Ontology type: schema:ScholarlyArticle
2013-09
AUTHORSS. Döring, S. Richter, F. Heisler, T. Ullsperger, A. Tünnermann, S. Nolte
ABSTRACTWe investigate the temporal evolution of the hole depth and shape for percussion drilling at different ambient pressure conditions. Deep drilling is performed in silicon as target material by ultrashort laser pulses at 1030 nm and a duration of 8 ps. Simultaneously, the backlit silhouette of the hole is imaged perpendicular to the drilling direction. While typical process phases like depth development and shape evolution are very similar for atmospheric pressure down to vacuum conditions (10−2 mbar), the ablation rate in the initial process phase is significantly increased for reduced pressure. The number of pulses till the stop of the drilling process also increases by a pressure reduction and exceeds drilling at atmospheric conditions by two orders of magnitude for a pressure of ca. 10−2 mbar. Accordingly, the maximum achievable hole depth is more than doubled. We attribute this behavior to an enlarged mean free path for ablation products at reduced pressure and therefore lower or no deposition of particles inside the hole capillary under vacuum conditions while debris fills the hole already after a few thousand pulses at atmospheric pressure. This is supported by scanning electron cross section images of the holes. More... »
PAGES623-629
http://scigraph.springernature.com/pub.10.1007/s00339-013-7836-7
DOIhttp://dx.doi.org/10.1007/s00339-013-7836-7
DIMENSIONShttps://app.dimensions.ai/details/publication/pub.1008455129
JSON-LD is the canonical representation for SciGraph data.
TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT
[
{
"@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json",
"about": [
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0202",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Atomic, Molecular, Nuclear, Particle and Plasma Physics",
"type": "DefinedTerm"
},
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Physical Sciences",
"type": "DefinedTerm"
}
],
"author": [
{
"affiliation": {
"alternateName": "Friedrich Schiller University Jena",
"id": "https://www.grid.ac/institutes/grid.9613.d",
"name": [
"Institute of Applied Physics, Abbe Center of Photonics, Friedrich\u2013Schiller-Universit\u00e4t Jena, Max\u2013Wien-Platz 1, 07743, Jena, Germany"
],
"type": "Organization"
},
"familyName": "D\u00f6ring",
"givenName": "S.",
"id": "sg:person.0607266651.43",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0607266651.43"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Friedrich Schiller University Jena",
"id": "https://www.grid.ac/institutes/grid.9613.d",
"name": [
"Institute of Applied Physics, Abbe Center of Photonics, Friedrich\u2013Schiller-Universit\u00e4t Jena, Max\u2013Wien-Platz 1, 07743, Jena, Germany"
],
"type": "Organization"
},
"familyName": "Richter",
"givenName": "S.",
"id": "sg:person.01216444351.95",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01216444351.95"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Friedrich Schiller University Jena",
"id": "https://www.grid.ac/institutes/grid.9613.d",
"name": [
"Institute of Applied Physics, Abbe Center of Photonics, Friedrich\u2013Schiller-Universit\u00e4t Jena, Max\u2013Wien-Platz 1, 07743, Jena, Germany"
],
"type": "Organization"
},
"familyName": "Heisler",
"givenName": "F.",
"id": "sg:person.013021746313.36",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013021746313.36"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Friedrich Schiller University Jena",
"id": "https://www.grid.ac/institutes/grid.9613.d",
"name": [
"Institute of Applied Physics, Abbe Center of Photonics, Friedrich\u2013Schiller-Universit\u00e4t Jena, Max\u2013Wien-Platz 1, 07743, Jena, Germany"
],
"type": "Organization"
},
"familyName": "Ullsperger",
"givenName": "T.",
"id": "sg:person.016626250667.12",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016626250667.12"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Fraunhofer Institute for Applied Optics and Precision Engineering",
"id": "https://www.grid.ac/institutes/grid.418007.a",
"name": [
"Institute of Applied Physics, Abbe Center of Photonics, Friedrich\u2013Schiller-Universit\u00e4t Jena, Max\u2013Wien-Platz 1, 07743, Jena, Germany",
"Fraunhofer Institute for Applied Optics and Precision Engineering, Albert\u2013Einstein-Stra\u00dfe 7, 07745, Jena, Germany"
],
"type": "Organization"
},
"familyName": "T\u00fcnnermann",
"givenName": "A.",
"id": "sg:person.0577721111.73",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0577721111.73"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Fraunhofer Institute for Applied Optics and Precision Engineering",
"id": "https://www.grid.ac/institutes/grid.418007.a",
"name": [
"Institute of Applied Physics, Abbe Center of Photonics, Friedrich\u2013Schiller-Universit\u00e4t Jena, Max\u2013Wien-Platz 1, 07743, Jena, Germany",
"Fraunhofer Institute for Applied Optics and Precision Engineering, Albert\u2013Einstein-Stra\u00dfe 7, 07745, Jena, Germany"
],
"type": "Organization"
},
"familyName": "Nolte",
"givenName": "S.",
"id": "sg:person.0767272372.44",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0767272372.44"
],
"type": "Person"
}
],
"citation": [
{
"id": "sg:pub.10.1007/bf01538207",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1003566905",
"https://doi.org/10.1007/bf01538207"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/bf01538207",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1003566905",
"https://doi.org/10.1007/bf01538207"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.apsusc.2005.01.137",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1014373369"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.tsf.2003.11.136",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1017628091"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1117/12.541434",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1032945658"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s00339-007-4211-6",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1038645777",
