Development of Al-based multilayer optics for EUV View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2010-01

AUTHORS

E. Meltchakov, C. Hecquet, M. Roulliay, S. De Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, F. Delmotte

ABSTRACT

We report on the development of multilayer optics for the extreme ultra-violet (EUV) range. The optical performance of Al-based multilayer mirrors is discussed with regard to promising reflectivity and selectivity characteristics and the problems of the interfacial roughness for this type of multilayers. We demonstrate a possibility to reduce the average roughness by introducing additional metal layer (W or Mo) rather than depositing a buffer layer at each interface. We have prepared and tested Al/SiC, Al/W/SiC and Al/Mo/SiC multilayers of various periods for the spectral range from 15 to 40 nm, which is the range of increasing interest for high-order harmonic generation, synchrotron radiation and astrophysics. The structure of the three-component systems has been optimized in order to obtain the best reflectivity for each wavelength within the spectral range. We have shown that introduction of refractory metal in Al-based periodic stack can improve the optical performance of multilayer reflecting coatings designed for the EUV applications. More... »

PAGES

111

Journal

TITLE

Applied Physics A

ISSUE

1

VOLUME

98

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00339-009-5445-2

DOI

http://dx.doi.org/10.1007/s00339-009-5445-2

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1030747103


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Laboratoire Charles Fabry", 
          "id": "https://www.grid.ac/institutes/grid.462674.5", 
          "name": [
            "Laboratoire Charles Fabry, Institut d\u2019Optique Graduate School, 91127, Palaiseau, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Meltchakov", 
        "givenName": "E.", 
        "id": "sg:person.01167106063.58", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01167106063.58"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire Charles Fabry", 
          "id": "https://www.grid.ac/institutes/grid.462674.5", 
          "name": [
            "Laboratoire Charles Fabry, Institut d\u2019Optique Graduate School, 91127, Palaiseau, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Hecquet", 
        "givenName": "C.", 
        "id": "sg:person.01021262152.93", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01021262152.93"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Laboratoire d\u2019Interaction du rayonnement X avec la Mati\u00e8re (LIXAM), 91403, Orsay, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Roulliay", 
        "givenName": "M.", 
        "id": "sg:person.013337053125.10", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013337053125.10"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire Charles Fabry", 
          "id": "https://www.grid.ac/institutes/grid.462674.5", 
          "name": [
            "Laboratoire Charles Fabry, Institut d\u2019Optique Graduate School, 91127, Palaiseau, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "De Rossi", 
        "givenName": "S.", 
        "id": "sg:person.0721630263.42", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0721630263.42"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire Charles Fabry", 
          "id": "https://www.grid.ac/institutes/grid.462674.5", 
          "name": [
            "Laboratoire Charles Fabry, Institut d\u2019Optique Graduate School, 91127, Palaiseau, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Menesguen", 
        "givenName": "Y.", 
        "id": "sg:person.015405726231.34", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015405726231.34"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire Charles Fabry", 
          "id": "https://www.grid.ac/institutes/grid.462674.5", 
          "name": [
            "Laboratoire Charles Fabry, Institut d\u2019Optique Graduate School, 91127, Palaiseau, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "J\u00e9rome", 
        "givenName": "A.", 
        "id": "sg:person.016202047323.80", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016202047323.80"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire Charles Fabry", 
          "id": "https://www.grid.ac/institutes/grid.462674.5", 
          "name": [
            "Laboratoire Charles Fabry, Institut d\u2019Optique Graduate School, 91127, Palaiseau, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Bridou", 
        "givenName": "F.", 
        "id": "sg:person.07612777236.23", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07612777236.23"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire Charles Fabry", 
          "id": "https://www.grid.ac/institutes/grid.462674.5", 
          "name": [
            "Laboratoire Charles Fabry, Institut d\u2019Optique Graduate School, 91127, Palaiseau, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Varniere", 
        "givenName": "F.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire Charles Fabry", 
          "id": "https://www.grid.ac/institutes/grid.462674.5", 
          "name": [
            "Laboratoire Charles Fabry, Institut d\u2019Optique Graduate School, 91127, Palaiseau, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ravet-Krill", 
        "givenName": "M.-F.", 
        "id": "sg:person.015745146301.89", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015745146301.89"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire Charles Fabry", 
          "id": "https://www.grid.ac/institutes/grid.462674.5", 
          "name": [
            "Laboratoire Charles Fabry, Institut d\u2019Optique Graduate School, 91127, Palaiseau, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Delmotte", 
        "givenName": "F.", 
        "id": "sg:person.01355254030.23", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01355254030.23"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/j.elspec.2005.01.227", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002317066"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0953-8984/18/13/003", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004963572"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0953-8984/18/13/003", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004963572"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1140/epjb/e2008-00290-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1008420019", 
