcom.2009.02.100", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032335994"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2005.12.111", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032852289"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/jmr.1995.3149", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1033860744"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s100190050070", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036508967", 
          "https://doi.org/10.1007/s100190050070"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02670926", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1042792088", 
          "https://doi.org/10.1007/bf02670926"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.300732", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048351056"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1080/00150197208235309", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1050739346"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/la00067a005", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056140223"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.102891", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057650467"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1652990", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057731038"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1771326", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057819860"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.2337362", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057850343"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.339433", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057946126"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.346890", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057957117"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.348365", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057959853"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.349422", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057962091"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.351726", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057966274"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.353212", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057969232"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.355889", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057974202"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.357137", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057976911"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.366957", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057996113"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.367101", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057996496"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.58.3605", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060589796"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.58.3605", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060589796"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/58.108869", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061190334"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/t-ed.1974.17955", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061459944"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/tdmr.2004.829071", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061583972"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/tuffc.2014.006671", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061811444"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.1316300", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062164694"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.1317070", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062165043"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.1492696", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062167780"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.571909", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062181956"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.575452", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062185499"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.578048", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062188095"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.580798", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062190845"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1126/science.246.4936.1400", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062538813"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.21.l655", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063038652"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.30.2152", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063046977"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.30.2159", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063046979"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.34.746", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063054715"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.35.4908", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063056138"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.36.294", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063057522"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/proc-361-223", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1067930192"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/proc-596-205", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1067947288"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/opl.2011.53", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1067970978"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2018-01", 
    "datePublishedReg": "2018-01-01", 
    "description": "The Pt/TiO2/SiO2/Si electrode structure prepared using sputter deposition of Ti, conversion of Ti to TiO2 by thermal oxidation, and sputter deposition of Pt was evaluated by using measurements of sheet resistance and X-ray diffraction. Nonlinearity of the reciprocal sheet resistance dependence on thickness revealed a change in the Ti conductivity that was attributed to a change in the Ti microstructure. Upon conversion to TiO2, it was determined that TiO2 exhibits a critical thickness of 32 nm that minimizes normal strain and {100}-textured misorientation and correlates with the onset of the Ti reciprocal sheet resistance nonlinearity. Both the TiO2 {100}-strain and {100}-texture directly affects the {111}-textured growth of Pt deposited at 500 \u00b0C. Pt deposited onto TiO2 films with the critical thickness of 32 nm exhibits a maximization of the normal strain relative to bulk Pt and also displays the narrowest distribution of Pt {111}-textured grain misalignment. The results presented show how Ti deposition conditions, TiO2 anneal conditions, and TiO2 thickness combine to modify the Pt electrode structural properties. Additionally, the measurement techniques demonstrated for the Ti, TiO2, and Pt are applicable to process control monitoring as well as standardized comparison of electrode structures used in integrated piezoelectric and ferroelectric devices.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s10854-017-7930-2", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136825", 
        "issn": [
          "0957-4522", 
          "1573-482X"
        ], 
        "name": "Journal of Materials Science: Materials in Electronics", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "1", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "29"
      }
    ], 
    "name": "Dependence of {111}-textured Pt electrode properties on TiO2 seed layers formed by thermal oxidation", 
    "pagination": "412-426", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "36a3d714d718d38816c4b7fec24e7b69526dab3c82c6e762c162609262004c17"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s10854-017-7930-2"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1092330182"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s10854-017-7930-2", 
      "https://app.dimensions.ai/details/publication/pub.1092330182"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T21:46", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8687_00000565.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://link.springer.com/10.1007%2Fs10854-017-7930-2"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s10854-017-7930-2'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s10854-017-7930-2'


 

This table displays all metadata directly associated to this object as RDF triples.

