High-power module based on inert gas–halogen mixtures for UV irradiation View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2012-05

AUTHORS

S. M. Avdeev, V. S. Skakun, E. A. Sosnin, V. F. Tarasenko, D. V. Schitz

ABSTRACT

We have developed a module based on exciplex barrier-discharge lamps for irradiation by high-power narrow-band ultraviolet radiation. The module uses air cooling and is intended for irradiation of substrates such as those used in microelectronics. The module provides close to uniform irradiation on a flat surface with power density up to 35 and 25 mW/cm2 as a result of emission in B–X bands of the molecules XeBr* (282 nm) and XeCl* (308 nm) respectively. More... »

PAGES

334-336

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s10812-012-9604-4

DOI

http://dx.doi.org/10.1007/s10812-012-9604-4

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1004459268


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