          "https://doi.org/10.1140/epjb/e2008-00290-x"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.949668", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1011963354"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.23315", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1013518410"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0040-6090(98)01451-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015838759"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/1.1489426", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022618581"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.332515", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027165186"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.820913", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1028415207"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.964833", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029329623"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1107/s0909049597019407", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030104987"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.168689", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1033769140"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.51214", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035707795"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/s1063785008050246", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039871942", 
          "https://doi.org/10.1134/s1063785008050246"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.514597", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040156192"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0168-9002(01)00314-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1041622978"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.mee.2006.01.126", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045742350"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s00339-007-4041-6", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046686943", 
          "https://doi.org/10.1007/s00339-007-4041-6"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/38/12/013", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047103196"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/38/12/013", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047103196"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.surfrep.2007.09.001", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053441124"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1051/aas:1997368", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056941681"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1051/jp4:2006138030", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056987551"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.348722", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057960549"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.584105", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062194152"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.41.4074", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063068047"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.41.5338", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063068347"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ao.36.002839", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065111951"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ao.37.004100", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065113340"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ao.39.002189", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065115120"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ao.43.001835", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065118903"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ao.44.000384", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065119533"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/josaa.19.000391", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065159719"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ol.19.001786", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065215408"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://app.dimensions.ai/details/publication/pub.1098869389", 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2010-01", 
    "datePublishedReg": "2010-01-01", 
    "description": "We report on the development of multilayer optics for the extreme ultra-violet (EUV) range. The optical performance of Al-based multilayer mirrors is discussed with regard to promising reflectivity and selectivity characteristics and the problems of the interfacial roughness for this type of multilayers. We demonstrate a possibility to reduce the average roughness by introducing additional metal layer (W or Mo) rather than depositing a buffer layer at each interface. We have prepared and tested Al/SiC, Al/W/SiC and Al/Mo/SiC multilayers of various periods for the spectral range from 15 to 40 nm, which is the range of increasing interest for high-order harmonic generation, synchrotron radiation and astrophysics. The structure of the three-component systems has been optimized in order to obtain the best reflectivity for each wavelength within the spectral range. We have shown that introduction of refractory metal in Al-based periodic stack can improve the optical performance of multilayer reflecting coatings designed for the EUV applications.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/s00339-009-5445-2", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1022207", 
        "issn": [
          "0947-8396", 
          "1432-0630"
        ], 
        "name": "Applied Physics A", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "1", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "98"
      }
    ], 
    "name": "Development of Al-based multilayer optics for EUV", 
    "pagination": "111", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "9279718ea36700ca34380c4ce629a74c6884521a23cecb227bd42e5de91e5edb"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s00339-009-5445-2"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1030747103"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s00339-009-5445-2", 
      "https://app.dimensions.ai/details/publication/pub.1030747103"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T14:34", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000373_0000000373/records_13109_00000001.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007/s00339-009-5445-2"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