266 TRIPLES      21 PREDICATES      89 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s10854-017-7930-2 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N55751661d58c487ba7b46c5ffeb6753c
4 schema:citation sg:pub.10.1007/bf00321438
5 sg:pub.10.1007/bf02670926
6 sg:pub.10.1007/s100190050070
7 https://doi.org/10.1002/cjoc.20000180313
8 https://doi.org/10.1016/0040-6090(72)90314-8
9 https://doi.org/10.1016/0040-6090(79)90310-9
10 https://doi.org/10.1016/0167-9317(95)00108-5
11 https://doi.org/10.1016/0167-9317(95)00163-8
12 https://doi.org/10.1016/j.apsusc.2005.12.111
13 https://doi.org/10.1016/j.apsusc.2010.02.048
14 https://doi.org/10.1016/j.jallcom.2009.02.100
15 https://doi.org/10.1016/j.tsf.2013.07.023
16 https://doi.org/10.1016/s0040-6090(01)01675-3
17 https://doi.org/10.1016/s0040-6090(01)01780-1
18 https://doi.org/10.1021/la00067a005
19 https://doi.org/10.1063/1.102891
20 https://doi.org/10.1063/1.1652990
21 https://doi.org/10.1063/1.1771326
22 https://doi.org/10.1063/1.2337362
23 https://doi.org/10.1063/1.339433
24 https://doi.org/10.1063/1.346890
25 https://doi.org/10.1063/1.348365
26 https://doi.org/10.1063/1.349422
27 https://doi.org/10.1063/1.351726
28 https://doi.org/10.1063/1.353212
29 https://doi.org/10.1063/1.355889
30 https://doi.org/10.1063/1.357137
31 https://doi.org/10.1063/1.366957
32 https://doi.org/10.1063/1.367101
33 https://doi.org/10.1080/00150197208235309
34 https://doi.org/10.1080/00150197308235781
35 https://doi.org/10.1080/01418610108216618
36 https://doi.org/10.1103/physrevb.58.3605
37 https://doi.org/10.1109/58.108869
38 https://doi.org/10.1109/t-ed.1974.17955
39 https://doi.org/10.1109/tdmr.2004.829071
40 https://doi.org/10.1109/tuffc.2014.006671
41 https://doi.org/10.1111/j.1151-2916.1991.tb04293.x
42 https://doi.org/10.1111/j.1151-2916.1994.tb04603.x
43 https://doi.org/10.1116/1.1316300
44 https://doi.org/10.1116/1.1317070
45 https://doi.org/10.1116/1.1492696
46 https://doi.org/10.1116/1.571909
47 https://doi.org/10.1116/1.575452
48 https://doi.org/10.1116/1.578048
49 https://doi.org/10.1116/1.580798
50 https://doi.org/10.1117/12.300732
51 https://doi.org/10.1126/science.246.4936.1400
52 https://doi.org/10.1143/jjap.21.l655
53 https://doi.org/10.1143/jjap.30.2152
54 https://doi.org/10.1143/jjap.30.2159
55 https://doi.org/10.1143/jjap.34.746
56 https://doi.org/10.1143/jjap.35.4908
57 https://doi.org/10.1143/jjap.36.294
58 https://doi.org/10.1557/jmr.1992.1876
59 https://doi.org/10.1557/jmr.1995.1508
60 https://doi.org/10.1557/jmr.1995.3149
61 https://doi.org/10.1557/jmr.1997.0050
62 https://doi.org/10.1557/jmr.2013.172
63 https://doi.org/10.1557/opl.2011.53
64 https://doi.org/10.1557/proc-361-223
65 https://doi.org/10.1557/proc-596-205
66 schema:datePublished 2018-01
67 schema:datePublishedReg 2018-01-01
68 schema:description The Pt/TiO2/SiO2/Si electrode structure prepared using sputter deposition of Ti, conversion of Ti to TiO2 by thermal oxidation, and sputter deposition of Pt was evaluated by using measurements of sheet resistance and X-ray diffraction. Nonlinearity of the reciprocal sheet resistance dependence on thickness revealed a change in the Ti conductivity that was attributed to a change in the Ti microstructure. Upon conversion to TiO2, it was determined that TiO2 exhibits a critical thickness of 32 nm that minimizes normal strain and {100}-textured misorientation and correlates with the onset of the Ti reciprocal sheet resistance nonlinearity. Both the TiO2 {100}-strain and {100}-texture directly affects the {111}-textured growth of Pt deposited at 500 °C. Pt deposited onto TiO2 films with the critical thickness of 32 nm exhibits a maximization of the normal strain relative to bulk Pt and also displays the narrowest distribution of Pt {111}-textured grain misalignment. The results presented show how Ti deposition conditions, TiO2 anneal conditions, and TiO2 thickness combine to modify the Pt electrode structural properties. Additionally, the measurement techniques demonstrated for the Ti, TiO2, and Pt are applicable to process control monitoring as well as standardized comparison of electrode structures used in integrated piezoelectric and ferroelectric devices.
