Shape controllable micro-nozzle fabrication View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2008-10

AUTHORS

KyungNam Kang, Yoonyoung Jin, Jost Goettert, Pratul K. Ajmera

ABSTRACT

A novel fabrication method involving two-step sequential backside exposures utilizing Fraunhofer diffraction is developed in this work to overcome some of the limitations of the current micro-nozzle fabrication techniques in controlling the shape and the size of micro-nozzles. Shape and size of the fabricated micro-nozzles are compared with simulation results. Micro-nozzles with tip diameters varying from 0 to 158.1 μm and the base diameter varying from 167.2 to 360 μm are fabricated simultaneously side-by-side on the same substrate by varying the total exposure dosage from 3 to 6 J/cm2 utilizing multiple backside exposures through designed circular aperture and zone plate masks. More... »

PAGES

1641-1646

Journal

TITLE

Microsystem Technologies

ISSUE

9-11

VOLUME

14

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00542-008-0604-5

DOI

http://dx.doi.org/10.1007/s00542-008-0604-5

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1021628426


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0915", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Interdisciplinary Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Louisiana State University", 
          "id": "https://www.grid.ac/institutes/grid.64337.35", 
          "name": [
            "Department of Electrical and Computer Engineering, Louisiana State University, 70803, Baton Rouge, LA, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kang", 
        "givenName": "KyungNam", 
        "id": "sg:person.07650261517.40", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07650261517.40"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Louisiana State University", 
          "id": "https://www.grid.ac/institutes/grid.64337.35", 
          "name": [
            "Center for Advanced Microstructures and Devices, Louisiana State University, 70806, Baton Rouge, LA, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Jin", 
        "givenName": "Yoonyoung", 
        "id": "sg:person.010120126675.38", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010120126675.38"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Louisiana State University", 
          "id": "https://www.grid.ac/institutes/grid.64337.35", 
          "name": [
            "Center for Advanced Microstructures and Devices, Louisiana State University, 70806, Baton Rouge, LA, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Goettert", 
        "givenName": "Jost", 
        "id": "sg:person.016357241431.41", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016357241431.41"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Louisiana State University", 
          "id": "https://www.grid.ac/institutes/grid.64337.35", 
          "name": [
            "Department of Electrical and Computer Engineering, Louisiana State University, 70803, Baton Rouge, LA, USA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ajmera", 
        "givenName": "Pratul K.", 
        "id": "sg:person.012546105716.49", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012546105716.49"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1088/0960-1317/14/4/021", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002592745"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00542-007-0510-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017118054", 
          "https://doi.org/10.1007/s00542-007-0510-2"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00542-007-0510-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017118054", 
          "https://doi.org/10.1007/s00542-007-0510-2"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1023/a:1027306323657", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021744542", 
          "https://doi.org/10.1023/a:1027306323657"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00542-006-0212-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029238603", 
          "https://doi.org/10.1007/s00542-006-0212-1"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00542-006-0212-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029238603", 
          "https://doi.org/10.1007/s00542-006-0212-1"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0924-4247(99)00260-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1052262995"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1357452", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057698483"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2008-10", 
    "datePublishedReg": "2008-10-01", 
    "description": "A novel fabrication method involving two-step sequential backside exposures utilizing Fraunhofer diffraction is developed in this work to overcome some of the limitations of the current micro-nozzle fabrication techniques in controlling the shape and the size of micro-nozzles. Shape and size of the fabricated micro-nozzles are compared with simulation results. Micro-nozzles with tip diameters varying from 0 to 158.1 \u03bcm and the base diameter varying from 167.2 to 360 \u03bcm are fabricated simultaneously side-by-side on the same substrate by varying the total exposure dosage from 3 to 6 J/cm2 utilizing multiple backside exposures through designed circular aperture and zone plate masks.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s00542-008-0604-5", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1294787", 
        "issn": [
          "0946-7076", 
          "1432-1858"
        ], 
        "name": "Microsystem Technologies", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "9-11", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "14"
      }
    ], 
    "name": "Shape controllable micro-nozzle fabrication", 
    "pagination": "1641-1646", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "670c75859b9b717df88f50bc71cba01baa028a81c17f2eb3ad426a384cb20cbb"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s00542-008-0604-5"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1021628426"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s00542-008-0604-5", 
      "https://app.dimensions.ai/details/publication/pub.1021628426"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T14:33", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000373_0000000373/records_13104_00000000.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007%2Fs00542-008-0604-5"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