229 TRIPLES      21 PREDICATES      61 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s00339-009-5445-2 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N47c632583c404d03b0a89a6c79e49402
4 schema:citation sg:pub.10.1007/s00339-007-4041-6
5 sg:pub.10.1134/s1063785008050246
6 sg:pub.10.1140/epjb/e2008-00290-x
7 https://app.dimensions.ai/details/publication/pub.1098869389
8 https://doi.org/10.1016/j.elspec.2005.01.227
9 https://doi.org/10.1016/j.mee.2006.01.126
10 https://doi.org/10.1016/j.surfrep.2007.09.001
11 https://doi.org/10.1016/s0040-6090(98)01451-5
12 https://doi.org/10.1016/s0168-9002(01)00314-x
13 https://doi.org/10.1051/aas:1997368
14 https://doi.org/10.1051/jp4:2006138030
15 https://doi.org/10.1063/1.168689
16 https://doi.org/10.1063/1.348722
17 https://doi.org/10.1088/0022-3727/38/12/013
18 https://doi.org/10.1088/0953-8984/18/13/003
19 https://doi.org/10.1107/s0909049597019407
20 https://doi.org/10.1116/1.584105
21 https://doi.org/10.1117/1.1489426
22 https://doi.org/10.1117/12.23315
23 https://doi.org/10.1117/12.332515
24 https://doi.org/10.1117/12.51214
25 https://doi.org/10.1117/12.514597
26 https://doi.org/10.1117/12.820913
27 https://doi.org/10.1117/12.949668
28 https://doi.org/10.1117/12.964833
29 https://doi.org/10.1143/jjap.41.4074
30 https://doi.org/10.1143/jjap.41.5338
31 https://doi.org/10.1364/ao.36.002839
32 https://doi.org/10.1364/ao.37.004100
33 https://doi.org/10.1364/ao.39.002189
34 https://doi.org/10.1364/ao.43.001835
35 https://doi.org/10.1364/ao.44.000384
36 https://doi.org/10.1364/josaa.19.000391
37 https://doi.org/10.1364/ol.19.001786
38 schema:datePublished 2010-01
39 schema:datePublishedReg 2010-01-01
40 schema:description We report on the development of multilayer optics for the extreme ultra-violet (EUV) range. The optical performance of Al-based multilayer mirrors is discussed with regard to promising reflectivity and selectivity characteristics and the problems of the interfacial roughness for this type of multilayers. We demonstrate a possibility to reduce the average roughness by introducing additional metal layer (W or Mo) rather than depositing a buffer layer at each interface. We have prepared and tested Al/SiC, Al/W/SiC and Al/Mo/SiC multilayers of various periods for the spectral range from 15 to 40 nm, which is the range of increasing interest for high-order harmonic generation, synchrotron radiation and astrophysics. The structure of the three-component systems has been optimized in order to obtain the best reflectivity for each wavelength within the spectral range. We have shown that introduction of refractory metal in Al-based periodic stack can improve the optical performance of multilayer reflecting coatings designed for the EUV applications.
41 schema:genre research_article
42 schema:inLanguage en
43 schema:isAccessibleForFree false
44 schema:isPartOf N6135e1dad6774973a5beb03148df55a0
45 N8b04fccee9b04f41887ca49b2772e8f6
46 sg:journal.1022207
47 schema:name Development of Al-based multilayer optics for EUV
48 schema:pagination 111
49 schema:productId N1e8cd7f2998f41ae8bad8929140af257
50 N30ecd396efc1489c8f6f32f392c65fb9
51 N4c6399a08dd74ec496b39e970b2281c8
52 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030747103
53 https://doi.org/10.1007/s00339-009-5445-2
54 schema:sdDatePublished 2019-04-11T14:34
55 schema:sdLicense https://scigraph.springernature.com/explorer/license/
56 schema:sdPublisher Na4d9f941b5714478a8c0177ddc19d6fb
57 schema:url http://link.springer.com/10.1007/s00339-009-5445-2
58 sgo:license sg:explorer/license/
59 sgo:sdDataset articles
60 rdf:type schema:ScholarlyArticle
61 N024f2c560d2846349915f350d03422dd rdf:first sg:person.01355254030.23
62 rdf:rest rdf:nil
63 N13aa7e2c72014771a3cd5da83d2d540b rdf:first sg:person.07612777236.23
64 rdf:rest Ne64cc5eaf9894924801c3f310fe8e057
65 N14f82d6846b94972b78914a1efe40982 rdf:first sg:person.015745146301.89
66 rdf:rest N024f2c560d2846349915f350d03422dd
67 N1e8cd7f2998f41ae8bad8929140af257 schema:name doi
68 schema:value 10.1007/s00339-009-5445-2
69 rdf:type schema:PropertyValue
70 N253c8c4e142a403ba4c64b908a486054 schema:affiliation https://www.grid.ac/institutes/grid.462674.5
71 schema:familyName Varniere
72 schema:givenName F.
73 rdf:type schema:Person
74 N30ecd396efc1489c8f6f32f392c65fb9 schema:name readcube_id
75 schema:value 9279718ea36700ca34380c4ce629a74c6884521a23cecb227bd42e5de91e5edb
76 rdf:type schema:PropertyValue
77 N47c632583c404d03b0a89a6c79e49402 rdf:first sg:person.01167106063.58
