Two-dimensional nanometer-scale calibration based on one-dimensional gratings View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1998-03

AUTHORS

J. Garnaes, L. Nielsen, K. Dirscherl, J.F. Jørgensen, J.B. Rasmussen, P.E. Lindelof, C.B. Sørensen

ABSTRACT

x and Cy, and the angle between the scanned x axis and the scanned y axis. From only three images of lines the calibration parameters can be calculated analytically. From more than three images the correction parameters can be estimated using a least-squares fitting technique. Using this method we have calibrated a tube scanner. For a scan area of 1000 nm×1000 nm, we have measured Cx and Cy with relative standard uncertainties (k=1) of 0.5% and 0.9%, respectively and γ with a standard uncertainty of 0.7°. This work is done to obtain traceability in the important sub-micrometer range as no commercial calibration objects are available with lateral dimensions between 200 nm and ≈1 nm. More... »

PAGES

s831-s835

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s003390051251

DOI

http://dx.doi.org/10.1007/s003390051251

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1014646836


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