Black Germanium fabricated by reactive ion etching View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2016-09

AUTHORS

Martin Steglich, Thomas Käsebier, Ernst-Bernhard Kley, Andreas Tünnermann

ABSTRACT

A reactive ion etching technique for the preparation of statistical “Black Germanium” antireflection surfaces, relying on self-organization in a Cl2 etch chemistry, is presented. The morphology of the fabricated Black Germanium surfaces is the result of a random lateral distribution of pyramidal etch pits with heights around (1450 ± 150) nm and sidewall angles between 80° and 85°. The pyramids’ base edges are oriented along the <110> crystal directions of Germanium, indicating a crystal anisotropy of the etching process. In the Vis–NIR, the tapered Black Germanium surface structure suppresses interface reflection to <2.5 % for normal incidence and still to <6 % at an angle of incidence of 70°. The presented Black Germanium might find applications as low-cost AR structure in optoelectronics and IR optics. More... »

PAGES

836

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00339-016-0318-y

DOI

http://dx.doi.org/10.1007/s00339-016-0318-y

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1016764437


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Chemistry (incl. Structural)", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Friedrich Schiller University Jena", 
          "id": "https://www.grid.ac/institutes/grid.9613.d", 
          "name": [
            "Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Jena, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Steglich", 
        "givenName": "Martin", 
        "id": "sg:person.010154746515.66", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010154746515.66"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Friedrich Schiller University Jena", 
          "id": "https://www.grid.ac/institutes/grid.9613.d", 
          "name": [
            "Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Jena, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "K\u00e4sebier", 
        "givenName": "Thomas", 
        "id": "sg:person.01102255221.26", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01102255221.26"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Fraunhofer Institute for Applied Optics and Precision Engineering", 
          "id": "https://www.grid.ac/institutes/grid.418007.a", 
          "name": [
            "Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Jena, Germany", 
            "Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kley", 
        "givenName": "Ernst-Bernhard", 
        "id": "sg:person.01261754731.24", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01261754731.24"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Fraunhofer Institute for Applied Optics and Precision Engineering", 
          "id": "https://www.grid.ac/institutes/grid.418007.a", 
          "name": [
            "Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Jena, Germany", 
            "Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "T\u00fcnnermann", 
        "givenName": "Andreas", 
        "id": "sg:person.0577721111.73", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0577721111.73"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1088/0022-3727/38/18/012", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014238354"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/38/18/012", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014238354"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.mee.2012.06.008", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014776905"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.4900996", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026029135"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s12274-010-0012-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027355617", 
          "https://doi.org/10.1007/s12274-010-0012-x"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s12274-010-0012-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027355617", 
          "https://doi.org/10.1007/s12274-010-0012-x"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.infrared.2015.01.033", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1031588048"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.854596", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036242345"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0960-1317/6/1/002", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045393444"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0960-1317/5/2/015", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047078776"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.matlet.2012.12.014", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049250556"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl080330y", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056217718"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nl080330y", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056217718"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.3171930", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057917330"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.23.5464", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060528875"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.23.5464", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060528875"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/16.925248", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061097531"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.2210946", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062171710"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.3089371", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062173906"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.569962", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062180009"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.24.68", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063040397"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ao.51.000008", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065127471"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/josaa.8.000549", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065166555"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/oe.15.013108", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065186191"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/oe.17.003063", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065189732"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/oe.17.003063", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065189732"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/9783527613786", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1109492041"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2016-09", 
    "datePublishedReg": "2016-09-01", 
    "description": "A reactive ion etching technique for the preparation of statistical \u201cBlack Germanium\u201d antireflection surfaces, relying on self-organization in a Cl2 etch chemistry, is presented. The morphology of the fabricated Black Germanium surfaces is the result of a random lateral distribution of pyramidal etch pits with heights around (1450 \u00b1 150) nm and sidewall angles between 80\u00b0 and 85\u00b0. The pyramids\u2019 base edges are oriented along the <110> crystal directions of Germanium, indicating a crystal anisotropy of the etching process. In the Vis\u2013NIR, the tapered Black Germanium surface structure suppresses interface reflection to <2.5 % for normal incidence and still to <6 % at an angle of incidence of 70\u00b0. The presented Black Germanium might find applications as low-cost AR structure in optoelectronics and IR optics.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s00339-016-0318-y", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1022207", 
        "issn": [
          "0947-8396", 
          "1432-0630"
        ], 
        "name": "Applied Physics A", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "9", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "122"
      }
    ], 
    "name": "Black Germanium fabricated by reactive ion etching", 
    "pagination": "836", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "4fe0633c91e6d27240ba8352e6c04fec99d9c527dd344d1c4a2eff132dc6ae35"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s00339-016-0318-y"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1016764437"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s00339-016-0318-y", 
      "https://app.dimensions.ai/details/publication/pub.1016764437"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T12:39", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000363_0000000363/records_70046_00000000.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://link.springer.com/10.1007%2Fs00339-016-0318-y"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s00339-016-0318-y'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s00339-016-0318-y'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s00339-016-0318-y'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s00339-016-0318-y'


 

This table displays all metadata directly associated to this object as RDF triples.

