Study of laser-deposited metallic thin films by a combination of high-resolution ex situ and time-resolved in situ experiments View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1999-12

AUTHORS

M. Störmer, K. Sturm, S. Fähler, M. Weisheit, J. Winkler, S. Kahl, Ph. Kesten, A. Pundt, M. Seibt, S. Senz, H.-U. Krebs

ABSTRACT

Laser-deposited metallic alloys and multilayers were studied in detail by a combination of high-resolution ex situ and time-resolved in situ experiments. The purpose of these experiments is to better understand the special properties of laser-deposited metallic films in comparison with conventionally prepared thin films. During deposition, thickness, resistance, and electron diffraction (THEED) experiments show that the film surface is resputtered, local mixing at the interfaces of multilayers on a nanometre scale occurs, and metastable phases up to large film thicknesses are formed. After deposition, a compressive stress of 1–2 GPa was measured using four-circle diffractometry, and growth defects were observed on an atomic scale by electron microscopy (HRTEM) and field ion microscopy (FIM). The obtained structural details of the metallic films can be explained by an implantation model for the laser deposition process. More... »

PAGES

s455-s457

Journal

TITLE

Applied Physics A

ISSUE

Suppl 1

VOLUME

69

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s003390051437

DOI

http://dx.doi.org/10.1007/s003390051437

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1022325881


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