Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2007-09

AUTHORS

J. Gautier, F. Delmotte, F. Bridou, M.F. Ravet, F. Varniere, M. Roulliay, A. Jerome, I. Vickridge

ABSTRACT

Scandium/silicon multilayers have been deposited by magnetron sputtering and characterized by several techniques. Experimental peak reflectances of 0.22 and 0.37 have been measured respectively at wavelengths of 40 nm and 46 nm, for 10° incidence angle. The corresponding theoretical values for a perfect Sc/Si structure are respectively 0.38 and 0.57. In order to explain these differences between calculated and measured reflectivity, thin film and multilayer characterizations have been done. Effects of multilayer imperfections on the reflectivity have been estimated independently by means of simulation. Based on these results, a new design of Sc/Si multilayer is proposed with top layer thickness optimization. With this design, the experimental peak reflectance reaches 0.46 at a wavelength of 46 nm. More... »

PAGES

719-725

Journal

TITLE

Applied Physics A

ISSUE

4

VOLUME

88

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00339-007-4041-6

DOI

http://dx.doi.org/10.1007/s00339-007-4041-6

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1046686943


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