UV detectors based on epitaxial diamond films grown on single-crystal diamond substrates by vapor-phase synthesis View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2010-11

AUTHORS

G. V. Sharonov, A. P. Bolshakov, V. G. Ralchenko, N. M. Kazuchits, S. A. Petrov

ABSTRACT

The prospects for use of CVD-technology for epitaxial growth of single-crystal diamond films of instrumental quality in UHF plasma for the production of optoelectronic devices are discussed. A technology for processing diamond single crystals that provides a perfect surface crystal structure with roughness less than 0.5 nm was developed. It was demonstrated that selective UV detectors based on synthetic single-crystal diamond substrates coated with single-crystal films can be produced. A criterion for selecting clean and structurally perfect single crystals of synthetic diamond was developed for the epitaxial growth technology. More... »

PAGES

658-662

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s10812-010-9383-8

DOI

http://dx.doi.org/10.1007/s10812-010-9383-8

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1043634725


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