Shape controllable micro-nozzle fabrication View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2008-10

AUTHORS

KyungNam Kang, Yoonyoung Jin, Jost Goettert, Pratul K. Ajmera

ABSTRACT

A novel fabrication method involving two-step sequential backside exposures utilizing Fraunhofer diffraction is developed in this work to overcome some of the limitations of the current micro-nozzle fabrication techniques in controlling the shape and the size of micro-nozzles. Shape and size of the fabricated micro-nozzles are compared with simulation results. Micro-nozzles with tip diameters varying from 0 to 158.1 μm and the base diameter varying from 167.2 to 360 μm are fabricated simultaneously side-by-side on the same substrate by varying the total exposure dosage from 3 to 6 J/cm2 utilizing multiple backside exposures through designed circular aperture and zone plate masks. More... »

PAGES

1641-1646

Journal

TITLE

Microsystem Technologies

ISSUE

9-11

VOLUME

14

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00542-008-0604-5

DOI

http://dx.doi.org/10.1007/s00542-008-0604-5

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1021628426


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