High-aspect-ratio microdrilling in polymeric materials with intense KrF laser radiation View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1999-12

AUTHORS

S. Lazare, J. Lopez, F. Weisbuch

ABSTRACT

UV laser microdrilling of high-aspect-ratio holes has been studied by using an intense beam with a low numerical aperture (KrF laser). The UV laser ablation produces a minimum of thermal or mechanical damage on the target. Under some particular experimental conditions (many high-fluence pulses), it is shown that long deep holes are obtained with reproducible aspect ratio (up to Φ/d≈600) in a variety of materials. Experiments with polymers (PMMA, PC, PET, PI, PS, PEEK) show that the more absorbing the polymer is, the better the resolution. However highly absorbing materials exhibit a low ablation rate. These promising results on laser microdrilling can be extended to new applications, for example, when the beam/target relative movement is computer driven. For instance this approach can be applied to cutting micro-objects with complicated shape or to machining fragile or brittle materials. More... »

PAGES

s1-s6

Journal

TITLE

Applied Physics A

ISSUE

Suppl 1

VOLUME

69

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s003399900218

DOI

http://dx.doi.org/10.1007/s003399900218

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1033514155


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "University of Bordeaux", 
          "id": "https://www.grid.ac/institutes/grid.412041.2", 
          "name": [
            "Laboratoire de Physicochimie Mol\u00e9culaire (LPCM), UMR 5803 du CNRS, Universit\u00e9 de Bordeaux 1, 351 cours de la Lib\u00e9ration, 33405 Talence, France (Fax: +33-5/5684-6645, E-mail: lazare@frbdx11.cribx1.u-bordeaux.fr), FR"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Lazare", 
        "givenName": "S.", 
        "id": "sg:person.015337120722.95", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015337120722.95"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Bordeaux", 
          "id": "https://www.grid.ac/institutes/grid.412041.2", 
          "name": [
            "Laboratoire de Physicochimie Mol\u00e9culaire (LPCM), UMR 5803 du CNRS, Universit\u00e9 de Bordeaux 1, 351 cours de la Lib\u00e9ration, 33405 Talence, France (Fax: +33-5/5684-6645, E-mail: lazare@frbdx11.cribx1.u-bordeaux.fr), FR"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Lopez", 
        "givenName": "J.", 
        "id": "sg:person.014756656775.30", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014756656775.30"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Bordeaux", 
          "id": "https://www.grid.ac/institutes/grid.412041.2", 
          "name": [
            "Laboratoire de Physicochimie Mol\u00e9culaire (LPCM), UMR 5803 du CNRS, Universit\u00e9 de Bordeaux 1, 351 cours de la Lib\u00e9ration, 33405 Talence, France (Fax: +33-5/5684-6645, E-mail: lazare@frbdx11.cribx1.u-bordeaux.fr), FR"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Weisbuch", 
        "givenName": "F.", 
        "id": "sg:person.015421510631.43", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015421510631.43"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "1999-12", 
    "datePublishedReg": "1999-12-01", 
    "description": "UV laser microdrilling of high-aspect-ratio holes has been studied by using an intense beam with a low numerical aperture (KrF laser). The UV laser ablation produces a minimum of thermal or mechanical damage on the target. Under some particular experimental conditions (many high-fluence pulses), it is shown that long deep holes are obtained with reproducible aspect ratio (up to \u03a6/d\u2248600) in a variety of materials. Experiments with polymers (PMMA, PC, PET, PI, PS, PEEK) show that the more absorbing the polymer is, the better the resolution. However highly absorbing materials exhibit a low ablation rate. These promising results on laser microdrilling can be extended to new applications, for example, when the beam/target relative movement is computer driven. For instance this approach can be applied to cutting micro-objects with complicated shape or to machining fragile or brittle materials.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s003399900218", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1022207", 
        "issn": [
          "0947-8396", 
          "1432-0630"
        ], 
        "name": "Applied Physics A", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "Suppl 1", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "69"
      }
    ], 
    "name": "High-aspect-ratio microdrilling in polymeric materials with intense KrF laser radiation", 
    "pagination": "s1-s6", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "9fa7236973deddcf1738cb6ad07f30e49e532406aee5430f63af75582f853bb7"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s003399900218"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1033514155"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s003399900218", 
      "https://app.dimensions.ai/details/publication/pub.1033514155"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T21:30", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8687_00000482.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007/s003399900218"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s003399900218'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s003399900218'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s003399900218'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s003399900218'


 

This table displays all metadata directly associated to this object as RDF triples.

