Ellipsometry studies of Si/Ge superlattices with embedded Ge dots View Full Text


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Article Info

DATE

2013-05-31

AUTHORS

Şeref Kalem, Örjan Arthursson, Peter Werner

ABSTRACT

In this paper, we present an analysis for treating the spectroscopic ellipsometry response of Si/Ge superlattices (SLs) with embedded Ge dots. Spectroscopic ellipsometry (SE) measurement at room temperature was used to investigate optical and electronic properties of Si/Ge SLs which were grown on silicon (Si) wafers having 〈111〉 crystallographic orientation. The results of the SE analysis between 200 nm and 1000 nm indicate that the SL system can effectively be described using an interdiffusion/intermixing model by assuming multicrystalline Si and Si1−xGex intermixing layers. The electronic transitions deduced from the analysis reveal Si-, Ge- and alloying-related critical energy points. More... »

PAGES

555-559

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00339-013-7781-5

DOI

http://dx.doi.org/10.1007/s00339-013-7781-5

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1038451293


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