Ball Tips of Micro/Nano Probing Systems: A Review View Full Text


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Article Info

DATE

2017-03

AUTHORS

Ruijun LI, Chen CHEN, Dandong LI, Kuang-Chao FAN, Zhenying CHENG, Qiangxian HUANG, Xueming DANG

ABSTRACT

To satisfy the measuring demands for the micro components of the industry, micro/nano probing systems with various ball tips have been developed. However, most of them cannot be used to measure the real micro geometrical features high precisely because the parameters of the ball tips are not appropriate. The ball tips with a diameter of less than 100 µm, a sphericity and eccentricity of far less than 1 µm are required urgently. A review on the state-of-the-art of ball tips of micro/nano probing systems is presented. The material characteristics and geometric parameters of now available ball tips are introduced separately. The existing fabrication methods for the ball tips are demonstrated and summarized. The ball tips’ future trends, which are smaller diameter, better sphericity and smaller eccentricity, are proposed in view of the practical requirements of high-precision measurement for micro geometrical features. Some challenges have to be faced in future, such as the promotion and high-precision measurement for the small ball tip’s sphericity and eccentricity. Fusion method without the gravity effect when the molten ball tip solidifying is a more suitable way to fabricate a small diameter ball tip together with a shaft. More... »

PAGES

222-230

References to SciGraph publications

  • 2016-01. Multi-objective optimal design of high frequency probe for scanning ion conductance microscopy in CHINESE JOURNAL OF MECHANICAL ENGINEERING
  • 2010-08. A vibrating micro-scale CMM probe for measuring high aspect ratio structures in MICROSYSTEM TECHNOLOGIES
  • 2002. Evaluation of Stages of Nano-CMM in INITIATIVES OF PRECISION ENGINEERING AT THE BEGINNING OF A MILLENNIUM
  • 2007. Metrology, Sensors and Control in MICROMANUFACTURING
  • 2016-01. Measurement uncertainty evaluation of conicity error inspected on CMM in CHINESE JOURNAL OF MECHANICAL ENGINEERING
  • 2014-09. Manufacturing tactile spherical stylus tips by combination process of micro electro chemical and one-pulse electro discharge technology in THE INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/s10033-017-0082-8

    DOI

    http://dx.doi.org/10.1007/s10033-017-0082-8

    DIMENSIONS

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