78 rdf:rest Nd95dbdc5a80840db97c1ec1931f0b351
79 N4c6399a08dd74ec496b39e970b2281c8 schema:name dimensions_id
80 schema:value pub.1030747103
81 rdf:type schema:PropertyValue
82 N6135e1dad6774973a5beb03148df55a0 schema:volumeNumber 98
83 rdf:type schema:PublicationVolume
84 N649b26de1d3e4d2395653443442f35a4 rdf:first sg:person.016202047323.80
85 rdf:rest N13aa7e2c72014771a3cd5da83d2d540b
86 N6bed03b2bd764845941362a28d909550 rdf:first sg:person.0721630263.42
87 rdf:rest Ne7dbf3ed09ef405ab601ec4e28f94983
88 N7839bac7d00a45cdaffc93620481b0a1 schema:name Laboratoire d’Interaction du rayonnement X avec la Matière (LIXAM), 91403, Orsay, France
89 rdf:type schema:Organization
90 N8b04fccee9b04f41887ca49b2772e8f6 schema:issueNumber 1
91 rdf:type schema:PublicationIssue
92 Na4d9f941b5714478a8c0177ddc19d6fb schema:name Springer Nature - SN SciGraph project
93 rdf:type schema:Organization
94 Nd95dbdc5a80840db97c1ec1931f0b351 rdf:first sg:person.01021262152.93
95 rdf:rest Nf303365b3fdd45c287c5114d5a78c494
96 Ne64cc5eaf9894924801c3f310fe8e057 rdf:first N253c8c4e142a403ba4c64b908a486054
97 rdf:rest N14f82d6846b94972b78914a1efe40982
98 Ne7dbf3ed09ef405ab601ec4e28f94983 rdf:first sg:person.015405726231.34
99 rdf:rest N649b26de1d3e4d2395653443442f35a4
100 Nf303365b3fdd45c287c5114d5a78c494 rdf:first sg:person.013337053125.10
101 rdf:rest N6bed03b2bd764845941362a28d909550
102 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
103 schema:name Engineering
104 rdf:type schema:DefinedTerm
105 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
106 schema:name Materials Engineering
107 rdf:type schema:DefinedTerm
108 sg:journal.1022207 schema:issn 0947-8396
109 1432-0630
110 schema:name Applied Physics A
111 rdf:type schema:Periodical
112 sg:person.01021262152.93 schema:affiliation https://www.grid.ac/institutes/grid.462674.5
113 schema:familyName Hecquet
114 schema:givenName C.
115 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01021262152.93
116 rdf:type schema:Person
117 sg:person.01167106063.58 schema:affiliation https://www.grid.ac/institutes/grid.462674.5
118 schema:familyName Meltchakov
119 schema:givenName E.
120 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01167106063.58
121 rdf:type schema:Person
122 sg:person.013337053125.10 schema:affiliation N7839bac7d00a45cdaffc93620481b0a1
123 schema:familyName Roulliay
124 schema:givenName M.
125 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013337053125.10
126 rdf:type schema:Person
127 sg:person.01355254030.23 schema:affiliation https://www.grid.ac/institutes/grid.462674.5
128 schema:familyName Delmotte
129 schema:givenName F.
130 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01355254030.23
131 rdf:type schema:Person
132 sg:person.015405726231.34 schema:affiliation https://www.grid.ac/institutes/grid.462674.5
133 schema:familyName Menesguen
134 schema:givenName Y.
135 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015405726231.34
136 rdf:type schema:Person
137 sg:person.015745146301.89 schema:affiliation https://www.grid.ac/institutes/grid.462674.5
138 schema:familyName Ravet-Krill
139 schema:givenName M.-F.
140 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015745146301.89
141 rdf:type schema:Person
142 sg:person.016202047323.80 schema:affiliation https://www.grid.ac/institutes/grid.462674.5
143 schema:familyName Jérome
144 schema:givenName A.
145 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016202047323.80
146 rdf:type schema:Person
147 sg:person.0721630263.42 schema:affiliation https://www.grid.ac/institutes/grid.462674.5
148 schema:familyName De Rossi
149 schema:givenName S.
150 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0721630263.42
151 rdf:type schema:Person
152 sg:person.07612777236.23 schema:affiliation https://www.grid.ac/institutes/grid.462674.5
153 schema:familyName Bridou
154 schema:givenName F.
155 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07612777236.23
156 rdf:type schema:Person
157 sg:pub.10.1007/s00339-007-4041-6 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046686943
158 https://doi.org/10.1007/s00339-007-4041-6
159 rdf:type schema:CreativeWork
160 sg:pub.10.1134/s1063785008050246 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039871942
161 https://doi.org/10.1134/s1063785008050246
162 rdf:type schema:CreativeWork
163 sg:pub.10.1140/epjb/e2008-00290-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1008420019
164 https://doi.org/10.1140/epjb/e2008-00290-x
165 rdf:type schema:CreativeWork
166 https://app.dimensions.ai/details/publication/pub.1098869389 schema:CreativeWork
