High aspect ratio micro tool manufacturing for polymer replication using μEDM of silicon, selective etching and electroforming View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2008-10

AUTHORS

G. Tosello, G. Bissacco, P. T. Tang, H. N. Hansen, P. C. Nielsen

ABSTRACT

Mass fabrication of polymer micro components with high aspect ratio micro-structures requires high performance micro tools allowing the use of low cost replication processes such as micro injection moulding. In this regard an innovative process chain, based on a combination of micro electrical discharge machining (μEDM) of a silicon substrate, electroforming and selective etching was used for the manufacturing of a micro tool. The micro tool was employed for polymer replication by means of the injection moulding process. More... »

PAGES

1757-1764

Journal

TITLE

Microsystem Technologies

ISSUE

9-11

VOLUME

14

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00542-008-0564-9

DOI

http://dx.doi.org/10.1007/s00542-008-0564-9

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1053216393


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