69 schema:genre research_article
70 schema:inLanguage en
71 schema:isAccessibleForFree false
72 schema:isPartOf Na71b921f46c84b49ba6a9d6998e17f7f
73 Nac2f3e7b1fa0441880a3fd639e20d7a0
74 sg:journal.1136825
75 schema:name Dependence of {111}-textured Pt electrode properties on TiO2 seed layers formed by thermal oxidation
76 schema:pagination 412-426
77 schema:productId N012ccd155a1b4368ba6c9f6a7fa1e8ed
78 N900d300d61364295833a82c5cb1d8332
79 Ncace0f86b616499eafe87d69b2b236d8
80 schema:sameAs https://app.dimensions.ai/details/publication/pub.1092330182
81 https://doi.org/10.1007/s10854-017-7930-2
82 schema:sdDatePublished 2019-04-10T21:46
83 schema:sdLicense https://scigraph.springernature.com/explorer/license/
84 schema:sdPublisher N304b5534b022411690242db5bb410179
85 schema:url https://link.springer.com/10.1007%2Fs10854-017-7930-2
86 sgo:license sg:explorer/license/
87 sgo:sdDataset articles
88 rdf:type schema:ScholarlyArticle
89 N012ccd155a1b4368ba6c9f6a7fa1e8ed schema:name dimensions_id
90 schema:value pub.1092330182
91 rdf:type schema:PropertyValue
92 N304b5534b022411690242db5bb410179 schema:name Springer Nature - SN SciGraph project
93 rdf:type schema:Organization
94 N55751661d58c487ba7b46c5ffeb6753c rdf:first sg:person.010051127237.95
95 rdf:rest N82182418d9634ac9841ae6f4fd8f1c66
96 N7c583f12826646158ef5dc0787821dad schema:name Fox Materials Consulting, LLC, 80908, Colorado Springs, CO, USA
97 rdf:type schema:Organization
98 N82182418d9634ac9841ae6f4fd8f1c66 rdf:first sg:person.013007274276.59
99 rdf:rest Nf31782fd904649cfaed1bf21bfa747d4
100 N900d300d61364295833a82c5cb1d8332 schema:name doi
101 schema:value 10.1007/s10854-017-7930-2
102 rdf:type schema:PropertyValue
103 Na71b921f46c84b49ba6a9d6998e17f7f schema:volumeNumber 29
104 rdf:type schema:PublicationVolume
105 Nac2f3e7b1fa0441880a3fd639e20d7a0 schema:issueNumber 1
106 rdf:type schema:PublicationIssue
107 Ncace0f86b616499eafe87d69b2b236d8 schema:name readcube_id
108 schema:value 36a3d714d718d38816c4b7fec24e7b69526dab3c82c6e762c162609262004c17
109 rdf:type schema:PropertyValue
110 Nf31782fd904649cfaed1bf21bfa747d4 rdf:first sg:person.01105505275.87
111 rdf:rest rdf:nil
112 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
113 schema:name Engineering
114 rdf:type schema:DefinedTerm
115 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
116 schema:name Materials Engineering
117 rdf:type schema:DefinedTerm
118 sg:journal.1136825 schema:issn 0957-4522
119 1573-482X
120 schema:name Journal of Materials Science: Materials in Electronics
121 rdf:type schema:Periodical
122 sg:person.010051127237.95 schema:affiliation N7c583f12826646158ef5dc0787821dad
123 schema:familyName Fox
124 schema:givenName Glen R.
125 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010051127237.95
126 rdf:type schema:Person
127 sg:person.01105505275.87 schema:affiliation https://www.grid.ac/institutes/grid.420282.e
128 schema:familyName Polcawich
129 schema:givenName Ronald G.