153 TRIPLES      21 PREDICATES      49 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s00339-016-0318-y schema:about anzsrc-for:03
2 anzsrc-for:0306
3 schema:author N44af8d9b37c849bdb8edf3c17eb4262e
4 schema:citation sg:pub.10.1007/s12274-010-0012-x
5 https://doi.org/10.1002/9783527613786
6 https://doi.org/10.1016/j.infrared.2015.01.033
7 https://doi.org/10.1016/j.matlet.2012.12.014
8 https://doi.org/10.1016/j.mee.2012.06.008
9 https://doi.org/10.1021/nl080330y
10 https://doi.org/10.1063/1.3171930
11 https://doi.org/10.1063/1.4900996
12 https://doi.org/10.1088/0022-3727/38/18/012
13 https://doi.org/10.1088/0960-1317/5/2/015
14 https://doi.org/10.1088/0960-1317/6/1/002
15 https://doi.org/10.1103/physrevb.23.5464
16 https://doi.org/10.1109/16.925248
17 https://doi.org/10.1116/1.2210946
18 https://doi.org/10.1116/1.3089371
19 https://doi.org/10.1116/1.569962
20 https://doi.org/10.1117/12.854596
21 https://doi.org/10.1143/jjap.24.68
22 https://doi.org/10.1364/ao.51.000008
23 https://doi.org/10.1364/josaa.8.000549
24 https://doi.org/10.1364/oe.15.013108
25 https://doi.org/10.1364/oe.17.003063
26 schema:datePublished 2016-09
27 schema:datePublishedReg 2016-09-01
28 schema:description A reactive ion etching technique for the preparation of statistical “Black Germanium” antireflection surfaces, relying on self-organization in a Cl2 etch chemistry, is presented. The morphology of the fabricated Black Germanium surfaces is the result of a random lateral distribution of pyramidal etch pits with heights around (1450 ± 150) nm and sidewall angles between 80° and 85°. The pyramids’ base edges are oriented along the <110> crystal directions of Germanium, indicating a crystal anisotropy of the etching process. In the Vis–NIR, the tapered Black Germanium surface structure suppresses interface reflection to <2.5 % for normal incidence and still to <6 % at an angle of incidence of 70°. The presented Black Germanium might find applications as low-cost AR structure in optoelectronics and IR optics.
29 schema:genre research_article
30 schema:inLanguage en
31 schema:isAccessibleForFree false
32 schema:isPartOf N09ba99c485034a1a838e2ef12757be95
33 Ndb653307d4a1432cac178febd0b04bc5
34 sg:journal.1022207
35 schema:name Black Germanium fabricated by reactive ion etching
36 schema:pagination 836
37 schema:productId N068c07d1ea2348549216107de460b20e
38 N4cc727d338114c688e69b0a87f0df2c7
39 Na1f4d77ecc254a789f8fd16d26873705
40 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016764437
41 https://doi.org/10.1007/s00339-016-0318-y
42 schema:sdDatePublished 2019-04-11T12:39
43 schema:sdLicense https://scigraph.springernature.com/explorer/license/
44 schema:sdPublisher N6dc917cd4af24216bb26062f681d38ae
45 schema:url https://link.springer.com/10.1007%2Fs00339-016-0318-y
46 sgo:license sg:explorer/license/
47 sgo:sdDataset articles
48 rdf:type schema:ScholarlyArticle
49 N068c07d1ea2348549216107de460b20e schema:name dimensions_id
50 schema:value pub.1016764437
51 rdf:type schema:PropertyValue
52 N09ba99c485034a1a838e2ef12757be95 schema:issueNumber 9
53 rdf:type schema:PublicationIssue
54 N3a4ef5313783491e983362c9986610bc rdf:first sg:person.0577721111.73
55 rdf:rest rdf:nil
56 N44af8d9b37c849bdb8edf3c17eb4262e rdf:first sg:person.010154746515.66
57 rdf:rest Nbdb70290d69a4706b99cda98177fac08
58 N4cc727d338114c688e69b0a87f0df2c7 schema:name doi
59 schema:value 10.1007/s00339-016-0318-y
60 rdf:type schema:PropertyValue
61 N6dc917cd4af24216bb26062f681d38ae schema:name Springer Nature - SN SciGraph project
62 rdf:type schema:Organization
63 N84accc54ae9c478e8b605e303090b180 rdf:first sg:person.01261754731.24
64 rdf:rest N3a4ef5313783491e983362c9986610bc
65 Na1f4d77ecc254a789f8fd16d26873705 schema:name readcube_id
66 schema:value 4fe0633c91e6d27240ba8352e6c04fec99d9c527dd344d1c4a2eff132dc6ae35
67 rdf:type schema:PropertyValue
68 Nbdb70290d69a4706b99cda98177fac08 rdf:first sg:person.01102255221.26
69 rdf:rest N84accc54ae9c478e8b605e303090b180
70 Ndb653307d4a1432cac178febd0b04bc5 schema:volumeNumber 122
71 rdf:type schema:PublicationVolume
72 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
73 schema:name Chemical Sciences
74 rdf:type schema:DefinedTerm
75 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
76 schema:name Physical Chemistry (incl. Structural)
77 rdf:type schema:DefinedTerm
78 sg:journal.1022207 schema:issn 0947-8396
79 1432-0630
80 schema:name Applied Physics A
81 rdf:type schema:Periodical
82 sg:person.010154746515.66 schema:affiliation https://www.grid.ac/institutes/grid.9613.d
