Ontology type: schema:ScholarlyArticle
2014-01
AUTHORSF. Zimmermann, A. Plech, S. Richter, S. Döring, A. Tünnermann, S. Nolte
ABSTRACTWe present an extensive study of the underlying structure of femtosecond laser-induced nanogratings in fused silica. To explore the evolution of the three-dimensional structure of the nanopores and cracks, of which the nanogratings consist, we performed small angle X-ray scattering measurements as well as focused ion beam milling and scanning electron microscopy. Our results show that cracks with dimensions of (280 × 25 × 380) nm3 and nanopores with typical diameters of (30 × 25 × 75) nm3 are formed independent of various illumination parameters. With increasing number of laser pulses the smaller pores fuse to larger structures. Furthermore, the data suggest a cross-sectional change of the pores from cuboidal to ellipsoidal. More... »
PAGES75-79
http://scigraph.springernature.com/pub.10.1007/s00339-013-8093-5
DOIhttp://dx.doi.org/10.1007/s00339-013-8093-5
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