Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2014-04

AUTHORS

Saskia Biehl, Christian Rumposch, Günter Bräuer, Hans-Werner Hoffmeister, Martin Luig

ABSTRACT

Thin film sensor systems based on hydrogenated carbon have the advantage to combine two very important characteristics in order to be used in measurement engineering: Firstly, the sensory layer demonstrates piezoresistive behavior and secondly its good properties related to hardness and wear resistance lead in a tribologically stable system. Therefore, the thin film sensor systems can be applied into the main distribution of force within machine parts or used for universal interchangeable sensor systems, e.g. sensory washers. In this article the deposition of a self-contained thin film sensor system on a large technical component (spindle shaft) is shown. The spindle shaft with a length of 480 mm and an outer diameter of 90 mm is part of a belt driven machining spindle for planing machines in woodworking industries. In order to establish a measurement system, which allows monitoring the clamping force of the tool holder and the imbalance of the mounted tool, the thin film sensor system was directly applied to the front surface of the spindle shaft. For this application a novel self-contained thin film sensor system was developed, which consists of an alumina layer for electrical isolation, a chromium layer to establish internal sensor electrodes, a piezoresistive hydrogenated carbon layer (1 μm) and a second covering wear resistance and insulation layer (silicon and oxygen modified carbon layer). The piezoresistive sensor layer and the top layer are part of the diamond like carbon layer family (Robertson, Diam Relat Mater 12:79–84, 2003; Bewilogua et al. DLC based coatings for tribological applications, pp. 67–75, 2006; Biehl et al. Thin Solid Films 515(3):1171–1175, 2006, Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems. Springer Verlag, pp. 879–883, 2010). More... »

PAGES

989-993

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00542-014-2101-3

DOI

http://dx.doi.org/10.1007/s00542-014-2101-3

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1010146347


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Fraunhofer Institute for Surface Engineering and Thin Films", 
          "id": "https://www.grid.ac/institutes/grid.462227.7", 
          "name": [
            "Fraunhofer Institute for Surface Engineering and Thin Films, Bienroder Weg 54 E, 38108, Braunschweig, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Biehl", 
        "givenName": "Saskia", 
        "id": "sg:person.010431056001.83", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010431056001.83"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Fraunhofer Institute for Surface Engineering and Thin Films", 
          "id": "https://www.grid.ac/institutes/grid.462227.7", 
          "name": [
            "Fraunhofer Institute for Surface Engineering and Thin Films, Bienroder Weg 54 E, 38108, Braunschweig, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Rumposch", 
        "givenName": "Christian", 
        "id": "sg:person.012024017001.39", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012024017001.39"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Fraunhofer Institute for Surface Engineering and Thin Films", 
          "id": "https://www.grid.ac/institutes/grid.462227.7", 
          "name": [
            "Fraunhofer Institute for Surface Engineering and Thin Films, Bienroder Weg 54 E, 38108, Braunschweig, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Br\u00e4uer", 
        "givenName": "G\u00fcnter", 
        "id": "sg:person.013440570403.27", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013440570403.27"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Braunschweig University of Technology", 
          "id": "https://www.grid.ac/institutes/grid.6738.a", 
          "name": [
            "Institute for Machine Tools and Production Technology, TU Braunschweig, Langer Kamp 19 b, 38106, Braunschweig, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Hoffmeister", 
        "givenName": "Hans-Werner", 
        "id": "sg:person.01157561345.65", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01157561345.65"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Braunschweig University of Technology", 
          "id": "https://www.grid.ac/institutes/grid.6738.a", 
          "name": [
            "Institute for Machine Tools and Production Technology, TU Braunschweig, Langer Kamp 19 b, 38106, Braunschweig, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Luig", 
        "givenName": "Martin", 
        "id": "sg:person.013477003657.78", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013477003657.78"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/j.tsf.2006.07.143", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039008364"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-9635(03)00006-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040672567"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00542-010-1058-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047012311", 
          "https://doi.org/10.1007/s00542-010-1058-0"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00542-010-1058-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047012311", 
          "https://doi.org/10.1007/s00542-010-1058-0"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2014-04", 
    "datePublishedReg": "2014-04-01", 
    "description": "Thin film sensor systems based on hydrogenated carbon have the advantage to combine two very important characteristics in order to be used in measurement engineering: Firstly, the sensory layer demonstrates piezoresistive behavior and secondly its good properties related to hardness and wear resistance lead in a tribologically stable system. Therefore, the thin film sensor systems can be applied into the main distribution of force within machine parts or used for universal interchangeable sensor systems, e.g. sensory washers. In this article the deposition of a self-contained thin film sensor system on a large technical component (spindle shaft) is shown. The spindle shaft with a length of 480 mm and an outer diameter of 90 mm is part of a belt driven machining spindle for planing machines in woodworking industries. In order to establish a measurement system, which allows monitoring the clamping force of the tool holder and the imbalance of the mounted tool, the thin film sensor system was directly applied to the front surface of the spindle shaft. For this application a novel self-contained thin film sensor system was developed, which consists of an alumina layer for electrical isolation, a chromium layer to establish internal sensor electrodes, a piezoresistive hydrogenated carbon layer (1 \u03bcm) and a second covering wear resistance and insulation layer (silicon and oxygen modified carbon layer). The piezoresistive sensor layer and the top layer are part of the diamond like carbon layer family (Robertson, Diam Relat Mater 12:79\u201384, 2003; Bewilogua et al. DLC based coatings for tribological applications, pp. 67\u201375, 2006; Biehl et al. Thin Solid Films 515(3):1171\u20131175, 2006, Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems. Springer Verlag, pp. 879\u2013883, 2010).", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s00542-014-2101-3", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1294787", 
        "issn": [
          "0946-7076", 
          "1432-1858"
        ], 
        "name": "Microsystem Technologies", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "4-5", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "20"
      }
    ], 
    "name": "Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon", 
    "pagination": "989-993", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "305686d0679c6873dce629cc88fe7feea6020b598d860e316273ac14149517a1"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s00542-014-2101-3"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1010146347"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s00542-014-2101-3", 
      "https://app.dimensions.ai/details/publication/pub.1010146347"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T21:40", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8687_00000530.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007%2Fs00542-014-2101-3"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