130 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01105505275.87
131 rdf:type schema:Person
132 sg:person.013007274276.59 schema:affiliation https://www.grid.ac/institutes/grid.420282.e
133 schema:familyName Potrepka
134 schema:givenName Daniel M.
135 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013007274276.59
136 rdf:type schema:Person
137 sg:pub.10.1007/bf00321438 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003369116
138 https://doi.org/10.1007/bf00321438
139 rdf:type schema:CreativeWork
140 sg:pub.10.1007/bf02670926 schema:sameAs https://app.dimensions.ai/details/publication/pub.1042792088
141 https://doi.org/10.1007/bf02670926
142 rdf:type schema:CreativeWork
143 sg:pub.10.1007/s100190050070 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036508967
144 https://doi.org/10.1007/s100190050070
145 rdf:type schema:CreativeWork
146 https://doi.org/10.1002/cjoc.20000180313 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025929746
147 rdf:type schema:CreativeWork
148 https://doi.org/10.1016/0040-6090(72)90314-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1000909968
149 rdf:type schema:CreativeWork
150 https://doi.org/10.1016/0040-6090(79)90310-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1007718243
151 rdf:type schema:CreativeWork
152 https://doi.org/10.1016/0167-9317(95)00108-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016120119
153 rdf:type schema:CreativeWork
154 https://doi.org/10.1016/0167-9317(95)00163-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024456521
155 rdf:type schema:CreativeWork
156 https://doi.org/10.1016/j.apsusc.2005.12.111 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032852289
157 rdf:type schema:CreativeWork
158 https://doi.org/10.1016/j.apsusc.2010.02.048 schema:sameAs https://app.dimensions.ai/details/publication/pub.1008116695
159 rdf:type schema:CreativeWork
160 https://doi.org/10.1016/j.jallcom.2009.02.100 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032335994
161 rdf:type schema:CreativeWork
162 https://doi.org/10.1016/j.tsf.2013.07.023 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012465970
163 rdf:type schema:CreativeWork
164 https://doi.org/10.1016/s0040-6090(01)01675-3 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001874711
165 rdf:type schema:CreativeWork
166 https://doi.org/10.1016/s0040-6090(01)01780-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030712970
167 rdf:type schema:CreativeWork
168 https://doi.org/10.1021/la00067a005 schema:sameAs https://app.dimensions.ai/details/publication/pub.1056140223
169 rdf:type schema:CreativeWork
170 https://doi.org/10.1063/1.102891 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057650467
171 rdf:type schema:CreativeWork
172 https://doi.org/10.1063/1.1652990 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057731038
173 rdf:type schema:CreativeWork
174 https://doi.org/10.1063/1.1771326 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057819860
175 rdf:type schema:CreativeWork
176 https://doi.org/10.1063/1.2337362 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057850343
177 rdf:type schema:CreativeWork
178 https://doi.org/10.1063/1.339433 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057946126
179 rdf:type schema:CreativeWork
180 https://doi.org/10.1063/1.346890 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057957117
181 rdf:type schema:CreativeWork
182 https://doi.org/10.1063/1.348365 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057959853
183 rdf:type schema:CreativeWork
184 https://doi.org/10.1063/1.349422 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057962091
185 rdf:type schema:CreativeWork
186 https://doi.org/10.1063/1.351726 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057966274
187 rdf:type schema:CreativeWork
188 https://doi.org/10.1063/1.353212 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057969232
189 rdf:type schema:CreativeWork
190 https://doi.org/10.1063/1.355889 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057974202
191 rdf:type schema:CreativeWork
192 https://doi.org/10.1063/1.357137 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057976911
193 rdf:type schema:CreativeWork
194 https://doi.org/10.1063/1.366957 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057996113
195 rdf:type schema:CreativeWork
196 https://doi.org/10.1063/1.367101 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057996496
197 rdf:type schema:CreativeWork
198 https://doi.org/10.1080/00150197208235309 schema:sameAs https://app.dimensions.ai/details/publication/pub.1050739346
199 rdf:type schema:CreativeWork
200 https://doi.org/10.1080/00150197308235781 schema:sameAs https://app.dimensions.ai/details/publication/pub.1019187405