"https://doi.org/10.1007/s00339-007-4211-6"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s00339-007-4211-6",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1038645777",
"https://doi.org/10.1007/s00339-007-4211-6"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s00339-002-1823-8",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1038681018",
"https://doi.org/10.1007/s00339-002-1823-8"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s00339-004-3192-y",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1038826072",
"https://doi.org/10.1007/s00339-004-3192-y"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1016/j.tsf.2003.11.137",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1044090140"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/s00339-011-6526-6",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1044968427",
"https://doi.org/10.1007/s00339-011-6526-6"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/bf01567637",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1049853790",
"https://doi.org/10.1007/bf01567637"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1117/12.515612",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1050573180"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1017/s0263034603211125",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1053833523"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1021/j100785a001",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1055677944"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.3554442",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1057973274"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1063/1.4732507",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1058054369"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1070/qe2004v034n06abeh002769",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1058186776"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/josab.14.002716",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065168703"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.1364/oe.18.020395",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1065194624"
],
"type": "CreativeWork"
},
{
"id": "https://doi.org/10.2961/jlmn.2008.03.0015",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1070927346"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/b96440",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1109718978",
"https://doi.org/10.1007/b96440"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/b96440",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1109718978",
"https://doi.org/10.1007/b96440"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1007/b96440",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1109718978",
"https://doi.org/10.1007/b96440"
],
"type": "CreativeWork"
}
],
"datePublished": "2013-09",
"datePublishedReg": "2013-09-01",
"description": "We investigate the temporal evolution of the hole depth and shape for percussion drilling at different ambient pressure conditions. Deep drilling is performed in silicon as target material by ultrashort laser pulses at 1030 nm and a duration of 8 ps. Simultaneously, the backlit silhouette of the hole is imaged perpendicular to the drilling direction. While typical process phases like depth development and shape evolution are very similar for atmospheric pressure down to vacuum conditions (10\u22122 mbar), the ablation rate in the initial process phase is significantly increased for reduced pressure. The number of pulses till the stop of the drilling process also increases by a pressure reduction and exceeds drilling at atmospheric conditions by two orders of magnitude for a pressure of ca. 10\u22122 mbar. Accordingly, the maximum achievable hole depth is more than doubled. We attribute this behavior to an enlarged mean free path for ablation products at reduced pressure and therefore lower or no deposition of particles inside the hole capillary under vacuum conditions while debris fills the hole already after a few thousand pulses at atmospheric pressure. This is supported by scanning electron cross section images of the holes.",
"genre": "research_article",
"id": "sg:pub.10.1007/s00339-013-7836-7",
"inLanguage": [
"en"
],
"isAccessibleForFree": false,
"isPartOf": [
{
"id": "sg:journal.1022207",
"issn": [
"0947-8396",
"1432-0630"
],
"name": "Applied Physics A",
"type": "Periodical"
},
{
"issueNumber": "3",
"type": "PublicationIssue"
},
{
"type": "PublicationVolume",
"volumeNumber": "112"
}
],
"name": "Influence of ambient pressure on the hole formation in laser deep drilling",
"pagination": "623-629",
"productId": [
{
"name": "readcube_id",
"type": "PropertyValue",
"value": [
"2847b1cac07179cf62f32f009930b320214b2cf543e1fd2ba16f3efa8103be1b"
]
},
{
"name": "doi",
"type": "PropertyValue",
"value": [
"10.1007/s00339-013-7836-7"
]
},
{
"name": "dimensions_id",
"type": "PropertyValue",
"value": [
"pub.1008455129"
]
}
],
"sameAs": [
"https://doi.org/10.1007/s00339-013-7836-7",
"https://app.dimensions.ai/details/publication/pub.1008455129"
],
"sdDataset": "articles",
"sdDatePublished": "2019-04-10T19:18",
"sdLicense": "https://scigraph.springernature.com/explorer/license/",
"sdPublisher": {
"name": "Springer Nature - SN SciGraph project",
"type": "Organization"
},
"sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8678_00000581.jsonl",
"type": "ScholarlyArticle",
"url": "http://link.springer.com/10.1007/s00339-013-7836-7"
}
]Download the RDF metadata as: json-ld nt turtle xml License info
JSON-LD is a popular format for linked data which is fully compatible with JSON.
curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/s00339-013-7836-7'
N-Triples is a line-based linked data format ideal for batch operations.
curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/s00339-013-7836-7'
Turtle is a human-readable linked data format.
curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/s00339-013-7836-7'
RDF/XML is a standard XML format for linked data.
curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/s00339-013-7836-7'
This table displays all metadata directly associated to this object as RDF triples.
167 TRIPLES
21 PREDICATES
47 URIs
19 LITERALS
7 BLANK NODES