102 TRIPLES      21 PREDICATES      30 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s00542-014-2101-3 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N5ff88f0886f54932b42079a07c4afb54
4 schema:citation sg:pub.10.1007/s00542-010-1058-0
5 https://doi.org/10.1016/j.tsf.2006.07.143
6 https://doi.org/10.1016/s0925-9635(03)00006-2
7 schema:datePublished 2014-04
8 schema:datePublishedReg 2014-04-01
9 schema:description Thin film sensor systems based on hydrogenated carbon have the advantage to combine two very important characteristics in order to be used in measurement engineering: Firstly, the sensory layer demonstrates piezoresistive behavior and secondly its good properties related to hardness and wear resistance lead in a tribologically stable system. Therefore, the thin film sensor systems can be applied into the main distribution of force within machine parts or used for universal interchangeable sensor systems, e.g. sensory washers. In this article the deposition of a self-contained thin film sensor system on a large technical component (spindle shaft) is shown. The spindle shaft with a length of 480 mm and an outer diameter of 90 mm is part of a belt driven machining spindle for planing machines in woodworking industries. In order to establish a measurement system, which allows monitoring the clamping force of the tool holder and the imbalance of the mounted tool, the thin film sensor system was directly applied to the front surface of the spindle shaft. For this application a novel self-contained thin film sensor system was developed, which consists of an alumina layer for electrical isolation, a chromium layer to establish internal sensor electrodes, a piezoresistive hydrogenated carbon layer (1 μm) and a second covering wear resistance and insulation layer (silicon and oxygen modified carbon layer). The piezoresistive sensor layer and the top layer are part of the diamond like carbon layer family (Robertson, Diam Relat Mater 12:79–84, 2003; Bewilogua et al. DLC based coatings for tribological applications, pp. 67–75, 2006; Biehl et al. Thin Solid Films 515(3):1171–1175, 2006, Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems. Springer Verlag, pp. 879–883, 2010).
10 schema:genre research_article
11 schema:inLanguage en
12 schema:isAccessibleForFree false
13 schema:isPartOf N733feea9939642d2a2923df786de55b6
14 Nd935914d7a744064ab6001c0f1f500a8
15 sg:journal.1294787
16 schema:name Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon
17 schema:pagination 989-993
18 schema:productId N26fc91c52c384ca790964cbfbea1eaa9
19 N3d8de8ede22d4553a728a339b6eded83
20 Nc5f5f17be43d4f9fa58d295893e492c9
21 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010146347
22 https://doi.org/10.1007/s00542-014-2101-3
23 schema:sdDatePublished 2019-04-10T21:40
24 schema:sdLicense https://scigraph.springernature.com/explorer/license/
25 schema:sdPublisher N959dd00ac6ba4d75a836a6902a47f045
26 schema:url http://link.springer.com/10.1007%2Fs00542-014-2101-3
27 sgo:license sg:explorer/license/
28 sgo:sdDataset articles
29 rdf:type schema:ScholarlyArticle
30 N26fc91c52c384ca790964cbfbea1eaa9 schema:name readcube_id
31 schema:value 305686d0679c6873dce629cc88fe7feea6020b598d860e316273ac14149517a1
32 rdf:type schema:PropertyValue
33 N3d8de8ede22d4553a728a339b6eded83 schema:name dimensions_id
34 schema:value pub.1010146347
35 rdf:type schema:PropertyValue
36 N5ff88f0886f54932b42079a07c4afb54 rdf:first sg:person.010431056001.83
37 rdf:rest N7f5f4a864bbc470fa937086109d82d34