201 rdf:type schema:CreativeWork
202 https://doi.org/10.1080/01418610108216618 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029973328
203 rdf:type schema:CreativeWork
204 https://doi.org/10.1103/physrevb.58.3605 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060589796
205 rdf:type schema:CreativeWork
206 https://doi.org/10.1109/58.108869 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061190334
207 rdf:type schema:CreativeWork
208 https://doi.org/10.1109/t-ed.1974.17955 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061459944
209 rdf:type schema:CreativeWork
210 https://doi.org/10.1109/tdmr.2004.829071 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061583972
211 rdf:type schema:CreativeWork
212 https://doi.org/10.1109/tuffc.2014.006671 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061811444
213 rdf:type schema:CreativeWork
214 https://doi.org/10.1111/j.1151-2916.1991.tb04293.x schema:sameAs https://app.dimensions.ai/details/publication/pub.1027021682
215 rdf:type schema:CreativeWork
216 https://doi.org/10.1111/j.1151-2916.1994.tb04603.x schema:sameAs https://app.dimensions.ai/details/publication/pub.1009158938
217 rdf:type schema:CreativeWork
218 https://doi.org/10.1116/1.1316300 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062164694
219 rdf:type schema:CreativeWork
220 https://doi.org/10.1116/1.1317070 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062165043
221 rdf:type schema:CreativeWork
222 https://doi.org/10.1116/1.1492696 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062167780
223 rdf:type schema:CreativeWork
224 https://doi.org/10.1116/1.571909 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062181956
225 rdf:type schema:CreativeWork
226 https://doi.org/10.1116/1.575452 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062185499
227 rdf:type schema:CreativeWork
228 https://doi.org/10.1116/1.578048 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062188095
229 rdf:type schema:CreativeWork
230 https://doi.org/10.1116/1.580798 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062190845
231 rdf:type schema:CreativeWork
232 https://doi.org/10.1117/12.300732 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048351056
233 rdf:type schema:CreativeWork
234 https://doi.org/10.1126/science.246.4936.1400 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062538813
235 rdf:type schema:CreativeWork
236 https://doi.org/10.1143/jjap.21.l655 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063038652
237 rdf:type schema:CreativeWork
238 https://doi.org/10.1143/jjap.30.2152 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063046977
239 rdf:type schema:CreativeWork
240 https://doi.org/10.1143/jjap.30.2159 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063046979
241 rdf:type schema:CreativeWork
242 https://doi.org/10.1143/jjap.34.746 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063054715
243 rdf:type schema:CreativeWork
244 https://doi.org/10.1143/jjap.35.4908 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063056138
245 rdf:type schema:CreativeWork
246 https://doi.org/10.1143/jjap.36.294 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063057522
247 rdf:type schema:CreativeWork
248 https://doi.org/10.1557/jmr.1992.1876 schema:sameAs https://app.dimensions.ai/details/publication/pub.1011801403
249 rdf:type schema:CreativeWork
250 https://doi.org/10.1557/jmr.1995.1508 schema:sameAs https://app.dimensions.ai/details/publication/pub.1011633707
251 rdf:type schema:CreativeWork
252 https://doi.org/10.1557/jmr.1995.3149 schema:sameAs https://app.dimensions.ai/details/publication/pub.1033860744
253 rdf:type schema:CreativeWork
254 https://doi.org/10.1557/jmr.1997.0050 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020983190
255 rdf:type schema:CreativeWork
256 https://doi.org/10.1557/jmr.2013.172 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023357848
257 rdf:type schema:CreativeWork
258 https://doi.org/10.1557/opl.2011.53 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067970978
259 rdf:type schema:CreativeWork
260 https://doi.org/10.1557/proc-361-223 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067930192
261 rdf:type schema:CreativeWork
262 https://doi.org/10.1557/proc-596-205 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067947288
263 rdf:type schema:CreativeWork
264 https://www.grid.ac/institutes/grid.420282.e schema:alternateName United States Army Research Laboratory
265 schema:name Sensors and Electron Devices Directorate, U.S. Army Research Laboratory, 20783, Adelphi, MD, USA
266 rdf:type schema:Organization
 




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