MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2007-07

AUTHORS

Yi Chiu, Chiung-Ting Kuo, Yu-Shan Chu

ABSTRACT

This paper presents a micro electrostatic vibration-to-electricity energy converter based on the micro-electromechanical system. For the 3.3 V supply voltage and 1 cm2 chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In the current design, the output power is 200 μW/cm2 for the optimal load of 8 MΩ. The device was fabricated in a silicon-on-insulator wafer. Mechanical and electrical measurements were conducted. Residual particles caused shortage of the variable capacitor and the output power could not be measured. Fabrication processes are being refined to remove the back silicon substrate to eliminate residual particles and parasitic capacitance. More... »

PAGES

1663-1669

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00542-006-0348-z

DOI

http://dx.doi.org/10.1007/s00542-006-0348-z

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1028532591


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