75 TRIPLES      20 PREDICATES      27 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s003399900218 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N603d6e23a5a5416297c2a393c7bfc24a
4 schema:datePublished 1999-12
5 schema:datePublishedReg 1999-12-01
6 schema:description UV laser microdrilling of high-aspect-ratio holes has been studied by using an intense beam with a low numerical aperture (KrF laser). The UV laser ablation produces a minimum of thermal or mechanical damage on the target. Under some particular experimental conditions (many high-fluence pulses), it is shown that long deep holes are obtained with reproducible aspect ratio (up to Φ/d≈600) in a variety of materials. Experiments with polymers (PMMA, PC, PET, PI, PS, PEEK) show that the more absorbing the polymer is, the better the resolution. However highly absorbing materials exhibit a low ablation rate. These promising results on laser microdrilling can be extended to new applications, for example, when the beam/target relative movement is computer driven. For instance this approach can be applied to cutting micro-objects with complicated shape or to machining fragile or brittle materials.
7 schema:genre research_article
8 schema:inLanguage en
9 schema:isAccessibleForFree false
10 schema:isPartOf N8961dffa212f41a4b44e4582dd82da42
11 Ne489dc22ea8e4ff3b819931ab0873ef5
12 sg:journal.1022207
13 schema:name High-aspect-ratio microdrilling in polymeric materials with intense KrF laser radiation
14 schema:pagination s1-s6
15 schema:productId Na11b7d4807c34468ac14bdfa4e2ede03
16 Nd125749ae52840b9a15f9173423d304f
17 Nf2b662de9e314a27b3b0b4c40cf133a2
18 schema:sameAs https://app.dimensions.ai/details/publication/pub.1033514155
19 https://doi.org/10.1007/s003399900218
20 schema:sdDatePublished 2019-04-10T21:30
21 schema:sdLicense https://scigraph.springernature.com/explorer/license/
22 schema:sdPublisher Ne64d579fc1df404ea9025502f0b7518e
23 schema:url http://link.springer.com/10.1007/s003399900218
24 sgo:license sg:explorer/license/
25 sgo:sdDataset articles
26 rdf:type schema:ScholarlyArticle
27 N52fac79d24d14a8da8597fb043811c68 rdf:first sg:person.014756656775.30
28 rdf:rest N7d6986c767ec4c778ccbd182549365f2
29 N603d6e23a5a5416297c2a393c7bfc24a rdf:first sg:person.015337120722.95
30 rdf:rest N52fac79d24d14a8da8597fb043811c68
31 N7d6986c767ec4c778ccbd182549365f2 rdf:first sg:person.015421510631.43
32 rdf:rest rdf:nil
33 N8961dffa212f41a4b44e4582dd82da42 schema:issueNumber Suppl 1
34 rdf:type schema:PublicationIssue
35 Na11b7d4807c34468ac14bdfa4e2ede03 schema:name readcube_id
36 schema:value 9fa7236973deddcf1738cb6ad07f30e49e532406aee5430f63af75582f853bb7
37 rdf:type schema:PropertyValue
38 Nd125749ae52840b9a15f9173423d304f schema:name doi
39 schema:value 10.1007/s003399900218
40 rdf:type schema:PropertyValue
41 Ne489dc22ea8e4ff3b819931ab0873ef5 schema:volumeNumber 69
42 rdf:type schema:PublicationVolume
43 Ne64d579fc1df404ea9025502f0b7518e schema:name Springer Nature - SN SciGraph project
44 rdf:type schema:Organization
45 Nf2b662de9e314a27b3b0b4c40cf133a2 schema:name dimensions_id
46 schema:value pub.1033514155
47 rdf:type schema:PropertyValue
48 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
49 schema:name Engineering
50 rdf:type schema:DefinedTerm
51 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
52 schema:name Materials Engineering
53 rdf:type schema:DefinedTerm
54 sg:journal.1022207 schema:issn 0947-8396
55 1432-0630
56 schema:name Applied Physics A
57 rdf:type schema:Periodical
58 sg:person.014756656775.30 schema:affiliation https://www.grid.ac/institutes/grid.412041.2
59 schema:familyName Lopez
60 schema:givenName J.
61 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014756656775.30
62 rdf:type schema:Person
63 sg:person.015337120722.95 schema:affiliation https://www.grid.ac/institutes/grid.412041.2
64 schema:familyName Lazare
65 schema:givenName S.
66 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015337120722.95
67 rdf:type schema:Person
68 sg:person.015421510631.43 schema:affiliation https://www.grid.ac/institutes/grid.412041.2
69 schema:familyName Weisbuch
70 schema:givenName F.
71 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015421510631.43
72 rdf:type schema:Person
73 https://www.grid.ac/institutes/grid.412041.2 schema:alternateName University of Bordeaux
74 schema:name Laboratoire de Physicochimie Moléculaire (LPCM), UMR 5803 du CNRS, Université de Bordeaux 1, 351 cours de la Libération, 33405 Talence, France (Fax: +33-5/5684-6645, E-mail: lazare@frbdx11.cribx1.u-bordeaux.fr), FR
75 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...