104 TRIPLES      21 PREDICATES      33 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s00542-008-0604-5 schema:about anzsrc-for:09
2 anzsrc-for:0915
3 schema:author N830acacaa6f34c4bbacf406ddd9c3a47
4 schema:citation sg:pub.10.1007/s00542-006-0212-1
5 sg:pub.10.1007/s00542-007-0510-2
6 sg:pub.10.1023/a:1027306323657
7 https://doi.org/10.1016/s0924-4247(99)00260-5
8 https://doi.org/10.1063/1.1357452
9 https://doi.org/10.1088/0960-1317/14/4/021
10 schema:datePublished 2008-10
11 schema:datePublishedReg 2008-10-01
12 schema:description A novel fabrication method involving two-step sequential backside exposures utilizing Fraunhofer diffraction is developed in this work to overcome some of the limitations of the current micro-nozzle fabrication techniques in controlling the shape and the size of micro-nozzles. Shape and size of the fabricated micro-nozzles are compared with simulation results. Micro-nozzles with tip diameters varying from 0 to 158.1 μm and the base diameter varying from 167.2 to 360 μm are fabricated simultaneously side-by-side on the same substrate by varying the total exposure dosage from 3 to 6 J/cm2 utilizing multiple backside exposures through designed circular aperture and zone plate masks.
13 schema:genre research_article
14 schema:inLanguage en
15 schema:isAccessibleForFree false
16 schema:isPartOf N592bf2e5d5f54bae9b62caa98eb1ba72
17 Nddef9a26248647efa35a90b5d25809b3
18 sg:journal.1294787
19 schema:name Shape controllable micro-nozzle fabrication
20 schema:pagination 1641-1646
21 schema:productId N0eba493390ec4db88fc3ed0985dad585
22 Nbaedc916b9494165a789b2ec8ac40f02
23 Nc4ed750561d54eca96418de3b50b8198
24 schema:sameAs https://app.dimensions.ai/details/publication/pub.1021628426
25 https://doi.org/10.1007/s00542-008-0604-5
26 schema:sdDatePublished 2019-04-11T14:33
27 schema:sdLicense https://scigraph.springernature.com/explorer/license/
28 schema:sdPublisher N720977bb97d645ab9a588d89f79c6db9
29 schema:url http://link.springer.com/10.1007%2Fs00542-008-0604-5
30 sgo:license sg:explorer/license/
31 sgo:sdDataset articles
32 rdf:type schema:ScholarlyArticle
33 N0eba493390ec4db88fc3ed0985dad585 schema:name readcube_id
34 schema:value 670c75859b9b717df88f50bc71cba01baa028a81c17f2eb3ad426a384cb20cbb
35 rdf:type schema:PropertyValue
36 N592bf2e5d5f54bae9b62caa98eb1ba72 schema:volumeNumber 14
37 rdf:type schema:PublicationVolume
38 N720977bb97d645ab9a588d89f79c6db9 schema:name Springer Nature - SN SciGraph project
39 rdf:type schema:Organization
40 N7e74adb1c3ce4608843a65d2ebf96f9e rdf:first sg:person.016357241431.41
41 rdf:rest Ne3f180752f9043d09a4e819c7015d7c4
42 N830acacaa6f34c4bbacf406ddd9c3a47 rdf:first sg:person.07650261517.40
43 rdf:rest Nd5b29f5fed3943499e02fd93359e9b68
44 Nbaedc916b9494165a789b2ec8ac40f02 schema:name dimensions_id
45 schema:value pub.1021628426
46 rdf:type schema:PropertyValue
47 Nc4ed750561d54eca96418de3b50b8198 schema:name doi
48 schema:value 10.1007/s00542-008-0604-5
49 rdf:type schema:PropertyValue
50 Nd5b29f5fed3943499e02fd93359e9b68 rdf:first sg:person.010120126675.38
51 rdf:rest N7e74adb1c3ce4608843a65d2ebf96f9e
52 Nddef9a26248647efa35a90b5d25809b3 schema:issueNumber 9-11
53 rdf:type schema:PublicationIssue
54 Ne3f180752f9043d09a4e819c7015d7c4 rdf:first sg:person.012546105716.49
55 rdf:rest rdf:nil
56 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
57 schema:name Engineering
58 rdf:type schema:DefinedTerm
59 anzsrc-for:0915 schema:inDefinedTermSet anzsrc-for:
60 schema:name Interdisciplinary Engineering
61 rdf:type schema:DefinedTerm
62 sg:journal.1294787 schema:issn 0946-7076
63 1432-1858
64 schema:name Microsystem Technologies
65 rdf:type schema:Periodical
66 sg:person.010120126675.38 schema:affiliation https://www.grid.ac/institutes/grid.64337.35
67 schema:familyName Jin
68 schema:givenName Yoonyoung
69 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010120126675.38
70 rdf:type schema:Person
71 sg:person.012546105716.49 schema:affiliation https://www.grid.ac/institutes/grid.64337.35
72 schema:familyName Ajmera
73 schema:givenName Pratul K.
74 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012546105716.49
75 rdf:type schema:Person
76 sg:person.016357241431.41 schema:affiliation https://www.grid.ac/institutes/grid.64337.35
77 schema:familyName Goettert
78 schema:givenName Jost
79 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016357241431.41
80 rdf:type schema:Person
81 sg:person.07650261517.40 schema:affiliation https://www.grid.ac/institutes/grid.64337.35
82 schema:familyName Kang
83 schema:givenName KyungNam
84 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07650261517.40
85 rdf:type schema:Person
86 sg:pub.10.1007/s00542-006-0212-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029238603
87 https://doi.org/10.1007/s00542-006-0212-1
88 rdf:type schema:CreativeWork
89 sg:pub.10.1007/s00542-007-0510-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017118054
90 https://doi.org/10.1007/s00542-007-0510-2
91 rdf:type schema:CreativeWork
92 sg:pub.10.1023/a:1027306323657 schema:sameAs https://app.dimensions.ai/details/publication/pub.1021744542
93 https://doi.org/10.1023/a:1027306323657
94 rdf:type schema:CreativeWork
95 https://doi.org/10.1016/s0924-4247(99)00260-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052262995
96 rdf:type schema:CreativeWork
97 https://doi.org/10.1063/1.1357452 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057698483
98 rdf:type schema:CreativeWork
99 https://doi.org/10.1088/0960-1317/14/4/021 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002592745
100 rdf:type schema:CreativeWork
101 https://www.grid.ac/institutes/grid.64337.35 schema:alternateName Louisiana State University
102 schema:name Center for Advanced Microstructures and Devices, Louisiana State University, 70806, Baton Rouge, LA, USA
103 Department of Electrical and Computer Engineering, Louisiana State University, 70803, Baton Rouge, LA, USA
104 rdf:type schema:Organization
 




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