83 schema:familyName Steglich
84 schema:givenName Martin
85 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010154746515.66
86 rdf:type schema:Person
87 sg:person.01102255221.26 schema:affiliation https://www.grid.ac/institutes/grid.9613.d
88 schema:familyName Käsebier
89 schema:givenName Thomas
90 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01102255221.26
91 rdf:type schema:Person
92 sg:person.01261754731.24 schema:affiliation https://www.grid.ac/institutes/grid.418007.a
93 schema:familyName Kley
94 schema:givenName Ernst-Bernhard
95 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01261754731.24
96 rdf:type schema:Person
97 sg:person.0577721111.73 schema:affiliation https://www.grid.ac/institutes/grid.418007.a
98 schema:familyName Tünnermann
99 schema:givenName Andreas
100 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0577721111.73
101 rdf:type schema:Person
102 sg:pub.10.1007/s12274-010-0012-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1027355617
103 https://doi.org/10.1007/s12274-010-0012-x
104 rdf:type schema:CreativeWork
105 https://doi.org/10.1002/9783527613786 schema:sameAs https://app.dimensions.ai/details/publication/pub.1109492041
106 rdf:type schema:CreativeWork
107 https://doi.org/10.1016/j.infrared.2015.01.033 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031588048
108 rdf:type schema:CreativeWork
109 https://doi.org/10.1016/j.matlet.2012.12.014 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049250556
110 rdf:type schema:CreativeWork
111 https://doi.org/10.1016/j.mee.2012.06.008 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014776905
112 rdf:type schema:CreativeWork
113 https://doi.org/10.1021/nl080330y schema:sameAs https://app.dimensions.ai/details/publication/pub.1056217718
114 rdf:type schema:CreativeWork
115 https://doi.org/10.1063/1.3171930 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057917330
116 rdf:type schema:CreativeWork
117 https://doi.org/10.1063/1.4900996 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026029135
118 rdf:type schema:CreativeWork
119 https://doi.org/10.1088/0022-3727/38/18/012 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014238354
120 rdf:type schema:CreativeWork
121 https://doi.org/10.1088/0960-1317/5/2/015 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047078776
122 rdf:type schema:CreativeWork
123 https://doi.org/10.1088/0960-1317/6/1/002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045393444
124 rdf:type schema:CreativeWork
125 https://doi.org/10.1103/physrevb.23.5464 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060528875
126 rdf:type schema:CreativeWork
127 https://doi.org/10.1109/16.925248 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061097531
128 rdf:type schema:CreativeWork
129 https://doi.org/10.1116/1.2210946 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062171710
130 rdf:type schema:CreativeWork
131 https://doi.org/10.1116/1.3089371 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062173906
132 rdf:type schema:CreativeWork
133 https://doi.org/10.1116/1.569962 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062180009
134 rdf:type schema:CreativeWork
135 https://doi.org/10.1117/12.854596 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036242345
136 rdf:type schema:CreativeWork
137 https://doi.org/10.1143/jjap.24.68 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063040397
138 rdf:type schema:CreativeWork
139 https://doi.org/10.1364/ao.51.000008 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065127471
140 rdf:type schema:CreativeWork
141 https://doi.org/10.1364/josaa.8.000549 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065166555
142 rdf:type schema:CreativeWork
143 https://doi.org/10.1364/oe.15.013108 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065186191
144 rdf:type schema:CreativeWork
145 https://doi.org/10.1364/oe.17.003063 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065189732
146 rdf:type schema:CreativeWork
147 https://www.grid.ac/institutes/grid.418007.a schema:alternateName Fraunhofer Institute for Applied Optics and Precision Engineering
148 schema:name Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, Germany
149 Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Jena, Germany
150 rdf:type schema:Organization
151 https://www.grid.ac/institutes/grid.9613.d schema:alternateName Friedrich Schiller University Jena
152 schema:name Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Jena, Germany
153 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...