167 https://doi.org/10.1016/j.elspec.2005.01.227 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002317066
168 rdf:type schema:CreativeWork
169 https://doi.org/10.1016/j.mee.2006.01.126 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045742350
170 rdf:type schema:CreativeWork
171 https://doi.org/10.1016/j.surfrep.2007.09.001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053441124
172 rdf:type schema:CreativeWork
173 https://doi.org/10.1016/s0040-6090(98)01451-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1015838759
174 rdf:type schema:CreativeWork
175 https://doi.org/10.1016/s0168-9002(01)00314-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1041622978
176 rdf:type schema:CreativeWork
177 https://doi.org/10.1051/aas:1997368 schema:sameAs https://app.dimensions.ai/details/publication/pub.1056941681
178 rdf:type schema:CreativeWork
179 https://doi.org/10.1051/jp4:2006138030 schema:sameAs https://app.dimensions.ai/details/publication/pub.1056987551
180 rdf:type schema:CreativeWork
181 https://doi.org/10.1063/1.168689 schema:sameAs https://app.dimensions.ai/details/publication/pub.1033769140
182 rdf:type schema:CreativeWork
183 https://doi.org/10.1063/1.348722 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057960549
184 rdf:type schema:CreativeWork
185 https://doi.org/10.1088/0022-3727/38/12/013 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047103196
186 rdf:type schema:CreativeWork
187 https://doi.org/10.1088/0953-8984/18/13/003 schema:sameAs https://app.dimensions.ai/details/publication/pub.1004963572
188 rdf:type schema:CreativeWork
189 https://doi.org/10.1107/s0909049597019407 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030104987
190 rdf:type schema:CreativeWork
191 https://doi.org/10.1116/1.584105 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062194152
192 rdf:type schema:CreativeWork
193 https://doi.org/10.1117/1.1489426 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022618581
194 rdf:type schema:CreativeWork
195 https://doi.org/10.1117/12.23315 schema:sameAs https://app.dimensions.ai/details/publication/pub.1013518410
196 rdf:type schema:CreativeWork
197 https://doi.org/10.1117/12.332515 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027165186
198 rdf:type schema:CreativeWork
199 https://doi.org/10.1117/12.51214 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035707795
200 rdf:type schema:CreativeWork
201 https://doi.org/10.1117/12.514597 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040156192
202 rdf:type schema:CreativeWork
203 https://doi.org/10.1117/12.820913 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028415207
204 rdf:type schema:CreativeWork
205 https://doi.org/10.1117/12.949668 schema:sameAs https://app.dimensions.ai/details/publication/pub.1011963354
206 rdf:type schema:CreativeWork
207 https://doi.org/10.1117/12.964833 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029329623
208 rdf:type schema:CreativeWork
209 https://doi.org/10.1143/jjap.41.4074 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063068047
210 rdf:type schema:CreativeWork
211 https://doi.org/10.1143/jjap.41.5338 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063068347
212 rdf:type schema:CreativeWork
213 https://doi.org/10.1364/ao.36.002839 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065111951
214 rdf:type schema:CreativeWork
215 https://doi.org/10.1364/ao.37.004100 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065113340
216 rdf:type schema:CreativeWork
217 https://doi.org/10.1364/ao.39.002189 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065115120
218 rdf:type schema:CreativeWork
219 https://doi.org/10.1364/ao.43.001835 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065118903
220 rdf:type schema:CreativeWork
221 https://doi.org/10.1364/ao.44.000384 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065119533
222 rdf:type schema:CreativeWork
223 https://doi.org/10.1364/josaa.19.000391 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065159719
224 rdf:type schema:CreativeWork
225 https://doi.org/10.1364/ol.19.001786 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065215408
226 rdf:type schema:CreativeWork
227 https://www.grid.ac/institutes/grid.462674.5 schema:alternateName Laboratoire Charles Fabry
228 schema:name Laboratoire Charles Fabry, Institut d’Optique Graduate School, 91127, Palaiseau, France
229 rdf:type schema:Organization
 




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