38 N733feea9939642d2a2923df786de55b6 schema:volumeNumber 20
39 rdf:type schema:PublicationVolume
40 N7f5f4a864bbc470fa937086109d82d34 rdf:first sg:person.012024017001.39
41 rdf:rest Nd5782ba0f5f5455a8fd767a3c7439a4e
42 N8711c1ab5e3d44098f2c951046d6ed04 rdf:first sg:person.01157561345.65
43 rdf:rest Ncc6c66ee36b341758d83bfca83e72584
44 N959dd00ac6ba4d75a836a6902a47f045 schema:name Springer Nature - SN SciGraph project
45 rdf:type schema:Organization
46 Nc5f5f17be43d4f9fa58d295893e492c9 schema:name doi
47 schema:value 10.1007/s00542-014-2101-3
48 rdf:type schema:PropertyValue
49 Ncc6c66ee36b341758d83bfca83e72584 rdf:first sg:person.013477003657.78
50 rdf:rest rdf:nil
51 Nd5782ba0f5f5455a8fd767a3c7439a4e rdf:first sg:person.013440570403.27
52 rdf:rest N8711c1ab5e3d44098f2c951046d6ed04
53 Nd935914d7a744064ab6001c0f1f500a8 schema:issueNumber 4-5
54 rdf:type schema:PublicationIssue
55 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
56 schema:name Engineering
57 rdf:type schema:DefinedTerm
58 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
59 schema:name Materials Engineering
60 rdf:type schema:DefinedTerm
61 sg:journal.1294787 schema:issn 0946-7076
62 1432-1858
63 schema:name Microsystem Technologies
64 rdf:type schema:Periodical
65 sg:person.010431056001.83 schema:affiliation https://www.grid.ac/institutes/grid.462227.7
66 schema:familyName Biehl
67 schema:givenName Saskia
68 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010431056001.83
69 rdf:type schema:Person
70 sg:person.01157561345.65 schema:affiliation https://www.grid.ac/institutes/grid.6738.a
71 schema:familyName Hoffmeister
72 schema:givenName Hans-Werner
73 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01157561345.65
74 rdf:type schema:Person
75 sg:person.012024017001.39 schema:affiliation https://www.grid.ac/institutes/grid.462227.7
76 schema:familyName Rumposch
77 schema:givenName Christian
78 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012024017001.39
79 rdf:type schema:Person
80 sg:person.013440570403.27 schema:affiliation https://www.grid.ac/institutes/grid.462227.7
81 schema:familyName Bräuer
82 schema:givenName Günter
83 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013440570403.27
84 rdf:type schema:Person
85 sg:person.013477003657.78 schema:affiliation https://www.grid.ac/institutes/grid.6738.a
86 schema:familyName Luig
87 schema:givenName Martin
88 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013477003657.78
89 rdf:type schema:Person
90 sg:pub.10.1007/s00542-010-1058-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047012311
91 https://doi.org/10.1007/s00542-010-1058-0
92 rdf:type schema:CreativeWork
93 https://doi.org/10.1016/j.tsf.2006.07.143 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039008364
94 rdf:type schema:CreativeWork
95 https://doi.org/10.1016/s0925-9635(03)00006-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040672567
96 rdf:type schema:CreativeWork
97 https://www.grid.ac/institutes/grid.462227.7 schema:alternateName Fraunhofer Institute for Surface Engineering and Thin Films
98 schema:name Fraunhofer Institute for Surface Engineering and Thin Films, Bienroder Weg 54 E, 38108, Braunschweig, Germany
99 rdf:type schema:Organization
100 https://www.grid.ac/institutes/grid.6738.a schema:alternateName Braunschweig University of Technology
101 schema:name Institute for Machine Tools and Production Technology, TU Braunschweig, Langer Kamp 19 b, 38106, Braunschweig, Germany
102 rdf:type schema:Organization
 




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